WO2015137251A1 - Capteur piézoélectrique - Google Patents

Capteur piézoélectrique Download PDF

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Publication number
WO2015137251A1
WO2015137251A1 PCT/JP2015/056672 JP2015056672W WO2015137251A1 WO 2015137251 A1 WO2015137251 A1 WO 2015137251A1 JP 2015056672 W JP2015056672 W JP 2015056672W WO 2015137251 A1 WO2015137251 A1 WO 2015137251A1
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WO
WIPO (PCT)
Prior art keywords
sheet
piezoelectric
conductor
electrode
signal electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2015/056672
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English (en)
Japanese (ja)
Inventor
信人 神谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
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Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP2015515064A priority Critical patent/JPWO2015137251A1/ja
Publication of WO2015137251A1 publication Critical patent/WO2015137251A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Definitions

  • the present invention relates to a piezoelectric sensor.
  • Patent Document 1 discloses a piezoelectric body made of a polymer material, and a first electrode holding portion that is disposed on one side of the piezoelectric body and that has a signal electrode supported on a first insulator. And a second electrode carrying portion disposed on the other side of the piezoelectric body and carrying a ground electrode on a second insulator, the piezoelectric body, the first electrode carrying portion, and the second electrode carrying portion.
  • the signal electrode is disposed within the region of the piezoelectric body, and the entire piezoelectric body is disposed within the region of the ground electrode or overlaps the region of the ground electrode when viewed in the overlapping direction with the electrode carrier.
  • a piezoelectric sensor is disclosed.
  • Patent Document 1 as a specific structure of the piezoelectric sensor, a signal electrode and a shield electrode are laminated and integrated in this order on the first surface of the piezoelectric body, and on the second surface of the piezoelectric body.
  • a piezoelectric sensor in which ground electrodes are laminated and integrated is disclosed.
  • a shield electrode is usually laminated and integrated on the signal electrode.
  • Patent Document 1 a first electrode sheet in which electrodes are laminated and integrated on a first surface of an insulating sheet and a second electrode sheet in which electrodes are stacked and integrated on both sides of an insulating sheet are separately prepared.
  • the piezoelectric sensor is manufactured by laminating and integrating the first electrode sheet on the first surface of the piezoelectric sensor via the adhesive layer and laminating and integrating the second electrode sheet on the second surface of the piezoelectric sensor. Therefore, the manufacturing process is complicated.
  • the present invention provides a piezoelectric sensor that has a simplified structure and can be easily manufactured.
  • the piezoelectric sensor of the present invention includes a piezoelectric sheet, a signal electrode laminated and integrated on the first surface of the piezoelectric sheet, and covers the signal electrode in a state of being electrically disconnected from the signal electrode, and a part thereof is grounded. It has a conductor acting as an electrode, a first conductive line electrically connected to the signal electrode, and a second conductive line electrically connected to the conductor.
  • the conductor is formed of a single conductive sheet.
  • the conductor is formed in a bag shape.
  • the conductor is laminated on the second surface of the piezoelectric sheet.
  • the piezoelectric sheet includes a polyolefin resin.
  • the piezoelectric sheet is a foam sheet.
  • the piezoelectric sensor of the present invention has the above-described configuration, and a signal electrode is covered with a conductor that partially acts as a ground electrode. Therefore, the piezoelectric sensor of the present invention uses a part of the conductor as the shield electrode of the signal electrode and the other part of the conductor as the ground electrode, which simplifies the structure and can be easily manufactured. .
  • the piezoelectric sensor A includes a piezoelectric sheet 11, a signal electrode 12 laminated and integrated on the first surface of the piezoelectric sheet 11, and the signal electrode 12 electrically non-conductive. Electrically connected to the signal electrode 12 and the conductor 13 that covers the signal electrode 12 in the connected state, and that partly acts as a ground electrode, and the potential generated in the piezoelectric sheet 11 can be measured through the signal electrode 12
  • the first conductive wire 14 and the second conductive wire 15 electrically connected to the conductor 13 are provided.
  • the piezoelectric sheet 11 is not particularly limited as long as it is a sheet (a sheet having a piezoelectric phenomenon) that can generate charges on the surface when an external force is applied, but it can accurately detect weak biological signals such as pulse waves.
  • the piezoelectric sheet is preferably a piezoelectric sheet in which a synthetic resin sheet (synthetic resin foam sheet or synthetic resin non-foamed sheet) is polarized, because it is highly sensitive and easily generates charges due to deformation in the thickness direction. Is more preferable, and a piezoelectric sheet obtained by imparting polarization to a synthetic resin foam sheet containing a polyolefin resin is particularly preferable.
  • the synthetic resin constituting the synthetic resin sheet is not particularly limited, and examples thereof include polyolefin resins such as polyethylene resins and polypropylene resins, polyvinylidene fluoride, polylactic acid, and liquid crystal resins, and polyolefin resins are preferable. .
  • the method for imparting polarization to the synthetic resin sheet is not particularly limited, and examples thereof include the following three methods.
  • a synthetic resin sheet is sandwiched between a pair of flat plate electrodes, a flat plate electrode that is in contact with the surface to be charged is connected to a high-voltage DC power supply, the other flat plate electrode is grounded, and the synthetic resin is And a polarization step of applying polarization to the synthetic resin sheet by applying a DC or pulsed high voltage to the sheet to inject charges into the synthetic resin.
  • the second method is to impart polarization to the synthetic resin sheet by irradiating the surface of the synthetic resin sheet with ionizing radiation such as electron beam and X-ray and ultraviolet rays, and ionizing air molecules in the vicinity of the synthetic resin sheet. It is a method to do.
  • a grounded flat plate electrode is placed in close contact with the first surface of the synthetic resin sheet, and a predetermined interval is placed on the second surface side of the synthetic resin sheet so that a DC high-voltage power supply is electrically connected.
  • a needle-like electrode or wire electrode connected to each other a corona discharge is generated by electric field concentration near the tip of the needle-like electrode or the surface of the wire electrode, and air molecules are ionized to cause the needle-like electrode or wire
  • air ions generated by the polarity of the electrode are repelled to polarize the synthetic resin.
  • the signal electrode 12 is laminated and integrated on the first surface 11a of the piezoelectric sheet 11 through a fixing agent layer (not shown) as necessary.
  • the signal electrode 12 is not particularly limited as long as it has conductivity, and examples thereof include metal sheets such as copper foil and aluminum foil, and conductive films.
  • the conductive film may be formed on the electrical insulating sheet and then laminated and integrated on the piezoelectric sheet 11, or the first surface 11a of the piezoelectric sheet 11 It may be formed directly.
  • a method for forming a conductive film on an electrical insulating sheet or piezoelectric sheet for example, (1) Applying a conductive paste containing conductive fine particles in a binder on an electrical insulating sheet or piezoelectric sheet, and drying And (2) a method of forming an electrode by vapor deposition on an electrical insulating sheet or piezoelectric sheet.
  • the electrical insulating sheet is not particularly limited as long as it has electrical insulating properties, and examples thereof include a polyimide sheet, a polyethylene terephthalate sheet, a polyethylene naphthalate sheet, and a polyvinyl chloride sheet.
  • the fixing agent constituting the fixing agent layer is composed of a reaction system, solvent system, water system, hot melt system adhesive or pressure sensitive adhesive, and has a low dielectric constant from the viewpoint of maintaining the sensitivity of the piezoelectric sheet 11.
  • a fixative is preferred.
  • a part 13a of the conductor 13 which is not in contact with the signal electrode 12 and is not electrically connected thereto is formed on the entire surface of the signal electrode 12. It is arrange
  • a portion 13a of the conductor 13 acts as a shield electrode.
  • a part 13b of the conductor 13 is laminated on the second surface 11b of the piezoelectric sheet 11 (the surface opposite to the surface on which the signal electrode 12 is laminated and integrated).
  • the conductor 13 is disposed on the second surface 11b of the piezoelectric sheet 11, so that a portion 13b functions as a ground electrode.
  • the potential generated by the piezoelectric phenomenon in the piezoelectric sheet 11 can be measured through the signal electrode 12 using the ground electrode as a reference electrode.
  • the conductor 13 is not particularly limited as long as it has conductivity. However, a sheet shape is preferable, and examples thereof include a metal foil, a metal net, and a conductive sheet having a conductive film on the surface. When using a conductive sheet having a conductive film on the surface, the conductive film is disposed on the piezoelectric sheet 11 side.
  • the conductive sheet having a conductive film on the surface can be produced, for example, in the same manner as the method for forming a conductive film on the above-described electrical insulating sheet. Further, a part 13b of the conductor 13 may be laminated and integrated with the piezoelectric sheet 11 via the fixing agent layer.
  • an electrical insulating sheet 16 is laminated and integrated on the entire surface of the signal electrode 12 of the piezoelectric sheet 11 so as to surround the piezoelectric sheet 11.
  • One sheet of the conductor 13 is wound.
  • the conductive film is on the piezoelectric sheet 11 side.
  • the sheet-like conductor 13 is not in contact with the signal electrode 12 and is not electrically connected to the signal electrode 12.
  • the sheet-like conductor 13 is preferably not in contact with the end face 11c of the piezoelectric sheet 11 because the charge generated in the piezoelectric sheet 11 can be detected more accurately.
  • the sheet-like conductor 13 is laminated on the second surface 11b of the piezoelectric sheet 11.
  • a portion 13 a of the conductor 13 covering the signal electrode 12 functions as a shield electrode for the signal electrode 12.
  • the portion 13b laminated on the second surface 11b of the piezoelectric sheet 11 acts as a ground electrode and serves as a reference electrode when measuring the potential generated in the piezoelectric sheet 11 through the signal electrode 12. Since the conductor 13 surrounds the piezoelectric sheet 11 by making a single turn, the signal electrode 12 is almost completely shielded from electromagnetic waves from the outside by the conductor 13, and the electric potential generated in the piezoelectric sheet 11 is further increased. It can be measured accurately.
  • the shield electrode and the ground electrode are configured by the sheet-like conductor 13 disposed so as to surround the piezoelectric sheet 11, the configuration of the piezoelectric sensor A is simple and easy. Can be manufactured. Further, the piezoelectric sensor A can be configured with fewer components, and the piezoelectric sensor A is thin and excellent in lightness.
  • the case where the conductor 13 is formed in a sheet shape and the sheet-like conductor 13 is wound around the piezoelectric sheet 11 has been described.
  • the piezoelectric sheet 11 may be accommodated in the bag-shaped conductor 13 and a part of the bag-shaped conductor 13 may be laminated on the piezoelectric sheet 11.
  • a portion 13a of the bag-like conductor 13 that covers the signal electrode 12 functions as a shield electrode of the signal electrode 12.
  • the portion 13a covering the signal electrode 12 is laminated on the signal electrode 12 via the electrical insulating sheet 16, and is not electrically connected to the signal electrode 12.
  • the portion 13b disposed on the second surface 11b of the piezoelectric sheet 11 acts as a ground electrode.
  • the potential generated by the piezoelectric phenomenon in the piezoelectric sheet 11 can be measured through the signal electrode 12 using the ground electrode as a reference electrode.
  • the bag-like conductor 13 is preferably not in contact with the end surface 11c of the piezoelectric sheet 11 because the charge generated in the piezoelectric sheet 11 can be detected more accurately.
  • one opening portion 133 is formed by integrating the outer peripheral edge portions except for one side of the flat rectangular surface portion 131 and the flat rectangular back surface portion 132. The bag-shaped conductor which has is mentioned.
  • the bag-shaped conductor is composed of, for example, a metal foil, a metal net, a conductive sheet having a conductive film on the surface, and the like.
  • the bag-shaped conductor is configured so that the conductive film is on the inside.
  • the portion 13b of the bag-like conductor 13 laminated on the second surface 11b of the piezoelectric sheet 11 may be laminated and integrated on the piezoelectric sheet 11 via the fixing agent layer.
  • the sheet-like conductor 13 is wound around the piezoelectric sheet 11 has been described.
  • the sheet-like conductor 13 is bent from the central portion, and the conductor 13 is bent.
  • the signal electrode 12 is entirely covered by one half, and a portion 13a covering the signal electrode 12 is used as a shield electrode of the signal electrode 12, and the other half of the conductor 13 is formed by the piezoelectric sheet 11 (preferably the piezoelectric sheet 11). May be laminated on the second surface 11b).
  • the other half of the conductor 13 acts as a ground electrode by being laminated on the second surface 11b of the piezoelectric sheet 11.
  • the potential generated by the piezoelectric phenomenon in the piezoelectric sheet 11 can be measured through the signal electrode 12 using the ground electrode as a reference electrode. Also in this case, it is preferable that the sheet-like conductor 13 is not in contact with the end face 11c of the piezoelectric sheet 11 because the charge generated in the piezoelectric sheet 11 can be detected more accurately.
  • the other half of the conductor 13 may be laminated on the piezoelectric sheet 11 with the fixing agent layer interposed therebetween.
  • first conductive wire 14 is electrically connected to the signal electrode 12, and the second conductive wire 15 is also electrically connected to the conductor 13.
  • a general-purpose method may be used for connection of the first and second conductive wires 14 and 15 to the signal electrode 12 and the conductor 13.
  • the first conductive wire 14 is connected to the measurement module, while the second conductive wire 15 is branched into two and one is connected to the measurement module to which the first conductive wire 14 is connected. And ground the other.
  • the piezoelectric sheet 11 is compressed in the thickness direction, a positive charge and a negative charge held in a polarized state in the piezoelectric sheet are displaced relative to each other, thereby generating a charge on the surface of the piezoelectric sheet 11.
  • the electric charge generated in the piezoelectric sheet 11 is measured as a potential through the signal electrode 12 using a ground electrode formed of a part 13b of the conductor 13 as a reference electrode.
  • the conductor 13 has conductivity on the surface.
  • the conductor 13 has the conductive layer 13c inside, the surface is electrically insulating layer 13d, It may be formed by 13d.
  • the conductor 13 is formed in a sheet shape, and a conductive layer 13c such as a metal foil such as an aluminum foil or a deposited film, and both surfaces of the conductive layer 13c. Electrical insulating layers 13d and 13d laminated and integrated.
  • the sheet-like conductor 13 whose surface is composed of the electrical insulating layers 13d and 13d is wound around the piezoelectric sheet 11 similarly to the piezoelectric sensor A shown in FIG.
  • the portion 13c1 covers the entire surface of the signal electrode 12, and the other portion 13c2 of the conductive layer 13c in the sheet-like conductor 13 is laminated on the second surface 11b of the piezoelectric sheet 11.
  • the electric insulating sheet for electrically isolating the signal electrode 12 and the electric conductor 13 on the signal electrode 12 Is not necessary.
  • the following method is employed. Piercing the sheet-like conductor 13 through the pierce terminal 17 in the thickness direction, electrically connecting the portion 13c2 of the conductive layer 13c and the pierce terminal 17, and a portion of the conductive layer 13c through the pierce terminal 17 A portion 13c2 of the conductive layer 13c is made to act as a ground electrode by grounding the 13c2.
  • the potential generated by the piezoelectric phenomenon in the piezoelectric sheet 11 can be measured through the signal electrode 12 using the ground electrode as a reference electrode.
  • the conductor 13 may be formed in a bag shape. In order to make a part of the conductive layer of the bag-like conductor act as a ground electrode, for example, a pierce terminal may be used in the same manner as described above. Like the piezoelectric sensor A shown in FIG. 5, the conductor 13 is not wound around the piezoelectric sheet 11, and the sheet-like conductor 13 is folded in half.
  • a piezoelectric sheet 11 may be disposed between the half portions. Specifically, as shown in FIG. 8, the sheet-like conductor 13 is bent from the center, and the signal electrode 12 is entirely covered with the half portion 13 c 1 of the conductive layer 13 c of the conductor 13. One half 13c1 of the conductive layer covering the signal electrode 12 is used as a shield electrode of the signal electrode 12. The other half 13c2 of the conductive layer 13c of the conductor 13 is laminated on the piezoelectric sheet 11 (preferably the second surface 11b of the piezoelectric sheet 11), and acts as a ground electrode in the same manner as described above. In this way, the piezoelectric sensor A may be configured.
  • a pierce terminal may be used as described above.
  • the same components as those of the piezoelectric sensor A shown in FIGS. 1 to 5 are denoted by the same reference numerals and description thereof is omitted.
  • the piezoelectric sensor of the present invention can be suitably used as a sensor for detecting vibration.
  • the sensor include a biological signal sensor for detecting a biological signal such as a pulse wave, respiration, and body movement, and a passage sensor for detecting vibration generated by a vehicle or a person traveling on the road.
  • Piezoelectric sheet 12 Signal electrode 13
  • Conductor 14 First conductive wire
  • Second conductive wire Electrical insulation sheet 17 Pierce Terminal A Piezoelectric Sensor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

La présente invention concerne un capteur piézoélectrique qui a une configuration simplifiée et peut être fabriqué facilement. Ce capteur piézoélectrique (A) est caractérisé par le fait qu'il possède : une feuille piézoélectrique (11) ; une électrode de signal (12) stratifiée d'une seule pièce sur une première surface de la feuille piézoélectrique (11) ; un conducteur (13) qui recouvre l'électrode de signal (12), sans être connecté électriquement à l'électrode de signal (12), et qui est connecté électriquement à la feuille piézoélectrique (11) ; un premier fil conducteur (14) connecté électriquement à l'électrode de signal (12) ; et un second fil conducteur (15) connecté électriquement au conducteur (13).
PCT/JP2015/056672 2014-03-10 2015-03-06 Capteur piézoélectrique Ceased WO2015137251A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015515064A JPWO2015137251A1 (ja) 2014-03-10 2015-03-06 圧電センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014046330 2014-03-10
JP2014-046330 2014-03-10

Publications (1)

Publication Number Publication Date
WO2015137251A1 true WO2015137251A1 (fr) 2015-09-17

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PCT/JP2015/056672 Ceased WO2015137251A1 (fr) 2014-03-10 2015-03-06 Capteur piézoélectrique

Country Status (3)

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JP (2) JPWO2015137251A1 (fr)
TW (1) TWI650537B (fr)
WO (1) WO2015137251A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150349744A1 (en) * 2014-05-30 2015-12-03 Kyocera Crystal Device Corporation Crystal device and producing method of crystal device
WO2017126052A1 (fr) * 2016-01-20 2017-07-27 フジデノロ株式会社 Système pour thérapie par capture de neutrons par le bore
JP2018036060A (ja) * 2016-08-29 2018-03-08 積水化学工業株式会社 圧電センサ構造体
EP3694007A1 (fr) * 2019-02-05 2020-08-12 Koninklijke Philips N.V. Capteur comprenant une interconnexion ayant un film de support
JP2020134444A (ja) * 2019-02-25 2020-08-31 ロボセンサー技研株式会社 圧電センサ
JP2021090695A (ja) * 2019-12-12 2021-06-17 国立大学法人山形大学 生体情報検出装置
EP3907769A1 (fr) * 2020-05-08 2021-11-10 Koninklijke Philips N.V. Capteur comprenant une interconnexion et dispositif médical d'intervention l'utilisant
JPWO2020170962A1 (ja) * 2019-02-18 2021-12-23 株式会社バルカー 圧電センサーおよび圧電センサーの製造方法

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CN119827853A (zh) * 2024-12-13 2025-04-15 北京中科飞龙传感技术有限责任公司 压电电极组件、加工方法及mems电场传感器

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150349744A1 (en) * 2014-05-30 2015-12-03 Kyocera Crystal Device Corporation Crystal device and producing method of crystal device
WO2017126052A1 (fr) * 2016-01-20 2017-07-27 フジデノロ株式会社 Système pour thérapie par capture de neutrons par le bore
US10668153B2 (en) 2016-01-20 2020-06-02 Fujidenolo Co. Ltd. Boron neutron capture therapy system
JP2018036060A (ja) * 2016-08-29 2018-03-08 積水化学工業株式会社 圧電センサ構造体
JP7094457B2 (ja) 2019-02-05 2022-07-01 コーニンクレッカ フィリップス エヌ ヴェ キャリアフィルムを有する相互接続を有するセンサ
WO2020160897A1 (fr) * 2019-02-05 2020-08-13 Koninklijke Philips N.V. Capteur comprenant une interconnexion dotée d'un film support
JP2022516811A (ja) * 2019-02-05 2022-03-02 コーニンクレッカ フィリップス エヌ ヴェ キャリアフィルムを有する相互接続を有するセンサ
EP3694007A1 (fr) * 2019-02-05 2020-08-12 Koninklijke Philips N.V. Capteur comprenant une interconnexion ayant un film de support
US12120961B2 (en) 2019-02-05 2024-10-15 Koninklijke Philips N.V. Sensor comprising an interconnect having a carrier film
JPWO2020170962A1 (ja) * 2019-02-18 2021-12-23 株式会社バルカー 圧電センサーおよび圧電センサーの製造方法
JP7391077B2 (ja) 2019-02-18 2023-12-04 株式会社バルカー 圧電センサーおよび圧電センサーの製造方法
JP2020134444A (ja) * 2019-02-25 2020-08-31 ロボセンサー技研株式会社 圧電センサ
JP7519065B2 (ja) 2019-02-25 2024-07-19 ロボセンサー技研株式会社 圧電センサ
JP2021090695A (ja) * 2019-12-12 2021-06-17 国立大学法人山形大学 生体情報検出装置
JP7464247B2 (ja) 2019-12-12 2024-04-09 国立大学法人山形大学 生体情報検出装置
EP3907769A1 (fr) * 2020-05-08 2021-11-10 Koninklijke Philips N.V. Capteur comprenant une interconnexion et dispositif médical d'intervention l'utilisant
WO2021224000A1 (fr) * 2020-05-08 2021-11-11 Koninklijke Philips N.V. Capteur comprenant une interconnexion et dispositif médical d'intervention l'utilisant

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TW201534880A (zh) 2015-09-16

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