TWI670140B - 乾式筒式研磨方法及介質之製造方法 - Google Patents

乾式筒式研磨方法及介質之製造方法 Download PDF

Info

Publication number: TWI670140B
Authority: TW; Taiwan
Prior art keywords: medium; workpiece; mass; polishing; dry
Prior art date: 2014-04-07

Application number

TW104110333A

Other languages

English (en)

Chinese (zh)

Other versions

TW201544238A (zh

Inventor

平塚陽一郎

末菅啟朗

Original Assignee

日商新東工業股份有限公司

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-04-07

Filing date

2015-03-30

Publication date

2019-09-01

2015-03-30 Application filed by 日商新東工業股份有限公司 filed Critical 日商新東工業股份有限公司

2015-12-01 Publication of TW201544238A publication Critical patent/TW201544238A/zh

2019-09-01 Application granted granted Critical

2019-09-01 Publication of TWI670140B publication Critical patent/TWI670140B/zh

Links

238000000034 method Methods 0.000 title claims description 47
238000000227 grinding Methods 0.000 title claims description 37
238000004519 manufacturing process Methods 0.000 title claims description 14
239000000463 material Substances 0.000 claims abstract description 107
238000005498 polishing Methods 0.000 claims abstract description 80
239000011248 coating agent Substances 0.000 claims abstract description 11
238000000576 coating method Methods 0.000 claims abstract description 11
238000009736 wetting Methods 0.000 claims abstract description 8
235000014113 dietary fatty acids Nutrition 0.000 claims description 34
239000000194 fatty acid Substances 0.000 claims description 34
229930195729 fatty acid Natural products 0.000 claims description 34
238000005245 sintering Methods 0.000 claims description 31
239000000843 powder Substances 0.000 claims description 26
AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 24
239000006061 abrasive grain Substances 0.000 claims description 23
150000004665 fatty acids Chemical class 0.000 claims description 23
UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 19
239000011734 sodium Substances 0.000 claims description 19
238000004898 kneading Methods 0.000 claims description 18
229910052708 sodium Inorganic materials 0.000 claims description 18
239000000395 magnesium oxide Substances 0.000 claims description 16
CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 16
AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 16
WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 claims description 15
239000011230 binding agent Substances 0.000 claims description 14
-1 sodium fatty acid Chemical class 0.000 claims description 11
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 10
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 8
150000003839 salts Chemical class 0.000 claims description 8
239000002245 particle Substances 0.000 claims description 7
ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 5
BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 4
239000000292 calcium oxide Substances 0.000 claims description 4
229910000420 cerium oxide Inorganic materials 0.000 claims description 4
BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 4
230000008569 process Effects 0.000 claims description 3
238000003801 milling Methods 0.000 claims 2
239000000428 dust Substances 0.000 description 18
238000012545 processing Methods 0.000 description 11
230000000694 effects Effects 0.000 description 10
235000013980 iron oxide Nutrition 0.000 description 8
230000003746 surface roughness Effects 0.000 description 8
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 7
239000011347 resin Substances 0.000 description 7
229920005989 resin Polymers 0.000 description 7
239000003925 fat Substances 0.000 description 6
235000019197 fats Nutrition 0.000 description 6
239000012535 impurity Substances 0.000 description 6
238000005259 measurement Methods 0.000 description 6
238000002156 mixing Methods 0.000 description 6
230000000052 comparative effect Effects 0.000 description 5
239000004519 grease Substances 0.000 description 5
238000012986 modification Methods 0.000 description 5
230000004048 modification Effects 0.000 description 5
239000003921 oil Substances 0.000 description 5
235000019198 oils Nutrition 0.000 description 5
238000005406 washing Methods 0.000 description 5
PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 4
229910018626 Al(OH) Inorganic materials 0.000 description 3
MXRIRQGCELJRSN-UHFFFAOYSA-N O.O.O.[Al] Chemical compound O.O.O.[Al] MXRIRQGCELJRSN-UHFFFAOYSA-N 0.000 description 3
230000008901 benefit Effects 0.000 description 3
230000007246 mechanism Effects 0.000 description 3
239000000203 mixture Substances 0.000 description 3
239000012779 reinforcing material Substances 0.000 description 3
239000007787 solid Substances 0.000 description 3
238000010183 spectrum analysis Methods 0.000 description 3
OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 description 2
WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 2
LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 2
QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 2
FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
239000005639 Lauric acid Substances 0.000 description 2
239000005642 Oleic acid Substances 0.000 description 2
ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 2
238000004458 analytical method Methods 0.000 description 2
230000005540 biological transmission Effects 0.000 description 2
239000000919 ceramic Substances 0.000 description 2
239000004927 clay Substances 0.000 description 2
238000004140 cleaning Methods 0.000 description 2
GHVNFZFCNZKVNT-UHFFFAOYSA-N decanoic acid Chemical compound CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 2
230000007423 decrease Effects 0.000 description 2
230000007547 defect Effects 0.000 description 2
230000005484 gravity Effects 0.000 description 2
IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 2
FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 2
239000007788 liquid Substances 0.000 description 2
WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 2
ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 2
RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
239000011148 porous material Substances 0.000 description 2
238000005211 surface analysis Methods 0.000 description 2
238000012360 testing method Methods 0.000 description 2
229910001928 zirconium oxide Inorganic materials 0.000 description 2
229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
229910052582 BN Inorganic materials 0.000 description 1
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
239000005632 Capric acid (CAS 334-48-5) Substances 0.000 description 1
239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 1
229910000975 Carbon steel Inorganic materials 0.000 description 1
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
235000021314 Palmitic acid Nutrition 0.000 description 1
ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
229910004298 SiO 2 Inorganic materials 0.000 description 1
235000021355 Stearic acid Nutrition 0.000 description 1
229910000831 Steel Inorganic materials 0.000 description 1
229910010413 TiO 2 Inorganic materials 0.000 description 1
239000003082 abrasive agent Substances 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
230000003139 buffering effect Effects 0.000 description 1
238000001354 calcination Methods 0.000 description 1
239000011575 calcium Substances 0.000 description 1
229910052791 calcium Inorganic materials 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
239000010962 carbon steel Substances 0.000 description 1
CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
WXANAQMHYPHTGY-UHFFFAOYSA-N cerium;ethyne Chemical compound [Ce].[C-]#[C] WXANAQMHYPHTGY-UHFFFAOYSA-N 0.000 description 1
239000003638 chemical reducing agent Substances 0.000 description 1
239000002131 composite material Substances 0.000 description 1
239000010431 corundum Substances 0.000 description 1
229910052593 corundum Inorganic materials 0.000 description 1
238000010586 diagram Methods 0.000 description 1
229910003460 diamond Inorganic materials 0.000 description 1
239000010432 diamond Substances 0.000 description 1
238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
238000011156 evaluation Methods 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
238000001125 extrusion Methods 0.000 description 1
239000008187 granular material Substances 0.000 description 1
229910002804 graphite Inorganic materials 0.000 description 1
239000010439 graphite Substances 0.000 description 1
229910010272 inorganic material Inorganic materials 0.000 description 1
239000011147 inorganic material Substances 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
VBMVTYDPPZVILR-UHFFFAOYSA-N iron(2+);oxygen(2-) Chemical class [O-2].[Fe+2] VBMVTYDPPZVILR-UHFFFAOYSA-N 0.000 description 1
239000011344 liquid material Substances 0.000 description 1
239000000314 lubricant Substances 0.000 description 1
239000011777 magnesium Substances 0.000 description 1
229910052749 magnesium Inorganic materials 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
238000000465 moulding Methods 0.000 description 1
WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
229960002446 octanoic acid Drugs 0.000 description 1
235000021313 oleic acid Nutrition 0.000 description 1
238000007517 polishing process Methods 0.000 description 1
239000011591 potassium Substances 0.000 description 1
229910052700 potassium Inorganic materials 0.000 description 1
230000009467 reduction Effects 0.000 description 1
102200082816 rs34868397 Human genes 0.000 description 1
238000004626 scanning electron microscopy Methods 0.000 description 1
239000008159 sesame oil Substances 0.000 description 1
235000011803 sesame oil Nutrition 0.000 description 1
229910001415 sodium ion Inorganic materials 0.000 description 1
239000008117 stearic acid Substances 0.000 description 1
239000010959 steel Substances 0.000 description 1
230000002195 synergetic effect Effects 0.000 description 1
TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 1
238000004065 wastewater treatment Methods 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
- B24B31/14—Abrading-bodies specially designed for tumbling apparatus, e.g. abrading-balls
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/02—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving rotary barrels

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

TW104110333A 2014-04-07 2015-03-30 乾式筒式研磨方法及介質之製造方法 TWI670140B (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2014-078918		2014-04-07
JP2014078918		2014-04-07

Publications (2)

Publication Number	Publication Date
TW201544238A TW201544238A (zh)	2015-12-01
TWI670140B true TWI670140B (zh)	2019-09-01

Family

ID=54287614

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW104110333A TWI670140B (zh)	2014-04-07	2015-03-30	乾式筒式研磨方法及介質之製造方法

Country Status (4)

Country	Link
JP (1)	JP6414206B2 (fr)
CN (1)	CN106029298A (fr)
TW (1)	TWI670140B (fr)
WO (1)	WO2015156033A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN105586005B (zh) *	2016-01-14	2018-02-23	洛阳三睿宝纳米科技有限公司	一种纳米刚玉磨料的制备方法
WO2019065253A1 (fr) *	2017-09-28	2019-04-04	新東工業株式会社	Dispositif de polissage à tambour rotatif sec, système de polissage à tambour rotatif à sec, et procédé de polissage à tambour rotatif sec
JP7159842B2 (ja) *	2018-12-14	2022-10-25	新東工業株式会社	バレル研磨用の研磨メディア

Citations (4)

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Publication number	Priority date	Publication date	Assignee	Title
JPS5013994B2 (fr) *	1972-08-05	1975-05-23
JPS6363634B2 (fr) *	1985-10-03	1988-12-08
TW200408502A (en) *	2002-11-29	2004-06-01	Sintobrator Ltd	Barrel polishing method, and barrel polishing device
WO2012086679A1 (fr) *	2010-12-24	2012-06-28	新東工業株式会社	Milieu inorganique destiné au polissage d'un cylindre

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JPS4217114Y1 (fr) *	1967-02-25	1967-10-02
US4235051A (en) *	1979-06-21	1980-11-25	Fremont Industries, Inc.	Finishing compound for barrel and vibratory surface conditioning of ferrous and non-ferrous metals
JP3590906B2 (ja) *	1993-01-22	2004-11-17	株式会社チップトン	バレル研磨用コンパウンド及びバレル研磨法
JPH07179622A (ja) *	1993-12-22	1995-07-18	Tipton Mfg Corp	コンパウンド入りバレル研磨石及びその製造方法
CN1060145C (zh) *	1994-04-12	2001-01-03	南京化工学院陶瓷厂	陶瓷微珠及其制造方法
JPH0879613A (ja) *	1994-09-07	1996-03-22	Minolta Co Ltd	フィルム画像再生装置
JP4009339B2 (ja) *	1996-01-29	2007-11-14	関西マテック株式会社	アルミナ−ジルコニア系焼結体、その製造法及びアルミナ−ジルコニア系焼結体を用いた衝撃式粉砕機
JP2777356B2 (ja) *	1996-11-15	1998-07-16	新東ブレーター株式会社	乾式バレル研磨用無機質メディア
US6287353B1 (en) *	1999-09-28	2001-09-11	3M Innovative Properties Company	Abrasive grain, abrasive articles, and methods of making and using the same
US7501001B2 (en) *	2001-08-02	2009-03-10	3M Innovative Properties Company	Abrasive particles, and methods of making and using the same
JP3841784B2 (ja) *	2003-11-21	2006-11-01	株式会社チップトン	乾式バレル研磨用メディアの調整方法及び乾式バレル研磨方法
JP4401855B2 (ja) *	2004-04-26	2010-01-20	株式会社資生堂	バレル研磨・洗浄用組成物
JP4456145B2 (ja) *	2007-09-27	2010-04-28	株式会社チップトン	乾式バレル研磨方法

2015
- 2015-02-17 WO PCT/JP2015/054317 patent/WO2015156033A1/fr not_active Ceased
- 2015-02-17 CN CN201580010935.0A patent/CN106029298A/zh active Pending
- 2015-02-17 JP JP2016512620A patent/JP6414206B2/ja active Active
- 2015-03-30 TW TW104110333A patent/TWI670140B/zh active

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Publication number	Priority date	Publication date	Assignee	Title
JPS5013994B2 (fr) *	1972-08-05	1975-05-23
JPS6363634B2 (fr) *	1985-10-03	1988-12-08
TW200408502A (en) *	2002-11-29	2004-06-01	Sintobrator Ltd	Barrel polishing method, and barrel polishing device
WO2012086679A1 (fr) *	2010-12-24	2012-06-28	新東工業株式会社	Milieu inorganique destiné au polissage d'un cylindre

Also Published As

Publication number	Publication date
JP6414206B2 (ja)	2018-10-31
CN106029298A (zh)	2016-10-12
JPWO2015156033A1 (ja)	2017-04-13
WO2015156033A1 (fr)	2015-10-15
TW201544238A (zh)	2015-12-01

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JP2011140097A (ja)	2011-07-21	砥石
JP2008200780A (ja)	2008-09-04	混合砥粒砥石
JP2777356B2 (ja)	1998-07-16	乾式バレル研磨用無機質メディア
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