TWM464295U - 具正弦式移動路徑之移動裝置 - Google Patents

具正弦式移動路徑之移動裝置 Download PDF

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Publication number
TWM464295U
TWM464295U TW102211164U TW102211164U TWM464295U TW M464295 U TWM464295 U TW M464295U TW 102211164 U TW102211164 U TW 102211164U TW 102211164 U TW102211164 U TW 102211164U TW M464295 U TWM464295 U TW M464295U
Authority
TW
Taiwan
Prior art keywords
mobile device
suction
suction rod
substrate
adsorption
Prior art date
Application number
TW102211164U
Other languages
English (en)
Chinese (zh)
Inventor
約瑟夫 默瑟
Original Assignee
約瑟夫 默瑟
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102005038976.7A external-priority patent/DE102005038976B4/de
Application filed by 約瑟夫 默瑟 filed Critical 約瑟夫 默瑟
Publication of TWM464295U publication Critical patent/TWM464295U/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
TW102211164U 2005-08-16 2006-08-16 具正弦式移動路徑之移動裝置 TWM464295U (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005038976.7A DE102005038976B4 (de) 2004-02-17 2005-08-16 Bewegungseinrichtung mit sinusförmigem Bewegungsablauf

Publications (1)

Publication Number Publication Date
TWM464295U true TWM464295U (zh) 2013-11-01

Family

ID=37574514

Family Applications (2)

Application Number Title Priority Date Filing Date
TW102211164U TWM464295U (zh) 2005-08-16 2006-08-16 具正弦式移動路徑之移動裝置
TW095130014A TW200714425A (en) 2005-08-16 2006-08-16 Moving device with a sine-shaped moving operation

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW095130014A TW200714425A (en) 2005-08-16 2006-08-16 Moving device with a sine-shaped moving operation

Country Status (5)

Country Link
JP (1) JP2009505410A (de)
KR (1) KR20080037718A (de)
CN (1) CN101304847A (de)
TW (2) TWM464295U (de)
WO (1) WO2007020008A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3084518B1 (fr) * 2018-07-25 2020-10-30 Commissariat Energie Atomique Dispositif de prehension d'une structure monocouche ou multicouche comportant un element de prehension rotatif et thermique
TWI829201B (zh) * 2022-06-17 2024-01-11 和淞科技股份有限公司 可調式負壓吸持模組

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6051500A (ja) * 1983-08-29 1985-03-22 Hitachi Ltd ロボットの動作制御装置
JPH06318628A (ja) * 1993-05-07 1994-11-15 Fujitsu Ltd 部品搬送方法とそのための装置
US5967578A (en) * 1998-05-29 1999-10-19 Sez North America, Inc. Tool for the contact-free support of plate-like substrates
WO2000078654A1 (en) * 1999-06-17 2000-12-28 Speedfam-Ipec Corporation Improved wafer handling apparatus
US6481951B1 (en) * 1999-09-16 2002-11-19 Applied Materials, Inc. Multiple sided robot blade for semiconductor processing equipment
US6327517B1 (en) * 2000-07-27 2001-12-04 Applied Materials, Inc. Apparatus for on-the-fly center finding and notch aligning for wafer handling robots
JP2003170384A (ja) * 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
DE102004007558B4 (de) * 2004-02-17 2012-06-21 Josef Moser Bewegungseinrichtung mit sinusförmigen Bewegungsablauf

Also Published As

Publication number Publication date
CN101304847A (zh) 2008-11-12
JP2009505410A (ja) 2009-02-05
WO2007020008A3 (de) 2007-05-10
TW200714425A (en) 2007-04-16
WO2007020008A2 (de) 2007-02-22
KR20080037718A (ko) 2008-04-30

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MK4K Expiration of patent term of a granted utility model