WO2007020008A3 - Bewegungseinrichtung mit doppelseitigem saugbalken - Google Patents

Bewegungseinrichtung mit doppelseitigem saugbalken Download PDF

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Publication number
WO2007020008A3
WO2007020008A3 PCT/EP2006/007916 EP2006007916W WO2007020008A3 WO 2007020008 A3 WO2007020008 A3 WO 2007020008A3 EP 2006007916 W EP2006007916 W EP 2006007916W WO 2007020008 A3 WO2007020008 A3 WO 2007020008A3
Authority
WO
WIPO (PCT)
Prior art keywords
motion device
suction bar
double
stepping
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2006/007916
Other languages
English (en)
French (fr)
Other versions
WO2007020008A2 (de
Inventor
Josef Moser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102005038976.7A external-priority patent/DE102005038976B4/de
Application filed by Individual filed Critical Individual
Priority to JP2008526414A priority Critical patent/JP2009505410A/ja
Publication of WO2007020008A2 publication Critical patent/WO2007020008A2/de
Publication of WO2007020008A3 publication Critical patent/WO2007020008A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

Die Erfindung betrifft eine mehrachsige Bewegungseinrichtung (l) mit weitgehend sinusförmigem Bewegungsablauf eines Greifers, der am freien Ende eines mehrachsig angetriebenen Armes (3,4) angeordnet ist, wobei jedem Arm ein schrittweise angetriebener Antriebsmotor (13,14,15) zugeordnet ist und die Schrittmotoren zum Antrieb der unabhängigen Achsen (7,8,9) unabhängig und autark voneinander arbeiten und eine Rückmeldung des einen Schrittmotors auf den anderen nicht statt findet. Die Erfindung ist dadurch gekennzeichnet, dass die Bewegungseinriσhtung einen Saugbalken (40) aufweist, welcher beidseitig die Anordnung einer Saugvorrichtung zur Aufnahme von Leiterplatten, Substraten, Waver oder dergleichen ausbildet.
PCT/EP2006/007916 2005-08-16 2006-08-10 Bewegungseinrichtung mit doppelseitigem saugbalken Ceased WO2007020008A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008526414A JP2009505410A (ja) 2005-08-16 2006-08-10 ２つの面を持つサクションバーを備える運動装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005038976.7 2005-08-16
DE102005038976.7A DE102005038976B4 (de) 2004-02-17 2005-08-16 Bewegungseinrichtung mit sinusförmigem Bewegungsablauf

Publications (2)

Publication Number Publication Date
WO2007020008A2 WO2007020008A2 (de) 2007-02-22
WO2007020008A3 true WO2007020008A3 (de) 2007-05-10

Family

ID=37574514

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/007916 Ceased WO2007020008A2 (de) 2005-08-16 2006-08-10 Bewegungseinrichtung mit doppelseitigem saugbalken

Country Status (5)

Country Link
JP (1) JP2009505410A (de)
KR (1) KR20080037718A (de)
CN (1) CN101304847A (de)
TW (2) TWM464295U (de)
WO (1) WO2007020008A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3084518B1 (fr) * 2018-07-25 2020-10-30 Commissariat Energie Atomique Dispositif de prehension d'une structure monocouche ou multicouche comportant un element de prehension rotatif et thermique
TWI829201B (zh) * 2022-06-17 2024-01-11 和淞科技股份有限公司 可調式負壓吸持模組

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0135772A2 (de) * 1983-08-29 1985-04-03 Hitachi, Ltd. Gerät zur Bewegungskontrolle für einen Manipulator
US5967578A (en) * 1998-05-29 1999-10-19 Sez North America, Inc. Tool for the contact-free support of plate-like substrates
WO2000078654A1 (en) * 1999-06-17 2000-12-28 Speedfam-Ipec Corporation Improved wafer handling apparatus
EP1085558A2 (de) * 1999-09-16 2001-03-21 Applied Materials, Inc. Mehrfachseitiges Roboterblatt für eine Anlage zur Behandlung von Halbleitern
US6327517B1 (en) * 2000-07-27 2001-12-04 Applied Materials, Inc. Apparatus for on-the-fly center finding and notch aligning for wafer handling robots
EP1464455A1 (de) * 2001-12-04 2004-10-06 Rorze Corporation Skalarroboter zum tragen flacher plattenförmiger objekte und system zur verarbeitung flacher plattenförmiger objekte
DE102004007558A1 (de) * 2004-02-17 2005-09-08 Josef Moser Bewegungseinrichtung mit sinusförmigen Bewegungsablauf

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06318628A (ja) * 1993-05-07 1994-11-15 Fujitsu Ltd 部品搬送方法とそのための装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0135772A2 (de) * 1983-08-29 1985-04-03 Hitachi, Ltd. Gerät zur Bewegungskontrolle für einen Manipulator
US5967578A (en) * 1998-05-29 1999-10-19 Sez North America, Inc. Tool for the contact-free support of plate-like substrates
WO2000078654A1 (en) * 1999-06-17 2000-12-28 Speedfam-Ipec Corporation Improved wafer handling apparatus
EP1085558A2 (de) * 1999-09-16 2001-03-21 Applied Materials, Inc. Mehrfachseitiges Roboterblatt für eine Anlage zur Behandlung von Halbleitern
US6327517B1 (en) * 2000-07-27 2001-12-04 Applied Materials, Inc. Apparatus for on-the-fly center finding and notch aligning for wafer handling robots
EP1464455A1 (de) * 2001-12-04 2004-10-06 Rorze Corporation Skalarroboter zum tragen flacher plattenförmiger objekte und system zur verarbeitung flacher plattenförmiger objekte
DE102004007558A1 (de) * 2004-02-17 2005-09-08 Josef Moser Bewegungseinrichtung mit sinusförmigen Bewegungsablauf

Also Published As

Publication number Publication date
CN101304847A (zh) 2008-11-12
JP2009505410A (ja) 2009-02-05
TWM464295U (zh) 2013-11-01
TW200714425A (en) 2007-04-16
WO2007020008A2 (de) 2007-02-22
KR20080037718A (ko) 2008-04-30

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