UA80685C2 - Спосіб і установка для одержання вуглецевих виробів із заготовок, що складаються з речовини, вихідної відносно вуглецю - Google Patents

Спосіб і установка для одержання вуглецевих виробів із заготовок, що складаються з речовини, вихідної відносно вуглецю Download PDF

Info

Publication number: UA80685C2
Authority: UA; Ukraine
Prior art keywords: furnace; stage; carbon; temperature; fact
Prior art date: 2002-07-12

Application number

UA2004031805A

Other languages

English (en)

Russian (ru)

Ukrainian (uk)

Inventor

Етьєн Лонкл

Паскаль Потьє

Original Assignee

Снекма Пропюльсйон Солід

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-07-12

Filing date

2003-11-07

Publication date

2007-10-25

2003-11-07 Application filed by Снекма Пропюльсйон Солід filed Critical Снекма Пропюльсйон Солід

2007-10-25 Publication of UA80685C2 publication Critical patent/UA80685C2/uk

Links

OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 44
229910052799 carbon Inorganic materials 0.000 title claims abstract description 39
238000000034 method Methods 0.000 title claims abstract description 38
239000000126 substance Substances 0.000 title abstract description 7
238000010438 heat treatment Methods 0.000 claims abstract description 52
229910052751 metal Inorganic materials 0.000 claims abstract description 26
239000002184 metal Substances 0.000 claims abstract description 26
238000006386 neutralization reaction Methods 0.000 claims abstract description 5
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 27
238000009434 installation Methods 0.000 claims description 23
239000000835 fiber Substances 0.000 claims description 16
239000007789 gas Substances 0.000 claims description 15
229910002092 carbon dioxide Inorganic materials 0.000 claims description 14
229920002239 polyacrylonitrile Polymers 0.000 claims description 14
229920000049 Carbon (fiber) Polymers 0.000 claims description 13
239000001569 carbon dioxide Substances 0.000 claims description 13
239000004917 carbon fiber Substances 0.000 claims description 13
239000000463 material Substances 0.000 claims description 12
238000004519 manufacturing process Methods 0.000 claims description 11
238000006243 chemical reaction Methods 0.000 claims description 10
238000010926 purge Methods 0.000 claims description 9
238000007664 blowing Methods 0.000 claims description 8
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
238000009529 body temperature measurement Methods 0.000 claims description 7
239000001301 oxygen Substances 0.000 claims description 7
229910052760 oxygen Inorganic materials 0.000 claims description 7
230000009466 transformation Effects 0.000 claims description 7
239000003795 chemical substances by application Substances 0.000 claims description 6
239000011261 inert gas Substances 0.000 claims description 6
229910002804 graphite Inorganic materials 0.000 claims description 5
239000010439 graphite Substances 0.000 claims description 5
230000003472 neutralizing effect Effects 0.000 claims description 5
230000003287 optical effect Effects 0.000 claims description 4
238000002161 passivation Methods 0.000 claims description 4
238000012360 testing method Methods 0.000 claims description 4
230000007704 transition Effects 0.000 claims description 4
239000011819 refractory material Substances 0.000 claims description 3
229910052783 alkali metal Inorganic materials 0.000 claims description 2
150000001340 alkali metals Chemical class 0.000 claims description 2
238000011109 contamination Methods 0.000 claims description 2
230000036571 hydration Effects 0.000 claims description 2
238000006703 hydration reaction Methods 0.000 claims description 2
239000007858 starting material Substances 0.000 claims 2
238000012876 topography Methods 0.000 claims 1
238000002347 injection Methods 0.000 abstract description 10
239000007924 injection Substances 0.000 abstract description 10
239000003575 carbonaceous material Substances 0.000 abstract description 2
238000002360 preparation method Methods 0.000 abstract 1
239000000047 product Substances 0.000 description 51
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
239000007833 carbon precursor Substances 0.000 description 15
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 14
229910052708 sodium Inorganic materials 0.000 description 14
239000011734 sodium Substances 0.000 description 14
150000002739 metals Chemical class 0.000 description 13
230000008569 process Effects 0.000 description 12
239000012535 impurity Substances 0.000 description 9
239000002243 precursor Substances 0.000 description 9
238000003763 carbonization Methods 0.000 description 8
229910052757 nitrogen Inorganic materials 0.000 description 8
230000008859 change Effects 0.000 description 7
239000011265 semifinished product Substances 0.000 description 7
230000006378 damage Effects 0.000 description 6
150000002825 nitriles Chemical class 0.000 description 6
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
239000002131 composite material Substances 0.000 description 4
238000001704 evaporation Methods 0.000 description 4
230000008020 evaporation Effects 0.000 description 4
239000004744 fabric Substances 0.000 description 4
238000005259 measurement Methods 0.000 description 4
238000000859 sublimation Methods 0.000 description 4
230000008022 sublimation Effects 0.000 description 4
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
230000033228 biological regulation Effects 0.000 description 3
238000001816 cooling Methods 0.000 description 3
238000005192 partition Methods 0.000 description 3
230000001105 regulatory effect Effects 0.000 description 3
238000005406 washing Methods 0.000 description 3
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
230000008901 benefit Effects 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
229910052791 calcium Inorganic materials 0.000 description 2
239000011575 calcium Substances 0.000 description 2
229910052804 chromium Inorganic materials 0.000 description 2
239000011651 chromium Substances 0.000 description 2
230000007423 decrease Effects 0.000 description 2
238000000151 deposition Methods 0.000 description 2
238000013461 design Methods 0.000 description 2
238000011161 development Methods 0.000 description 2
229910052742 iron Inorganic materials 0.000 description 2
210000003127 knee Anatomy 0.000 description 2
229910052749 magnesium Inorganic materials 0.000 description 2
239000011777 magnesium Substances 0.000 description 2
229910052759 nickel Inorganic materials 0.000 description 2
230000035515 penetration Effects 0.000 description 2
238000005086 pumping Methods 0.000 description 2
239000000779 smoke Substances 0.000 description 2
150000003388 sodium compounds Chemical class 0.000 description 2
239000000243 solution Substances 0.000 description 2
239000004753 textile Substances 0.000 description 2
238000004804 winding Methods 0.000 description 2
XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
229920000297 Rayon Polymers 0.000 description 1
238000013459 approach Methods 0.000 description 1
238000000429 assembly Methods 0.000 description 1
230000000712 assembly Effects 0.000 description 1
238000012512 characterization method Methods 0.000 description 1
238000002485 combustion reaction Methods 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
230000001276 controlling effect Effects 0.000 description 1
230000007797 corrosion Effects 0.000 description 1
238000005260 corrosion Methods 0.000 description 1
230000002950 deficient Effects 0.000 description 1
230000008021 deposition Effects 0.000 description 1
210000005069 ears Anatomy 0.000 description 1
230000005611 electricity Effects 0.000 description 1
230000007717 exclusion Effects 0.000 description 1
238000011010 flushing procedure Methods 0.000 description 1
-1 for example Chemical class 0.000 description 1
230000004927 fusion Effects 0.000 description 1
230000001939 inductive effect Effects 0.000 description 1
238000007689 inspection Methods 0.000 description 1
238000009413 insulation Methods 0.000 description 1
239000012212 insulator Substances 0.000 description 1
230000003993 interaction Effects 0.000 description 1
239000007791 liquid phase Substances 0.000 description 1
238000011068 loading method Methods 0.000 description 1
239000011159 matrix material Substances 0.000 description 1
VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
239000000203 mixture Substances 0.000 description 1
230000003647 oxidation Effects 0.000 description 1
238000007254 oxidation reaction Methods 0.000 description 1
230000003071 parasitic effect Effects 0.000 description 1
ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
239000002244 precipitate Substances 0.000 description 1
238000012545 processing Methods 0.000 description 1
239000002994 raw material Substances 0.000 description 1
239000011226 reinforced ceramic Substances 0.000 description 1
229910000029 sodium carbonate Inorganic materials 0.000 description 1
KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
229910001948 sodium oxide Inorganic materials 0.000 description 1
239000007790 solid phase Substances 0.000 description 1
238000012795 verification Methods 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/52—Constituents or additives characterised by their shapes
- C04B2235/5208—Fibers
- C04B2235/5268—Orientation of the fibers
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Organic Chemistry (AREA)
Manufacturing & Machinery (AREA)
Materials Engineering (AREA)
Structural Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Composite Materials (AREA)
Carbon And Carbon Compounds (AREA)
Inorganic Fibers (AREA)
Ceramic Products (AREA)
Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Muffle Furnaces And Rotary Kilns (AREA)
Manufacture And Refinement Of Metals (AREA)
Furnace Details (AREA)

UA2004031805A 2002-07-12 2003-11-07 Спосіб і установка для одержання вуглецевих виробів із заготовок, що складаються з речовини, вихідної відносно вуглецю UA80685C2 (uk)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
FR0208821A FR2842192B1 (fr)	2002-07-12	2002-07-12	Procede et installation pour l'obtention de produits en carbone a partir de produits en precurseur de carbone
PCT/FR2003/002205 WO2004007402A1 (fr)	2002-07-12	2003-07-11	Procede et installation pour l'obtention de produits en carbone a partir de produits en precurseur de carbone

Publications (1)

Publication Number	Publication Date
UA80685C2 true UA80685C2 (uk)	2007-10-25

Family

ID=29763806

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
UA2004031805A UA80685C2 (uk)	2002-07-12	2003-11-07	Спосіб і установка для одержання вуглецевих виробів із заготовок, що складаються з речовини, вихідної відносно вуглецю

Country Status (13)

Country	Link
US (1)	US7410630B2 (de)
EP (1)	EP1521731B1 (de)
JP (1)	JP4422614B2 (de)
CN (1)	CN100344582C (de)
AT (1)	ATE359246T1 (de)
AU (1)	AU2003267518A1 (de)
CA (1)	CA2460502C (de)
DE (1)	DE60313177T2 (de)
FR (1)	FR2842192B1 (de)
NO (1)	NO339002B1 (de)
RU (1)	RU2319679C2 (de)
UA (1)	UA80685C2 (de)
WO (1)	WO2004007402A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
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US6309473B1 (en)	1998-10-09	2001-10-30	Kawasaki Steel Corporation	Method of making grain-oriented magnetic steel sheet having low iron loss
USRE39482E1 (en) *	1998-10-09	2007-02-06	Jfe Steel Corporation	Method of making grain-oriented magnetic steel sheet having low iron loss
KR100905702B1 (ko) *	2008-08-11	2009-07-01	강선주	무전극 조명 장치
US8771623B2 (en) *	2009-10-30	2014-07-08	Goodrich Corporation	Methods and apparatus for residual material management
US20110104041A1 (en) *	2009-10-30	2011-05-05	Goodrich Corporation	Methods and systems for hcn removal
CN101724922B (zh) *	2009-11-26	2012-09-05	中复神鹰碳纤维有限责任公司	一种碳纤维用高强聚丙烯腈基原丝的制备方法
FR2953826B1 (fr) *	2009-12-16	2019-10-11	Safran Landing Systems	Procede de fabrication d'une piece de friction a base de materiau composite c/c
CN103512711B (zh) *	2012-06-20	2016-01-20	五冶集团上海有限公司	常化退火炉气密性试验方法
KR101408834B1 (ko) *	2014-01-06	2014-06-20	한국지역난방공사	배기가스 정량 공급이 가능한 산업설비용 추기장치
RU2607401C1 (ru) *	2015-09-25	2017-01-10	Олег Викторович Барзинский	Способ получения углерод-углеродого композиционного материала
US11131503B2 (en) *	2018-03-26	2021-09-28	Goodrich Corporation	Carbon fiber, carbon composite and furnace purification by hydrogen reduction followed by thermal heat treatment
CN108572191A (zh) *	2018-03-30	2018-09-25	攀钢集团攀枝花钢钒有限公司	生石灰消化速率快速检测装置
CN114717689B (zh) *	2022-04-20	2023-06-02	宁波益铸智能科技有限公司	一种活性炭纤维低温预氧设备
CN115677371B (zh) *	2022-11-18	2024-02-20	浙江超探碳素新材料有限公司	一种碳碳马弗及其制造方法
FR3151850B1 (fr) *	2023-08-04	2025-08-01	Safran Landing Systems	Procédé industriel de traitement thermique de préformes en matériau précurseur de carbone pour la fabrication de pièces en C/C

Family Cites Families (13)

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Publication number	Priority date	Publication date	Assignee	Title
GB1329245A (en) *	1969-11-05	1973-09-05	Secr Defence	Method of manufacturing carbon articles
JPS5133211B2 (de) *	1974-02-04	1976-09-18
JPS5848643B2 (ja) *	1977-04-05	1983-10-29	東レ株式会社	高純度アクリル系炭素繊維
US4238244A (en) *	1978-10-10	1980-12-09	Halliburton Company	Method of removing deposits from surfaces with a gas agitated cleaning liquid
DE3435120A1 (de) *	1983-10-13	1985-05-02	HITCO, Newport Beach, Calif.	Verfahren zur veredelung kohlenstoffhaltiger zwischenfasern
US5154776A (en) *	1989-05-18	1992-10-13	Bloch Christopher J	Method for decontamination of vessels and other equipment polluted with metallic sodium and other reactive metals
DE69311817D1 (de) *	1992-01-24	1997-08-07	Nippon Oil Co Ltd	Verfahren zur Herstellung von Kohle-Kohle-Verbund-Vorformen und Kohle-Kohle-Verbund
FR2732962B1 (fr) *	1995-04-12	1997-07-04	Europ Propulsion	Procede pour l'infiltration chimique en phase vapeur d'un materiau compose de carbone et de silicium et/ou bore
FR2770233B1 (fr) *	1997-10-27	2000-01-14	Messier Bugatti	Procede de fabrication de preformes en fibres de carbone
JPH11209115A (ja) *	1998-01-23	1999-08-03	Toyo Tanso Kk	高純度ｃ／ｃコンポジットおよびその製造方法
US20010051127A1 (en) *	2000-06-12	2001-12-13	Showa Denko K.K.	Carbon fiber, method for producing the same and apparatus therefor
CA2417247C (en) *	2000-07-26	2010-05-04	Ballard Power Systems Inc.	Carbon-matrix composites, compositions and methods related thereto
FR2842193B1 (fr) *	2002-07-12	2004-10-01	Messier Bugatti	Procede et installation pour le traitement thermique a haute temperature et la densification par infiltration chimique en phase vapeur de textures en carbone

2002
- 2002-07-12 FR FR0208821A patent/FR2842192B1/fr not_active Expired - Fee Related
- 2002-09-26 US US10/256,223 patent/US7410630B2/en not_active Expired - Lifetime
2003
- 2003-07-11 WO PCT/FR2003/002205 patent/WO2004007402A1/fr not_active Ceased
- 2003-07-11 CN CNB038010410A patent/CN100344582C/zh not_active Expired - Fee Related
- 2003-07-11 EP EP03748209A patent/EP1521731B1/de not_active Expired - Lifetime
- 2003-07-11 AU AU2003267518A patent/AU2003267518A1/en not_active Abandoned
- 2003-07-11 JP JP2004520776A patent/JP4422614B2/ja not_active Expired - Lifetime
- 2003-07-11 RU RU2004106596/03A patent/RU2319679C2/ru not_active IP Right Cessation
- 2003-07-11 CA CA2460502A patent/CA2460502C/en not_active Expired - Fee Related
- 2003-07-11 DE DE60313177T patent/DE60313177T2/de not_active Expired - Lifetime
- 2003-07-11 AT AT03748209T patent/ATE359246T1/de active
- 2003-11-07 UA UA2004031805A patent/UA80685C2/uk unknown
2004
- 2004-03-10 NO NO20041017A patent/NO339002B1/no not_active IP Right Cessation

Also Published As

Publication number	Publication date
DE60313177T2 (de)	2007-12-27
EP1521731A1 (de)	2005-04-13
FR2842192B1 (fr)	2004-10-01
AU2003267518A1 (en)	2004-02-02
US20040008750A1 (en)	2004-01-15
JP4422614B2 (ja)	2010-02-24
RU2004106596A (ru)	2005-07-10
US7410630B2 (en)	2008-08-12
CA2460502A1 (en)	2004-01-22
RU2319679C2 (ru)	2008-03-20
WO2004007402A1 (fr)	2004-01-22
EP1521731B1 (de)	2007-04-11
CA2460502C (en)	2011-04-19
ATE359246T1 (de)	2007-05-15
NO339002B1 (no)	2016-11-07
FR2842192A1 (fr)	2004-01-16
JP2005532975A (ja)	2005-11-04
CN1556780A (zh)	2004-12-22
CN100344582C (zh)	2007-10-24
NO20041017L (no)	2004-03-10
DE60313177D1 (de)	2007-05-24

Publication	Publication Date	Title
UA80685C2 (uk)	2007-10-25	Спосіб і установка для одержання вуглецевих виробів із заготовок, що складаються з речовини, вихідної відносно вуглецю
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US4020273A (en)	1977-04-26	Vertical pyrolysis furnace for use in the production of carbon fibers
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KR20200025424A (ko)	2020-03-10	블로우 튜브 가열 시스템이 적용된 백필터 집진기
KR100958778B1 (ko)	2010-05-18	유기 박막 증착 공정용 증발원 연속 공급장치
JP5700160B2 (ja)	2015-04-15	硫化水素ガス製造プラント及び硫化水素ガスの排気方法
GB2463433A (en)	2010-03-17	Process and plant for the formal treatment of fine-grained solids
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