UA86372C2 - Способ нанесения покрытия (варианты) - Google Patents

Способ нанесения покрытия (варианты)

Info

Publication number
UA86372C2
UA86372C2 UAA200511415A UAA200511415A UA86372C2 UA 86372 C2 UA86372 C2 UA 86372C2 UA A200511415 A UAA200511415 A UA A200511415A UA A200511415 A UAA200511415 A UA A200511415A UA 86372 C2 UA86372 C2 UA 86372C2
Authority
UA
Ukraine
Prior art keywords
cathode
power
evaporative surface
overcoating
electric current
Prior art date
Application number
UAA200511415A
Other languages
English (en)
Ukrainian (uk)
Inventor
Рассел А. Бирс
Азумини Казуле
Кевин Ли Коллинз
Original Assignee
Юнайтед Текнолоджиз Корпорейшн
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Юнайтед Текнолоджиз Корпорейшн filed Critical Юнайтед Текнолоджиз Корпорейшн
Publication of UA86372C2 publication Critical patent/UA86372C2/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32614—Consumable cathodes for arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Предлагается способ нанесения покрытия с помощью напылительной машины с применением катодной дуги. Способ характеризуется тем, что напылительная машина с применением катодной дуги содержит источник питания, в машине применяют дискообразный катод, который имеет выпарную поверхность, которая проходит между первой торцевой поверхностью и второй торцевой поверхностью катода, и выпарная поверхность имеет площадь. Способ включает этап определения максимально приемлемой удельной мощности для выпарной поверхности и подведения электрического тока определенной величины от источника питания к катоду, причем величина электрического тока, разделенная на площадь, равняется или является меньше максимально приемлемой удельной мощности для выпарной поверхности. Способ обеспечивает высокую скор�
UAA200511415A 2004-12-13 2005-12-01 Способ нанесения покрытия (варианты) UA86372C2 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/010,890 US8241468B2 (en) 2004-12-13 2004-12-13 Method and apparatus for cathodic arc deposition of materials on a substrate

Publications (1)

Publication Number Publication Date
UA86372C2 true UA86372C2 (ru) 2009-04-27

Family

ID=36177686

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA200511415A UA86372C2 (ru) 2004-12-13 2005-12-01 Способ нанесения покрытия (варианты)

Country Status (6)

Country Link
US (1) US8241468B2 (ru)
EP (1) EP1683888A3 (ru)
JP (1) JP2006169630A (ru)
KR (1) KR20060066632A (ru)
SG (1) SG123711A1 (ru)
UA (1) UA86372C2 (ru)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8968528B2 (en) * 2008-04-14 2015-03-03 United Technologies Corporation Platinum-modified cathodic arc coating
US8211234B2 (en) * 2008-09-02 2012-07-03 United Technologies Corporation Coater platter homing tool
US10704136B2 (en) * 2013-03-05 2020-07-07 Raytheon Technologies Corporation Cathodic arc deposition stinger
US9786474B2 (en) 2013-10-08 2017-10-10 United Technologies Corporation Cathodic arc deposition apparatus and method
US20170016745A1 (en) * 2014-03-24 2017-01-19 Panasonic Intellectual Property Management Co., Ltd. Magnetic sensor
US10094890B2 (en) * 2014-10-09 2018-10-09 Panasonic Intellectual Property Management Co., Ltd. Magnetic sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3881256D1 (de) * 1987-03-06 1993-07-01 Balzers Hochvakuum Verfahren und vorrichtungen zum vakuumbeschichten mittels einer elektrischen bogenentladung.
DE4109213C1 (en) 1991-03-21 1992-04-09 Forschungsgesellschaft Fuer Elektronenstrahl- Und Plasmatechnik Mbh, O-8051 Dresden, De Arc-source for vacuum coating system - comprises cathode housing with double walled shell, and thin base, target, cooling water supply, drain, etc.
DE69227313T2 (de) 1991-04-29 1999-04-08 Scientific-Industrial Enterprise Novatech, Moscow Verfahren und vorrichtung zur behandlung von bauteilen in einem gasentladungsplasma
JPH06506986A (ja) 1991-04-29 1994-08-04 ナウチノ−プロイズボドストヴェノーエ・プレドプリェティエ・“ノヴァテク” ガス放電プラズマ中での製品の処理方法と装置
JP3252565B2 (ja) 1993-10-20 2002-02-04 トヨタ自動車株式会社 摺動部材およびその製造方法
US5401543A (en) 1993-11-09 1995-03-28 Minnesota Mining And Manufacturing Company Method for forming macroparticle-free DLC films by cathodic arc discharge
US6009829A (en) 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US6036828A (en) 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
US5972185A (en) 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus

Also Published As

Publication number Publication date
EP1683888A2 (en) 2006-07-26
SG123711A1 (en) 2006-07-26
US20060124450A1 (en) 2006-06-15
JP2006169630A (ja) 2006-06-29
EP1683888A3 (en) 2010-02-17
KR20060066632A (ko) 2006-06-16
US8241468B2 (en) 2012-08-14

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