UA94039C2 - Rf memc-switch - Google Patents

Rf memc-switch

Info

Publication number
UA94039C2
UA94039C2 UAA200710442A UAA200710442A UA94039C2 UA 94039 C2 UA94039 C2 UA 94039C2 UA A200710442 A UAA200710442 A UA A200710442A UA A200710442 A UAA200710442 A UA A200710442A UA 94039 C2 UA94039 C2 UA 94039C2
Authority
UA
Ukraine
Prior art keywords
switching means
state
switch
memc
micromechanical
Prior art date
Application number
UAA200710442A
Other languages
English (en)
Ukrainian (uk)
Inventor
Оливье Мийе
Original Assignee
Дельфмемс
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Дельфмемс filed Critical Дельфмемс
Publication of UA94039C2 publication Critical patent/UA94039C2/ru

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Electrotherapy Devices (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Push-Button Switches (AREA)
  • Burglar Alarm Systems (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

РЧ МЕМС -Переключатель содержит микромеханическое переключающее устройство, размещенное на подкладке и выполненное с возможностью приведения в действие между двумя положениями: первым положением (отключенное состояние/фиг. 1) и вторым положением (включенное состояние), и активизирующее устройство, предназначенное для приведения переключающего устройства в соответствующее положение. При этом микромеханическое переключающее устройство содержит гибкую мембрану (6), свободно поддерживаемую опорным устройством (3) и выполненную с возможностью сгибаться под влиянием активирующего устройства (7) и свободно скользить относительно опорного устройства (3) во время своего перемещения изгиба.
UAA200710442A 2005-03-21 2006-07-03 Rf memc-switch UA94039C2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05370005A EP1705676B9 (en) 2005-03-21 2005-03-21 RF MEMS switch with a flexible and free switch membrane

Publications (1)

Publication Number Publication Date
UA94039C2 true UA94039C2 (en) 2011-04-11

Family

ID=34942756

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA200710442A UA94039C2 (en) 2005-03-21 2006-07-03 Rf memc-switch

Country Status (19)

Country Link
US (1) US7834722B2 (ru)
EP (1) EP1705676B9 (ru)
JP (1) JP4637234B2 (ru)
KR (1) KR101230284B1 (ru)
CN (1) CN101147223B (ru)
AT (1) ATE376704T1 (ru)
AU (1) AU2006226642B2 (ru)
BR (1) BRPI0611549A2 (ru)
CA (1) CA2602187C (ru)
DE (1) DE602005003008T2 (ru)
DK (1) DK1705676T3 (ru)
ES (1) ES2296116T3 (ru)
IL (1) IL185992A (ru)
MX (1) MX2007011641A (ru)
PT (1) PT1705676E (ru)
RU (1) RU2433499C2 (ru)
UA (1) UA94039C2 (ru)
WO (1) WO2006099945A1 (ru)
ZA (1) ZA200707988B (ru)

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DE102009006421A1 (de) * 2009-01-22 2010-07-29 E.G.O. Elektro-Gerätebau GmbH Bedieneinrichtung für ein Elektrogerät
DK2230679T3 (da) 2009-03-20 2012-07-30 Delfmems MEMS-struktur med en fleksibel membran og forbedrede elektriske påvirkningsmidler
US8354899B2 (en) * 2009-09-23 2013-01-15 General Electric Company Switch structure and method
CN102074771A (zh) * 2011-01-06 2011-05-25 东南大学 一种微固支梁式射频开关
ES2436644T3 (es) 2011-03-28 2014-01-03 Delfmems Conmutador de punto de cruce MEMS de RF y matriz de conmutador de punto de cruce que comprende conmutadores de punto de cruce MEMS de RF
US9641174B2 (en) * 2011-04-11 2017-05-02 The Regents Of The University Of California Use of micro-structured plate for controlling capacitance of mechanical capacitor switches
US9085454B2 (en) * 2011-07-05 2015-07-21 Duality Reality Energy, LLC Reduced stiffness micro-mechanical structure
JP6169614B2 (ja) 2012-01-23 2017-07-26 ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・ミシガンＴｈｅ Ｒｅｇｅｎｔｓ Ｏｆ Ｔｈｅ Ｕｎｉｖｅｒｓｉｔｙ Ｏｆ Ｍｉｃｈｉｇａｎ プラズモン電極を有する光伝導装置
EP2969912A4 (en) 2013-03-15 2016-11-09 Wispry Inc ACTUATING PLATE PARTITIONING AND CONTROL DEVICES AND METHOD
FR3006808B1 (fr) 2013-06-06 2015-05-29 St Microelectronics Rousset Dispositif de commutation integre electriquement activable
US9859079B2 (en) 2013-08-06 2018-01-02 The Regents Of The University Of Michigan Reconfigurable device for terahertz (THz) and infrared (IR) filtering and modulation
RU2527942C1 (ru) * 2013-11-05 2014-09-10 Общество С Ограниченной Ответственностью "Научно-Производственное Предприятие "Технология" Способ изготовления электростатического силового мэмс ключа
CN103762123A (zh) * 2014-01-21 2014-04-30 西安电子科技大学 一种静电驱动双稳态rfmems开关
EP3038125A1 (en) * 2014-12-22 2016-06-29 DelfMEMS SAS Mems structure with multilayer membrane
EP3038126A1 (en) * 2014-12-22 2016-06-29 DelfMEMS SAS MEMS structure with thick movable membrane
FR3031098A1 (fr) * 2014-12-26 2016-07-01 Delfmems Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane mobile en translation et une electrode d'actionnement isolee de la membrane par une couche dielectrique
FR3031096A1 (fr) * 2014-12-26 2016-07-01 Delfmems Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane qui est mobile en translation et est profilee pour reduire les courts-circuits et la formation d'arcs electriques
JP6860210B2 (ja) 2015-05-27 2021-04-14 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニアＴｈｅ Ｒｅｇｅｎｔｓ Ｏｆ Ｔｈｅ Ｕｎｉｖｅｒｓｉｔｙ Ｏｆ Ｃａｌｉｆｏｒｎｉａ レーザ駆動式テラヘルツ源および検出器を通したテラヘルツ内視鏡検査
CN108291846B (zh) * 2015-12-07 2020-08-04 尼尔斯·奥格·尤尔·艾勒森 测压仪
KR200481233Y1 (ko) 2015-12-31 2016-09-01 한지흠 마비된 중풍 손가락의 관절과 근육 물리치료용 운동기구
KR200480523Y1 (ko) 2015-12-31 2016-06-29 한지흠 펄스모양 회전축을 구비한 중풍 손 물리치료 기구
CN105680132B (zh) * 2016-03-16 2018-06-29 西安电子科技大学 一种太赫兹波阻抗易调谐空气共面波导结构及其制备方法
FR3051784B1 (fr) * 2016-05-24 2018-05-25 Airmems Membrane mems a ligne de transmission integree
RU169456U1 (ru) * 2016-07-06 2017-03-21 Общество с ограниченной ответственностью "Базовые технологии" Трехбитный РЧ МЭМС варактор
EP3612812B1 (en) 2017-04-20 2024-12-04 The Regents of the University of California Methods for high frequency nanoscopy
US11456392B2 (en) 2017-06-01 2022-09-27 The Regents Of The University Of California Metallo-graphene nanocomposites and methods for using metallo-graphene nanocomposites for electromagnetic energy conversion
EP3867191B1 (de) 2018-10-16 2024-07-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Biegewandler als aktor, biegewandler als sensor, biegewandlersystem
RU2705564C1 (ru) * 2018-12-20 2019-11-08 федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) Интегральный микроэлектромеханический переключатель
RU2705792C1 (ru) * 2018-12-26 2019-11-12 федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) Интегральный микроэлектромеханический переключатель
CN110212805B (zh) * 2019-05-30 2020-12-25 上海集成电路研发中心有限公司 一种改善翘曲程度的mems结构
US11906424B2 (en) 2019-10-01 2024-02-20 The Regents Of The University Of California Method for identifying chemical and structural variations through terahertz time-domain spectroscopy
US12066380B2 (en) 2019-10-31 2024-08-20 The Regents Of The University Of California Methods and systems for detecting water status in plants using terahertz radiation
EP4256382A4 (en) 2020-12-01 2024-10-16 The Regents of the University of California Systems and methods for wavelength conversion through plasmon-coupled surface states
US12055927B2 (en) * 2021-02-26 2024-08-06 Honeywell International Inc. Thermal metamaterial for low power MEMS thermal control
CN117355918A (zh) 2022-04-27 2024-01-05 京东方科技集团股份有限公司 Mems开关及其制备方法、电子设备

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SU1350687A1 (ru) * 1985-09-05 1987-11-07 Предприятие П/Я Г-4493 Мембранный переключатель
SU1597949A1 (ru) * 1987-11-20 1990-10-07 Предприятие П/Я Ю-9539 Мембранный переключатель
US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
US20040050674A1 (en) * 2002-09-14 2004-03-18 Rubel Paul John Mechanically bi-stable mems relay device
KR100513723B1 (ko) * 2002-11-18 2005-09-08 삼성전자주식회사 Ｍｅｍｓ스위치
JP4066928B2 (ja) 2002-12-12 2008-03-26 株式会社村田製作所 Ｒｆｍｅｍｓスイッチ
JP2004319215A (ja) * 2003-04-15 2004-11-11 Murata Mfg Co Ltd 静電駆動素子
US6882256B1 (en) * 2003-06-20 2005-04-19 Northrop Grumman Corporation Anchorless electrostatically activated micro electromechanical system switch
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FR2858459B1 (fr) * 2003-08-01 2006-03-10 Commissariat Energie Atomique Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
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Also Published As

Publication number Publication date
IL185992A (en) 2011-08-31
BRPI0611549A2 (pt) 2010-09-21
ZA200707988B (en) 2008-06-25
PT1705676E (pt) 2008-02-07
DE602005003008D1 (de) 2007-12-06
DE602005003008T2 (de) 2008-08-14
EP1705676A1 (en) 2006-09-27
RU2433499C2 (ru) 2011-11-10
CN101147223B (zh) 2010-09-08
ES2296116T3 (es) 2008-04-16
JP2008533690A (ja) 2008-08-21
AU2006226642A1 (en) 2006-09-28
RU2007134310A (ru) 2009-04-27
MX2007011641A (es) 2008-01-18
CA2602187C (en) 2014-05-06
KR101230284B1 (ko) 2013-02-06
EP1705676B9 (en) 2010-08-11
JP4637234B2 (ja) 2011-02-23
KR20080004467A (ko) 2008-01-09
EP1705676B1 (en) 2007-10-24
AU2006226642B2 (en) 2010-11-11
US7834722B2 (en) 2010-11-16
IL185992A0 (en) 2008-01-20
CN101147223A (zh) 2008-03-19
ATE376704T1 (de) 2007-11-15
CA2602187A1 (en) 2006-09-28
WO2006099945A1 (en) 2006-09-28
DK1705676T3 (da) 2008-02-18
US20080237024A1 (en) 2008-10-02

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