ATE376704T1 - Rf mems schalter mit einer flexiblen und freien schaltmembran - Google Patents

Rf mems schalter mit einer flexiblen und freien schaltmembran

Info

Publication number
ATE376704T1
ATE376704T1 AT05370005T AT05370005T ATE376704T1 AT E376704 T1 ATE376704 T1 AT E376704T1 AT 05370005 T AT05370005 T AT 05370005T AT 05370005 T AT05370005 T AT 05370005T AT E376704 T1 ATE376704 T1 AT E376704T1
Authority
AT
Austria
Prior art keywords
mems switch
flexible
free switching
switching membrane
switching means
Prior art date
Application number
AT05370005T
Other languages
English (en)
Inventor
Olivier Millet
Original Assignee
Delfmems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delfmems filed Critical Delfmems
Application granted granted Critical
Publication of ATE376704T1 publication Critical patent/ATE376704T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Electrotherapy Devices (AREA)
  • Push-Button Switches (AREA)
  • Burglar Alarm Systems (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
AT05370005T 2005-03-21 2005-03-21 Rf mems schalter mit einer flexiblen und freien schaltmembran ATE376704T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05370005A EP1705676B9 (de) 2005-03-21 2005-03-21 RF MEMS Schalter mit einer flexiblen und freien Schaltmembran

Publications (1)

Publication Number Publication Date
ATE376704T1 true ATE376704T1 (de) 2007-11-15

Family

ID=34942756

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05370005T ATE376704T1 (de) 2005-03-21 2005-03-21 Rf mems schalter mit einer flexiblen und freien schaltmembran

Country Status (19)

Country Link
US (1) US7834722B2 (de)
EP (1) EP1705676B9 (de)
JP (1) JP4637234B2 (de)
KR (1) KR101230284B1 (de)
CN (1) CN101147223B (de)
AT (1) ATE376704T1 (de)
AU (1) AU2006226642B2 (de)
BR (1) BRPI0611549A2 (de)
CA (1) CA2602187C (de)
DE (1) DE602005003008T2 (de)
DK (1) DK1705676T3 (de)
ES (1) ES2296116T3 (de)
IL (1) IL185992A (de)
MX (1) MX2007011641A (de)
PT (1) PT1705676E (de)
RU (1) RU2433499C2 (de)
UA (1) UA94039C2 (de)
WO (1) WO2006099945A1 (de)
ZA (1) ZA200707988B (de)

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US8461948B2 (en) * 2007-09-25 2013-06-11 The United States Of America As Represented By The Secretary Of The Army Electronic ohmic shunt RF MEMS switch and method of manufacture
DE102009006421A1 (de) * 2009-01-22 2010-07-29 E.G.O. Elektro-Gerätebau GmbH Bedieneinrichtung für ein Elektrogerät
EP2230679B1 (de) 2009-03-20 2012-05-16 Delfmems MEMS-Struktur mit flexibler Membran und verbesserte elektrische Auslösungsmittel
US8354899B2 (en) * 2009-09-23 2013-01-15 General Electric Company Switch structure and method
CN102074771A (zh) * 2011-01-06 2011-05-25 东南大学 一种微固支梁式射频开关
PL2506282T3 (pl) 2011-03-28 2014-02-28 Delfmems Przełącznik krzyżowy RF MEMS i matryca przełączników krzyżowych zawierająca przełączniki krzyżowe RF MEMS
US9641174B2 (en) * 2011-04-11 2017-05-02 The Regents Of The University Of California Use of micro-structured plate for controlling capacitance of mechanical capacitor switches
US9085454B2 (en) * 2011-07-05 2015-07-21 Duality Reality Energy, LLC Reduced stiffness micro-mechanical structure
WO2013112608A1 (en) 2012-01-23 2013-08-01 The Regents Of The University Of Michigan Photoconductive device with plasmonic electrodes
CN105228946B (zh) 2013-03-15 2018-04-20 维斯普瑞公司 致动器板分割以及控制装置和方法
FR3006808B1 (fr) * 2013-06-06 2015-05-29 St Microelectronics Rousset Dispositif de commutation integre electriquement activable
WO2015021100A1 (en) * 2013-08-06 2015-02-12 The Regents Of The University Of Michigan Reconfigurable device for terahertz (thz) and infrared (ir) filtering and modulation
RU2527942C1 (ru) * 2013-11-05 2014-09-10 Общество С Ограниченной Ответственностью "Научно-Производственное Предприятие "Технология" Способ изготовления электростатического силового мэмс ключа
CN103762123A (zh) * 2014-01-21 2014-04-30 西安电子科技大学 一种静电驱动双稳态rfmems开关
EP3038125A1 (de) 2014-12-22 2016-06-29 DelfMEMS SAS MEMS-Struktur mit mehrschichtiger Membran
EP3038126A1 (de) * 2014-12-22 2016-06-29 DelfMEMS SAS MEMS-Struktur mit dicker bewegbarer Membran
FR3031098A1 (fr) * 2014-12-26 2016-07-01 Delfmems Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane mobile en translation et une electrode d'actionnement isolee de la membrane par une couche dielectrique
FR3031096A1 (fr) * 2014-12-26 2016-07-01 Delfmems Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane qui est mobile en translation et est profilee pour reduire les courts-circuits et la formation d'arcs electriques
US10863895B2 (en) 2015-05-27 2020-12-15 The Regents Of The University Of California Terahertz endoscopy through laser-driven terahertz sources and detectors
EP3387402B1 (de) * 2015-12-07 2021-04-07 EILERSEN, Nils Aage Juul Kraftmesszelle
KR200481233Y1 (ko) 2015-12-31 2016-09-01 한지흠 마비된 중풍 손가락의 관절과 근육 물리치료용 운동기구
KR200480523Y1 (ko) 2015-12-31 2016-06-29 한지흠 펄스모양 회전축을 구비한 중풍 손 물리치료 기구
CN105680132B (zh) * 2016-03-16 2018-06-29 西安电子科技大学 一种太赫兹波阻抗易调谐空气共面波导结构及其制备方法
FR3051784B1 (fr) * 2016-05-24 2018-05-25 Airmems Membrane mems a ligne de transmission integree
RU169456U1 (ru) * 2016-07-06 2017-03-21 Общество с ограниченной ответственностью "Базовые технологии" Трехбитный РЧ МЭМС варактор
US11249017B2 (en) 2017-04-20 2022-02-15 The Regents Of The University Of California Systems and methods for high frequency nanoscopy
WO2018223068A1 (en) 2017-06-01 2018-12-06 The Regents Of The University Of California Metallo-graphene nanocomposites and methods for using metallo-graphene nanocomposites for electromagnetic energy conversion
KR102563920B1 (ko) 2018-10-16 2023-08-04 프라운호퍼 게젤샤프트 쭈르 푀르데룽 데어 안겐반텐 포르슝 에. 베. 액추에이터로서의 벤딩 변환기, 센서로서의 벤딩 변환기, 벤딩 변환기 시스템
RU2705564C1 (ru) * 2018-12-20 2019-11-08 федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) Интегральный микроэлектромеханический переключатель
RU2705792C1 (ru) * 2018-12-26 2019-11-12 федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" (Южный федеральный университет) Интегральный микроэлектромеханический переключатель
CN110212805B (zh) * 2019-05-30 2020-12-25 上海集成电路研发中心有限公司 一种改善翘曲程度的mems结构
EP4038366A4 (de) 2019-10-01 2024-03-06 The Regents of the University of California Verfahren zur identifizierung von chemischen und strukturellen variationen durch terahertz-zeitbereichsspektroskopie
EP4052458A4 (de) 2019-10-31 2023-11-29 The Regents of the University of California Verfahren und systeme zur detektion des wasserstatus bei pflanzen mittels terahertzstrahlung
WO2022154994A2 (en) 2020-12-01 2022-07-21 The Regents Of The University Of California Systems and methods for wavelength conversion through plasmon-coupled surface states
US12055927B2 (en) * 2021-02-26 2024-08-06 Honeywell International Inc. Thermal metamaterial for low power MEMS thermal control
CN117355918A (zh) 2022-04-27 2024-01-05 京东方科技集团股份有限公司 Mems开关及其制备方法、电子设备

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SU1597949A1 (ru) * 1987-11-20 1990-10-07 Предприятие П/Я Ю-9539 Мембранный переключатель
US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
US20040050674A1 (en) * 2002-09-14 2004-03-18 Rubel Paul John Mechanically bi-stable mems relay device
KR100513723B1 (ko) * 2002-11-18 2005-09-08 삼성전자주식회사 Ｍｅｍｓ스위치
JP4066928B2 (ja) * 2002-12-12 2008-03-26 株式会社村田製作所 Ｒｆｍｅｍｓスイッチ
JP2004319215A (ja) * 2003-04-15 2004-11-11 Murata Mfg Co Ltd 静電駆動素子
US6882256B1 (en) * 2003-06-20 2005-04-19 Northrop Grumman Corporation Anchorless electrostatically activated micro electromechanical system switch
JP4364565B2 (ja) * 2003-07-02 2009-11-18 シャープ株式会社 静電アクチュエーター，マイクロスイッチ，マイクロ光スイッチ，電子機器および静電アクチュエーターの製造方法
FR2858459B1 (fr) * 2003-08-01 2006-03-10 Commissariat Energie Atomique Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
US20070188846A1 (en) * 2003-09-03 2007-08-16 Slicker James M MEMS switch with bistable element having straight beam components
US7348870B2 (en) * 2005-01-05 2008-03-25 International Business Machines Corporation Structure and method of fabricating a hinge type MEMS switch

Also Published As

Publication number Publication date
IL185992A0 (en) 2008-01-20
EP1705676B1 (de) 2007-10-24
IL185992A (en) 2011-08-31
AU2006226642B2 (en) 2010-11-11
AU2006226642A1 (en) 2006-09-28
CN101147223B (zh) 2010-09-08
KR20080004467A (ko) 2008-01-09
DE602005003008D1 (de) 2007-12-06
ZA200707988B (en) 2008-06-25
BRPI0611549A2 (pt) 2010-09-21
EP1705676B9 (de) 2010-08-11
PT1705676E (pt) 2008-02-07
RU2007134310A (ru) 2009-04-27
DE602005003008T2 (de) 2008-08-14
CN101147223A (zh) 2008-03-19
CA2602187C (en) 2014-05-06
CA2602187A1 (en) 2006-09-28
KR101230284B1 (ko) 2013-02-06
DK1705676T3 (da) 2008-02-18
UA94039C2 (en) 2011-04-11
ES2296116T3 (es) 2008-04-16
JP2008533690A (ja) 2008-08-21
RU2433499C2 (ru) 2011-11-10
EP1705676A1 (de) 2006-09-27
US20080237024A1 (en) 2008-10-02
MX2007011641A (es) 2008-01-18
JP4637234B2 (ja) 2011-02-23
US7834722B2 (en) 2010-11-16
WO2006099945A1 (en) 2006-09-28

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