US20210010963A1 - Gas sensor and manufacturing method therefor - Google Patents

Gas sensor and manufacturing method therefor Download PDF

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Publication number
US20210010963A1
US20210010963A1 US17/040,278 US201917040278A US2021010963A1 US 20210010963 A1 US20210010963 A1 US 20210010963A1 US 201917040278 A US201917040278 A US 201917040278A US 2021010963 A1 US2021010963 A1 US 2021010963A1
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Prior art keywords
sensor element
electrode
green sheet
laminated body
manufacturing
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Tetsuro Tanaka
Kenichi Iguchi
Ken Takahashi
Chika Ito
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Koa Corp
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Koa Corp
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Assigned to KOA CORPORATION reassignment KOA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ITO, CHIKA, IGUCHI, KENICHI, TAKAHASHI, KEN, TANAKA, TETSURO
Publication of US20210010963A1 publication Critical patent/US20210010963A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/30—Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/48—Producing shaped prefabricated articles from the material by removing material from solid section preforms for forming hollow articles, e.g. by punching or boring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component

Definitions

  • the present invention relates to a gas sensor, which detects gas concentration such as oxygen concentration within a measuring atmosphere, and a manufacturing method therefor.
  • An oxygen sensor having an oxygen concentration detecting element made of various materials is well-known.
  • the oxygen sensor using composite ceramics made by mixing LnBa 2 Cu 3 O 7-6 and Ln 2 BaCuO 5 (where Ln denotes rare earth element) is known as the material composition of the oxygen sensor using a ceramic sintered body (see Patent Document 1).
  • the oxygen sensor using a ceramic sintered body detects oxygen concentration utilizing a hot-spot phenomenon that a part of the linear member (sensor element) is red-heated when a voltage is applied.
  • a hot spot-type oxygen sensor is characterized in that O 2 ⁇ ions taken into the crystal structure of an oxygen sensor element travel to the positive electrode.
  • a hot spot generating at this time moves to the negative electrode in which the number of O 2 ⁇ ions have decreased.
  • Patent Document 2 a narrow part formed in the sensor element made of a linear body etc. is used as a hot spot, and thus the hot spot is generated at a specific position of the sensor element.
  • the central part of the element is formed to be a narrow part, which thus has a smaller cross-sectional area and a larger resistance than the other portions, resulting in generation of a hot spot in the narrow part.
  • Patent Document 1 JP 2007-85816A (U.S. Pat. No. 4,714,867)
  • Patent Document 2 JP 10-73549A
  • Patent Document 3 JP 2000-19143A
  • the conventional hot-spot type oxygen sensor described above either has a long and slender rectangular parallelepiped shape with a uniform cross-sectional area, or has the same shape with a narrow part in the central part of the element.
  • Such a sensor material has a problem that generation of a hot spot, which emits intense heat, at a position close to the negative electrode causes remarkable deterioration of the electrode material.
  • the present invention is devised in light of the problems described above, and aims to provide a gas sensor that allows fixation of a hot spot generating position without generation of fragile parts.
  • the present invention aims to resolve the above problems, and includes the following structure, for example, as means for achieving the above aim. That is, the present invention is a gas sensor characterized in that it is made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element.
  • the sensor element has a cross-sectional area that changes shape from one electrode side toward the other electrode side of paired electrode parts formed on either longitudinal end.
  • the cross-sectional area increases or decreases either uniformly or gradually from the one electrode side toward the other electrode side.
  • the sensor element has a constant thickness, and a width that increases or decreases either uniformly or gradually from the one electrode side toward the other electrode side.
  • the sensor element has thickness and width increasing or decreasing either uniformly or gradually from the one electrode side toward the other electrode side.
  • an electrode part formed on a side where cross-sectional area of the sensor element is larger is set as a negative electrode
  • an electrode part formed on a side where the cross-sectional area is smaller is set as a positive electrode.
  • either the negative electrode and the positive electrode have nearly the same size, or size of the negative electrode is larger than that of the positive electrode. It is also characterized in that, for example, either both the negative electrode and the positive electrode are formed on the same side of the sensor element, or one of the negative electrode or the positive electrode is formed on an upper surface of the sensor element and the other is formed on an under surface of the sensor element.
  • a manufacturing method for a gas sensor made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element is characterized by including the steps of: manufacturing a green sheet from slurry formed by mixing together raw materials of the sensor element; manufacturing a ring-shaped first green sheet by punching out the green sheet so as to form a punched hole having a predetermined diameter; manufacturing a ring-shaped second green sheet by forming belt-like shaped electrodes along periphery of the punched hole of the first green sheet and a ring-shaped outer periphery of the first green sheet; manufacturing a ring-shaped laminated body by coaxially stacking a plurality of the first green sheet with the second green sheet as a top surface; cutting the laminated body along a plurality of diametral virtual lines of the ring-shaped laminated body that is formed by rotating around the axis of the ring-shaped laminated body every fixed angle in the circumferential direction
  • cutting of the laminated body is carried out either by rotating the laminated body around its axis every fixed angle in the circumferential direction, and moving a cutter part arranged on an upper part of the laminated body a predetermined distance vertically downward in sync with said rotating, or by fixing the laminated body and moving a cutter part arranged on an upper part of the laminated body a predetermined distance vertically downward while rotating around the axis of the laminated body every fixed angle in the circumferential direction.
  • a manufacturing method for a gas sensor made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element is characterized by including the steps of: manufacturing a long green sheet from slurry formed by mixing together raw materials of the sensor element; manufacturing a sensor element piece with a nearly trapezoidal shape, in a planar view, by cutting the green sheet in a zigzag shape at predetermined intervals in a direction crossing a longitudinal direction of the green sheet; and baking the sensor element piece and forming paired electrodes on either end part in the longitudinal direction.
  • fixation of the hot spot generating position in a gas sensor prevents deterioration etc. of the electrode due to the hot spot.
  • FIG. 1 is an external perspective diagram of an oxygen sensor according to an embodiment of the present invention
  • FIG. 2 is a flow chart showing oxygen sensor manufacturing steps in time series according to the embodiment
  • FIG. 3 shows processing etc. of components corresponding to each manufacturing step of FIG. 2 ;
  • FIG. 4 shows processing etc. of components corresponding to each manufacturing step of FIG. 2 ;
  • FIG. 5 shows examples of manufacturing sensor elements according to Modified Example 1
  • FIG. 6 shows external perspective diagrams of sensor elements according to Modified Example 2
  • FIG. 7 shows planar views of sensor elements according to Modified Example 3.
  • FIG. 8 shows example patterns of punching out sensor elements according to Modified Example 3 from a green sheet
  • FIG. 9 shows external perspective diagrams of sensor elements according to Modified Example 4.
  • FIG. 1 is an external perspective diagram of the oxygen sensor according to the embodiment of the present invention.
  • the oxygen sensor has a structure in which a sensor element is stored inside a tubular body such as a cylindrical glass, made of heat-resistant glass. However, illustration of the tubular body is omitted from the drawing.
  • the oxygen sensor 10 according to the embodiment shown in FIG. 1 includes a sensor element 12 , paired electrodes 13 and 15 formed facing each other at longitudinal ends of the sensor element 12 , and lead wires 17 and 19 connected to the respective electrodes 13 and 15 .
  • the sensor element 12 has a shape that the cross-sectional area of the element on one electrode side differs from that of the element on the other electrode side. Specifically, the shape of the cross-sectional area of the sensor element 12 increases uniformly from the positive (+) electrode 13 toward the negative ( ⁇ ) electrode 15 .
  • a ratio of cross-sectional area S 1 on the negative electrode side when the sensor element 12 is cut along a line indicated by arrows A-A′ of FIG. 1 to cross-sectional area S 2 on the positive electrode side when the sensor element 12 is cut along a line indicated by arrows B-B′ is set to 1.5:1 to 2:1, for example.
  • the sensor element 12 is constituted by a ceramic sintered body made by mixing LnBa 2 Cu 3 O 7-6 and Ln 2 BaCuO 5 , for example.
  • Ln denotes rare earth element (for example, Sc (scandium), Y (yttrium), La (lanthanum), Nd (neodymium), Sm (samarium), Eu (europium), Gd (gadolinium), Dy (dysprosium), Ho (holmium), Er (erbium), Tm (thulium), Yb (ytterbium), Lu (lutetium), etc.)
  • ⁇ represents oxygen defect (0 to 1).
  • Results from comparison of the oxygen sensor according to the embodiment to the conventional oxygen sensor, which is made from a sensor element having a slender, rectangular parallelepiped shape and uniform cross-sectional areas from the positive electrode side to the negative electrode side, are described below.
  • This comparison has been carried out under the following conditions: An oxygen sensor is housed in a cylindrical glass tube made of a heat-resistant glass where conductive caps (mouthpieces) made of metal such as copper (Cu) are fitted to respective ends of the glass tube, the electric conductive caps are connected to a power source, resulting in an electric current passing through the sensor element, and generation of a hot spot is observed.
  • the hot spot generating position in the oxygen sensor according to the embodiment can be considered a position that is at nearly equal distances from the paired electrodes formed on either end of the sensor element. This allows avoiding damage to the electrode due to heat emitted by the hot spot. Moreover, in order to control hot spot generating positions, provision of a narrow part in the sensor element as in the conventional case is not required, thus avoiding formation of a fragile part in the sensor element.
  • FIG. 2 is a flow chart showing oxygen sensor manufacturing steps in time series according to the embodiment.
  • a manufacturing method for the oxygen sensor illustrated in FIG. 1 which has an element structure where shape of the cross-sectional area of the sensor element increases uniformly from the positive electrode toward the negative electrode, is described.
  • FIG. 3 and FIG. 4 show processing etc. of components corresponding to each manufacturing step for the oxygen sensor of FIG. 2 .
  • step S 1 of FIG. 2 raw materials of the oxygen sensor element are mixed together and pulverized. More specifically, LnBa 2 Cu 3 O 7-6 and Ln 2 BaCuO 5 (Ln denotes rare earth element) are mixed together as materials for the oxygen sensor element, and the mixed raw materials are pulverized using a ball mill or the like, resulting in the same sized grains.
  • LnBa 2 Cu 3 O 7-6 and Ln 2 BaCuO 5 Ln denotes rare earth element
  • step S 2 the materials obtained in the step described above are subjected to heat treatment (preliminary baking) at 900 to 1000° C.
  • step S 3 the preliminarily baked raw materials are pulverized using a ball mill or the like, resulting in the same sized grains, and then slurry is manufactured.
  • a binder resin e.g., butyral resin (PVB)
  • a dispersant e.g., sorbitan trioleate
  • a plasticizer e.g., bis phthalate (2-ethylhexyl), DOP
  • a diluting solvent e.g., 2-ethylhexanol
  • step S 4 a film is formed using a doctor blade so as to manufacture a green sheet of approximately 10 to 100 ⁇ m, for example.
  • step S 5 as shown in FIG. 3A , central circles 21 a to 21 d are punched out from a green sheet 20 using a mechanical punch etc.
  • Step S 6 includes forming in the same sheet, a ring-shaped green sheet 27 a positioned on the top layer of a laminated body described later and ring-shaped green sheets 27 b to 27 d stacked on the bottom layer thereof, and printing electrodes. More specifically, as shown in FIGS. 3A and 3B , electrode material made of silver (Ag) paste, for example, is screen printed in a ring shape along the inner periphery of the central circle 21 a corresponding to the central circle of the ring-shaped green sheet 27 a on the top surface of the laminated body, thus forming a positive electrode 25 .
  • silver (Ag) paste for example
  • the electrode material is screen printed in a ring shape along an outer periphery 22 a , which is at a distance equal to the radius of the ring-shaped green sheet 27 a (namely, longitudinal length of the sensor element) from the center of the central circle 21 a , thus forming a negative electrode 23 .
  • the other central circles 21 b to 21 d are left punched out without forming any electrodes.
  • step S 7 the green sheet 20 is punched out using a mechanical punch etc. along outer peripheries 22 a to 22 d (in the case of the central circle 21 a , the outer periphery 22 a becomes outer periphery of the negative electrode 23 ) stipulated at a distance equal to the radius of the ring-shaped green sheet (sensor element length) from the center of each of the central circles 21 a to 21 d .
  • FIG. 3C illustrates the green sheets (ring-shaped green sheets) 27 a to 27 d each punched out in a ring shape from the green sheet 20 .
  • step S 8 the ring-shaped green sheet 27 a in which the electrodes 23 and 25 are formed in the inner and outer peripheries respectively is placed on the top part of the ring-shaped green sheets 27 b to 27 d in which electrodes are not provided, and a rod-like pin 31 is then inserted through center holes of the ring-shaped green sheets, thereby stacking them while aligning them, as illustrated in FIG. 3D .
  • the laminated material of the ring-shaped sheets is then applied pressure using a uniaxial press, for example, thereby manufacturing a laminated body 33 having a predetermined thickness illustrated in FIG. 3E .
  • the ring-shaped green sheet 27 a is stacked on the three ring-shaped green sheets 27 b to 27 d , which become under layers thereof, thereby manufacturing a laminated body.
  • the number of stacked layers is not limited thereto, and a necessary number of ring-shaped green sheets are stacked in accordance with thickness of the laminated body to be manufactured.
  • each ring-shaped green sheet layer in the same sheet has been described, a method of forming together a plurality of the ring-shaped green sheet 27 a to be the top surface of the same sheet may be used.
  • step S 9 the laminated body 33 is cut (diced) in accordance with product (sensor element) size.
  • the laminated body 33 is adhered and fixed on to a guillotine stage 35 , and while rotating the guillotine stage 35 around the circle center of the laminated body 33 every fixed angle (e.g., 10° at a time), a cutter 37 is moved a predetermined distance vertically downward, thereby cutting the laminated body 33 .
  • step S 10 the sensor element 32 cut in the dicing step described above and divided into individual pieces as illustrated in FIG. 4B is baked in atmospheric air at, for example, 920° C. for 10 hours. Note that de-binding may be carried out on the laminated body before baking, and annealing may be performed on the laminated body after baking.
  • step S 11 lead wires 47 and 49 are attached using a conductive paste, for example, to the positive electrode 43 and the negative electrode 45 of the sensor element 42 after baking, respectively, as illustrated in FIG. 4C .
  • the method of attaching the lead wires is not limited to the above description. For example, instantly heating a joint using a pulse heat power source so as to solder or weld, or wire bonding through ultrasonic vibration or thermocompression bonding may be used.
  • the length of the sensor element divided into individual pieces and baked as described above is 5 mm, for example, and the outer dimensions (size) of the oxygen sensor include, for example, a glass tube diameter of 5 mm, glass tube length of 20 mm, and air hole diameter of 2.5 mm.
  • the sensor element with the dimensions described above makes the oxygen sensor exchangeable via the air holes of the glass tube, for example.
  • paired electrodes 13 and 15 are formed on either end of the same surface (upper surface) in the longitudinal direction of the sensor element 12
  • paired electrodes may be formed on an upper surface of one end of the sensor element 12 , and on an under surface of the other end of the sensor element 12 .
  • both side surfaces in the axial direction of the oxygen sensor 10 of FIG. 1 extend linearly between the positive electrode and the negative electrode in a planar view
  • the sensor is not limited thereto.
  • any one of shapes in which: either both side surfaces between the positive electrode and the negative electrode change into a curved form, or one side surface changes into a curved form and the other side surface changes linearly, in a planar view, may be used.
  • the hot spot-type sensor element has a high resistance value on the opposite side to the travelling direction of O 2 ⁇ ions, that is, the negative electrode side including a decreased number of O 2 ⁇ ions. Therefore, the oxygen sensor according to the embodiment has the cross-sectional area with a shape that increases uniformly from the positive (+) electrode side toward the negative ( ⁇ ) electrode side, and the hot spot attempting to move to the negative electrode side may thus be led to a lower resistance side.
  • a position that is at nearly equal distances from paired electrodes formed on either end of the sensor element may be a hot spot generating position, and prevention of damage to electrodes from heat emitted from a hot spot as the hot spot approaches the electrode and prevention of generation of cracks in a sensor element etc. caused by thermal stress due to thermal expansion are possible.
  • the negative electrode may be made larger in size than the positive electrode.
  • concentration of O 2 ⁇ ions in the sensor element has changed, causing a hot spot to move to the negative electrode side, more effective heat radiation is facilitated on the negative side of the sensor element. Due to such heat radiation effect, the hot spot generating position may be kept away from the negative electrode side so as to be at a position nearly equal from both electrodes.
  • the oxygen sensor according to the present invention is not limited to the embodiment described above, and various modifications are possible. Modified examples are described below.
  • FIGS. 5A and 5B show examples of manufacturing sensor elements by dicing a green sheet having a belt-like shape.
  • a long green sheet 50 having width W in accordance with a longitudinal dimension (length in the longitudinal direction) of a sensor element is prepared, and the long green sheet 50 is cut along cutting lines in its width direction.
  • the long green sheet 50 is diced along cutting lines 51 a running in the width direction of the long green sheet 50 and cutting lines 51 b running diagonally in the width direction.
  • This allows manufacture of sensor elements 52 a to 52 f having shape of: the cross-sectional area thereof increasing uniformly from the one end toward the other end, and width W 1 on the one end side smaller than width W 2 on the other end side.
  • FIG. 5B illustrates an example of dicing the long green sheet 50 along two cutting lines 53 a and 53 b running diagonally in the width direction of the long green sheet 50 .
  • This allows manufacture of sensor elements 54 a to 54 f having shape of: the cross-sectional area thereof increasing uniformly from the one end toward the other end, and width W 3 on the one end side smaller than width W 4 on the other end side.
  • a sensor element 62 illustrated in FIG. 6A has an overall pyramid shape in which one end bottom surface has a smaller area than the other end bottom surface.
  • lead lines 63 and 65 are attached to respective electrodes (omitted from the drawing) arranged on the one end bottom surface and the other end bottom surface.
  • a sensor element 64 illustrated in FIG. 6B has an overall cone shape in which the one end bottom surface has a smaller area than the other end bottom surface.
  • lead lines 67 and 69 are attached to respective electrodes, which are omitted from the drawing, arranged on the one end bottom surface and the other end bottom surface.
  • FIG. 7A is an example where shape of a sensor element 72 is a T shape in a planar view. With the sensor element 72 , cross-sectional area increases gradually or stepwisely from one side on which a lead wire 73 is attached, toward another side on which a lead wire 75 is attached.
  • FIG. 7B is an example where shape of a sensor element 74 is an L shape in a planar view.
  • cross-sectional area increases gradually or stepwisely from one side on which a lead wire 77 is attached, toward another side on which a lead wire 79 is attached.
  • FIG. 8A illustrates an example punch-out pattern in the case of punching out a plurality of the T-shaped sensor element 72 of FIG. 7A from a single green sheet 70 .
  • FIG. 8B shows an example punch-out pattern in the case of punching out a plurality of the L-shaped sensor element 74 of FIG. 7B from a single green sheet 80 .
  • the number of sensor elements formed in a single green sheet may be maximized.
  • a sensor element 82 of FIG. 9A has a shape in which two rectangular parallelepipeds having differing cross-sectional areas are connected. Moreover, lead wires 83 and 85 are attached to either end surface of the sensor element 82 .
  • a sensor element 84 of FIG. 9B has a shape in which two cylinders having differing cross-sectional areas are connected. Lead wires 87 and 89 are attached to either end surface of the sensor element 84 . Accordingly, the cross-sectional area of the sensor element increases gradually or stepwisely from one end to the other end, even with the sensor element 82 of FIG. 9A and the sensor element 84 of FIG. 9B .

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JP7643685B2 (ja) 2021-06-17 2025-03-11 国立大学法人長岡技術科学大学 酸素センサ素子およびその製造方法

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CN111886494A (zh) 2020-11-03
EP3770592A4 (fr) 2021-12-29
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CN111886494B (zh) 2024-06-04
US12493010B2 (en) 2025-12-09

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