US2256771A - Method of coating articles by cathode disintegration - Google Patents
Method of coating articles by cathode disintegration Download PDFInfo
- Publication number
- US2256771A US2256771A US219293A US21929338A US2256771A US 2256771 A US2256771 A US 2256771A US 219293 A US219293 A US 219293A US 21929338 A US21929338 A US 21929338A US 2256771 A US2256771 A US 2256771A
- Authority
- US
- United States
- Prior art keywords
- articles
- disintegration
- housing
- cathode
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000576 coating method Methods 0.000 title description 17
- 239000011248 coating agent Substances 0.000 title description 15
- 238000000034 method Methods 0.000 title description 11
- 239000000463 material Substances 0.000 description 13
- 239000002245 particle Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000002826 coolant Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000010406 cathode material Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 238000012216 screening Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Definitions
- the present invention relates to a method of coating articles by means of particles disintegrated from a cathode.
- the invention relates to a method of coating articles by cathode disintegration, wherein the impinge either on the articles and the suspen-.
- the cathode material deposited on the suspension devices which are constructed in an easily removable manner and preferably consist of the materialto be disintegrated, can be easily recovered.
- the anode voltage may be applied to the articles to be coated.
- the articles may be so connected as to carry a negative voltage with respect to the anode, and be surrounded by a. glow fringe.
- a second conductor may be introduced in an insulated manner, provided with a replaceable disc-shaped electrode connected as an anode, which may consist of the material to be disintegrated.
- the output on the surface of the articles per square centimeter is smaller than the load on the cathode-to be disintegrated.
- the load itself is to be coated consists. when use is made of alternating current voltage for the disintegration,
- the source of alternating current voltage is connected preferably with the one terminal to the articles to be coated, and with the other ter-v minal to the-cathode to be disintegrated.
- thermoelectric tube generators produced by thermionic tube generators, may
- the article Before the beginning of the disintegration of the cathode material, in the case of direct current, the article is first subjected to a preliminary disintegration, whereby it is attained that the material to be provided thereon will adhere especially firmly.
- the load on the article In the case of alternating current disintegration the load on the article is higher than with respect to that on the cathode to be disintegrated, so that the surface of the articles is again cleaned before the coating thereof. Thereupon the disintegration conditions are so adjusted that materialis deposited on the articles.
- the vessel may be made solid of the cathode material, such as iron, copper, nickel, magnesium, aluminum and the like, but, in the case of expensive materials, such as silver, gold, platinum, rhodium, or of materials which have not suiiicient strength, such as cadmium, tin, zinc, or materials the shape of which cannot be changed, or only with difficulty changed, such as beryllium, chromium, titanium, molybdenum, tantalum, tungsten, the disintegration vessel may be coated with these materials on its inner wall. In the case of disintegration of materials up to a fusing point of about 1100?
- the miterial to be disintegrated may also be fused on the bottom of the vessel by heating with glow current and be disintegrated from the melt;
- the reduced pressures for'the disintegration may be adjusted-to lie between 10 and0.00l and preferably between 1.5 and 0.1 millimeters of mercury.
- Figure 4 is a third diagram of connections. Referring to Figure 1 which illustrates a sec- .13 is arranged in parallel circuit relation with tionthrough cathode disintegration apparatus,
- the whole of the inner surface of the housing I forms a cathode which surrounds the articles to be coated.
- The. housing is closed in a vacuumtight manner by a cover 2 and a seal 3.
- the cover is secured to the vessel
- the articles l3 to be coated are, for instance,
- Rings of insulating and sealing material are indicated at IL! and I9, and a metallic screen- 1 ing sleeve is provided, the hollow flange 2
- the positive voltage is supplied to the screening sleeve through the cable 23.
- the screening sleeve 20 may be provided at its end with an anode 24 which may for instance be disc-shaped.
- the cover of the vessel is provided with a jacket 25 to which the cooling medium is supplied-by.
- the pipe 26 and the cooling medium is discharged through a pipe connection 21.
- FIG. 2 a diagram of con-, snections which is, for instance, used in the in-' stallation according to Fig. 1.
- the source of direct current high voltage 58 is connected with the positive terminal thereof to the anode 24 overia resistance 60 and the negative terminal is connected over the switch 62 to the wall of the cathode disintegration housing I.
- the articles l3 are connected to a sliding contact of a resistance. 65, which is connected in parallel with thesource of direct current voltage.
- the vac- :uum pump is represented at 65 and is connected over the valve 61 with the distintegration chamber, and a hydrogen flask H is connected over the valve 68 withfthe disintegration chamber,
- a transformer 10 is connected to the supply line 69 and one terminal of the secondary of this transformer is The other terminal of the secondary winding of the transformer is connected to thearticles I3 within the housing I through a rectifier 12. 'An adjustable resistor respect to the rectifier. The rectifier prevents the passage of current therethrough during one cycle so that the load of the disintegrating current can be regulated by the shunt resistor I3.
- the method of coating an article which comprises, surrounding the article to be coated with a housing having an inner surface formed of metallic material adapted to provide the coating for the article, sealing the housing, adjust ing the pressure within the housing to support cathode disintegration therein, and electrically disintegrating particles from all -points along the inner surface of said housing onto said article whereby the entire surface of the article is simultaneously coated.
- the method of coating articles which comprises, surrounding the articles to be coated with a housing having an inner surface formed of metallic material adapted to provide the coating for the articles, sealing the housing, adjusting the pressure within the housing to a range be-' tween 10 and 0.001 millimeters of mercury, and electrically disintegrating particles from all portions of the inner surface of said housing onto the articles whereby all surfaces of the articles ure 3 differs from the diagram of connections I according to Fig. 2 in that the articles l3 carry the positive voltage and are connected over the resistance to the positive terminal of the source of voltage 58.
- the arrangement shown in Fig. 4 includesithe are simultaneously coated.
- the method of coating articles which comprises, supporting the articles within a sealed housing having the inner surface completely. covered with a metal adapted to form the coating of the articles, adjusting the pressure within the housing to support cathode disintegration of the tegrating metal particles from all points of the imer surf-ace of the housing whereby some of the particles impinge onto the articles and other particles engage the inner surface of the housing for further disintegration.
- the method of coating an article which comprises, supporting the article within a sealed housing having the inner surface formed of a metallic material for the coating and which completely surrounds the article, adjusting the pressure within the housing to support cathode dis integration of the inner surface of the housing, impressing a direct currentvoltage across the housing and an electrode within the housing with the housing connected negatively-with respect to said electrode to disintegrate particles from all 'points of the inner surface of the housing onto the article, andimpressing a voltage across said with respect to said electrode.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEB179593D DE722131C (de) | 1937-08-15 | 1937-08-15 | Anordnung und Verfahren zum Metallisieren von Gegenstaenden mittels Kathodenzerstaeubung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US2256771A true US2256771A (en) | 1941-09-23 |
Family
ID=7008665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US219293A Expired - Lifetime US2256771A (en) | 1937-08-15 | 1938-07-14 | Method of coating articles by cathode disintegration |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US2256771A (de) |
| CH (1) | CH204862A (de) |
| DE (1) | DE722131C (de) |
| ES (1) | ES144125A1 (de) |
| FR (1) | FR841903A (de) |
| GB (1) | GB501500A (de) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2416949A (en) * | 1942-06-10 | 1947-03-04 | Leeds & Northrup Co | Cell for ph measurements |
| US2451877A (en) * | 1945-10-06 | 1948-10-19 | Reeves Hoffman Corp | Method of manufacturing oscillator plates |
| US2456795A (en) * | 1945-10-06 | 1948-12-21 | Reeves Hoffman Corp | Cathode sputtering apparatus for coating oscillator plates |
| US2553289A (en) * | 1947-03-12 | 1951-05-15 | Bausch & Lomb | Method for depositing thin films |
| US2955998A (en) * | 1953-02-17 | 1960-10-11 | Berghaus Bernhard | Process for carrying out technical operations in a glow discharge |
| US3354074A (en) * | 1963-09-16 | 1967-11-21 | Ibm | Cylindrical cathode sputtering apparatus including means for establishing a quadrupole magnetic field transverse of the discharge |
| US4000335A (en) * | 1974-09-20 | 1976-12-28 | The United States Of America As Represented By The Secretary Of The Army | Method of making photocathodes |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE752049C (de) * | 1942-04-09 | 1954-03-08 | Bosch Gmbh Robert | Verfahren zur Erzeugung von bemusterten Metallisierungen durch Bedampfung im Vakuum |
| CH310968A (de) * | 1953-02-17 | 1955-11-15 | Berghaus Elektrophysik Anst | Verfahren zur thermischen, metallurgischen oder chemischen Behandlung von metallischen Gegenständen mittels elektrischer Glimmentladungen |
| CH404010A (de) * | 1961-03-30 | 1965-12-15 | Berghaus Elektrophysik Anst | Verfahren und Vorrichtung zur Durchführung technischer Prozesse unter Einwirkung einer elektrischen Glimmentladung |
| CH659484A5 (de) * | 1984-04-19 | 1987-01-30 | Balzers Hochvakuum | Anordnung zur beschichtung von substraten mittels kathodenzerstaeubung. |
-
1937
- 1937-08-15 DE DEB179593D patent/DE722131C/de not_active Expired
-
1938
- 1938-07-05 ES ES0144125A patent/ES144125A1/es not_active Expired
- 1938-07-11 CH CH204862D patent/CH204862A/de unknown
- 1938-07-14 US US219293A patent/US2256771A/en not_active Expired - Lifetime
- 1938-07-25 GB GB22004/38A patent/GB501500A/en not_active Expired
- 1938-08-08 FR FR841903D patent/FR841903A/fr not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2416949A (en) * | 1942-06-10 | 1947-03-04 | Leeds & Northrup Co | Cell for ph measurements |
| US2451877A (en) * | 1945-10-06 | 1948-10-19 | Reeves Hoffman Corp | Method of manufacturing oscillator plates |
| US2456795A (en) * | 1945-10-06 | 1948-12-21 | Reeves Hoffman Corp | Cathode sputtering apparatus for coating oscillator plates |
| US2553289A (en) * | 1947-03-12 | 1951-05-15 | Bausch & Lomb | Method for depositing thin films |
| US2955998A (en) * | 1953-02-17 | 1960-10-11 | Berghaus Bernhard | Process for carrying out technical operations in a glow discharge |
| US3354074A (en) * | 1963-09-16 | 1967-11-21 | Ibm | Cylindrical cathode sputtering apparatus including means for establishing a quadrupole magnetic field transverse of the discharge |
| US4000335A (en) * | 1974-09-20 | 1976-12-28 | The United States Of America As Represented By The Secretary Of The Army | Method of making photocathodes |
Also Published As
| Publication number | Publication date |
|---|---|
| GB501500A (en) | 1939-02-28 |
| ES144125A1 (es) | 1938-09-16 |
| DE722131C (de) | 1942-07-01 |
| CH204862A (de) | 1939-05-31 |
| FR841903A (fr) | 1939-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US2227176A (en) | Method of sintering hard substances in vacuum | |
| US4169031A (en) | Magnetron sputter cathode assembly | |
| US3461054A (en) | Cathodic sputtering from a cathodically biased target electrode having an rf potential superimposed on the cathodic bias | |
| US3767551A (en) | Radio frequency sputter apparatus and method | |
| US2305758A (en) | Coating of articles by cathode disintegration | |
| US2955998A (en) | Process for carrying out technical operations in a glow discharge | |
| US2219615A (en) | Electrical discharge apparatus | |
| US2804885A (en) | Product of arc welding | |
| US2257411A (en) | Method of cathode disintegration | |
| GB501500A (en) | Improvements in and relating to the coating of articles by cathode disintegration | |
| US2433813A (en) | Electric discharge tube | |
| US2467953A (en) | Use of glow discharge in vacuum coating processes | |
| US2534643A (en) | Method for brazing beryllium | |
| US2015482A (en) | Method of effecting metal-refractory joint and joints resulting therefrom | |
| US2371278A (en) | Electric reaction furnace | |
| US1418022A (en) | Discharge-tube relay for undulatory currents | |
| US2819961A (en) | Process for connecting a tantalum electrode pin to an electrode body | |
| US3693241A (en) | Manufacture of foil seals | |
| US1760525A (en) | Rectifier | |
| US2459827A (en) | Electric valve with vitreous enamel seals | |
| US2203452A (en) | Electronic discharge tube | |
| US2443677A (en) | Igniter | |
| US3210263A (en) | Electric discharge apparatus for etching | |
| US3049639A (en) | High power switch tube | |
| US3045093A (en) | Method for constructing arc discharge devices |