US3399875A - Heat treating furnace - Google Patents

Heat treating furnace Download PDF

Info

Publication number
US3399875A
US3399875A US554236A US55423666A US3399875A US 3399875 A US3399875 A US 3399875A US 554236 A US554236 A US 554236A US 55423666 A US55423666 A US 55423666A US 3399875 A US3399875 A US 3399875A
Authority
US
United States
Prior art keywords
door
opening
chamber
wall
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US554236A
Other languages
English (en)
Inventor
Illinois National Bank And The
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Abar Ipsen Industries Inc
Original Assignee
Ikon Office Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ikon Office Solutions Inc filed Critical Ikon Office Solutions Inc
Priority to US554236A priority Critical patent/US3399875A/en
Priority to DE1533954A priority patent/DE1533954B2/de
Priority to CH553567A priority patent/CH447486A/fr
Priority to GB18271/67A priority patent/GB1128769A/en
Application granted granted Critical
Publication of US3399875A publication Critical patent/US3399875A/en
Assigned to ABAR IPSEN INDUSTRIES reassignment ABAR IPSEN INDUSTRIES ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: ALCO STANDARD CORPORATION
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/18—Door frames; Doors, lids or removable covers
    • F27D1/1858—Doors

Definitions

  • HEAT TREATING FURNACE Filed April 21, 1966 Sheets-Sheet 2 lsz TTORBY/ Patented Sept. 3, 1968
  • a passage for admitting workpieces into a chamber of a vacuum heat treating furnace is closed by two doors, one a relatively light weight vacuum sealing door movable upwardly and downwardly to open and close the passage and also movable broadwise into tight engagement with the walls of the furnace around the passage in order to establish a gas-tight seal for the chamber.
  • the other door is simply movable upwardly and downwardly across the passage between the vacuum door and the heating chamber and is made of relatively heavy heat insulating material to shield and insulate the vacuum door from the heat in the chamber.
  • This invention relates to heat treating apparatus or a furnace of the type in which workpieces are moved into a heat chamber and heated, usually in a vacuum or nonoXidizing atmosphere and more particularly, the invention relates to a door structure for such a heat treating apparatus.
  • the primary object of this invention is to provide a door which controls the entryway of the heating chamber, which is readily movable and which effectively seals the entryway against heat and gas passage therethrough.
  • Another object is to provide a door which is especially suited to meet the sealing requirements of vacuum heat treating and which is operated easily by simple, reciprocating actuators.
  • FIGURE 1 is a cross-sectional view of a heat treating furnace embodying the invention.
  • FIG. 2 is a fragmentary perspective view of the entryway to the heat chamber of the furnace showing the doors in the closed position.
  • FIG. 3 is a fragmentary plan view of one edge of the door and entryway.
  • FIG. 4 is a side view of the vacuum door in the partially closed position.
  • the work to be treated is heated in a heat chamber 11 defined by an inner casing or internal baille 12 which is made of refractory material and which is disposed within a separate outer metal casing 14.
  • the work is moved through an opening 15 in the baille and an alined opening 16 in the furnace housing 17, the two openings together constituting the entryway into the furnace chamber.
  • Conventional heating elements 18 within the chamber 11 heat the work 10, usually carried in a tray, to the desired temperature while the tray is resting on a support 19.
  • the work is loaded into the heating chamber 11 through a cooling chamber 20 which is deiined by walls 21 having an opening 22 therethrough controlled by a door 24.
  • This cooling chamber communicates with the entryway through the openings 15 and 16 whichA are alinedwith the opening 22.
  • the work rests on rollers 25 journaled on a support 26 in the cooling chamber from which it can be moved easily into the heat chamber on additional rollers 27 rotatably mounted on the support 19.
  • the furnace chamber 14 is pressure sealed to allow heating of the workpieces in a substantial vacuum and, for this purpose, the chamber may be evacuated by a mechanical pump 29 connected in series with an oil diffusion pump 30.
  • the pump 29 communicates with the furnace chamber through a port 31 and discharges through a conduit 32 connected to the diffusion pu-mp 30.
  • the conduit 32 includes a illter 34 for removing any foreign matter that the air might carry from the furnace chamber.
  • a fan 35 is disposed within the chamber 11 and is driven by a motor 36 mounted on the outside of the furnace to circulate the atmosphere within the heating chamber.
  • the workpieces After the workpieces are heated suiliciently, they are transferred back into the cooling chamber 20 for quenching.
  • the atmosphere in this chamber is circulated by va fan 41 driven by a motor 42 for cooling the workpieces.
  • the workpieces then are removed from the cooling chamber through the opening 22 after opening the door 24 by energization of an actuator 44.
  • the entryway into the furnace is closed -by separate doors which control the openings 15 and 16 in the heat chamber baille 12 and the furnace wall 17, respectively, with the inner heat chamber door being adapted to limit the heat loss from the heat chamber and the outer door closing the opening in the furnace wall being a vacuum type for pressure sealing the furnace chamber.
  • a heat insulating door 45 is provided for closing the opening 15 leading to the heat chamber and, a separate vacuum door 46 is supported for independent movement into engagement with the furnace wall 17 for sealing the opening 16 leading into the furnace chamber.
  • the door 45 is comparatively heavy and operates with a simple vertical motion so that it acts principally as a heat shield.
  • the door 46 is given a compound Imovement so that it not only moves vertically but also laterally to effect a good seal around the opening 16. Since the door 46 is shielded from the heat of the chamber 11 by the door 45, it may be quite light in weight and thus may be given this compound motion by a simple reciprocating actuator.
  • the heat insulating door 45 is made of a material capable of withstanding the temperatures to which the heat chamber is heated and is mounted for vertical movement within vertical channels 47.
  • the latter are disposed on each side of the opening 15 and are formed by a flange 48 fixed to the baille 12 and extending around the opening and by a guide 49 fixed to the furnace housing 17.
  • a suitable reciprocating actuator 50 mounted on a bracket 51 at the top of the furnace is connected to the door by a rod 52. Energizaton of this actuator effects vertical movement of the door between the raised or open position and the down or closed position.
  • the insulating door In the closed position, the insulating door is disposed in heat barrier relation with both the wall opening 16 and the chamber opening 15, the terms heat barrier relation as used herein and in the appended claims meaning that the insulating door moves across the openings and acts as a heat shield Without pressure sealing either of the openings with a gas-tight seal.
  • the vacuum door 46 also is mounted for vertical movement relative to the opening 16 in the furnace housing 17 and, for this purpose, an actuator 54 mounted on a bracket 55 above the furnace is connected to the door by a rigid connecting rod 56 for moving the door into a closed position abutting the wall 17a and overlying the opening 16 therein.
  • this actuator 54 be energized simultaneously with energization of the actuator 50 for the heat insulating door, for movement of the doors in unison.
  • a gasket 57 carried by the vacuum door and encircling the opening 16 seals against the passage of gas around the door.
  • cooling' coils 58 preferably are fixed to the interior of the wall 17a of the furnace chamber and encircle the opening 16 to maintain the wall in the proximity of the gasket cool. In addition to the gasket being shielded against high temperatures, it also is protected against wear and being deformed as the door is moved to the closed position across the opening 16 and into contact with the furnace wall 17a.
  • the invention is further characterized by the manner in which the vacuum door 46 is supported and actuated across and toward the opening 16 between the open and closed positions. More particularly, the door first is moved away from the opening 16 and then up to uncover the opening. To close the latter, the door is .moved down in spaced relation to the wall 17a which defines the opening 16 and then is moved broadwise against this wall. All of these motions are effected by a conventional reciprocating actuator 54.
  • the vacnum door is supported by a frame 59 to which a rod 56 leading from the actuator 54 is fixed.
  • the frame moves vertically and carries the door down until it is alined with the opening 16, Continued downward movement of the frame shifts the door horizontally to seat the gasket 57 on the door against the wall 17a of the furnace.
  • the frame is guided for vertical movement by channels 60 fixed to the cooling chamber walls at each side of the opening 16. Riding in these channels are a pair of rollers 61 journaled on pins 62 fixed to the side of the frame.
  • a parallelogram linkage 64 couples the frame to the door 4for moving the door horizontally las the frame is moved vertically to seat the gasket 57 properly.
  • This parallelogram linkage comprises a pair of links 65 and 66 on each side of the door and each pivotally attached at opposite ends to the frame and door edges.
  • the links are fixed at one end to the frame by being sandwiched between the rollers 61 and the frame edge on the pins 62 mounting the rollers. 'Ihe other ends of these links are pivotally attached by pins 67 to a door member 68 fixed to the outside of the vacuum door.
  • a roller 69 is mounted on the lower pin 67 on each side of the door and contacts a flange 70 to the side of the door during the final downward movement of the frame.
  • the actuator 54 is energized to move the rod 56 and connected frame 59 upward with the rollers riding alongside the channels 60.
  • the weight of the vacuum door is supported by the rollers 69 resting on the flanges 70.
  • the door weight is transferred to the links 65 and 66 and the links pivot counterclockwise about the pins 67 and pull the door away from the furnace wall 17a until the outer surface 68a of the door member 68 contacts the inner surface 59a of the frame. Thereafter the door and frame move upward together with the door being spaced from the furnace wall.
  • rollers 69 When the door and frame are lowered to close the door, the rollers 69 contact the flange 70 when the door is alined with the opening 16, and with further lowering of the frame, these rollers 69 roll inward toward the furnace wall 17a as the links 65 and 66 are pivoted clockwise about the pins 67.
  • the actuator 54 acting through the rigid rod 56 causes the rollers 61 to be pressed tightly against the channels 60 to each side of the door thereby forcing the door toward the wall 17a to squeeze or load the gasket against the latter for pressure sealing the opening.
  • the entryway thus is effectively heat insulated and pressure sealed by the door structures described which are easily moved by energization of simple reciprocating actuators 50 and 54. It should be obvious that one actuator could be substituted for the two shown, if desired, with the only change in operation being that the heat insulating and vacuum doors would always be moved simultaneously while, with the use of two actuators, they can be moved individually if desired.
  • a heat treating furnace having in combination, a gas-tight walled structure enclosing a heating chamber, said structure including a wall with an opening through which workpieces can be moved into said chamber, heating means for raising the temperature of said workpieces within said chamber, and means for closing said opening comprising a heat insulating door and a vacuum door disposed on opposite sides of the opening and the wall with the heat insulating door being located alongside the chamber side of said wall and with the vacuum door being located alongside the opposite side of the wall, means for mounting said vacuum door for movement to a position extending across the opening and into engagement with said wall for sealing against gas flow through the opening, and means for mounting said heat insulating door for movement into heat barrier relation with both said opening and said heating chamber and into a position across said opening between the heating chamber and the vacuum door thereby to shield the latter from the heat of the chamber.
  • heating chamber is defined by a separate casing disposed within said structure and having an opening therein alined with said opening in said wall and wherein the heat insulating door is moved into heat barrier relation across said casing opening.
  • said means Ifor mounting said vacuum door includes mechanism for moving the door across and in alinement with said opening and then toward said opening into engagement with said wall to close said opening.
  • a gas-tight walled structure enclosing a heating chamber, said structure including a wall with an opening through which workpieces can be moved into said chamber, said heating chamber being defined by a separate casing disposed within and surrounded by said structure and having an opening therein alined with the opening in said wall, heating means for raising the temperature of said workpieces within said chamber, means for closing said openings comprising a heat insulating door and a vacuum door disposed on opposite sides of said wall with the heat insulating door being located within said gas-tight structure alongside the chamber side of said wall and with the vacuum door being located alongside the opposite side of said wall, means for mounting said vacuum door for movement rst to a position extending across said wall opening and then toward said wall into gas-tight sealing engagement with the Wall for sealing against gas flow through the wall opening, and means for mounting said heat insulating door for movement into heat barrier relation across each of said openings and into a position between said heating chamber and said vacuum door thereby
  • said means for mounting said vacuum door includes a frame mounted for movement across said wall opening, a parallelogram linkage connecting said door and frame for movement of said door bodily with said frame and also toward and away from said frame while being held parallel thereto, and an abutment stopping movement of said door across said wall opening when it alines with the Alatter on being moved to the closed position whereby upon further movement of said frame said door is moved toward said wall by said parallelogram mechanism.
  • a door for use with a wall structure defining an opening therethrough, the combination of, a door, a frame, a plurality of parallel extending links pivotally attached at one end to said frame and at the other end to said -door for supporting the door for movement toward and away from said frame and in parallel relationship thereto, guide means supporting said frame for movement along said wall structure to move said door from a first position to one side of said opening to a second position alined with said opening, means biasing said door toward said frame, and an abutment contacting said door and stopping movement thereof across said opening when the door alines with the opening whereby said door will be shifted toward and into engagement with said wall structure on further movement of said frame toward said second position.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Furnace Details (AREA)
  • Tunnel Furnaces (AREA)
US554236A 1966-04-21 1966-04-21 Heat treating furnace Expired - Lifetime US3399875A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US554236A US3399875A (en) 1966-04-21 1966-04-21 Heat treating furnace
DE1533954A DE1533954B2 (de) 1966-04-21 1967-04-18 Doppeltür für einen Vakuumofen
CH553567A CH447486A (fr) 1966-04-21 1967-04-19 Four de traitement thermique
GB18271/67A GB1128769A (en) 1966-04-21 1967-04-20 Heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US554236A US3399875A (en) 1966-04-21 1966-04-21 Heat treating furnace

Publications (1)

Publication Number Publication Date
US3399875A true US3399875A (en) 1968-09-03

Family

ID=24212566

Family Applications (1)

Application Number Title Priority Date Filing Date
US554236A Expired - Lifetime US3399875A (en) 1966-04-21 1966-04-21 Heat treating furnace

Country Status (4)

Country Link
US (1) US3399875A (fr)
CH (1) CH447486A (fr)
DE (1) DE1533954B2 (fr)
GB (1) GB1128769A (fr)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3558112A (en) * 1969-07-07 1971-01-26 Alco Standard Corp Door unit for heat treating apparatus
US4086050A (en) * 1975-01-15 1978-04-25 Ipsen Industries International Method and apparatus for gas circulation in a heat treating furnace
US4257173A (en) * 1979-08-27 1981-03-24 Smith Derrick A No-heat clothes dryer
US4403448A (en) * 1981-12-18 1983-09-13 Alco Standard Corporation Apparatus for closing and sealing a doorway
US5052923A (en) * 1989-10-12 1991-10-01 Ipsen Industries International Gesellschaft Mit Beschrankter Haftung Oven for partial heat treatment of tools
US5567381A (en) * 1995-03-20 1996-10-22 Abar Ipsen Industries, Inc. Hybrid heat treating furnace
FR2782156A1 (fr) * 1998-08-05 2000-02-11 Fours Ind B M I Baudasse Marti Dispositif de convoyage d'une charge entre plusieurs enceintes sous vide et unite de traitement sous vide equipee d'un tel dispositif
EP1555330A3 (fr) * 2001-01-26 2006-04-12 Ipsen International GmbH Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces
US20080023892A1 (en) * 2003-11-14 2008-01-31 Ipsen International Gmbh Device and Method for Heat Treating, in Particular, Metallic Workpieces
DE102008026272A1 (de) * 2008-06-02 2009-12-03 Schwartz, Eva Ofenschieber; Ofenanlage mit Ofenschieber
US20110008743A1 (en) * 2008-02-28 2011-01-13 Eisenmann Anlagenbau Gmbh & Co. Kg Gate Unit and High Temperature Oven Having the Same
CN103322813A (zh) * 2013-06-26 2013-09-25 四川长虹电器股份有限公司 高温加热炉的炉门密封结构
US20150168070A1 (en) * 2013-12-17 2015-06-18 Honda Motor Co., Ltd. Automatic charge hearth access door assembly
CN112460981A (zh) * 2020-10-16 2021-03-09 泰州市金驰电力设备有限公司 一种有效防导热烘箱炉门及其密封隔热方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7639482U1 (de) * 1976-12-17 1977-03-24 Ipsen Industries International Gmbh, 4190 Kleve Schutzgas-anlassofen mit vakuumspuelung
FR2644567A1 (fr) * 1989-03-17 1990-09-21 Etudes Const Mecaniques Dispositif pour l'execution de traitements thermiques enchaines en continu sous vide
CN103629921B (zh) * 2013-11-05 2015-08-19 江苏丰泰仪器有限公司 一种马弗炉的炉门
DE102023102850A1 (de) * 2023-02-06 2024-08-08 Iva Schmetz Gmbh Vakuumofen zur Wärmebehandlung von metallischen Werkstücken

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US871421A (en) * 1906-11-10 1907-11-19 Koppers Gmbh Heinrich Coke-oven door.
US890175A (en) * 1907-07-09 1908-06-09 Hans Ries Door for furnaces and the like.
US1455290A (en) * 1922-03-10 1923-05-15 Hieb Jacob Electric bake oven
US1795324A (en) * 1925-06-16 1931-03-10 Arnold Beckers Coke oven
US2373891A (en) * 1943-09-06 1945-04-17 Guardite Corp Closure system for vacuum driers
US2398874A (en) * 1940-02-14 1946-04-23 Edmund A Steinbock Electric furnace
US2804855A (en) * 1952-02-23 1957-09-03 Surface Combustion Corp Furnace door construction
US3234661A (en) * 1961-01-19 1966-02-15 Leybold Anlagen Holding A G Controlled multipressure drying apparatus
US3301541A (en) * 1964-06-12 1967-01-31 The Illinois National Bank Co Heat treating furnace with circulated gas quench

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US871421A (en) * 1906-11-10 1907-11-19 Koppers Gmbh Heinrich Coke-oven door.
US890175A (en) * 1907-07-09 1908-06-09 Hans Ries Door for furnaces and the like.
US1455290A (en) * 1922-03-10 1923-05-15 Hieb Jacob Electric bake oven
US1795324A (en) * 1925-06-16 1931-03-10 Arnold Beckers Coke oven
US2398874A (en) * 1940-02-14 1946-04-23 Edmund A Steinbock Electric furnace
US2373891A (en) * 1943-09-06 1945-04-17 Guardite Corp Closure system for vacuum driers
US2804855A (en) * 1952-02-23 1957-09-03 Surface Combustion Corp Furnace door construction
US3234661A (en) * 1961-01-19 1966-02-15 Leybold Anlagen Holding A G Controlled multipressure drying apparatus
US3301541A (en) * 1964-06-12 1967-01-31 The Illinois National Bank Co Heat treating furnace with circulated gas quench

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3558112A (en) * 1969-07-07 1971-01-26 Alco Standard Corp Door unit for heat treating apparatus
US4086050A (en) * 1975-01-15 1978-04-25 Ipsen Industries International Method and apparatus for gas circulation in a heat treating furnace
US4257173A (en) * 1979-08-27 1981-03-24 Smith Derrick A No-heat clothes dryer
US4403448A (en) * 1981-12-18 1983-09-13 Alco Standard Corporation Apparatus for closing and sealing a doorway
US5052923A (en) * 1989-10-12 1991-10-01 Ipsen Industries International Gesellschaft Mit Beschrankter Haftung Oven for partial heat treatment of tools
US5567381A (en) * 1995-03-20 1996-10-22 Abar Ipsen Industries, Inc. Hybrid heat treating furnace
FR2782156A1 (fr) * 1998-08-05 2000-02-11 Fours Ind B M I Baudasse Marti Dispositif de convoyage d'une charge entre plusieurs enceintes sous vide et unite de traitement sous vide equipee d'un tel dispositif
EP1555330A3 (fr) * 2001-01-26 2006-04-12 Ipsen International GmbH Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces
US20080023892A1 (en) * 2003-11-14 2008-01-31 Ipsen International Gmbh Device and Method for Heat Treating, in Particular, Metallic Workpieces
US20110008743A1 (en) * 2008-02-28 2011-01-13 Eisenmann Anlagenbau Gmbh & Co. Kg Gate Unit and High Temperature Oven Having the Same
US9605903B2 (en) * 2008-02-28 2017-03-28 Eisenmann Ag Gate unit and high temperature oven having the same
DE102008026272A1 (de) * 2008-06-02 2009-12-03 Schwartz, Eva Ofenschieber; Ofenanlage mit Ofenschieber
CN103322813A (zh) * 2013-06-26 2013-09-25 四川长虹电器股份有限公司 高温加热炉的炉门密封结构
US20150168070A1 (en) * 2013-12-17 2015-06-18 Honda Motor Co., Ltd. Automatic charge hearth access door assembly
US9234703B2 (en) * 2013-12-17 2016-01-12 Honda Motor Co., Ltd. Automatic charge hearth access door assembly
CN112460981A (zh) * 2020-10-16 2021-03-09 泰州市金驰电力设备有限公司 一种有效防导热烘箱炉门及其密封隔热方法

Also Published As

Publication number Publication date
DE1533954B2 (de) 1975-03-13
GB1128769A (en) 1968-10-02
DE1533954A1 (de) 1970-02-12
CH447486A (fr) 1967-11-30

Similar Documents

Publication Publication Date Title
US3399875A (en) Heat treating furnace
JP4645592B2 (ja) ２室型熱処理炉
US3020032A (en) Vacuum furnace
CN100483058C (zh) 真空热处理炉的冷却气体风路切换装置
US3684263A (en) Vacuum oil quench furnace
US1811522A (en) Furnace
JP3908468B2 (ja) 高能率冷却式熱処理装置
US3410547A (en) Door assembly for heat treating furnaces
US3219331A (en) Heat treating furnace
US2804855A (en) Furnace door construction
JP6184718B2 (ja) 熱処理炉
JPH0633944B2 (ja) ロ−ラハ−ス式真空炉
US3260783A (en) Vacuum oven
US3522357A (en) Vacuum furnace having a liquid quench and a vertically movable work holder
US3558112A (en) Door unit for heat treating apparatus
US3830479A (en) Heat treatment furnace
JPH05247635A (ja) スパッタリング装置
US3160404A (en) Vacuum oven muffle seal
US3266644A (en) Conditioning apparatus with tiltable receiving platform
US2231716A (en) Closure for openings in heattreatment furnaces
KR20170085745A (ko) 진공 게이트 밸브
US3431346A (en) Electric furnace with continuously sealed heating chamber
US2023101A (en) Furnace
JP2533459Y2 (ja) 基板表面処理室の基板搬入口／搬出口遮断装置
US2742273A (en) Roll seal

Legal Events

Date Code Title Description
AS Assignment

Owner name: ABAR IPSEN INDUSTRIES, 905 PENNSYLVANIA BLVD., FEA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:ALCO STANDARD CORPORATION;REEL/FRAME:004377/0588

Effective date: 19850312