US5886352A - Readhead for an opto-electronic rotary encoder - Google Patents

Readhead for an opto-electronic rotary encoder Download PDF

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US5886352A
US5886352A US08/836,150 US83615097A US5886352A US 5886352 A US5886352 A US 5886352A US 83615097 A US83615097 A US 83615097A US 5886352 A US5886352 A US 5886352A
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scale
pattern
resultant
readhead
fringes
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David A Wright
Geoff McFarland
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Renishaw PLC
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Renishaw PLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Definitions

  • the present invention relates to an opto-electronic rotary encoder which may be employed, for example, to measure angular displacement of one rotatable body relative to another.
  • Such rotary encoders are known per se, and typically include a code wheel, mounted to a first one of the relatively rotatable bodies, having a plurality of radially extending, circumferentially spaced lines, situated at equi-angular intervals about the periphery of the code wheel, thereby to form a scale.
  • An optical readhead mounted to the other of the relatively rotatable bodies, and in register with the scale, projects light onto the scale which, depending upon the configuration of code wheel, is then either reflected or transmitted. From the reflected or transmitted light, the readhead generates a series of signals which may be used to generate an incremental count indicative of the relative angular displacement of the first and second relatively rotatable bodies.
  • a first aspect of the present invention provides opto-electronic encoder apparatus for measuring relative movement having a scale defined by a series of spaced apart lines, and a readhead lying in register with the scale, the scale and readhead being relatively movable in the direction of spacing of the lines; the readhead comprising:
  • a detector upon which said resultant fringe pattern is incident, for generating a plurality of phase shifted cyclically modulating signals upon said relative movement;
  • one of the periodic light pattern and resultant fringe pattern is a linear pattern, and the other is an angular pattern.
  • An independent aspect of the present invention provides opto-electronic rotary encoder apparatus for measuring relative angular displacement having a scale defined by a series of spaced apart lines, and a readhead lying in register with the scale, the scale and readhead being relatively movable in the direction of spacing of the lines; the readhead comprising:
  • a detector upon which said resultant fringe pattern is incident for generating a plurality of phase shifted cyclically modulating signals upon said relative movement, comprising:
  • FIG. 1 is a schematic elevation of a rotary encoder in accordance with the present invention
  • FIG. 2 is a side view on II--II in FIG. 1;
  • FIGS. 3a-c are signal diagrams illustrating the generation of resultant fringes
  • FIG. 4 is a vector diagram
  • FIG. 5 is an elevation of the detector array in the readhead of FIG. 2;
  • FIGS. 6a-c illustrate the effect of code wheel eccentricity
  • FIG. 7 is a graph showing phase error due to eccentricity
  • FIG. 8 illustrates the interference fringe pattern generated in the readhead of FIG. 2
  • FIG. 9 is an elevation of a part of a modified analyser grating.
  • FIG. 10 is an elevation of a detector array used with the analyser of FIG. 9.
  • an angular encoder for measuring relative angular displacement of two members includes a circular code wheel 10, mounted to one of the members in a manner permitting rotation about a central bearing 12, and a pair of opto-electronic readheads 14, mounted to the other of the members.
  • the code wheel 10 has, at its periphery, a rotary scale 20, made up of a series of alternately light-reflecting and non-reflecting lines 22; the lines 22 extend radially and are circumferentially spaced from each other.
  • the lines may be provided by a phase grating (known per se) type structure, etched into the surface of the code wheel 10 to generate a scale.
  • the readheads 14 each include a diffuse light source 30, which generates a collimated beam that illuminates the scale 20 via an index grating 32.
  • the index grating 32 comprises alternate light transmitting and opaque lines (not shown), whose angular pitch and circumferential spacing are identical to the portion of the lines 22 of the scale 20 with which the window defined by the index grating 32 is in register. After passing through index grating 32, light is reflected from the scale 20 and, by virtue of its interaction with both index grating 32 and scale 20, a periodic light pattern in the form of interference fringes is formed in an analyser plane AP.
  • the angular of both the lines on the index grating 32 and the scale 20, together with the stand-off distance between grating 32, and scale 20 are chosen so that a corresponding optical mechanism to the linear encoding mechanism shown in GB 1504691, applies.
  • the interference fringes formed in the analyser plane AP will have the same angular pitch as the lines of the index grating 32 and scale 20 (N.B. in an alternative optical mechanism shadow fringes may be formed).
  • Rotation of the code wheel 10 relative to the readhead 14 will cause rotation of the interference fringes Generated in the analyser plane AP, and a corresponding cyclically varying modulation of the intensity of light incident upon any given point in the said plane. Observation of two or more phases of this light intensity modulation will enable the determination of both the direction and magnitude of angular displacement of the wheel 10. However, direct observation of this light intensity modulation is only possible with a photo voltaic transducer whose dimensions are less than or equal to one half of the width of an interference fringe. In the present example, the linear spacing between adjacent lines of the scale 22 at their outer radius is equal to 2 microns, and this is therefore also the maximum linear spacing between adjacent fringes of the corresponding interference fringe pattern generated in analyser plane AP.
  • an analyser grating 40 is provided in the analyser plane AP.
  • FIG. 3a the light intensity distribution of the interference fringes 50 with angle is illustrated in FIG. 3a. It can be seen that the intensity distribution is substantially sinusoidal, and that the angular pitch of the fringes is constant.
  • the configuration of the analyser grating 40 is illustrated in juxtaposition with the fringes 50 in FIG. 3b. It can be seen from FIGS.
  • the generation of the resultant fringe 60 may be explained in that at the central portion of the illustrated part of the analyser grating 40 the high intensity peaks of the interference fringe pattern lie in register with non-transmissive lines of the grating 40, and so comparatively little of the incident light from the interference fringes 50 is transmitted by the analyser grating 40. Toward the periphery, the high intensity peaks lie increasingly in register with light transmissive lines of the grating 40, as a result of which, more light is transmitted by the analyser grating 40.
  • the generation of a resultant fringe 60 of this type may be likened to the generation of a beat frequency, or to a Vernier scale. For this reason, resultant fringe 60 may be referred to as a resultant Vernier fringe.
  • Movement of the resultant Vernier fringes is detected by a structured array 100 of the type shown in FIG. 5, comprising a semiconductor substrate 102, upon which a series of photosensitive elements are formed.
  • the elements 110 extend radially with respect to the code wheel, and are grouped into three sets 110A,110B,110C, with all elements of a given set being electrically connected in common.
  • the elements 110 are interleaved in a repeating pattern 110A-110B-110C, and are angularly spaced such that consecutive like elements are separated by an angle 1/V f equal to the pitch of a resultant Vernier fringe.
  • each set of elements 110 will generate a sinusoidally varying electrical output; the outputs of the three sets of elements 110A,110B,110C, having a phase relationship of 0°, 120°, and 240° respectively may then be combined in a known manner, to produce a pair of sinusoidally varying quadrature outputs, yielding the magnitude and direction of rotation of the code wheel.
  • a vector I f represents the number of fringes per unit angular displacement of the incident interference fringe pattern
  • the vector A g indicates the number of lines per unit angular displacement of the analyser grating
  • the vector V f denotes the number of resultant Vernier fringes per unit angular displacement which will be generated as a result of interaction between the incident interference fringes and the lines of the analyser grating. The sum of these three vectors must be equal to zero.
  • the pitch of the interference fringes, the pitch of the lines on the analyser grating and the pitch of the resultant Vernier fringes are 1/I f , I/A g , I/V f respectively, and are angles.
  • a further way to describe pitch in an angular encoder is in terms of circumferential spacing between adjacent lines or fringes, and this is given by the expression ##EQU1## where R is the radius (measured from the point from which the lines or fringes extend radially) at which the lines or fringes are being viewed; and
  • N is the number of lines or fringes per revolution.
  • the circumferential spacing is a significant parameter because although the apparatus described thus far has a code wheel 10 whose scale 20 is mounted with perfect concentricity, in practice it is likely that the mounting of the code wheel 10 will be eccentric.
  • the effect of such an eccentric mounting is a change in the circumferential spacing of the scale lines with rotation of the code wheel, when viewed from the readhead.
  • FIG. 6a the position of the optical center O of the code wheel 10 (i.e. the point from which all the scale lines extend radially) is illustrated relative to the mechanical center M about which the code wheel 10 rotates.
  • the eccentricity of the scale 20 is equal to the distance between the two points and is designated as e. Referring to FIGS.
  • the readhead 14 is mounted relative to the code wheel 10 so that at a first angular displacement of the code wheel 10 the circumferential spacing of the part of the scale with which the readhead is in register is ##EQU2## where r is the mean scale radius.
  • This change in the circumferential spacing of the scale 20 will cause a corresponding change in the circumferential spacing of the interference fringes incident upon the analyser grating, and consequently, a change in the circumferential spacing of the resultant Vernier fringes incident upon the photosensitive array 100. Because the circumferential spacing between consecutive like elements 110 of the array 100 is chosen to match the circumferential spacing of the resultant Vernier fringes, a change in the circumferential spacing of the resultant Vernier fringes from that selected for the elements 110 of the array 100 will give rise to a phase error in the electrical outputs of the array 100. If there are n photosensitive elements 110 in each set 110A,B,C of elements, and w is the circumferential distance (see FIG.
  • FIG. 7 is a graphical illustration of the change in phase error with increasing number of resultant Vernier fringes, for a 10 ⁇ m value of eccentricity and a scale of mean radius of 35.5 mm having 55800 lines per rev.
  • this phenomenon may be understood in that small pitch resultant Vernier fringes are produced when the circumferential spacings of the interference fringes (and thus the scale) and analyser grating differ by a relatively large amount. The larger this difference is, the smaller the effect proportionally of a change in the circumferential spacing of the scale (and thus the interference fringes) due to eccentricity.
  • the interference fringes incident upon the window 200 defining the extent of the analyser grating are illustrated.
  • the geometry of the analyser grating 40 with which the inference fringes interact determines the size of the resultant Vernier fringes, it is possible to configure the analyser grating 40 to obtain any pitch and/or geometry of resultant fringes from any given incident fringes (i.e. in the examples described herein, interference fringes).
  • a parallel, or "linear" resultant Vernier fringe pattern may be generated from angular radially extending fringe pattern or vice versa.
  • the configuration of the analyser grating 40 may be determined in the following way:
  • the linear pitch of the 1st interference fringe from the 0th fringe (0th fringe extending substantially perpendicular to the window 200 defining the boundaries of the analyser grating 40) at its inner radius within window 200 is P i .
  • the number of lines per unit displacement (i.e. the spatial frequency) of lines at this pitch is thus given by 1/P i .
  • the required spatial frequency of resultant Vernier fringes is n fringes across an analyser window 200 of width w, i.e. n/w.
  • the requisite linear pitch between the 0th and 1st line of the analyser grating at the inner radius of the analyser grating window 200 required to generate a resultant Vernier fringe of width W/N is A i , corresponding to a spatial frequency of 1/A i ..
  • the pitch A o between the 1st and 0th line of the analyser gating at its outer radius within window 200 must be such that it will also interact with the interference fringe to produce a resultant Vernier fringe of pitch w/n.
  • the same calculation must therefore be repeated in respect of the 1st and 0th interference fringe to generate a value A o of pitch at the outer radius of 1st and 0th lines of the analyser grating.
  • P o is the pitch between the 0th and 1st fringes at the outer radius.
  • a suitably structured photodetector array 400 configured to generate three phase-shifted cyclically modulating electrical signals corresponding to the light intensity modulation of the linear resultant Vernier fringes upon rotation of the code wheel 10 is illustrated in FIG. 10.
  • the detector array 400 comprises a semi-conductor substrate 402, having provided thereon a plurality of elongate substantially parallel light sensitive elements 410, grouped into three sets 410A,410B,410C, with all elements of a given set being connected electrically in common, and with the elements being interleaved in a repeating pattern 410A-410B-410C.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Analogue/Digital Conversion (AREA)
US08/836,150 1995-11-02 1996-11-04 Readhead for an opto-electronic rotary encoder Expired - Lifetime US5886352A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9522491.1 1995-11-02
GBGB9522491.1A GB9522491D0 (en) 1995-11-02 1995-11-02 Opto-electronic rotary encoder
PCT/GB1996/002699 WO1997016704A1 (fr) 1995-11-02 1996-11-04 Codeur rotatif optoelectronique

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US (1) US5886352A (fr)
EP (2) EP1114983A1 (fr)
JP (1) JPH10512374A (fr)
AT (1) ATE211816T1 (fr)
DE (1) DE69618441T3 (fr)
GB (1) GB9522491D0 (fr)
WO (1) WO1997016704A1 (fr)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001020264A1 (fr) * 1999-09-14 2001-03-22 Leopold Kostal Gmbh & Co. Kg Detecteur d'angle de rotation opto-electronique
WO2000065310A3 (fr) * 1999-04-22 2001-04-05 Heidenhain Gmbh Dr Johannes Dispositif optique de mesure de position
US6476405B1 (en) * 1999-12-03 2002-11-05 Renishaw Plc Measurement apparatus having a diffraction grating structure
US20020195551A1 (en) * 1997-08-15 2002-12-26 John Baxter Sensor for sensing absolute angular position of a rotatable body
US6512222B2 (en) * 2000-02-03 2003-01-28 Mitutoyo Corporation Displacement measuring apparatus
US6541761B1 (en) * 1999-08-31 2003-04-01 Dr. Johannas Heidenhain Gmbh Optical position measuring system with a graduation that causes essentially only first orders of diffraction
US6635863B1 (en) 1999-08-06 2003-10-21 Mitutoyo Corporation Optical encoder
US20040227958A1 (en) * 2003-05-16 2004-11-18 Dr. Johannes Heidenhain Gmbh Position measuring system
US20040256546A1 (en) * 2003-06-18 2004-12-23 Chun-Fang Hsiao Position-detecting device
WO2007129022A1 (fr) * 2006-05-04 2007-11-15 Renishaw Plc Appareil codeur rotatif
US20100072456A1 (en) * 2006-10-28 2010-03-25 Renishaw Plc Opto-electronic read head
EP2775269A4 (fr) * 2011-10-31 2015-08-26 Nsk Ltd Dispositif de détection de couple et dispositif de direction assistée électrique
US9541423B2 (en) 2012-03-08 2017-01-10 Renishaw Plc Magnetic encoder apparatus having a plurality of magnetic sensor elements
US9871595B2 (en) 2016-04-27 2018-01-16 Industrial Technology Research Institute Decoding device and method for absolute positioning code

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000011431A1 (fr) 1998-08-21 2000-03-02 Parriaux Olivier M Dispositif de mesure de la translation, rotation ou vitesse, au moyen de l'interference de faisceaux lumineux
EP1028309B1 (fr) 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Codeur optique
US7881896B2 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
EP1519158B1 (fr) * 2003-09-23 2010-08-11 Dr. Johannes Heidenhain GmbH Dispositif de mesure de position
JP4754230B2 (ja) * 2005-02-02 2011-08-24 株式会社ミツトヨ 光電式エンコーダ
JP2008241243A (ja) * 2005-06-30 2008-10-09 Mitsubishi Electric Corp 光学式エンコーダ
DE102008046793A1 (de) * 2008-09-11 2010-03-18 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
WO2014030177A1 (fr) * 2012-08-22 2014-02-27 Inrim Istituto Nazionale Di Ricerca Metrologica Appareil et procédé de stabilisation de codeurs linéaires
CN108592961B (zh) * 2018-05-21 2021-02-12 深圳市英科达光电技术有限公司 一种游标多读数头全代码相加的高精度绝对式光电编码器

Citations (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2886717A (en) * 1953-03-14 1959-05-12 Ferranti Ltd Measuring apparatus
US3290175A (en) * 1960-04-14 1966-12-06 Gen Electric Semiconductor photovoltaic devices
DE1905392A1 (de) * 1968-04-23 1969-10-30 Tajima Seisakusho Kk Vorrichtung zum Erzeugen von elektrischen Signalen mittels eines Skalengitters,das relativ zu einem Indexgitter bewegbar ist
GB1220094A (en) * 1967-02-23 1971-01-20 Contraves Ag Improvements in and relating to optical-electrical angle-measuring devices
GB1231029A (fr) * 1968-12-13 1971-05-05
GB1311275A (en) * 1969-06-04 1973-03-28 Ferranti Ltd Measuring apparatus employing optical gratings
DE2511900A1 (de) * 1974-03-21 1975-09-25 Int Research & Dev Co Ltd Verfahren zur herstellung eines oder mehrerer fotoelektrischer heterouebergaenge
US3951548A (en) * 1974-07-22 1976-04-20 Baird-Atomic, Inc. Electro-optical fourier vernier device
US3961318A (en) * 1975-01-17 1976-06-01 Inductosyn Corporation Electrostatic position-measuring transducer
DE2451994A1 (de) * 1974-11-02 1976-11-04 Fromund Prof Dipl Phys Hock Verfahren und anordnung zur erzeugung photoelektrischer signale
GB1504691A (en) * 1974-03-15 1978-03-22 Nat Res Dev Measurement apparatus
GB2094974A (en) * 1981-03-12 1982-09-22 Mitutoyo Mfg Co Ltd Photoelectric encoder device
DE3308841A1 (de) * 1982-04-15 1983-10-27 VEB Feinmesszeugfabrik Suhl, DDR 6000 Suhl Einrichtung zur messung von verschiebungen und verdrehungen eines koerpers
US4430566A (en) * 1981-04-21 1984-02-07 Vibrac Corporation Electro-optical angular displacement
EP0143525A1 (fr) * 1983-09-30 1985-06-05 Ing. C. Olivetti & C., S.p.A. Transmetteur optique de position
EP0157034A2 (fr) * 1983-07-27 1985-10-09 Sony Magnescale Incorporation Tête de capteur
JPS61178612A (ja) * 1985-02-04 1986-08-11 Kobe Steel Ltd 光電式ロ−タリエンコ−ダ
JPS63174563A (ja) * 1987-01-13 1988-07-19 Mitsubishi Electric Corp 直流電源装置
US4782229A (en) * 1986-05-14 1988-11-01 Dr. Johannes Heidenhain Gmbh Photoelectric displacement measuring device for obtaining harmonic free signals
EP0431976A2 (fr) * 1989-12-08 1991-06-12 Hewlett-Packard Company Appareil et méthode de codage optique
DE4006789A1 (de) * 1990-03-03 1991-09-05 Zeiss Carl Fa Optisches abtastsystem fuer rasterteilungen
US5064290A (en) * 1987-12-12 1991-11-12 Renishaw Plc Opto-electronic scale-reading apparatus wherein phase-separated secondary orders of diffraction are generated
US5155355A (en) * 1991-04-25 1992-10-13 Mitutoyo Corporation Photoelectric encoder having a grating substrate with integral light emitting elements
EP0510516A2 (fr) * 1991-04-24 1992-10-28 Dr. Johannes Heidenhain GmbH Dispositif capteur sur un substrat avec élément de liaison électrique et procédé pour la réalisation d'un tel dispositif
EP0543513A1 (fr) * 1991-11-06 1993-05-26 Renishaw Transducer Systems Limited Dispositif opto-électronique de lecture d'une échelle graduée
EP0608758A1 (fr) * 1993-01-28 1994-08-03 Dr. Johannes Heidenhain GmbH Dispositif de mesure pour plusieurs coördonnées
DE4427080A1 (de) * 1993-08-07 1995-02-09 Heidenhain Gmbh Dr Johannes Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
GB2288015A (en) * 1994-03-31 1995-10-04 Mitutoyo Corp An optical encoder with an improved photodiode array
DE19522611A1 (de) * 1994-07-01 1996-01-04 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßeinrichtung
US5661296A (en) * 1993-10-29 1997-08-26 Canon Kabushiki Kaisha Rotary encoder measuring substantially coinciding phases of interference light components

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1516536A (en) * 1975-08-22 1978-07-05 Ferranti Ltd Measuring apparatus
NL8202300A (nl) † 1982-06-08 1984-01-02 Philips Nv Inrichting voor het bepalen van hoekverplaatsingen van een voorwerp.
DE3377669D1 (en) † 1982-09-01 1988-09-15 Rosemount Ltd Position measuring apparatus

Patent Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2886717A (en) * 1953-03-14 1959-05-12 Ferranti Ltd Measuring apparatus
US3290175A (en) * 1960-04-14 1966-12-06 Gen Electric Semiconductor photovoltaic devices
GB1220094A (en) * 1967-02-23 1971-01-20 Contraves Ag Improvements in and relating to optical-electrical angle-measuring devices
DE1905392A1 (de) * 1968-04-23 1969-10-30 Tajima Seisakusho Kk Vorrichtung zum Erzeugen von elektrischen Signalen mittels eines Skalengitters,das relativ zu einem Indexgitter bewegbar ist
DE1962099B2 (de) * 1968-12-13 1979-06-13 National Research Development Corp., London Optisches Indexgitter und Verfahren zu dessen Herstellung
GB1231029A (fr) * 1968-12-13 1971-05-05
GB1311275A (en) * 1969-06-04 1973-03-28 Ferranti Ltd Measuring apparatus employing optical gratings
GB1504691A (en) * 1974-03-15 1978-03-22 Nat Res Dev Measurement apparatus
DE2511900A1 (de) * 1974-03-21 1975-09-25 Int Research & Dev Co Ltd Verfahren zur herstellung eines oder mehrerer fotoelektrischer heterouebergaenge
US3951548A (en) * 1974-07-22 1976-04-20 Baird-Atomic, Inc. Electro-optical fourier vernier device
DE2451994A1 (de) * 1974-11-02 1976-11-04 Fromund Prof Dipl Phys Hock Verfahren und anordnung zur erzeugung photoelektrischer signale
US3961318A (en) * 1975-01-17 1976-06-01 Inductosyn Corporation Electrostatic position-measuring transducer
GB2094974A (en) * 1981-03-12 1982-09-22 Mitutoyo Mfg Co Ltd Photoelectric encoder device
DE3209043A1 (de) * 1981-03-12 1982-11-18 Mitutoyo Mfg. Co., Ltd., Tokyo Photoelektrische kodiereinrichtung
US4430566A (en) * 1981-04-21 1984-02-07 Vibrac Corporation Electro-optical angular displacement
DE3308841A1 (de) * 1982-04-15 1983-10-27 VEB Feinmesszeugfabrik Suhl, DDR 6000 Suhl Einrichtung zur messung von verschiebungen und verdrehungen eines koerpers
EP0157034A2 (fr) * 1983-07-27 1985-10-09 Sony Magnescale Incorporation Tête de capteur
EP0143525A1 (fr) * 1983-09-30 1985-06-05 Ing. C. Olivetti & C., S.p.A. Transmetteur optique de position
JPS61178612A (ja) * 1985-02-04 1986-08-11 Kobe Steel Ltd 光電式ロ−タリエンコ−ダ
US4782229A (en) * 1986-05-14 1988-11-01 Dr. Johannes Heidenhain Gmbh Photoelectric displacement measuring device for obtaining harmonic free signals
EP0250711B1 (fr) * 1986-05-14 1992-01-29 Dr. Johannes Heidenhain GmbH Dispositif de mesure photoélectrique
DE3616144C2 (fr) * 1986-05-14 1992-06-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
JPS63174563A (ja) * 1987-01-13 1988-07-19 Mitsubishi Electric Corp 直流電源装置
US5064290A (en) * 1987-12-12 1991-11-12 Renishaw Plc Opto-electronic scale-reading apparatus wherein phase-separated secondary orders of diffraction are generated
EP0431976A2 (fr) * 1989-12-08 1991-06-12 Hewlett-Packard Company Appareil et méthode de codage optique
DE4006789A1 (de) * 1990-03-03 1991-09-05 Zeiss Carl Fa Optisches abtastsystem fuer rasterteilungen
EP0510516A2 (fr) * 1991-04-24 1992-10-28 Dr. Johannes Heidenhain GmbH Dispositif capteur sur un substrat avec élément de liaison électrique et procédé pour la réalisation d'un tel dispositif
US5155355A (en) * 1991-04-25 1992-10-13 Mitutoyo Corporation Photoelectric encoder having a grating substrate with integral light emitting elements
EP0543513A1 (fr) * 1991-11-06 1993-05-26 Renishaw Transducer Systems Limited Dispositif opto-électronique de lecture d'une échelle graduée
EP0608758A1 (fr) * 1993-01-28 1994-08-03 Dr. Johannes Heidenhain GmbH Dispositif de mesure pour plusieurs coördonnées
DE4427080A1 (de) * 1993-08-07 1995-02-09 Heidenhain Gmbh Dr Johannes Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
US5661296A (en) * 1993-10-29 1997-08-26 Canon Kabushiki Kaisha Rotary encoder measuring substantially coinciding phases of interference light components
GB2288015A (en) * 1994-03-31 1995-10-04 Mitutoyo Corp An optical encoder with an improved photodiode array
DE19522611A1 (de) * 1994-07-01 1996-01-04 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßeinrichtung

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Clark, L et al. "Thin Film Photovoltaic Detector Arrays." International Research and Development Co, Ltd. Conference on Moire Finge Technology, Jun. 19-20, 1972, pp. 1-5.
Clark, L et al. Thin Film Photovoltaic Detector Arrays. International Research and Development Co, Ltd. Conference on Moire Finge Technology, Jun. 19 20, 1972, pp. 1 5. *

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020195551A1 (en) * 1997-08-15 2002-12-26 John Baxter Sensor for sensing absolute angular position of a rotatable body
US6759648B2 (en) 1997-08-15 2004-07-06 Bishop Innovation Limited Sensor for sensing absolute angular position of a rotatable body
WO2000065310A3 (fr) * 1999-04-22 2001-04-05 Heidenhain Gmbh Dr Johannes Dispositif optique de mesure de position
US6794637B1 (en) 1999-04-22 2004-09-21 Dr. Johannas Heidenhain Gmbh Optical device for measuring position
US6635863B1 (en) 1999-08-06 2003-10-21 Mitutoyo Corporation Optical encoder
US6541761B1 (en) * 1999-08-31 2003-04-01 Dr. Johannas Heidenhain Gmbh Optical position measuring system with a graduation that causes essentially only first orders of diffraction
WO2001020264A1 (fr) * 1999-09-14 2001-03-22 Leopold Kostal Gmbh & Co. Kg Detecteur d'angle de rotation opto-electronique
US6552330B2 (en) 1999-09-14 2003-04-22 Leopold Kostal Gmbh & Co. Kg Optoelectronic angle of rotation sensor
US6476405B1 (en) * 1999-12-03 2002-11-05 Renishaw Plc Measurement apparatus having a diffraction grating structure
US6512222B2 (en) * 2000-02-03 2003-01-28 Mitutoyo Corporation Displacement measuring apparatus
US7164482B2 (en) 2003-05-16 2007-01-16 Dr. Johannes Heidenhain Gmbh Position measuring system
CN100374823C (zh) * 2003-05-16 2008-03-12 约翰尼斯海登海恩博士股份有限公司 位置测量装置
US20040227958A1 (en) * 2003-05-16 2004-11-18 Dr. Johannes Heidenhain Gmbh Position measuring system
US20040256546A1 (en) * 2003-06-18 2004-12-23 Chun-Fang Hsiao Position-detecting device
US7969579B2 (en) 2006-05-04 2011-06-28 Renishaw Plc Rotary encoder apparatus
US20090180125A1 (en) * 2006-05-04 2009-07-16 Renishaw Plc Rotary Encoder Apparatus
WO2007129022A1 (fr) * 2006-05-04 2007-11-15 Renishaw Plc Appareil codeur rotatif
JP4898906B2 (ja) * 2006-05-04 2012-03-21 レニショウ パブリック リミテッド カンパニー ロータリエンコーダ装置
US20100072456A1 (en) * 2006-10-28 2010-03-25 Renishaw Plc Opto-electronic read head
EP2775269A4 (fr) * 2011-10-31 2015-08-26 Nsk Ltd Dispositif de détection de couple et dispositif de direction assistée électrique
EP2775271A4 (fr) * 2011-10-31 2015-08-26 Nsk Ltd Échelle optique, procédé de production d'échelles optiques et codeur optique
US9383274B2 (en) 2011-10-31 2016-07-05 Nsk Ltd. Torque detection apparatus and electric power steering apparatus
US9410858B2 (en) 2011-10-31 2016-08-09 Nsk Ltd. Optical scale having wires, method for manufacturing optical scale having wires,and optical encode
US9541423B2 (en) 2012-03-08 2017-01-10 Renishaw Plc Magnetic encoder apparatus having a plurality of magnetic sensor elements
US9871595B2 (en) 2016-04-27 2018-01-16 Industrial Technology Research Institute Decoding device and method for absolute positioning code
US10243668B2 (en) 2016-04-27 2019-03-26 Industrial Technology Research Institute Positioning measurement device and the method thereof

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EP0801724B2 (fr) 2013-03-06
DE69618441T2 (de) 2002-06-06
EP0801724B1 (fr) 2002-01-09
WO1997016704A1 (fr) 1997-05-09
ATE211816T1 (de) 2002-01-15
EP0801724A1 (fr) 1997-10-22
JPH10512374A (ja) 1998-11-24
DE69618441T3 (de) 2013-06-27
GB9522491D0 (en) 1996-01-03
EP1114983A1 (fr) 2001-07-11
DE69618441D1 (de) 2002-02-14

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