WO1987007028A3 - Sonde laser a haute vitesse - Google Patents

Sonde laser a haute vitesse Download PDF

Info

Publication number
WO1987007028A3
WO1987007028A3 PCT/US1987/000631 US8700631W WO8707028A3 WO 1987007028 A3 WO1987007028 A3 WO 1987007028A3 US 8700631 W US8700631 W US 8700631W WO 8707028 A3 WO8707028 A3 WO 8707028A3
Authority
WO
WIPO (PCT)
Prior art keywords
high speed
laser probe
speed laser
surface element
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1987/000631
Other languages
English (en)
Other versions
WO1987007028A2 (fr
Inventor
Joseph Hy Abeles
Lin Paul Shau Da
Robert Boris Marcus
Andrew Marc Weiner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iconectiv LLC
Original Assignee
Bell Communications Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bell Communications Research Inc filed Critical Bell Communications Research Inc
Publication of WO1987007028A2 publication Critical patent/WO1987007028A2/fr
Publication of WO1987007028A3 publication Critical patent/WO1987007028A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

L'appareil permettant de tester un circuit intégré ou un dispositif à semi-conducteurs à haute vitesse comprend un dispositif pour diriger un faisceau laser pulsé vers un élément de surface du dispositif ou circuit intégré soumis au test; l'appareil ci-décrit comprend également un dispositif de détection des photoélectrons émis depuis l'élément de surface, ainsi qu'un dispositif de calcul du potentiel local depuis l'élément de surface au moment de l'irradiation par le faisceau laser pulsé à partir d'une analyse des photoélectrons émis.
PCT/US1987/000631 1986-05-16 1987-03-24 Sonde laser a haute vitesse Ceased WO1987007028A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86393686A 1986-05-16 1986-05-16
US863,936 1992-04-06

Publications (2)

Publication Number Publication Date
WO1987007028A2 WO1987007028A2 (fr) 1987-11-19
WO1987007028A3 true WO1987007028A3 (fr) 1987-12-17

Family

ID=25342148

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1987/000631 Ceased WO1987007028A2 (fr) 1986-05-16 1987-03-24 Sonde laser a haute vitesse

Country Status (1)

Country Link
WO (1) WO1987007028A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4902963A (en) * 1988-01-28 1990-02-20 Brust Hans D Method and arrangement for recording periodic signals with a laser probe
GB2226643B (en) * 1988-12-22 1992-11-18 Stc Plc Device testing apparatus and method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0180780A1 (fr) * 1984-11-01 1986-05-14 International Business Machines Corporation Testeur dynamique sans contacts pour circuits intégrés

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0180780A1 (fr) * 1984-11-01 1986-05-14 International Business Machines Corporation Testeur dynamique sans contacts pour circuits intégrés

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Applied Physics Letters, Vol. 46, No. 12, 15 June 1985 (New York, US) W.H. KNOX et al.: "Optical pulse Compression to 8 fs at a 5-kHz Repetition Rate", pages 1120-1121, see page 1120, left-hand column, lines 1-12 (cited in the application) *
Applied Physics Letters, Vol. 49, No. 6, 11 August 1986 (New York, US) R.B. MARCUS et al.: "High-speed Electrical Sampling by fs Photo-Emission", pages 357-359, see the whole document *
IBM Technical Disclosure Bulletin, Vol. 25, No. 3A, August 1982 (New York, US) G.W. RUBLOFF: "Contactless Measurement of Voltage Levels using Photoemission", pages 1171-1172, see the whole document *
Proceedings of the 21st Electronic Components Conference, 10-12 May 1971 (Washington D.C., US) R.E. McMAHON: "Testing Integrated Circuits with a Laser Beam", pages 412-416, see page 412, right-hand column, lines 14-26 *

Also Published As

Publication number Publication date
WO1987007028A2 (fr) 1987-11-19

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