WO1998052012A3 - Dispositif de mesure et procede de nettoyage des zones de contamination d'un dispositif de mesure - Google Patents

Dispositif de mesure et procede de nettoyage des zones de contamination d'un dispositif de mesure Download PDF

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Publication number
WO1998052012A3
WO1998052012A3 PCT/EP1998/002722 EP9802722W WO9852012A3 WO 1998052012 A3 WO1998052012 A3 WO 1998052012A3 EP 9802722 W EP9802722 W EP 9802722W WO 9852012 A3 WO9852012 A3 WO 9852012A3
Authority
WO
WIPO (PCT)
Prior art keywords
measuring device
contaminated areas
sample input
input device
cleaning contaminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP1998/002722
Other languages
German (de)
English (en)
Other versions
WO1998052012A2 (fr
Inventor
Horst-Henning Grotheer
Harald Oser
Reinhold Thanner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Deutsches Zentrum fuer Luft und Raumfahrt eV
Original Assignee
Deutsches Zentrum fuer Luft und Raumfahrt eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsches Zentrum fuer Luft und Raumfahrt eV filed Critical Deutsches Zentrum fuer Luft und Raumfahrt eV
Publication of WO1998052012A2 publication Critical patent/WO1998052012A2/fr
Publication of WO1998052012A3 publication Critical patent/WO1998052012A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0029Cleaning of the detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/38Cleaning of electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32Processing objects by plasma generation

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Biomedical Technology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

Abstract

L'invention concerne un dispositif de mesure comprenant un appareil de mesure pour échantillons en particulier gazeux et un dispositif d'introduction d'échantillons au moyen duquel les échantillons sont amenés à l'appareil de mesure. Pour améliorer un tel dispositif de façon que les résultats de mesure et/ou d'analyse de l'appareil de mesure ne subissent pas l'influence d'éventuelles contaminations, il est proposé que le dispositif d'introduction d'échantillons soit pourvu d'un dispositif de nettoyage servant à nettoyer les zones de contamination de ce dispositif d'introduction d'échantillons, ce nettoyage consistant à transformer les impuretés se trouvant dans les zones de contamination par réaction chimique, et que les produits de réaction formés soient évacués du dispositif d'introduction d'échantillons.
PCT/EP1998/002722 1997-05-12 1998-05-09 Dispositif de mesure et procede de nettoyage des zones de contamination d'un dispositif de mesure Ceased WO1998052012A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1997119903 DE19719903A1 (de) 1997-05-12 1997-05-12 Meßvorrichtung und Verfahren zur Reinigung von Kontaminationsbereichen einer Meßvorrichtung
DE19719903.8 1997-05-12

Publications (2)

Publication Number Publication Date
WO1998052012A2 WO1998052012A2 (fr) 1998-11-19
WO1998052012A3 true WO1998052012A3 (fr) 1999-04-01

Family

ID=7829262

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1998/002722 Ceased WO1998052012A2 (fr) 1997-05-12 1998-05-09 Dispositif de mesure et procede de nettoyage des zones de contamination d'un dispositif de mesure

Country Status (2)

Country Link
DE (1) DE19719903A1 (fr)
WO (1) WO1998052012A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10061828B4 (de) * 2000-12-12 2011-03-31 Plasmatreat Gmbh Verfahren zum Einbringen von Material in einen Plasmastrahl und Plasmadüse zur Durchführung des Verfahrens
DE102005054605B4 (de) * 2005-11-16 2010-09-30 Bruker Daltonik Gmbh Automatische Reinigung von Ionenquellen
DE202008008731U1 (de) 2008-07-02 2009-11-19 Melitta Haushaltsprodukte Gmbh & Co. Kg Anordnung zur Herstellung von Plasma
DE202008008729U1 (de) * 2008-07-02 2009-11-19 Melitta Haushaltsprodukte Gmbh & Co. Kg Vorrichtung zur Reinigung von Gegenständen
CN106324197B (zh) * 2016-08-22 2018-03-23 芜湖市神龙新能源科技有限公司 一种便于清洗的大气污染检测装置
CN108802290A (zh) * 2018-06-22 2018-11-13 温州市骐邦环保科技有限公司 一种便于清洗的大气污染检测装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3516158A1 (de) * 1985-05-06 1986-11-06 Grün Optik Wetzlar GmbH, 6330 Wetzlar Dissoziationskammer zur abspaltung von atomarem quecksilber
EP0280539A1 (fr) * 1987-02-24 1988-08-31 Semiconductor Energy Laboratory Co., Ltd. Procédé pour enlever des dépôts de carbone indésirables de l'intérieur d'une chambre de réaction CVD
US4956024A (en) * 1988-01-11 1990-09-11 The Perkin Elmer Corporation Non-contacting method of cleaning surfaces with a planoar gas bearing
DE4030130A1 (de) * 1990-09-24 1992-04-02 Hartmann & Braun Ag Vorrichtung fuer die aufbereitung von rauchgas
DE4302657C1 (de) * 1993-01-30 1994-03-03 Holstein & Kappert Maschf Verfahren zur Bestimmung von Kontaminaten in Behältern
US5364795A (en) * 1993-06-11 1994-11-15 The United States Of America As Represented By The Secretary Of The Army Laser-based detection of nitro-containing compounds
US5517943A (en) * 1993-12-16 1996-05-21 Mitsubishi Denki Kabushiki Kaisha Vacuum CVD apparatus
DE4441972A1 (de) * 1994-11-25 1996-08-14 Deutsche Forsch Luft Raumfahrt Verfahren und Vorrichtung zum Nachweis von Probenmolekülen in einem Trägergas

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1468934A (fr) * 1965-11-22 1967-02-10 Lafarge Ciments Sa Dosage en continu des éléments de mélanges, et notamment de crus de cimenterie
GB1382254A (en) * 1971-02-05 1975-01-29 Pye Ltd Flame spectrometry apparatus
DE2433690C2 (de) * 1974-07-12 1984-04-26 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Vorrichtung zur Oberflächenbehandlung einer metallographischen Probe
DD114865A1 (fr) * 1974-08-14 1975-08-20
DE2732746A1 (de) * 1977-07-20 1979-03-01 Leybold Heraeus Gmbh & Co Kg Verfahren und vorrichtung zur trennung und zum anschliessenden nachweis von substanzen
JPS59109840A (ja) * 1982-12-16 1984-06-25 Hitachi Koki Co Ltd 走査形電子顕微鏡用生物試料の前処理方法
DE4031020A1 (de) * 1990-10-01 1992-04-02 Bela Medvey Vorrichtung und verfahren zum aufbereiten einer in einem analysengeraet zu analysierenden probe
DE19519890A1 (de) * 1995-05-31 1996-07-11 Bosch Gmbh Robert Elektromagnetisch betätigbares Magnetventil

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3516158A1 (de) * 1985-05-06 1986-11-06 Grün Optik Wetzlar GmbH, 6330 Wetzlar Dissoziationskammer zur abspaltung von atomarem quecksilber
EP0280539A1 (fr) * 1987-02-24 1988-08-31 Semiconductor Energy Laboratory Co., Ltd. Procédé pour enlever des dépôts de carbone indésirables de l'intérieur d'une chambre de réaction CVD
US4956024A (en) * 1988-01-11 1990-09-11 The Perkin Elmer Corporation Non-contacting method of cleaning surfaces with a planoar gas bearing
DE4030130A1 (de) * 1990-09-24 1992-04-02 Hartmann & Braun Ag Vorrichtung fuer die aufbereitung von rauchgas
DE4302657C1 (de) * 1993-01-30 1994-03-03 Holstein & Kappert Maschf Verfahren zur Bestimmung von Kontaminaten in Behältern
US5364795A (en) * 1993-06-11 1994-11-15 The United States Of America As Represented By The Secretary Of The Army Laser-based detection of nitro-containing compounds
US5517943A (en) * 1993-12-16 1996-05-21 Mitsubishi Denki Kabushiki Kaisha Vacuum CVD apparatus
DE4441972A1 (de) * 1994-11-25 1996-08-14 Deutsche Forsch Luft Raumfahrt Verfahren und Vorrichtung zum Nachweis von Probenmolekülen in einem Trägergas

Also Published As

Publication number Publication date
DE19719903A1 (de) 1998-11-19
WO1998052012A2 (fr) 1998-11-19

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