WO2003015156A1 - Robot de montage foup pour efem semi-conducteur - Google Patents

Robot de montage foup pour efem semi-conducteur Download PDF

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Publication number
WO2003015156A1
WO2003015156A1 PCT/JP2001/009094 JP0109094W WO03015156A1 WO 2003015156 A1 WO2003015156 A1 WO 2003015156A1 JP 0109094 W JP0109094 W JP 0109094W WO 03015156 A1 WO03015156 A1 WO 03015156A1
Authority
WO
WIPO (PCT)
Prior art keywords
foup
efem
transporter
robot
opener
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2001/009094
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English (en)
Japanese (ja)
Inventor
Takehide Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of WO2003015156A1 publication Critical patent/WO2003015156A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means

Definitions

  • the present invention automatically supplies and collects a FOUP (wafer sealed container) to the so-called opener of the EFEM (Equipment Front End Module) attached to the semiconductor manufacturing equipment S, and automatically stores it in a buffer storage shelf. It relates to a multi-functional robot that can be transferred to a monorail transporter or a self-propelled transport vehicle on the floor (AGV or RGV). Background art
  • the device S of the present invention is a post supported on the upper surface of the frame, has two grips, and is a SCARA-type mouth pot incorporating functions of elevating, turning, unfolding, and tilting, and the EFEM opener and storage.
  • the feature is that it can be operated on shelves and conveyor stations. It has a wide operating range and can be installed in various places instead of assembling the shelf and transport station in one place, so the FOUP storage volume on the shelf can be increased.
  • the collection and supply of Foup at the opener is quick due to the two grips. After taking out the foup from the storage shelf with one of the grips, go to the opener to collect the FOUP with the other, and at the same time, rotate the grip to supply the FOUP from the shelf, greatly improving cycle time. I do.
  • the reporter is small and has a post-like shape supported by the upper part of the structural frame, and is integrated with the shelf, so it can be easily attached to the existing EFEM. Disclosure of the invention
  • the present invention is intended to greatly increase the work efficiency by making the robot multifunctional.
  • Mouth pots and storage shelves are attached to the stand-alone frame.
  • the post-like robot body attached to the upper surface of the frame has a swiveling robot arm that moves up and down and two grips.
  • the swivel arm robot is widely used in the transport station on the ceiling, the side of the self-propelled transport vehicle such as AGV or RGV on the floor, the storage shelf on the opposite side, the transport station in the shelf, and the EFEM opener. Make it work.
  • the two grips at the tip are equipped with a rotating mechanism and a mechanism for raising and lowering the grips.
  • Figure 1 is a plan view showing the layout of the EFEM, opener, storage shelf, and robot.
  • Figure 2 is a side view of the EFEM, opener, storage shelf, and robot.
  • Figure 3 is a front view of the shelf, opener, and robot.
  • FIG. 4 is a detailed side view of the robot arm. Explanation of reference numerals
  • Fig. 1 shows the positional relationship between the EFEM, opener and mouth pot.
  • the processed wafer is fed into the FOUP (20) on the opener (10) by the EFEM (12) from the manufacturing equipment (13). And sealed.
  • Mouth pot (1) removes new FOUP (25) from storage shelf (7) and brings it to the first place in the oven.
  • the grip (5) is lowered by the elevating and turning mechanism, gripping FOUPC20), and then rising to rotate both grips.
  • the grip (4) descends and places the FOUP (25) on the top of the oven.
  • FIG. 2 is a side view showing the relationship between the monorail type transporter and the floor-based self-propelled transport vehicle.
  • the FOUP (20) is temporarily stored on a shelf, but when the FOUP (20>) that happens to be recovered is collected, the FOUP arrives at the monorail transport station (30) or the self-propelled transport vehicle (31)
  • the robot holds the F0UPC20) from the opener, grabs the F0UP sent by the monorail mele type transporter and the self-propelled transport vehicle, and then rotates the grip.
  • the F0UP (20) is placed on the monorail transport station (30) or the transport trolley (31), and the F0UP supply and collection work is performed simultaneously.
  • supply and recovery operations are performed in the same manner as described above with the transporter, so that the time when the transporter is made to wait is reduced.
  • Fig. 3 is a front view of the shelf and opener. If the FOUP is transported by the transporter, if there is FOUP in the oven, it is temporarily stored in the storage shelf and the FOUP is adjusted according to the state of the opener. Supply and collect to openers from storage shelves.
  • Fig. 4 is a detailed side view of the mouth pot.Each grip has a lifting function to prevent the bottom of the F0UP from interfering with the opener operation section (1 1) when rotating the grip. If there is no interference from the bottom, you can remove the lifting function of the grip. When the transfer frequency is low, a single grip can be used. Industrial applicability
  • the present invention has the above-described structure, and has the following effects.
  • Monorail type transporter Since there are fewer restrictions on where to transfer and transfer to a self-propelled transporter, a narrow clean room can be effectively used. In addition, since FOUP supply and recovery operations can be performed at the same time, the time required for the transfer machine to wait can be reduced, and the number of transfer vehicles in the entire transfer system can be reduced.
  • the mouth pot frame Since the mouth pot frame is self-supporting, it can be installed on existing EFEMs, and automation can be easily performed.

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

L'invention concerne un robot intégré dans une unité EFEM (12) conçu pour fournir des plaquettes transportées à partir de conteneurs fermés (23, 24, 25), dits FOUP, vers un système de production de semi-conducteurs (13) ou pour y collecter les plaquettes à transporter dans les conteneurs, qui consiste en un corps (1) de robot de type colonne ayant une fonction de levage/d'abaissement soutenu à partir d'une surface supérieure et fixé à l'aide d'un bras tournant (2), l'extrémité avant dudit bras étant pourvue d'au moins une poignée (4, 5). Les opérations de fourniture et de collecte du FOUP sont exécutées simultanément grâce à une fonction qui élève/abaisse la poignée et son mécanisme rotatif de manière indépendante grâce à l'emploi de deux poignées lorsque la fréquence de transport est élevée. Ledit robot se caractérise par le fait qu'il est pourvu d'une fonction de fourniture et de collecte du FOUP entre la section d'ouverture (10) du EFEM, une étagère de stockage (7) et des transporteurs (30, 31) sur les faces plafond et plancher.
PCT/JP2001/009094 2001-08-02 2001-10-17 Robot de montage foup pour efem semi-conducteur Ceased WO2003015156A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001268004A JP2003051527A (ja) 2001-08-02 2001-08-02 半導体自動搬送対応ｅｆｅｍ（密閉容器からウエハーを出し入れし、製造装置に供給、回収する装置）用ｆｏｕｐ（密閉容器）移載ロボット
JP2001-268004 2001-08-02

Publications (1)

Publication Number Publication Date
WO2003015156A1 true WO2003015156A1 (fr) 2003-02-20

Family

ID=19094056

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/009094 Ceased WO2003015156A1 (fr) 2001-08-02 2001-10-17 Robot de montage foup pour efem semi-conducteur

Country Status (2)

Country Link
JP (1) JP2003051527A (fr)
WO (1) WO2003015156A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109427636A (zh) * 2017-08-30 2019-03-05 台湾积体电路制造股份有限公司 搬运晶片载具的设备及方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4904995B2 (ja) 2006-08-28 2012-03-28 シンフォニアテクノロジー株式会社 ロードポート装置
JP5429570B2 (ja) 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
JP5318005B2 (ja) 2010-03-10 2013-10-16 株式会社Ｓｏｋｕｄｏ 基板処理装置、ストッカー装置および基板収納容器の搬送方法
KR101603926B1 (ko) 2014-07-30 2016-03-17 주식회사 신성에프에이 물류 이송 시스템
US10406562B2 (en) * 2017-07-21 2019-09-10 Applied Materials, Inc. Automation for rotary sorters
CN116313998B (zh) * 2023-04-06 2025-11-28 安徽积芯微电子科技有限公司 一种晶圆划片机的机械手夹料装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316340U (fr) * 1989-06-29 1991-02-19
JPH0864656A (ja) * 1994-08-22 1996-03-08 Dainippon Screen Mfg Co Ltd 基板搬送装置
JPH08243965A (ja) * 1995-03-13 1996-09-24 Canon Inc 部品転送装置
JPH09283588A (ja) * 1996-04-08 1997-10-31 Hitachi Ltd 基板搬送装置及び基板の搬送方法
EP0824266A2 (fr) * 1996-08-05 1998-02-18 Kokusai Electric Co., Ltd. Dispositif pour le traitement de substrats
EP0833374A2 (fr) * 1996-09-26 1998-04-01 Kokusai Electric Co., Ltd. Dispositif pour traiter des substrats
JP2000091398A (ja) * 1998-09-07 2000-03-31 Kokusai Electric Co Ltd 基板処理装置
JP2000159304A (ja) * 2000-01-01 2000-06-13 Advanced Display Inc カセットの搬送方法および該方法に用いる自動倉庫
JP2001077174A (ja) * 1999-09-06 2001-03-23 Yokogawa Electric Corp 搬送装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316340U (fr) * 1989-06-29 1991-02-19
JPH0864656A (ja) * 1994-08-22 1996-03-08 Dainippon Screen Mfg Co Ltd 基板搬送装置
JPH08243965A (ja) * 1995-03-13 1996-09-24 Canon Inc 部品転送装置
JPH09283588A (ja) * 1996-04-08 1997-10-31 Hitachi Ltd 基板搬送装置及び基板の搬送方法
EP0824266A2 (fr) * 1996-08-05 1998-02-18 Kokusai Electric Co., Ltd. Dispositif pour le traitement de substrats
EP0833374A2 (fr) * 1996-09-26 1998-04-01 Kokusai Electric Co., Ltd. Dispositif pour traiter des substrats
JP2000091398A (ja) * 1998-09-07 2000-03-31 Kokusai Electric Co Ltd 基板処理装置
JP2001077174A (ja) * 1999-09-06 2001-03-23 Yokogawa Electric Corp 搬送装置
JP2000159304A (ja) * 2000-01-01 2000-06-13 Advanced Display Inc カセットの搬送方法および該方法に用いる自動倉庫

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109427636A (zh) * 2017-08-30 2019-03-05 台湾积体电路制造股份有限公司 搬运晶片载具的设备及方法
CN109427636B (zh) * 2017-08-30 2022-11-22 台湾积体电路制造股份有限公司 搬运晶片载具的设备及方法

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