WO2003106918A3 - Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen - Google Patents

Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen Download PDF

Info

Publication number
WO2003106918A3
WO2003106918A3 PCT/DE2003/001978 DE0301978W WO03106918A3 WO 2003106918 A3 WO2003106918 A3 WO 2003106918A3 DE 0301978 W DE0301978 W DE 0301978W WO 03106918 A3 WO03106918 A3 WO 03106918A3
Authority
WO
WIPO (PCT)
Prior art keywords
object surfaces
measuring apparatus
mechanical
optical analysis
surface measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2003/001978
Other languages
English (en)
French (fr)
Other versions
WO2003106918A2 (de
Inventor
Hans-Ulrich Danzebrink
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Federal Government of Germany
Physikalisch-Technische Bundesanstalt
Original Assignee
Federal Government of Germany
Physikalisch-Technische Bundesanstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Federal Government of Germany, Physikalisch-Technische Bundesanstalt filed Critical Federal Government of Germany
Priority to AU2003250262A priority Critical patent/AU2003250262A1/en
Publication of WO2003106918A2 publication Critical patent/WO2003106918A2/de
Publication of WO2003106918A3 publication Critical patent/WO2003106918A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Eine Oberflächenmessvorrichtung zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen mit einem Tastkopf (2) zur mechanischen Messung hat eine Spiegel- und/oder Linsenanordnung (4) zur Fokussierung von Lichtstrahlen (3) derart, dass der Fokuspunkt (F) der von der Spiegel- und/oder Linsenanordnung (4) gebündelten Lichtstrahlen (3) wahlwei­se entweder auf den Tastkopf (2) zur Messung der Position oder Verlagerung des Tastkopfes (2) zur mechanischen Messung oder auf die zu untersuchende Objektoberfläche (1) zur berührungslosen-optischen Messung einstellbar ist.
PCT/DE2003/001978 2002-06-15 2003-06-12 Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen Ceased WO2003106918A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003250262A AU2003250262A1 (en) 2002-06-15 2003-06-12 Device for measuring surfaces and method for the mechanical and contactless-optical analysis of object surfaces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10226801A DE10226801B4 (de) 2002-06-15 2002-06-15 Oberflächenmessvorrichtung und Verfahren zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen
DE10226801.0 2002-06-15

Publications (2)

Publication Number Publication Date
WO2003106918A2 WO2003106918A2 (de) 2003-12-24
WO2003106918A3 true WO2003106918A3 (de) 2004-03-18

Family

ID=29719136

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2003/001978 Ceased WO2003106918A2 (de) 2002-06-15 2003-06-12 Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen

Country Status (3)

Country Link
AU (1) AU2003250262A1 (de)
DE (1) DE10226801B4 (de)
WO (1) WO2003106918A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2965929B1 (fr) * 2010-10-07 2012-12-14 Centre Nat Rech Scient Microscope optique en champ proche
CN102636132A (zh) * 2012-03-09 2012-08-15 中国科学院长春光学精密机械与物理研究所 一种用于光学表面粗糙度标定的参考平面生成装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0394962A2 (de) * 1989-04-24 1990-10-31 Olympus Optical Co., Ltd. Atomkraftmikroskop
DE4327250A1 (de) * 1992-09-25 1994-03-31 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
US5581082A (en) * 1995-03-28 1996-12-03 The Regents Of The University Of California Combined scanning probe and scanning energy microscope
JPH1194848A (ja) * 1997-09-19 1999-04-09 Olympus Optical Co Ltd 測定装置
WO2003008905A1 (de) * 2001-07-16 2003-01-30 Werth Messtechnik Gmbh Verfahren zur messung von oberflächeneigenschaften sowie koordinatenmessgerät

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9112343D0 (en) * 1991-06-08 1991-07-31 Renishaw Transducer Syst Surface analysis apparatus
JPH0477605A (ja) * 1990-07-20 1992-03-11 Olympus Optical Co Ltd 走査型トンネル顕微鏡、及び、この顕微鏡に使用されるプローブ
JPH0540034A (ja) * 1991-08-08 1993-02-19 Nikon Corp 複合型顕微鏡
GB2289759B (en) * 1994-05-11 1996-05-22 Khaled Karrau Coupled oscillator scanning imager
US5756997A (en) * 1996-03-04 1998-05-26 General Nanotechnology, L.L.C. Scanning probe/optical microscope with modular objective/probe and drive/detector units
US5955661A (en) * 1997-01-06 1999-09-21 Kla-Tencor Corporation Optical profilometer combined with stylus probe measurement device
DE19816270A1 (de) * 1998-04-11 1999-10-21 Werth Messtechnik Gmbh Verfahren und Anordnung zur Erfassung der Geometrie von Gegenständen mittels eines Koordinatenmeßgeräts
DE19947287C2 (de) * 1999-09-30 2003-01-30 Surface Imaging Systems Gmbh Nahfeldmikroskop

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0394962A2 (de) * 1989-04-24 1990-10-31 Olympus Optical Co., Ltd. Atomkraftmikroskop
DE4327250A1 (de) * 1992-09-25 1994-03-31 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
US5581082A (en) * 1995-03-28 1996-12-03 The Regents Of The University Of California Combined scanning probe and scanning energy microscope
JPH1194848A (ja) * 1997-09-19 1999-04-09 Olympus Optical Co Ltd 測定装置
WO2003008905A1 (de) * 2001-07-16 2003-01-30 Werth Messtechnik Gmbh Verfahren zur messung von oberflächeneigenschaften sowie koordinatenmessgerät

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 09 30 July 1999 (1999-07-30) *

Also Published As

Publication number Publication date
DE10226801A1 (de) 2004-01-08
DE10226801B4 (de) 2005-03-31
AU2003250262A1 (en) 2003-12-31
WO2003106918A2 (de) 2003-12-24

Similar Documents

Publication Publication Date Title
CN108332689B (zh) 一种检测表面粗糙度和表面损伤的光学测量系统及方法
CA2186719C (en) Lens parameter measurement using optical sectioning
NZ223988A (en) Optical distance measuring
KR101987402B1 (ko) 편광픽셀어레이를 이용한 박막과 후막의 두께 및 삼차원 표면 형상 측정 광학 장치
TWI541489B (zh) 干涉式膜厚計
ATE417255T1 (de) Vorrichtung zur bildaufnahme und bildverarbeitung bei brillengläsern
CN109807471A (zh) 一种激光打标装置及方法
CN106767545A (zh) 一种高精度高空间分辨角度测量仪及角度测量方法
CN113405478A (zh) 一种透明材料厚度测量方法
CN107860776A (zh) 一种镜片缺陷检测装置及方法
CN109187494A (zh) 飞秒激光加工参数差动共焦拉曼光谱原位监测方法与装置
JPH10311779A (ja) レンズ特性測定装置
CN102081218A (zh) 影像测量仪的对焦装置
CN106461572A (zh) 用于光学检查的非成像相干的行扫描仪系统和方法
DE3687029D1 (de) Optische messapparate.
CN108955568A (zh) 无需轴向扫描的表面三维形貌检测装置及其使用方法
ES2239404T3 (es) Aparato y procedimiento para la determinacion de la distorsion optica de un sustrato transparente.
WO2003106918A3 (de) Oberflächenmessvorrichtung und verfahren zur mechanischen sowie berührungslosen-optischen untersuchung von objektoberflächen
CN101532826A (zh) 工件轮廓的非接触式光学量测方法
CN223139402U (zh) 一种高速拉曼光谱成像装置
KR20150021346A (ko) 3차원 형상 측정기
CN106841036A (zh) 激光干涉成像系统中样品池的最佳摆放方式
TW200933123A (en) Apparatus and method for simulataneous confocal full-field micro surface profilometry
Abuazza et al. Multi-beam fibre-optic laser scanning system for surface defect recognition
KR100344344B1 (ko) 휴대용 비파괴 비접촉 광계측기

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NI NO NZ OM PH PL PT RO RU SC SD SE SG SK SL TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP