WO2004011982A1 - Dispositif optique et procede de production associe - Google Patents

Dispositif optique et procede de production associe Download PDF

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Publication number
WO2004011982A1
WO2004011982A1 PCT/JP2003/009067 JP0309067W WO2004011982A1 WO 2004011982 A1 WO2004011982 A1 WO 2004011982A1 JP 0309067 W JP0309067 W JP 0309067W WO 2004011982 A1 WO2004011982 A1 WO 2004011982A1
Authority
WO
WIPO (PCT)
Prior art keywords
fiber array
base
face
optical device
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2003/009067
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English (en)
Japanese (ja)
Inventor
Masashi Fukuyama
Akiyoshi Ide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of WO2004011982A1 publication Critical patent/WO2004011982A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4212—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element being a coupling medium interposed therebetween, e.g. epoxy resin, refractive index matching material, index grease, matching liquid or gel
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres

Definitions

  • the present invention relates to an optical device in which a fiber array having one or more optical fibers is fixed and a method for manufacturing the same, and more particularly, to an optical device suitable for a case where signal light propagating through the fiber array is monitored on the way. And its manufacturing method.
  • WDM wavelength division multiplexing
  • FIG. 13 Conventionally, a technique as shown in FIG. 13 has been disclosed (for example, see Japanese Patent Application Laid-Open No. 2000-264954).
  • an optical fiber 204 is placed in a V-groove 202 of a glass substrate 200, and then an optical fiber 204 is placed on the glass substrate 200 (with respect to its optical axis).
  • a parallel groove 206 is formed so as to cross obliquely.
  • a light reflecting substrate 208 optical member
  • an ultraviolet curable resin (adhesive) 210 is filled in the gap. I have to.
  • the signal light 211 propagating through the optical fiber 204, the light component (reflected light) 214 reflected by the light reflecting substrate 208 is taken out of the cladding. Will be sent out. Therefore, the signal light 2 12 can be monitored by detecting the reflected light 2 14 with, for example, the light receiving element 2 16.
  • a light reflecting substrate 208 as another optical member is inserted into the parallel groove 206 provided in the glass substrate 200 and the optical fiber 204. ing.
  • the adhesive 210 generally has refractive index matching.
  • the wavelength used is 1530 to 1625 nm, and a considerably wide wavelength is used. In some cases, wider wavelengths will also be used. In such a case, it is extremely difficult to match the refractive index at any time, or even at a certain wavelength, but to match them all in such a wide band.
  • the transmitted light is refracted at the interface, and a reflection component is also generated.
  • the transmitted light L is refracted at the interface between the optical fiber 204 and the adhesive 210, and passes through the adhesive 210.
  • the distance between the adhesives 210 is on the order of 10 m
  • the displacement of the transmitted light due to refraction (the displacement of the optical fiber 204 with respect to the ideal optical axis m) cannot be ignored.
  • This refraction also occurs at the interface between the light reflecting substrate 208 and the adhesive 210, and finally the transmitted light L reaches the optical fiber 204, but due to the bending at the two interfaces. Misalignment increases loss (effect of misalignment).
  • the parallel groove 206 When the parallel groove 206 is provided, the light reflecting substrate 208 is accommodated in the parallel groove 206, so that the optical fiber 204 is formed as schematically shown in FIG.
  • the inclination angle of the end face with respect to the reference plane does not match the inclination angle of the end face of the light reflecting substrate 208 with respect to the reference plane.
  • the fact that the inclination angles do not coincide with each other means that the inclination angles vary from one manufacturing object to another.
  • the optical axis angle of the light L transmitted through the light reflecting substrate 208 becomes 4 does not match the optical axis angle of light L passing through There is.
  • the occurrence of such misalignment due to manufacturing variations means that quality cannot be substantially controlled (the effect of misalignment).
  • the light reflecting substrate 208 (1) a half mirror of a multilayer film formed on a quartz substrate, and (2) a single layer film of a material having a desired refractive index is formed on a quartz substrate. (3) A bulk member having a desired refractive index may be used.
  • the reflection and transmission characteristics are naturally designed at a certain incident angle. In other words, if the incident angle changes, various characteristics will change. In particular, the characteristics of polarization plane dependence and wavelength dependence are demanding and sensitive to the incident angle.
  • the reflection characteristics and the transmission characteristics may be adversely affected (incident angle Characteristic variation due to).
  • the reflection is caused by the adhesive 210, there is a possibility that the reflection will interfere with the original reflection from the end face of the light reflecting substrate 208.
  • the thickness of the adhesive 210 varies, and it is difficult to control the thickness. Therefore, it is difficult to control the influence of the interference (the influence of the interference). ).
  • the end face of the optical fiber 204 is formed by grinding, so that it has a rough surface. If the refractive index is perfectly matched with the adhesive 210, this surface state (rough surface) will not be affected, but as described above, the refractive index difference is always at the material interface, so the end surface is rough. For example, both reflected and transmitted light diverge at the end face, and it is difficult to obtain desired characteristics. In addition, the divergence changes the angle of incidence on the light-reflecting substrate 208, which also has an adverse effect on the wavelength and the polarization characteristics (effect on the characteristics of the surface state).
  • the behavior due to environmental changes such as the temperature of the light reflecting substrate 208 (The light reflecting substrate 208 actually moves).
  • the characteristic changes for both the reflected light and the transmitted light characteristic changes due to environmental changes. Ver.
  • the present invention has been made in view of such problems, and considers the influence of positional deviation of transmitted light of an optical device having a monitoring function, the dispersion of characteristics due to an incident angle, the influence of interference, and the characteristics of a surface state. It is an object of the present invention to provide an optical device and a method for manufacturing the same, which are capable of solving problems such as characteristics fluctuation due to the influence of light and environmental changes and suppressing deterioration of characteristics of reflected light and transmitted light. Disclosure of the invention
  • the optical device is an optical device having a structure in which reflected light of light passing through a first fiber array having one or more optical fibers is guided to the outside of the first fiber array.
  • the reflection member is fixed between the first fiber array and the second fiber array via a refractive index matching member.
  • the reflecting member and the end face of the first fiber array are surface-matched and fixed to each other via the refractive index matching member, so that the distance between the reflecting member and the end face of the first fiber array is set.
  • the distance between the reflecting member and the end face of the first fiber array and the distance between the reflecting member and the end face of the second fiber array can be reduced, so that even if refraction occurs at each interface, Almost no misalignment occurs, resulting in low loss (improvement of misalignment effect).
  • the loss can be kept low. However, it is preferably 3 m or less, and more preferably submicron. Although this depends on the conditions for attaching the reflecting member, it is basically a face-to-face attachment, so this is a practicable level. Furthermore, according to the present invention, as described above, the first fiber array and the reflecting member can be fixed by face-to-face contact, so that the inclination angle of the end face of the first fiber array with respect to the reference plane, and The angle of inclination of the end face of the reflection member facing the first fiber array with respect to the reference plane can be substantially the same. Therefore, even if there is refraction in the reflecting member, the positional deviation of the transmitted light does not increase and the loss is low (the effect of the positional deviation is improved).
  • the angle of the reflecting member can be controlled with high accuracy, which suppresses the dispersion of the incident angle.
  • the reflection characteristics and transmission characteristics can be adjusted to the desired characteristics (required characteristics).
  • the variation in the characteristics due to the incident angle can be improved.
  • the first fiber array And the reflecting member can be fixed by surface-to-face matching, so that there can be almost no refractive index matching member (for example, an adhesive layer), and the thickness variation can be reduced. This makes it easier to control the thickness of the index-matching member and to better manage the effects of reflected light interference.
  • the first fiber array and the reflection member are fixed by face-to-face fixing.
  • the end face of the array is optically polished In the first fiber array (and the second fiber array) according to the present invention, the end face is also optically polished.
  • the reflecting member is fixed to the end face of the fiber array that has been optically polished and almost mirror-finished, so that light does not diverge at the end face of the fiber array, and the incident angle can be reduced. No fluctuation and no change in wavelength or polarization characteristics occur (improve the effect of surface state on characteristics).
  • the reflecting member since the reflecting member is fixed in a face-to-face manner between the first fiber array and the second fiber array, the reflecting member is in a rigid state, and changes in environment such as temperature. Even if there is, only the reflection member does not move, and the reflection and transmission characteristics are stable (improvement of characteristic fluctuation due to environmental change).
  • the influence of the positional shift of the transmitted light of the optical device having the monitoring function the variation of the characteristic due to the incident angle, the influence of the interference, the influence on the characteristic of the surface state, the characteristic variation due to the environmental change, and the like.
  • the problem can be solved, and deterioration of the characteristics of reflected light and transmitted light can be suppressed.
  • the reflection member may include a bulk member, and a half mirror film formed on an end surface of the bulk member facing the first fiber array. Further, the reflection member may include a resin film and a half mirror film formed on an end surface of the resin film facing the first fiber array.
  • a first base in which a V groove in which the first fiber array is mounted is formed
  • a second base in which a V groove in which the second fiber array is mounted is formed.
  • An end face of the first base and an end face of the first fiber array substantially coincide with each other
  • an end face of the second base and an end face of the second fiber array substantially coincide with each other.
  • the reflecting member may be interposed between the end surface of the first base and the end surface of the second base.
  • the method for manufacturing an optical device includes a step of optically polishing each end face of a first fiber array having one or more optical fibers and a first fiber array having one or more optical fibers. Fixing the end face of the first fiber array and one end face of the reflection member via an adhesive used as a refractive index matching member; and connecting the other end face of the reflection member to the second fiber array. And fixing the end face with an adhesive used as a refractive index matching member.
  • the other end surface of the reflecting member may be ground and polished.
  • a fifth step of fixing one end face and a sixth step of fixing the end face of the second base to the other end face of the reflection member may be provided.
  • a positioning groove is formed on the third base in addition to the V groove, and the third base is cut in the third step to cut the first base.
  • the sixth step includes: The end face of the second base is face-to-face with the other end face of the reflection member, and a guide bin is inserted into the positioning groove formed by the face-to-face matching. It is preferable to align the second fiber array and then fix the end surface of the second base to the other end surface of the reflection member.
  • FIG. 1 is a configuration diagram showing an optical device according to the first embodiment.
  • FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
  • FIG. 3 shows the optical device according to the first embodiment, T JP2003 / 009067
  • FIG. 8 is a sectional view shown.
  • FIG. 4 is a schematic diagram showing a state of displacement of transmitted light in the optical device according to the first embodiment.
  • FIG. 5 is a configuration diagram illustrating an optical device according to the second embodiment.
  • FIG. 6 is a cross-sectional view taken along the line VI-VI in FIG.
  • FIG. 7 is a cross-sectional view showing a joining portion of a reflection member in the optical device according to the second embodiment.
  • FIG. 8A is an explanatory diagram showing the effect of the adhesive remaining on the clad.
  • FIG. 8B is an explanatory view showing the effect of the concave portion.
  • FIG. 9 is a process block diagram illustrating a manufacturing process of the optical device according to the second embodiment.
  • FIG. 10 is a perspective view showing a third base of the optical device according to the first modified example with a part omitted.
  • FIG. 11 is a perspective view showing an optical device according to a first modification with a part thereof omitted.
  • FIG. 12 is a configuration diagram showing an optical device according to a second modification.
  • FIG. 13 is a perspective view showing a configuration of a monitor device according to a conventional example.
  • FIG. 14 is a cross-sectional view showing a monitor device according to a conventional example viewed from the side.
  • FIG. 15 is an enlarged view showing a parallel groove portion of the monitor device according to the conventional example.
  • FIG. 16 is a schematic diagram showing a state of a positional shift of transmitted light (part 1) in an optical device according to a conventional example.
  • FIG. 17 is a schematic diagram showing a state of positional deviation of transmitted light (part 2) in an optical device according to a conventional example.
  • the optical device 1 OA has a first fiber array unit 12 and a second fiber array unit 14 as shown in FIG.
  • the first fiber array section 12 has a first base 18 having a plurality of V-shaped grooves 16 arranged in parallel on the upper surface.
  • An optical fiber 22 is placed and fixed in each V-groove 16 via a fixing adhesive 20. That is, on the first base 18, an optical fiber array 24 in which a plurality of optical fibers 22 are arranged is mounted and fixed.
  • one holding substrate 26 for holding the optical fiber array 24 on the side of the V-groove 16 is fixed.
  • a mounting surface 30 on which the covering portion 28 of the optical fiber array 24 is mounted is formed on the upper surface of the first base 18, in addition to the V-groove 16 (see FIG. 2).
  • the holder 32 for fixing the covering portion 28 of the optical fiber array 24 is attached to the mounting surface 30.
  • the inclination angle 01 of the end face 40 of the optical fiber array 24 with respect to the reference plane (for example, a vertical plane) and the inclination angle of the end face 42 of the first base 18 with respect to the reference plane. 0 2 is almost the same.
  • the inclination angles 01 and 02 for example, 12 ° or the like can be adopted.
  • the inclination angles 01 and ⁇ 2 be in the range of 15 ° to 25 °.
  • a portion from the end face 42 of the first base 18 to the holding substrate 26 constitutes a monitor section 44.
  • the optical fiber array 24 is formed in the monitor section 44. A part of each propagating signal light is extracted and detected by the light receiving element array 46, for example.
  • the light-receiving element array 46 includes a plurality of light-receiving elements 48 mounted on a wiring board 50, and each light-receiving element 48 is a light-receiving element in the optical fiber array 24.
  • the fibers 22 are arranged at substantially the same arrangement pitch as the arrangement pitch.
  • wiring The substrate 50 has a wiring pattern formed on the surface, and a detection signal (detection current) from each light receiving element 48 is taken out to an external circuit through these wiring patterns.
  • the back-illuminated type is preferably used for the light receiving element array 46. In this case, since no wires are required, higher reliability can be obtained.
  • the light receiving element array 46 is mounted on the first fiber array section 12 by connecting the functional surface 50 a of the wiring board 50 (the surface on which the light receiving element 48 is mounted) to an optical fiber.
  • the light receiving element 48 and the optical fiber 22 are positioned so as to face each other, and are fixed via an adhesive 52 as a refractive index matching layer.
  • the wiring board 50 is fixed on a spacer 54 (see FIG. 1) fixed so as to straddle the optical fiber array 24.
  • the spacer 54 is used for fixing the wiring board 50 to the optical fiber array 24 and for setting the distance between the light receiving element 48 and the optical fiber 22 to a certain distance or more. Be provided.
  • the constant distance indicates, for example, the height of the bonding wire 58 (see FIG. 1) wired from the pad of the light receiving element 48 to the wiring board 50. In this embodiment, For example, it is set to 100 m.
  • the second fiber array section 14 also has a second base 62 having a plurality of V-grooves 60 (see FIG. 3) arranged in parallel on the upper surface.
  • An optical fiber 66 is placed and fixed in each V-groove 60 via a fixing adhesive 64, respectively, to form an optical fiber array 68.
  • a single holding substrate 70 for holding the optical fiber array .68 on the side of the V-groove 60 is also fixed on the second base 62.
  • a mounting surface 74 on which the covering portion 72 of the optical fiber array 68 is mounted is formed, and the mounting surface 74 is also provided with the optical fiber array 68.
  • a holder 76 for fixing the covering portion 72 is attached.
  • the portion sandwiched between the holding substrate 70 and the mounting surface 74 is an open portion 78 from which the optical fiber array 68 is exposed to the outside.
  • the reference plane of the end face 80 of the optical fiber array 68 (for example, The inclination angle 0 3 with respect to the vertical plane) and the inclination angle 0 4 with respect to the reference plane of the end surface 82 of the second base 62 are set to be substantially the same.
  • the inclination angle 0 1 of the end face 40 of the optical fiber array 24 in the first fiber array section 12 is determined.
  • the inclination angle ⁇ 3 of the end face 80 of the optical fiber array 68 in the second fiber array section 14 is almost the same, and the inclination angle 0 2 of the end face 42 of the first base 18 is The inclination angle 04 of the end face 82 of the second base 62 is also substantially the same.
  • the optical device 1 OA according to the first embodiment includes a first fiber array unit 12 and a second fiber array unit 14 via a reflection member 90. Are combined.
  • the end faces of the first fiber array section 12 (the end face 40 of the optical fiber array 24 and the end face 42 of the first base 18) and the reflecting member 90 are fixed to each other via an adhesive 94 serving as a refractive index matching layer
  • the end faces of the second fiber array section 14 (the end face 80 of the optical fiber array 68 and the second base face) are fixed to each other.
  • the end face 82 2) of the table 62 and the other end face 96 of the reflection member 90 are fixed to each other via an adhesive 98 as a refractive index matching layer.
  • the reflecting member 90 has a quartz substrate 100 and a multilayer film (half mirror film 102) formed on one end surface of the quartz substrate 100. Therefore, the end face of the half mirror film 102 constitutes one end face 92 of the reflection member 90.
  • the inclination angle ⁇ 1 of the end face 40 of the optical fiber array 24 in the first fiber array section 12 and the inclination angle ⁇ 5 of the one end face 92 of the reflection member 90 are assumed to be substantially the same.
  • the inclination angle 03 of the end face 80 of the optical fiber array 68 in the second fiber array section 14 is substantially the same as the inclination angle ⁇ 6 of the other end face 96 of the reflection member 90.
  • the first fiber array section 12 and the reflecting member 90 can be fixed by face-to-face matching, and the second fiber array section 14 and the reflecting member 90 can also be fixed by face-to-face matching. it can.
  • the distance d1 between the end face 40 of the optical fiber array 24 and the one end face 92 of the reflection member 90 in the first fiber array section 12 can be set to a submicron level.
  • the distance d1 can be set to 5 m or less even in consideration of the manufacturing variation of the bonding at the time of assembling.
  • the distances d1 and d2 can be set to 5 or less, for example, from the first fiber array section 12 to the second fiber array section 14 via the reflection member 90. Even if refraction occurs at each interface when the light L is transmitted, the position shift of the transmitted light L in the second fiber array section 14 (ideal in the second fiber array section 14) Of the optical axis m with respect to the optical axis m) hardly occurs, resulting in low loss.
  • the reflection member 9 Even if there is refraction in 0, the positional deviation of the transmitted light L does not increase and the loss is low.
  • the reflection member 90 When the reflection member 90 is fixed, the inclination angles 0 5 and ⁇ 6 of the end faces 92 and 96 do not shift, so that the inclination angles 05 and 06 of the reflection member 90 are accurately controlled. This leads to the suppression of the variation of the incident angle, and the reflection characteristics and the transmission characteristics can be adjusted to desired characteristics (required characteristics).
  • the reflecting member 90 can be fixed by face-to-face fixing, almost no adhesive can be provided, and variations in the thickness of the adhesives 94 and 98 can be reduced. it can. For this reason, the thickness of the adhesives 94 and 98 can be easily controlled, and the influence of reflected light interference can be easily managed. This leads to almost no influence of interference, and the characteristics can be improved.
  • the end faces 40 and 80 of the optical fiber arrays 24 and 68 are aligned with the end faces 92 and 96 of the reflection member 90, respectively. I have.
  • the end faces 40 and 80 of the optical fiber arrays 24 and 68 are Because of the optical polishing, the end faces 40 and 80 that are face-to-face with the reflecting member 90 are almost mirror-finished end faces.
  • the light L does not diverge at 40 and 80, and the fluctuation of the incident angle and the fluctuation of the wavelength and the polarization characteristics do not occur.
  • the reflecting member 90 is in a rigid state between the first fiber array unit 12 and the second fiber array unit 14, and only the reflecting member 90 moves even if there is a change in environment such as temperature.
  • the reflection characteristics and transmission characteristics are stable.
  • an optical fiber is placed in a V-groove and fixed with a holding substrate.
  • the refractive index matching is performed on the holding substrate.
  • the light receiving element is installed via an adhesive as a material.
  • the monitor substrate 44 is not provided with the holding substrate 26, but is provided on the cladding of the optical fiber 22 via an adhesive 52 as a refractive index matching. Since the light receiving element 48 is directly installed, the light receiving element 48 can be brought as close as possible to the source of the reflected light. As a result, it is effective in reducing crosstalk. In particular, in the first embodiment, since the holding substrate 26 is provided in a portion other than the monitor portion 44, the optical fiber array 24 can be fixed in this portion, and mechanical Reliability can also be improved.
  • the spacer 54 is also used as the holding substrate 26. Is also good. In this case, the space for installing the holding substrate 26 is reduced. It is also possible to do.
  • the optical device 10B according to the second embodiment has substantially the same configuration as the optical device 1OA according to the above-described first embodiment, but as shown in FIGS.
  • the portion corresponding to the monitor section 44 is cut or polished to obtain, for example, a bottom face 110a.
  • the portion from the end face of the second fiber array portion 14 to the holding substrate 70 is cut or polished, for example, a concave portion 1 1 2 (Sharpened part).
  • the concave portions 112 are mirror-finished with a surface roughness Ra ⁇ lOnm. This is because if the surface roughness is large, there is a concern that the polarization dependence of transmitted light may be degraded.
  • a light receiving element is provided via an adhesive 52 as a refractive index matching layer.
  • the child array 46 is fixed.
  • the optical device 10B according to the second embodiment has the following effects in addition to the effects of the optical device 10A according to the first embodiment described above.
  • the spot diameter of the reflected light is limited because the light receiving area of the light receiving element 48 needs to be small. Since the arrangement pitch is narrow, there is a problem of occurrence of crosstalk that light enters another channel.
  • a concave portion 110 is provided in the clad, and a bottom surface of the concave portion 110 is formed. Since the light receiving element 48 was placed on the 10a via the adhesive 52, the distance from the source of the reflected light to the light receiving surface of the light receiving element 48 was set to be smaller than in the first embodiment. Light receiving element for reflected light 48 The spot diameter on the light receiving surface of 8 can be reduced. This is effective in reducing crosstalk.
  • light reception is performed by using the inner wall 11 Ob in the concave portion 110 formed by grinding or polishing as a reference for installing the light receiving element 48.
  • Passive alignment of the element 48 (and the light receiving element array 46) in the optical axis direction becomes possible.
  • the position of the inner wall 11 Ob in the recess 110 is used as a reference for installation, thereby eliminating the trouble of monitoring the optical signal output as described above. Accordingly, the time required for installing the light receiving element 48 (and the light receiving element array 46) can be reduced, and the process can be simplified.
  • the optical fiber 22 is fixed to the V-groove 16 using an adhesive 114 that does not constitute a refractive index matching layer.
  • an additional adhesive 52 is placed on top of the remaining adhesive (residual adhesive 114 a).
  • the light-receiving element 48 will be installed via the interface, but the light reflected at the interface between the clad and the residual adhesive 114 and the interface between the residual adhesive 114 and the adhesive 52 The output of 1 16 will be weakened.
  • the concave portion 110 is provided in the clad by grinding or polishing, the bottom surface 11 of the concave portion 110 is formed as shown in FIG. 8B. No adhesive 1 1 4 remains on 0a. Therefore, even if the light receiving element 48 is provided on the bottom surface 110a of the concave portion 110 via the adhesive 52, no loss of the reflected light 116 due to the adhesive 114 occurs. .
  • the light receiving element 48 can stably receive light even with respect to thermal fluctuations. That is, when the concave portion 110 is formed by grinding or polishing, a structure where the light receiving element 48 is installed (the bottom surface 110 a of the concave portion 110) has a flat surface. 3 009067
  • the thickness of the adhesive 52 becomes larger toward the left and right from the center line.
  • Adhesive 5 2 used as a refractive index matching layer the thermal expansion coefficient is as large as 2 0 0 ⁇ 3 0 OX 1 0- 7 [1 / C C], the thickness of the adhesive 5 2 not When uniform, stress unevenness due to thermal fluctuations may not be negligible. In such a stress non-uniform state, it is assumed that the refractive index distribution may also be non-uniform.
  • the thickness of the adhesive 52 can be made uniform by forming the concave portion 110 in the clad of the optical fiber 22 by grinding or polishing.
  • the position at which the cutting or polishing is performed is not particularly limited, but it is desirable that the distance from the core end face of the reflecting portion to the light receiving center of the light receiving element 48 be within a range of 5 mm. New This is because the light receiving power of the reflected monitor light is attenuated as the light receiving position is further away from the reflecting member 90.
  • the amount of shaving or polishing be 21 m at a minimum from the upper end of the optical fiber 22 and 55 m at a maximum.
  • the shaving amount be at least 21 m so that the width of 10 a is at least 10.
  • the maximum value of the shaving does not reach the range of the leakage light. For example, in the case of a single-mode fiber with a diameter of 125 zm, it is possible to cut down to 55 m.
  • a third base 120 serving as a base of the first base 18 and the second base 62 is prepared. That is, the third base 120 has a configuration in which the first base 18 and the second base 62 are integrally formed.
  • step S2 a V-groove 16 (60) is formed on the upper surface of the third base 120.
  • step S3 the third base 120 is cut, for example, at the center (the portion shown by a broken line in FIG. 10), and the first base 18 and the second base 62 are cut. Make it.
  • step S4 the optical fibers 22 are placed and fixed in the V-grooves 16 of the first base 18 to form an optical fiber array 24, and the second base 6 2
  • the optical fibers 66 are placed and fixed in the V-grooves 60 of the optical fiber array 60 to form an optical fiber array 68 (see FIG. 11).
  • step S5 thereafter, in step S5, as shown in FIG. 7, one end face 92 of the reflecting member 90 is joined to the end face of the first base 18 via an adhesive 94 as a refractive index matching layer. .
  • the first fiber array unit 12 is configured.
  • step S6 the other end surface 96 of the reflecting member 90 is cut and polished so that the reflecting member 90 has a desired thickness.
  • step S7 as shown in FIG. 7, the other end surface 96 of the reflection member 90 is connected to the end surface 82 of the second base 62 with an adhesive 98 as a refractive index matching layer. And join.
  • each optical fiber 22 of the optical fiber array 24 in the first fiber array unit 12 and the optical fiber in the second fiber array unit 14 are connected.
  • the alignment is performed by aligning each optical fiber 22 of the 18 eyebar array 68.
  • step S8 the light receiving element array 46 is set on the monitor section 44 of the optical fiber array 24 in the first fiber array section 12.
  • a spacer 54 is attached to a part of the functional surface 50a of the wiring board 50, and further, the spacer 50 is attached with the functional surface 50a of the wiring board 50 facing downward.
  • 4 is placed and fixed on the optical fiber array 24, that is, on the bottom 110 a of the recess 110, so as to straddle the optical fiber array 24.
  • the light receiving elements 48 are positioned and fixed so as to correspond to the optical fibers 22 respectively.
  • the fixing is performed by interposing an adhesive 52 as a refractive index matching layer between the optical fiber array 24 and the light receiving element array 46.
  • step S8 When the process in step S8 is completed, the optical device 10B according to the second embodiment is completed.
  • the optical device 1OBa according to the first modified example has substantially the same configuration as the optical device 10B according to the second embodiment described above, but as shown in FIG. Of the upper surface of the base 18 and the second base 62 on both sides of the portion where the V-grooves 16 and 60 are formed, continuous on the first and second bases 18 and 62 A guide groove 130 is formed, and a guide bin 132 is inserted into the guide groove 130.
  • the optical fiber array 24 and the second fiber array in the first fiber array section 12 are joined together. It is necessary to align and join the optical fiber array 68 in the part 14, but in this alignment, it is only necessary that the relative positions of the optical fibers 22 facing each other match.
  • the guide pin 1 is formed in the guide groove 130 formed continuously between the first base 18 and the second base 62. Since 3 2 is inserted, each optical fiber in the optical fiber array 2 4 The relative positions of the optical fiber 22 and the optical fiber 22 in the optical fiber array 68 can be easily matched.
  • the guide groove 130 is guided by the guide groove 130. Alignment can be performed only by inserting the pins 13 2, so that passive alignment can be easily realized, which is advantageous in cost. After the optical fiber arrays 24 and 68 are aligned and fixed, the guide pins 13 and 22 are unnecessary and may be removed.
  • step S2 of FIG. 9 the V-groove 16 is formed on the upper surface of the third base 120.
  • a guide groove 130 (see FIG. 10) is formed.
  • step S3 when the third base 120 is cut to produce the first base 18 and the second base 62, the first base 18 is cut. And a part of the guide groove 130 is formed in each of the second base 62.
  • step S7 when the second base 62 is surface-fitted to the other end surface 96 of the reflecting member 90 via the adhesive 94, as shown in FIG.
  • the guide pin 13 2 is inserted into the guide groove 130 (formed continuously over the first and second bases 18 and 62). insert.
  • the relative positions of the optical fibers 22 of the optical fiber array 24 in the first fiber array section 12 and the optical fiber array 68 in the second fiber array section 14 are changed. Will match. That is, the optical fiber array 24 and the optical fiber array 68 are aligned by passive alignment.
  • the adhesive 94 is cured and the other end face 96 of the reflection member 90 is attached to the end face of the second fiber array section 14 (the end face 82 of the second base 62 and the end face of the optical fiber array 68).
  • the end face 80 is fixed, and thereafter, the optical device 10Ba according to the first modification is completed through step S8.
  • the optical device 1 OB b according to the second modification has a shape in which the second fiber array section 14 is cut in the middle as shown in FIG. 12, and the second fiber array
  • the inclination angle of the other end surface 140 of the key portion 14 is set to 6 ° to 8 °.
  • An optical component 142 such as a PLC (planar waveguide circuit) such as an AWG (array waveguide) or an optical switch of a MEMS (Micro Electro Mechanical System) type is connected to the other end surface 140.
  • PLC plane waveguide circuit
  • AWG array waveguide
  • MEMS Micro Electro Mechanical System
  • a half mirror film 102 is formed on a quartz substrate 100 as the reflection member 90.
  • a half mirror film is formed on one end surface of a polyimide film having a refractive index equal to or substantially equal to that of quartz.
  • the reflecting member may be formed by forming 102.
  • FIGS. 10 and 11 show eight-channel optical devices 10Ba and 10Bc, the basic structure is the same as that of a 12-fiber fiber array with a monitor ring function.
  • the first fiber array unit 12 was manufactured. As shown in FIG. 5, the first fiber array section 12 has a length of 3 mm where the holding substrate 26 is installed, a length of 3 mm of the monitor section 44, and a length of 3 mm of the mounting surface 30. mm, the length of the open part 34 is 2 mm, and the total length is 11 mm. The thickness of both the first base 18 and the holding substrate 26 was 1.5 mm, and the width was 5 mm. As shown in FIG. 7, the inclination angle 01 of the end face 40 of the optical fiber 24 and the inclination angle ⁇ 2 of the end face 42 of the first base 18 were both set to 12 °.
  • the second fiber array portion has a length of 3 mm where the holding substrate 70 is installed, a length of 2 mm from the end face 80 of the second base 62 to the holding substrate 70, and The length of the mounting surface 74 was 3 mm, the length of the open portion 78 was 2 mm, and the total length was 10 mm.
  • the thickness of both the second base 62 and the holding substrate 70 is 1.5 mm, and the width is 5 mm.
  • the inclination angle S 3 of the end face 80 of the optical fiber array 68 and the inclination angle 04 of the end face 82 of the second base 62 were both set to 12 °.
  • a multilayer film was provided on one end face of a quartz substrate 100 having a thickness of 0.5 mm.
  • This multilayer film was a half mirror film 102 having a reflection of 10% and a transmission of 90% at an incident angle of 12 °.
  • a reflecting member 90 was attached to an end face of the first fiber array section 12 with an adhesive 94. At this time, the end face 92 on which the half mirror film 102 was formed was attached to the end face of the first fiber array section 12.
  • the other end face 96 of the reflecting member 90 was polished by a polishing method used for polishing a normal fiber array. At this time, polishing was performed until the thickness of the quartz substrate 100 became 20 urn. Finally, optical polishing was performed, and the other end surface 96 of the reflecting member 90 was also made a mirror surface.
  • a portion corresponding to the monitor portion 44 of the clad of each optical fiber 22 of the optical fiber array 24 in the first fiber array portion 12 is polished by a surface grinder.
  • a recess 110 having a flat bottom 110a is provided. Polishing was performed so that the bottom surface 110a of the concave portion 110 was located at a position 20 m from the center of each core of the optical fiber 22.
  • the other end face 96 of the reflecting member 90 attached to the first fiber array section 12 and the end face of the second fiber array section 14 are face-to-face with an adhesive 98, and The optical fiber array 24 in the first fiber array section 12 and the optical fiber array 68 in the second fiber array section 14 were aligned and fixed with the adhesive 98.
  • the light receiving element array 46 was prepared.
  • the surface of each light receiving element 48 was subjected to an AR coating with a refractive index of 1.45 (quartz).
  • Alumina was used for the wiring board 50, and the thickness was lmm.
  • the light receiving element 48 having a thickness of 200 m was used.
  • the wiring board 5 is set so that the distance between the optical fiber 22 and the light receiving element 48 is 100 m, which is a distance that the bonding wire 58 (see FIG. 5) does not contact the optical fiber 22.
  • a spacer 54 having a thickness of 300 m was stuck on the functional surface 50 a of No. 0.
  • the light receiving element array 46 was installed.
  • the end of the reflecting member 90 is imaged, and while the image of the end is viewed, the light receiving element array 46 is roughly positioned, and then the position between the light receiving element 48 of the light receiving element array 46 and the optical fiber 22 is determined.
  • An adhesive 52 as a refractive index matching layer was applied to the substrate.
  • the spacer 54 was placed such that the lower surface of the spacer 54 was in contact with the bottom surface 110 a of each recess 110 of the optical fiber 22.
  • the adhesive 52 used was an ultraviolet-curable adhesive having a refractive index of 1.45 so that no reflection would occur when light exited from the clad (quartz) of the optical fiber 22. .
  • a laser beam L having a wavelength of 1.55 is incident from the other end of the optical fiber array 24 in the first fiber array section 12 and the reflected light reflected through the reflecting member 90 is received by a light receiving element array.
  • the installation position of the light receiving element array 46 was finely adjusted to maximize the intensity.
  • the adjustment was performed while monitoring the intensity of the reflected light only at 1 11 and 12 ch.
  • the monitor of the intensity of the reflected light was detected by applying a probe to the wiring pattern formed on the wiring board 50.
  • the adhesive 52 of the light receiving element array 46 was irradiated with ultraviolet rays to be temporarily cured.
  • the wiring board 50 is made of alumina and does not transmit ultraviolet rays.
  • the fiber array according to this embodiment is installed in a certain direction in the ultraviolet irradiation device, and the wiring array 50 is placed around the wiring board 50.
  • the surrounding adhesive 52 was cured by irradiating ultraviolet rays.
  • the loss to the signal light (transmission) is the loss of ld B, including the attenuation of the reflected light.
  • PDL 0.1 dB
  • WDL 0.2 dB, cross between channels! ⁇ It was a good 50 dB.
  • optical device and the method of manufacturing the same according to the present invention are not limited to the above-described embodiments, but may adopt various configurations without departing from the gist of the present invention.
  • the influence of the positional shift of the transmitted light of the optical device having the monitoring function, the variation of the characteristics due to the incident angle, the influence of the interference, Problems such as the influence of the state on the characteristics and the fluctuation of the characteristics due to environmental changes can be solved, and the deterioration of the characteristics of the reflected light and the transmitted light can be suppressed.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

L'invention concerne un dispositif optique (10A) présentant une structure guidant la lumière de réflexion de la lumière (L) traversant un réseau de fibres optiques (24) présentant au moins une fibre optique (22) jusqu'à l'extérieur du réseau de fibres optiques (24). Ce dispositif comprend le réseau de fibres optiques (24) susmentionné, un autre réseau de fibres optiques (68) présentant au moins une fibre optique (66), et un élément de réflexion (90) disposé entre la face d'extrémité (40) du réseau de fibres optiques (24) et la face d'extrémité (80) du réseau de fibres optiques (68). L'élément de réflexion (90) est fixé entre les réseaux de fibres optiques (24, 68), par le biais d'adhésifs (94, 98) servant de couches de correspondance de reflectance.
PCT/JP2003/009067 2002-07-25 2003-07-17 Dispositif optique et procede de production associe Ceased WO2004011982A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002217335 2002-07-25
JP2002-217335 2002-07-25

Publications (1)

Publication Number Publication Date
WO2004011982A1 true WO2004011982A1 (fr) 2004-02-05

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PCT/JP2003/009067 Ceased WO2004011982A1 (fr) 2002-07-25 2003-07-17 Dispositif optique et procede de production associe

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WO (1) WO2004011982A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0675137A (ja) * 1992-08-26 1994-03-18 Hitachi Ltd 光伝送モジュール
US5339373A (en) * 1992-09-22 1994-08-16 Rohm Co., Ltd. Optical branching and coupling device
WO1997006458A1 (fr) * 1995-08-03 1997-02-20 Matsushita Electric Industrial Co., Ltd. Dispositif optique et procede pour le fabriquer
WO2002031547A2 (fr) * 2000-10-11 2002-04-18 Matsushita Electric Industrial Co., Ltd. Appareil et procede permettant de transmettre et detecter la lumiere

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0675137A (ja) * 1992-08-26 1994-03-18 Hitachi Ltd 光伝送モジュール
US5339373A (en) * 1992-09-22 1994-08-16 Rohm Co., Ltd. Optical branching and coupling device
WO1997006458A1 (fr) * 1995-08-03 1997-02-20 Matsushita Electric Industrial Co., Ltd. Dispositif optique et procede pour le fabriquer
WO2002031547A2 (fr) * 2000-10-11 2002-04-18 Matsushita Electric Industrial Co., Ltd. Appareil et procede permettant de transmettre et detecter la lumiere

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