WO2004106945A3 - 電子部品試験装置 - Google Patents

電子部品試験装置 Download PDF

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Publication number
WO2004106945A3
WO2004106945A3 PCT/JP2004/007363 JP2004007363W WO2004106945A3 WO 2004106945 A3 WO2004106945 A3 WO 2004106945A3 JP 2004007363 W JP2004007363 W JP 2004007363W WO 2004106945 A3 WO2004106945 A3 WO 2004106945A3
Authority
WO
WIPO (PCT)
Prior art keywords
chip
moving device
held
output terminal
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2004/007363
Other languages
English (en)
French (fr)
Other versions
WO2004106945A1 (ja
WO2004106945A2 (ja
Inventor
Akihiko Ito
Kazuyuki Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to US10/558,385 priority Critical patent/US7511522B2/en
Priority to JP2005506502A priority patent/JPWO2004106945A1/ja
Publication of WO2004106945A1 publication Critical patent/WO2004106945A1/ja
Publication of WO2004106945A2 publication Critical patent/WO2004106945A2/ja
Publication of WO2004106945A3 publication Critical patent/WO2004106945A3/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56016—Apparatus features
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

　ＩＣチップ（ＩＣ）の入出力端子（ＨＢ）をテストヘッドのコンタクト部に押し付けて試験を行う電子部品試験装置であって、ＩＣチップ（ＩＣ）の入出力端子（ＨＢ）が導出している前面を把持部（４１４）により把持して移動させるＩＣ移動装置４１０と、把持される前のＩＣチップ（ＩＣ）の前面を撮像する第１のカメラ（４１５）と、把持されたＩＣチップ（ＩＣ）の背面を撮像する第２のカメラ（４２０）と、第１のカメラ（４１５）及び第２のカメラ（４２０）により撮像された画像情報から、ＩＣ移動装置（４１０）に把持されたＩＣチップ（ＩＣ）の入出力端子（ＨＢ）の位置を算出し、当該算出結果に基づいて、ＩＣ移動装置（４１０）に把持されたＩＣチップ（ＩＣ）の入出力端子（ＨＢ）のコンタクト部に対する相対的位置を特定する画像処理装置と備え、ＩＣ移動装置４１０は、画像処理装置により特定されたＩＣチップ（ＩＣ）の入出力端子（ＨＢ）のコンタクト部に対する相対的位置に基づいて、ＩＣチップの位置を補正する。
PCT/JP2004/007363 2003-05-30 2004-05-28 電子部品試験装置 Ceased WO2004106945A2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US10/558,385 US7511522B2 (en) 2003-05-30 2004-05-28 Electronic device test apparatus
JP2005506502A JPWO2004106945A1 (ja) 2003-05-30 2004-05-28 電子部品試験装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2003/006835 WO2004106954A1 (ja) 2003-05-30 2003-05-30 電子部品試験装置
JPPCT/JP03/06835 2003-05-30

Publications (3)

Publication Number Publication Date
WO2004106945A1 WO2004106945A1 (ja) 2004-12-09
WO2004106945A2 WO2004106945A2 (ja) 2004-12-09
WO2004106945A3 true WO2004106945A3 (ja) 2005-02-17

Family

ID=33485800

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2003/006835 Ceased WO2004106954A1 (ja) 2003-05-30 2003-05-30 電子部品試験装置
PCT/JP2004/007363 Ceased WO2004106945A2 (ja) 2003-05-30 2004-05-28 電子部品試験装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/006835 Ceased WO2004106954A1 (ja) 2003-05-30 2003-05-30 電子部品試験装置

Country Status (7)

Country Link
US (1) US7511522B2 (ja)
JP (1) JPWO2004106945A1 (ja)
KR (1) KR100815490B1 (ja)
CN (1) CN1788205A (ja)
AU (1) AU2003241977A1 (ja)
TW (1) TW200504376A (ja)
WO (2) WO2004106954A1 (ja)

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JP2011086880A (ja) * 2009-10-19 2011-04-28 Advantest Corp 電子部品実装装置および電子部品の実装方法
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TWI418811B (zh) * 2011-02-14 2013-12-11 久元電子股份有限公司 封裝晶片檢測與分類裝置
JP2013024829A (ja) * 2011-07-26 2013-02-04 Seiko Epson Corp 電子部品搬送装置及び電子部品搬送方法
JP2013053991A (ja) 2011-09-06 2013-03-21 Seiko Epson Corp ハンドラー及び部品検査装置
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JP2013145134A (ja) * 2012-01-13 2013-07-25 Advantest Corp ハンドラ装置および試験装置
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KR101362524B1 (ko) * 2012-07-27 2014-02-17 세메스 주식회사 전자 부품 수납 장치
TWI472778B (zh) * 2013-08-30 2015-02-11 Chroma Ate Inc System - level IC test machine automatic retest method and the test machine
KR101508433B1 (ko) * 2013-09-11 2015-04-07 주식회사 엘지씨엔에스 Ic칩 리더기 및 그것의 동작 방법
CN106959410B (zh) * 2013-11-11 2019-10-18 伊斯梅卡半导体控股公司 用于处理构件的组件和方法
JP2015232446A (ja) * 2014-06-09 2015-12-24 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
KR20180033119A (ko) * 2015-07-31 2018-04-02 이스메카 세미컨덕터 홀딩 에스.아. 부품 취급 조립체 및 부품 취급 방법
CN106959409A (zh) * 2015-10-30 2017-07-18 精工爱普生株式会社 电子部件搬运装置以及电子部件检查装置
JP2017083373A (ja) * 2015-10-30 2017-05-18 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
CN107176450A (zh) * 2016-03-09 2017-09-19 精工爱普生株式会社 电子部件运送装置、以及电子部件检查装置
KR102656451B1 (ko) * 2016-03-18 2024-04-12 (주)테크윙 전자부품 테스트용 핸들러
TW201738577A (zh) * 2016-03-29 2017-11-01 三角設計公司 積體電路測試點視像對準系統
CN107632656A (zh) * 2016-07-19 2018-01-26 扬智科技股份有限公司 集成电路结构
CN107931154B (zh) * 2016-10-13 2019-07-26 泰克元有限公司 电子部件测试用分选机及其示教点调整方法
US10473714B2 (en) * 2017-03-06 2019-11-12 Asm Technology Singapore Pte Ltd Method and apparatus for aligning electronic components
US10297043B2 (en) * 2017-04-07 2019-05-21 Advantest Corporation Detector for detecting position of IC device and method for the same
JP6809978B2 (ja) * 2017-04-28 2021-01-06 株式会社アドバンテスト 電子部品試験装置用のキャリア
US10324127B2 (en) * 2017-06-08 2019-06-18 Advantest Corporation Electronic component handling apparatus, electronic component testing apparatus, and electronic component testing method
US11961220B2 (en) * 2018-01-23 2024-04-16 Texas Instruments Incorporated Handling integrated circuits in automated testing
TWI679428B (zh) * 2019-02-01 2019-12-11 迅得機械股份有限公司 訊號接通裝置及訊號接通方法
TWI729822B (zh) * 2020-05-22 2021-06-01 美商第一檢測有限公司 環境控制設備及晶片測試系統
JP7638723B2 (ja) * 2021-02-18 2025-03-04 東京エレクトロン株式会社 検査装置のセットアップ方法及び検査装置
CN113835019B (zh) * 2021-11-25 2022-02-18 河北圣昊光电科技有限公司 一种芯片自动对位装置及对位方法
CN116343213B (zh) * 2023-05-31 2023-08-25 成都数之联科技股份有限公司 模型训练及芯片的字符识别方法、装置、设备和介质
TWI918185B (zh) * 2023-10-19 2026-03-11 韓商泰克元股份有限公司 用於測試電子元件的處理機及用於測試電子元件的處理機的電子元件重新配置方法

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Also Published As

Publication number Publication date
CN1788205A (zh) 2006-06-14
AU2003241977A1 (en) 2005-01-21
KR100815490B1 (ko) 2008-03-24
JPWO2004106945A1 (ja) 2006-07-20
US20070069752A1 (en) 2007-03-29
US7511522B2 (en) 2009-03-31
KR20060003110A (ko) 2006-01-09
WO2004106945A2 (ja) 2004-12-09
WO2004106954A1 (ja) 2004-12-09
TW200504376A (en) 2005-02-01

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