WO2004110941A1 - Dispositif de frittage et procede de frittage pour matiere de base de fibre optique - Google Patents

Dispositif de frittage et procede de frittage pour matiere de base de fibre optique Download PDF

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Publication number
WO2004110941A1
WO2004110941A1 PCT/JP2004/008460 JP2004008460W WO2004110941A1 WO 2004110941 A1 WO2004110941 A1 WO 2004110941A1 JP 2004008460 W JP2004008460 W JP 2004008460W WO 2004110941 A1 WO2004110941 A1 WO 2004110941A1
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Prior art keywords
sintering
optical fiber
preform
base material
change
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Ceased
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PCT/JP2004/008460
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English (en)
Japanese (ja)
Inventor
Tadakatsu Shimada
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings

Definitions

  • the present invention relates to the manufacture of a quartz glass rod as a base material of an optical communication fiber, and more particularly, to a sintering apparatus and a sintering method for an optical fiber base material.
  • a porous preform for an optical fiber formed by depositing glass particles is sintered and transparently glassed to form an optical fiber preform.
  • An example of a method of sintering a transparent base material into a transparent glass will be described with reference to FIG.
  • a porous preform 2 is attached to a support portion 1 in a vertically moving and rotating manner, and the porous preform 2 moves in a direction of an arrow in a sintering furnace 3 so that the porous preform 2 is From the end 4 side to the end 5 side, the heater 6 sequentially heats and raises the temperature to 1400 to 1600 ° C., turns into a transparent glass, and forms an optical fiber preform.
  • the outer diameter of the optical fiber preform manufactured in this way fluctuates, and it is necessary to adjust the outer diameter.
  • the outer diameter of a glass lathe or the like has increased. It is difficult to adjust the diameter.
  • Fibers for optical communication are manufactured by heating and stretching an optical fiber preform and then drawing it.
  • the outer diameter of the optical fiber preform varies, the airflow in the drawing apparatus changes, This affects the dimensional accuracy of the optical fiber obtained by drawing, and the characteristics of the optical fiber fluctuate. Therefore, in order to improve the dimensional accuracy of the sintered optical fiber preform, the outer diameter is adjusted while heating and stretching using a burner and an electric furnace before being drawn.
  • the optical fiber preform 12 after sintering has a thick outer portion, a portion (a), a thinner portion, and a portion (b).
  • Patent Document 1 discloses that a sintered optical fiber preform is heated by a burner to a predetermined diameter. It states that the outer diameter is measured at two points near the drawn-down part when the diameter is reduced and the drawing speed is adjusted to increase the dimensional accuracy of the optical fiber preform to be drawn. However, there is a problem that the cost is increased when the outer diameter adjusting force is adjusted.
  • Patent Document 2 measures the temperature of the porous base material during sintering, and changes the temperature of the heater and the rate of reduction based on the measured temperature. It controls the temperature of the material, but if the outer diameter or viscosity changes, the amount of expansion and contraction cannot be made constant by temperature control alone.
  • Patent Document 1 JP-A-56-9231
  • Patent Document 2 JP-A-11-322356
  • Patent Document 3 JP-A-62-167236
  • An object of the present invention is to provide a porous base material having a large outer diameter, having a uniform outer diameter in the longitudinal direction after sintering, eliminating the need for a conventionally required outer diameter adjusting process, and drawing the wire as it is.
  • An object of the present invention is to provide an optical fiber preform sintering apparatus and a sintering method which can be used for manufacturing and reduce the manufacturing cost.
  • the fiber preform sintering apparatus is an apparatus for sintering a porous preform for optical fiber and producing a vitreous glass by vitrifying the porous preform. It has a function to detect the amount of expansion and contraction of the base material, and a function to detect the amount of expansion and contraction of the base material in the longitudinal direction. It consists of an arithmetic unit that determines the position of the lower end and calculates the amount of expansion and contraction from the position of the lower end and the distance of the base material being lowered.
  • the camera for photographing the lower end of the base material has a moving means for moving in synchronization with the movement of the base material.
  • the sintering apparatus further includes an adjusting unit that obtains a rate of change in the amount of expansion and contraction of the base material in the longitudinal direction and adjusts the rate of change to a preset rate of change.
  • the method for sintering an optical fiber preform of the present invention is a method for producing an optical fiber preform by sintering a porous preform for optical fiber obtained by depositing soot on the surface of a core rod and turning it into a transparent glass.
  • the amount of expansion and contraction of the base material in the longitudinal direction is measured to determine the rate of change, and adjustment is performed so that the rate of change becomes a preset rate of change.
  • the amount of expansion and contraction of the outer diameter of the porous preform for optical fibers during sintering was measured in the longitudinal direction in advance, and the amount of expansion and contraction of each part and the reference position were measured.
  • the ratio to the amount of expansion and contraction was determined, and the outer diameter was changed in the longitudinal direction to the outer diameter obtained by multiplying the ratio by an inverse number.
  • the rate of change is adjusted by adjusting the temperature of the heater of the sintering furnace and / or the feed rate of the base material. For example, if the calculated rate of change exceeds an upper limit that is greater than the preset rate of change, the heater temperature is reduced or the rate of reduction of the base material is increased, and the determined rate of change is If the temperature falls below the lower limit, raise the heater temperature or reduce the lowering speed of the base material.
  • the output of the heater and / or the pull-down speed of the porous base material are adjusted such that the difference between the measured change rate of the amount of expansion and contraction of the porous base material and the set change rate becomes small.
  • FIG. 1 is a schematic cross-sectional view showing an example of a method for sintering a porous base material to form a transparent glass.
  • FIG. 2 is a schematic cross-sectional view illustrating a method for manufacturing a porous preform.
  • FIG. 3 is a schematic sectional view showing a change in outer diameter of an optical fiber preform after sintering.
  • FIG. 4 is a graph showing a distribution of a relative outer diameter in a longitudinal direction obtained from a change in an amount of expansion and contraction of an outer diameter of a porous base material before and after sintering.
  • FIG. 5 is a schematic cross-sectional view of a core rod 20 manufactured by changing the outer diameter.
  • FIG. 6 is a schematic cross-sectional view of a porous base material 30 in which a soot 32 is deposited on the core rod 20 of FIG.
  • FIG. 7 is a schematic sectional view showing one example of a sintering apparatus of the present embodiment.
  • the present inventors previously measured the change in the outer diameter of the porous preform for optical fiber during sintering in the longitudinal direction, and determined the change in the outer diameter at the reference position in the longitudinal direction. Determine the ratio of the change in the outer diameter of each part in the longitudinal direction, adjust the outer diameter in the longitudinal direction of the core rod in advance to the reciprocal multiple of the ratio of the change in the outer diameter, and deposit soot around the core rod by an external method. A soot is deposited so that the ratio between the thickness and the outer diameter of the core rod becomes constant, and a porous preform is manufactured. By sintering the porous preform, the outer diameter of the optical fiber preform is reduced. They have found that they can be made uniform. Details of a method of changing the outer diameter of the core rod in the longitudinal direction will be described later.
  • this embodiment uses a porous base material in which soot is deposited on a core rod whose outer diameter has been changed in the longitudinal direction in advance, and expands and contracts the base material in the longitudinal direction during sintering of the porous base material.
  • a porous base material in which soot is deposited on a core rod whose outer diameter has been changed in the longitudinal direction in advance, and expands and contracts the base material in the longitudinal direction during sintering of the porous base material.
  • FIG. 2 is a diagram illustrating a method for manufacturing a porous preform for an optical fiber by an external CVD method (OVD method).
  • the core rod 7 of the porous base material 2 is composed of a core and a part of a clad, and is supported by a core rod supporting member so as to be rotatable around an axis. Below this core opening 7, a burner 8 that can move left and right is installed.
  • An oxyhydrogen burner is usually used for the burner 8, and a raw material for an optical fiber, for example, a vapor of SiCl or the like and a reaction gas (hydrogen gas and oxygen gas) are blown onto the core rod 7, and the acid rod is burned.
  • a raw material for an optical fiber for example, a vapor of SiCl or the like and a reaction gas (hydrogen gas and oxygen gas) are blown onto the core rod 7, and the acid rod is burned.
  • the porous base material 2 By depositing glass fine particles (soot) synthesized by hydrolysis in an elementary flame on the core rod 7, the porous base material 2 is formed.
  • Members such as quartz are connected to the non-soot deposition portions at both ends of the core rod, and are often used as grip portions.
  • the porous preform 2 manufactured as described above is sintered using a sintering furnace 3 that heats the base material in the longitudinal direction, such as the sintering furnace shown in Fig. 1.
  • a sintering furnace 3 that heats the base material in the longitudinal direction, such as the sintering furnace shown in Fig. 1.
  • the amount of change in outer diameter before and after sintering is measured in the longitudinal direction, and the amount of change in outer diameter at the reference point (the position of the relative position 0 shown in FIG. 4) is set to 1, and the outer diameter of each part in the longitudinal direction is determined.
  • the ratio of the amount of change to the amount of change in the outer diameter at the reference point, ie, the relative outer diameter, was determined over the longitudinal direction.
  • Fig. 4 shows the results.
  • FIG. 5 is a schematic cross-sectional view of the core rod 20 manufactured by changing the outer diameter.
  • FIG. 6 is a schematic cross-sectional view of the porous base material 30 in which the soot 32 is deposited on the core rod 20 of FIG. is there.
  • the changes in the outer diameters of the core rod 20 and the porous base material 30 are exaggerated for the sake of explanation.
  • the outer diameter of the core rod 20 is changed in the longitudinal direction.
  • the core rod 20 is manufactured by changing the outer diameter in the longitudinal direction by a multiple of a reciprocal value of the relative outer diameter obtained earlier, that is, a reciprocal multiple.
  • the core rod 20 having a substantially uniform outer diameter is prepared, and the outer diameter of the prototype is reduced or increased by heating and pulling or shrinking the axial direction of the prototype.
  • the soot 32 is deposited on the core rod 20.
  • soot is deposited by making the outer diameter of the core rod relatively small in advance, and soot is deposited by making the outer diameter of the core rod relatively large in advance where the outer diameter of the optical fiber preform becomes narrower.
  • the outer diameter of the sintered optical fiber preform 12 has a distribution shown in Fig. 4 when a core rod 7 having a uniform outer diameter is used, the outer diameter of the core rod 20 is reciprocal times the outer diameter. Determine the diameter.
  • the core rod 20 is manufactured by changing the outer diameter in the longitudinal direction by a reciprocal multiple of the relative outer diameter obtained earlier, and the force for depositing the soot 32 thereon is obtained in this manner. Since the outer diameter of the porous preform is not constant in the longitudinal direction, the expansion and contraction of the optical fiber preform 12 after sintering is the same as that of the conventional porous preform 2 having a constant outer diameter. It has a different appearance from that of transparent vitrification.
  • the outer diameter of the core rod 20 is changed in the longitudinal direction by a reciprocal multiple of the relative outer diameter based on the measurement data in FIG. 4 obtained by sintering the porous base material 2 having a constant outer diameter, the initial design It may deviate from the outer diameter distribution.
  • the relative outer diameter may be corrected in advance using data obtained by manufacturing and sintering the porous preform 30 by changing the outer diameter of the core rod 20.
  • the thickness of the soot 32 that is externally deposited on the core rod 20 is manufactured while adjusting the manufacturing conditions so that the ratio of the soot 32 to the outer diameter of the core rod 20 is constant in the longitudinal direction. Toyore. It is preferable that the soot 32 be deposited by changing the moving speed of the burner 8 relative to the core rod 20 and the amount of raw material supplied to change the amount of deposition in the longitudinal direction. For example, when the ratio of the outer diameter of the core rod 20 is r: r: r as shown in FIG.
  • the soot 32 is deposited so that 1 2 3 1 1 2 2 and r / R are equal to each other.
  • the core rod 20 having the outer diameter for which the amount of change is anticipated is used, so that sintering and transparent vitrification are performed.
  • the outer diameter of the optical fiber preform becomes uniform in the longitudinal direction.
  • the outer diameter of the core rod 20 in the longitudinal direction is changed in accordance with the sintering method, the function of the apparatus, and the like. After light What is necessary is just to determine in consideration of the shape of a fiber preform. Usually, the outer diameter after sintering is set so as to be constant in the longitudinal direction, but the outer diameter after sintering can be changed in the longitudinal direction according to the requirement of the drawing step.
  • the sintering conditions of the porous base material 30 are variously changed, and the rate of change in the amount of expansion and contraction in the longitudinal direction of the porous base material 30 under each sintering condition is measured.
  • the resulting finishing force of the optical fiber preform S ie, the accuracy of the finished outer diameter of the optical fiber preform, is measured.
  • correlation data of the sintering conditions, the rate of change, and the finish accuracy are accumulated.
  • a change rate at which the finishing accuracy is increased is obtained in advance.
  • the change rate of the expansion / contraction amount at which the finishing accuracy is increased is set in the arithmetic unit 22 in advance.
  • the arithmetic unit 22 measures the amount of expansion and contraction in the longitudinal direction during sintering of the porous base material 30 to determine the rate of change, and controls the heater 6 so that the determined rate of change is a preset rate of change. Control the temperature and / or the speed of pulling down by the support 1. Thereby, the sintering apparatus of the present embodiment finishes the outer diameter of the optical fiber preform uniformly.
  • FIG. 7 shows an example of the manufacturing apparatus of the present embodiment.
  • the porous base material 30 rotatably attached to the support 1 is moved in the direction of the arrow in the sintering furnace 3 so that the porous base material 30 is sequentially moved from the end 40 side to the end 50 side. Heated to 1400-1600 ° C by the heater 6, the temperature was raised, and the glass was turned into a transparent glass and used as an optical fiber preform.
  • the camera 200 photographs the lower end of the porous base material that expands and contracts by sintering from outside the furnace tube 11.
  • the arithmetic unit 220 recognizes the position of the lower end of the porous base material from the image of the lower end taken by the camera 200. Then, the lowering distance of the porous base material 30 obtained from the linear scale value (not shown) and the amount of rotation of the lowering motor, the moving distance of the lower end of the porous base material obtained by analyzing the image, and the camera movement From the moving distance of the camera 200 by the mechanism 240, the amount of expansion and contraction of the porous base material is obtained for each down distance. Then, the change in the amount of expansion and contraction according to the change in the reduction distance is obtained as the change rate of the amount of expansion and contraction. The rate of change in the amount of expansion and contraction may also be the change in the amount of expansion and contraction per unit time.
  • the image processing for recognizing the position of the lower end of the base material from the image captured by the camera 200 and the calculation processing for calculating the amount of expansion and contraction of the porous base material using the recognized lower end position are both performed by the arithmetic unit 220, but the image processing and the arithmetic processing are independent of each other.
  • the processing may be distributed to the image processing device and the arithmetic processing device.
  • the manufacturing apparatus of the present embodiment obtains the difference between the rate of change in the amount of expansion and contraction thus obtained and the rate of change set in advance, and lowers the heater temperature and / or the temperature so that the difference falls within a certain range.
  • an adjustment unit for adjusting the output of the motor for use that is, the adjusting unit adjusts the heater temperature and / or the output of the motor for lowering the motor so that the change rate of the expansion / contraction amount calculated by the arithmetic unit 220 becomes a predetermined change rate.
  • the adjustment unit is, for example, the arithmetic unit 220.
  • the camera 200 may have a mechanism that moves in synchronization with the speed at which the porous preform is lowered.
  • the arithmetic unit 220 calculates only the amount of expansion and contraction of the base material based on only the change in the position of the lower end of the base material in the image captured by the camera 200 without using the moving distance of the base material and the moving distance of the base material. Can be detected. That is, the change in the position of the lower end of the base material in the image of the camera 200 can be directly measured as the amount of expansion and contraction. According to such a method, since the amount of expansion and contraction of the base material in the longitudinal direction is smaller than the distance by which the porous base material is lowered by 1/10 or less, the image of the camera 200 is enlarged so that the lower end of the base material can be obtained. Can be accurately recognized. Therefore, the change rate of the amount of expansion and contraction in the longitudinal direction of the base material can be calculated with higher accuracy.
  • the amount of expansion and contraction of the base material in the longitudinal direction obtained in the present embodiment can be uniquely obtained by measuring the change in the position of the lower end. In this point, a measurement error is less likely to occur than when measuring an outer diameter that tends to vary depending on the measurement direction. Therefore, in the present embodiment, the elongation rate of the base material is determined based on the change rate of the elongation amount of the base material in the longitudinal direction. In this embodiment, the elongation rate of the base material is determined based on the change rate of the elongation amount of the base material in the outer diameter direction. Higher accuracy than required.
  • the change in the outer diameter of the porous base material before and after sintering is measured in the longitudinal direction to calculate the relative outer diameter of each part (see Fig. 4), and the outer diameter of the core rod in the longitudinal direction is calculated as the relative outer diameter. It was adjusted to the reciprocal multiple of.
  • a porous preform 30 was produced by an external CVD method.
  • the porous base material 30 was heated from the end 4 side to the end 5 side in the sintering furnace 3 and sequentially heated to about 1400 to 1600 ° C. did.
  • the amount of change in outer diameter before and after sintering was measured in the longitudinal direction, and the change in outer diameter at the reference point (the position at the relative position 0 shown in Fig. 4) was set to 1.
  • the ratio of the amount to the change in the outer diameter of the reference point, ie, the relative outer diameter, was determined over the longitudinal direction.
  • Figure 4 shows the results.
  • the outer diameter of the core rod in the longitudinal direction is adjusted to the reciprocal multiple of the relative outer diameter, and the porous base material 30 is formed using the adjusted core rod.
  • the arithmetic unit 220 measures the amount of expansion and contraction of the porous base material 30 in the longitudinal direction and calculates the rate of change.
  • the outer diameter of the optical fiber preform is made constant by changing the heater temperature and / or the pull-down speed so that
  • the arithmetic unit 220 calculates the distance by which the porous base material 30 is lowered, the moving distance of the camera 200 that captures the lower end of the porous base material 30, and the expansion and contraction of the porous base material 30 based on the image captured by the camera 200. Determine the rate of change of quantity. Then, when the calculated change rate exceeds the upper limit value larger than the preset change rate, the temperature of the heater 6 is lowered, and the calculated change rate falls below the lower limit value smaller than the preset change rate. In this case, control is performed so that the temperature of the heater 6 is increased. In this way, the porous preform 30 was sintered and transparently vitrified to obtain an optical fiber preform. When the shape of the optical fiber preform obtained by this example was examined, the rate of change of the outer diameter in the longitudinal direction was about 1% at the maximum even when 50 lots were manufactured continuously. A remarkable effect was obtained.
  • a porous preform 30 manufactured in the same manner as in Example 1 was prepared, and the porous preform 30 was used in the same sintering furnace as in Example 1, from the end 4 side to the end 5 side. , And sequentially heated to about 1400 1600 ° C for sintering.
  • the arithmetic unit 220 calculates the distance of the lowering of the porous base material 30 and the moving distance of the camera 200 for photographing the lower end of the porous base material 30, and the amount of expansion and contraction of the porous base material 30 based on the image taken by the camera 200. Find the rate of change. When the obtained change rate exceeds an upper limit value larger than a preset change rate, the lowering speed of the porous base material 30 is reduced. When the obtained rate of change falls below a lower limit that is smaller than a predetermined rate of change, the pulling-down speed of the porous base material 30 is reduced. In this way, the porous preform 30 was sintered and vitrified to obtain an optical fiber preform.
  • the rate of change of the outer diameter in the longitudinal direction was a maximum of about 1% change in the outer diameter even when 50 lots were continuously manufactured. The same effect was obtained.
  • the temperature of the heater 6 or the temperature of the porous base material 30 is determined based on the difference between the rate of change in the amount of expansion and contraction of the porous base material 30 and a predetermined rate of change. Sintered force with feedback to adjust the lowering speed It is possible to adjust both the temperature of the heater 6 and the ⁇ I lowering speed of the porous base material 30 at the same time.
  • a porous base material was produced by an external CVD method. Using a sintering furnace as shown in Fig. 1, this porous preform was heated to about 1400-1600 ° C from end 4 to end 5 and sintered and transparent vitrified to form an optical fiber base. Material.
  • the outer diameter varied about 13% in the longitudinal direction.
  • a porous preform was produced in the same manner as in Example 1, that is, using a core rod whose outer diameter was changed in the longitudinal direction, and using a sintering furnace as shown in FIG. Toward the end 5 side, the material was heated to about 1400-1600 ° C, sintered, and made into a transparent glass to obtain an optical fiber preform. After sintering, the shape of the obtained optical fiber preform was examined. The rate of change in the outer diameter in the longitudinal direction was less than 2%, which was good. However, there was a case where the outer diameter fluctuated up to about 4% between lots.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

L'invention concerne un dispositif, produisant une matière de base de fibre optique, par frittage d'une matière de base poreuse utilisant une fibre optique (30) qui va devenir un verre transparent. Le dispositif présente la fonction de détection de l'allongement/rétrécissement longitudinal de la matière de base (30) pendant le frittage, la fonction de détection de l'allongement/rétrécissement longitudinal comprenant une caméra (200) permettant de photographier l'extrémité inférieure de la matière de base (30), et un dispositif informatique (220) analysant l'image photographiée afin d'obtenir la position de l'extrémité inférieure de la matière de base (30) et déterminant l'allongement/rétrécissement depuis la position d'extrémité inférieure et la distance de pas de la matière de base (30). La caméra (200) capture l'extrémité inférieure de la matière de base (30) et présente des moyens de déplacement de caméra (240) se déplaçant en synchronisation avec le mouvement de la matière de base (30).
PCT/JP2004/008460 2003-06-17 2004-06-16 Dispositif de frittage et procede de frittage pour matiere de base de fibre optique Ceased WO2004110941A1 (fr)

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JP2003172233A JP4107655B2 (ja) 2003-06-17 2003-06-17 光ファイバ母材の焼結装置及び焼結方法
JP2003-172233 2003-06-17

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2028165A1 (fr) 2007-07-24 2009-02-25 Shin-Etsu Chemical Co., Ltd. Four pour fabriquer une préforme de verre ou une fibre optique
CN106064883A (zh) * 2015-04-20 2016-11-02 信越化学工业株式会社 多孔质玻璃母材的烧结方法和烧结装置
CN116736443A (zh) * 2023-06-16 2023-09-12 广西大学 一种基于光纤拉锥装置及智能视觉监控系统

Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
JP4817339B2 (ja) 2009-02-17 2011-11-16 信越化学工業株式会社 加熱炉のシール部材
CN102092937B (zh) * 2010-12-15 2012-10-31 北京交通大学 迅速优化光子晶体光纤拉制工艺的方法和系统
KR102608269B1 (ko) * 2018-09-17 2023-11-29 엘에스전선 주식회사 광섬유 모재 증착장치 및 증착방법 그리고 이를 이용하여 증착된 광섬유 모재
JP7585093B2 (ja) 2021-03-04 2024-11-18 古河電気工業株式会社 光ファイバ母材の製造方法及び光ファイバ母材の製造装置

Citations (2)

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Publication number Priority date Publication date Assignee Title
JPH06239624A (ja) * 1993-02-16 1994-08-30 Furukawa Electric Co Ltd:The 透明ガラス母材の製造方法
JP2003081642A (ja) * 2001-09-05 2003-03-19 Hitachi Cable Ltd ガラス母材の製造方法及び製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06239624A (ja) * 1993-02-16 1994-08-30 Furukawa Electric Co Ltd:The 透明ガラス母材の製造方法
JP2003081642A (ja) * 2001-09-05 2003-03-19 Hitachi Cable Ltd ガラス母材の製造方法及び製造装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2028165A1 (fr) 2007-07-24 2009-02-25 Shin-Etsu Chemical Co., Ltd. Four pour fabriquer une préforme de verre ou une fibre optique
CN106064883A (zh) * 2015-04-20 2016-11-02 信越化学工业株式会社 多孔质玻璃母材的烧结方法和烧结装置
CN106064883B (zh) * 2015-04-20 2020-10-13 信越化学工业株式会社 多孔质玻璃母材的烧结方法和烧结装置
CN116736443A (zh) * 2023-06-16 2023-09-12 广西大学 一种基于光纤拉锥装置及智能视觉监控系统

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TW200503975A (en) 2005-02-01
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