WO2005109016A1 - Gestionnaire tcp - Google Patents

Gestionnaire tcp Download PDF

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Publication number
WO2005109016A1
WO2005109016A1 PCT/JP2004/006680 JP2004006680W WO2005109016A1 WO 2005109016 A1 WO2005109016 A1 WO 2005109016A1 JP 2004006680 W JP2004006680 W JP 2004006680W WO 2005109016 A1 WO2005109016 A1 WO 2005109016A1
Authority
WO
WIPO (PCT)
Prior art keywords
carrier tape
sprocket
tcp
tape
pusher
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2004/006680
Other languages
English (en)
Japanese (ja)
Inventor
Hisashi Murano
Kiyoshi Shimizu
Syuuichi Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP2006512911A priority Critical patent/JPWO2005109016A1/ja
Priority to CNB2004800430112A priority patent/CN100570385C/zh
Priority to PCT/JP2004/006680 priority patent/WO2005109016A1/fr
Priority to TW094111814A priority patent/TW200538355A/zh
Publication of WO2005109016A1 publication Critical patent/WO2005109016A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Definitions

  • the present invention is manufactured by using TCP (Tape Carrier Package) or C ⁇ F (Chip On Film) (hereinafter referred to as TCP, C ⁇ ⁇ ⁇ F, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC device.
  • TCP Transmission Carrier Package
  • C ⁇ F Chip On Film
  • TAB Tape Automated Bonding
  • the test equipment for TCP generally consists of a tester body, a test head, and ⁇
  • TCP handler a CP handling device
  • This TCP handler has a carrier tape in which a plurality of TCPs are formed on a tape (including the concept of a film; the same applies hereinafter).
  • Such a TCP handler generally includes a pusher body that presses a carrier tape against a probe, and a carrier tape that supports a carrier tape. 04 006680
  • Sprockets include a main sprocket that drives the carrier tape at the rear stage of the pusher body and an auxiliary sprocket that assists the carrier tape transport at the front stage of the pusher main body. Connected in the evening, the auxiliary sprocket rotates synchronously with the main sprocket.
  • the present invention has been made in view of such a situation, and it is possible to apply an appropriate tension to a carrier tape, accurately position a carrier tape (TCP), and carry a carrier tape (TCP) during conveyance. It is an object of the present invention to provide a TCP handling device capable of suppressing fluttering.
  • the present invention relates to a method in which a carrier tape having a plurality of TCPs formed on a tape is electrically connected to a test head by a pusher while being transported by a transport device.
  • a ⁇ C ⁇ handling device capable of sequentially applying a plurality of TCs to a test, wherein the transporting device is a front stage of the pusher for supporting a carrier tape and running and stopping the carrier tape.
  • a drive source capable of rotating the first sprocket is connected to the first sprocket. Wherein the driving source is controlled such that a predetermined tension is applied to the carrier tape supported by the first sprocket and the second sprocket.
  • the carrier tape by controlling the drive source of the first sprocket, the carrier tape can be supported with an appropriate tension without applying excessive stress to the carrier tape.
  • the carrier tape TCP
  • the carrier tape can be accurately positioned, and when the carrier tape is transported, the carrier tape can be prevented from flapping and the carrier tape can be transported at a high speed.
  • the processing speed of the handling device can be improved.
  • the rotational force applied to the first sprocket by the drive source is preferably a rotational force in a direction opposite to a rotational direction of the second sprocket.
  • connection member capable of absorbing vibration is interposed between the first sprocket and the drive source (Invention 3).
  • the connecting member absorbs the vibration of the drive shaft (necessarily absorbs 100% of the vibration). It does not mean that it is the same in this specification.) Then, the rotational force of the drive shaft can be transmitted to the first sprocket. The As a result, the vibration of the first sprocket is reduced, and the flapping of the carrier tape and the displacement of the carrier tape (TCP) caused by the vibration are effectively suppressed.
  • a carrier tape having a plurality of TCPs formed on a tape is pressed by a pusher against a contact portion electrically connected to a test head by a pusher, and an external terminal of the TCP is pressed.
  • a TCP handling device capable of sequentially applying a plurality of TCPs to a test by being connected to the contact section, wherein the transport device supports a carrier tape provided on a front side of the pusher.
  • the present invention provides a TCP handling apparatus characterized by comprising a connecting member provided between the connecting members and capable of absorbing vibration. ).
  • connection member absorbs the vibration of the drive shaft and transmits the rotation force of the drive shaft to the rotation shaft of the sprocket. can do. Thereby, the vibration of the sprocket is reduced, and the fluttering of the carrier tape and the displacement of the carrier tape (TCP) caused by the vibration are effectively suppressed.
  • connection member is a member having flexibility at least in a twisting direction (Invention 5).
  • the vibration of the drive shaft can be effectively absorbed with a simple structure.
  • a shaft coupling called a so-called flexible coupling can be used, but it is not limited to this.
  • connection member has a bellows structure.
  • invention 6 the vibration of the drive shaft can be effectively absorbed by the bellows structure, and the torque of the drive shaft can be efficiently transmitted to the rotation shaft of the sprocket.
  • the drive source is preferably a torque motor (Invention 7).
  • the torque motor it is easy to control the application of tension by the sprocket.
  • the drive source is a torque motor, vibration is likely to be generated in the drive shaft, but the vibration can be absorbed by the connecting member.
  • the sprocket is provided on a frame to support the carrier tape from above, and the frame supports and guides a carrier tape from below.
  • a tape support member may be provided (Invention 8).
  • the carrier tape can be supported from above and below by the sprocket and the tape support member, so that unnecessary movement of the carrier tape can be effectively prevented, and higher-speed conveyance can be achieved.
  • the processing speed of the TCP handling device can be improved, and the displacement of the carrier tape can be effectively suppressed.
  • a carrier tape in which a plurality of TCPs are formed on a tape is pressed by a pusher against a contact portion electrically connected to a test head while being transported by a transport device.
  • a TCP handling device capable of sequentially applying a plurality of TCPs to a test by connecting the transporter to the contact portion, wherein the transport device has a carrier tape on the upstream side and / or the downstream side of the pusher. And a frame for supporting the sprocket, and a carrier tape supported from below on the frame.
  • a TCP handling device provided with a tape supporting member for holding and guiding is provided (Invention 9).
  • the carrier tape can be supported from above and below by the sprocket and the tape supporting member, so that unnecessary movement of the carrier tape can be effectively prevented, and higher-speed conveyance is possible.
  • the processing speed of the TCP handling device can be improved, and the displacement of the carrier tape due to the vibration of the sprocket can be effectively suppressed.
  • a suction device capable of sucking and holding the carrier tape may be further provided (Invention 10).
  • This suction device can suction-fix the carrier tape, the position of which has been suppressed by the guide, so that the TCP to be tested can be easily positioned.
  • FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention.
  • FIG. 2 is a front view of a pusher unit in the TCP handler according to the embodiment.
  • FIG. 3 is a sectional view of a tension sprocket driving device in the TCP handler according to the embodiment.
  • FIG. 4 is a perspective view of a connection member in the TCP handler according to the embodiment.
  • FIG. 5 is a side view of the tape support member in the TCP handler according to the embodiment.
  • FIG. 6 is a view showing the tape support member in the TCP handler according to the embodiment. It is a perspective view. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1 shows a TCP test apparatus using a TCP handler according to one embodiment of the present invention.
  • the TCP test apparatus 1 includes a tester main body (not shown), a test head 10 electrically connected to the test main body, and a TCP handler 2 provided above the test head 10.
  • the TCP handler 2 sequentially applies a plurality of TCPs formed on the carrier tape 5 to the test.
  • each TCP is subjected to the test one by one.
  • the present invention is not limited to this, and a plurality of TCPs arranged in the serial direction and the Z or parallel direction on the carrier tape 5 may be simultaneously subjected to the test.
  • the TCP handler 2 includes an unwind reel 21 and a take-up reel 22.
  • the unwind reel 21 has a carrier tape 5 before the test wound thereon.
  • the carrier tape 5 is unwound from the unwinding reel 21, is subjected to a test, and is wound up on the take-up reel 22.
  • the three tapes that pass the protective tape 51 peeled off from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22 are provided.
  • Pisa rolls 23a, 23b and 23c are provided.
  • Each spacer roll 23a, 23b, 23c is vertically movable so that the tension of the protective tape 51 can be adjusted.
  • the carrier tape 5 unwound from the unwinding reel 21 is guided by the tape guide 24a, while the unwinding limit port —the la 25a, To the pusher nit 3 via the inlet 25b and the guide rollers 25c on the fin side.
  • a tape guide 24 b, a take-up limiter 25: f, an out-side sub-prototype 25 e, and an out-side guide roller 25 d are provided below the take-up reel 22.
  • the carrier tape 5 is guided by the tape guide 24 b through the out guide roller 25 d, the out subbus bracket 25 e and the winding limit roller 25 ⁇ . Meanwhile, it is wound up by winding reel 22.
  • a pusher nit 3 is provided between the inner guide roller 25c and the outer guide roller 25d.
  • the second camera 6b is provided below the pusher unit 3 (inside the probe card stage 7 described later), and the third camera 6c is provided behind the pusher unit 3 (the right side in FIG. 1). ing.
  • a mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c.
  • the mark punch 26a is used to make one or more holes at predetermined positions for the relevant TCP based on the test results, while the reject punch 26b It punches out TCPs that are determined to be good.
  • ⁇ -Each camera 6a, 6b, 6c is connected to an image processing device (not shown).
  • the second camera 6b is for determining the position and number of holes according to 6a, and the second camera 6b is for obtaining information on the positional deviation between the TCP on the carrier tape 5 and the probe.
  • This implementation The second camera 6b in the embodiment can acquire positional deviation information on a plurality of objects in the field of view.
  • the second camera 6b is mounted on the camera stage 61, and moves in the vertical and horizontal directions (X-axis-Y-axis direction) and the vertical direction (Z-axis direction) in plan view according to the actuation of the camera stage 61. It is possible.
  • thermopowder 31 that can rotate the pole screw 32 is mounted via a bracket 361, and a pusher to which the pole screw 32 is screwed.
  • the main body 33 is mounted via two Z-axis linear motion guides 37.
  • the pusher main body 33 can be moved in the vertical direction (Z-axis direction) while being guided by the linear motion guide 37 by driving the thermopump 31.
  • the pusher body 33 and the frame (pusher frame) 36 of the pusher unit 3 are connected by a linkage mechanism (not shown), and when the pusher body 33 moves up and down as described above, Accordingly, the pusher frame 36 also moves up and down.
  • a suction plate 34 capable of sucking and holding the carrier tape 5 by sucking air is provided.
  • a tension sprocket 35a is provided on the front side (the left side in FIG. 1) of the pusher main body 33 in the pusher frame 36, and the rear side of the pusher main body 33 (the right side in FIG. 1). Has a main sprocket 35b.
  • the tension sprocket 35a and the main sprocket 35b may be collectively referred to as push-sprockets 35a and 35b.
  • Pusher unit 3 is connected to a pusher stage (not shown).
  • the The pusher stage is connected to the servo motor through a plurality of pole screws (not shown).
  • the pusher unit 3 can be moved in the horizontal direction (XY plane direction) by driving the servo motor, and the pusher unit can be moved. 3 can be rotated around the vertical axis (around the Z axis).
  • a probe card stage 7 on which a probe card 8 is mounted is installed below the pusher nit 3 and above the test head 10.
  • the probe card stage 7 is connected to the support through a plurality of pole screws (not shown), and the probe card 8 can be moved in the horizontal direction (XY plane direction) by driving the servo motor.
  • the probe force 8 can be rotated about the vertical axis (about the Z axis).
  • a probe card 8 having a plurality of probes 81 is detachably attached to a card ring of a probe card stage 7 by pins (not shown). Each probe 81 of the probe card 8 is electrically connected to the tester main body via the test head 10, and is located below the probe force 8 and the probe force stage 7.
  • the second camera 6b is located inside.
  • the carrier tape 5 is conveyed so as to pass below the pusher unit 3, and the pusher unit 3 sucks and supports the carrier tape 5 while pushing the carrier tape 5 on the test head-10.
  • the TCP on the carrier tape 5 contacts the probe 81 of the probe card 8, the test signal is applied to the TCP, and the response signal read from the TCP is sent to the tester main unit through the test head 10. .
  • the performance and function of the TCP are tested.
  • the carrier tape 5 is transported to This is performed sequentially for all TCPs on tape 5. Then, the mark punch 26a or the reject punch 26b is driven based on the test result.
  • FIG. 2 is a front view of the pusher unit of the TCP handler shown in FIG. '
  • the tension sprocket 35a is provided on the front side of the pusher body 33 in the pusher frame 36 of the pusher nit 3, and the main sprocket 35b is provided on the rear side. I have.
  • the main sprocket 35b is driven by a main drive source capable of normal rotation and reverse rotation, generally a stepping motor, and conveys the carrier tape 5 at predetermined intervals.
  • the tension sprocket 35 a applies a predetermined tension to the carrier tape 5 by applying a load in the traveling direction of the carrier tape 5 by a driving device described later.
  • the driving of these sprockets 35a and 35b is controlled by a control unit (not shown) of the TCP handler 2.
  • the tension sprocket 35 a and the main sprocket 35 b stretch the carrier tape straight from both sides of the pusher body 33 to improve the positioning accuracy of the carrier tape 5.
  • the carrier tape 5 is sucked and held by the suction plate 3 4 at the lower end of the pusher body 3 3, and the carrier tape 5 is supported by the tension sprocket 35 a and the main sprocket 35 b.
  • the pusher unit 3 moves downward and presses the carrier tape 5 against the probe card 8 to contact the TCP on the carrier 5 with the probe 81 of the probe force 8.
  • FIG. 3 is a side view of a driving device of the tension sprocket in the pusher nit shown in FIG.
  • FIG. 4 is a perspective view of a connection member in the drive device shown in FIG.
  • the driving device 4 of the tension sprocket 35 a includes a driving source 41, a brake member 42, a connecting member 43, a housing 44, and a rotating shaft 45. .
  • the drive source 41 is a torque motor that applies a rotational force (torque) to the drive shaft 41 1 in a direction opposite to the carrier tape 5 transport direction.
  • the magnitude of the torque applied to the drive shaft 41 1 can be controlled by the voltage applied to the drive source 41 or the like.
  • the drive source 41 is arranged such that the drive shaft 41 1 is inserted into the housing 44 from the rear side of the pusher frame 36, and the drive shaft 41 1 is connected to the intermediate gears 46, 47. Are connected to the rotating shaft 45 through the shaft.
  • the brake member 42 in the present embodiment is attached to the rotating shaft 45 on the back side of the pusher frame 36, and when the power is not supplied, the rotating member 45 is held and the stop position of the rotating shaft 45 is determined. It can be held and released when energized.
  • the drive source 41 and the brake member 42 are connected to a control unit (not shown) of the TCP handler 2, and the drive is controlled by this control unit.
  • the tension sprocket 35a is rotatably supported by the bearing 3552 by inserting the rotating shaft 351 into the bearing 3552 in the housing 44 from the front side of the push frame 36. Have been.
  • connection member 43 has a function of absorbing vibration.
  • a member having flexibility in a torsion direction (a so-called flexible coupling) is used. Used.
  • a bellows coupling as shown in FIGS. 3 and 4 is employed.
  • the connecting member 43 is not limited to this, and for example, a flexible member, a viscous member, or another vibration absorbing member can be used.
  • the main sprocket 35 b maintains the carrier tape 5 supported by the main sprocket 35 b in a stopped state.
  • the drive source 41 gives the drive shaft 4 1 1 a torque in the direction opposite to the carrier tape 5 transport direction, the intermediate gears 4 6 and 4 7, the connecting member 4 3 and the rotary shaft 3 5 1
  • the tension sprocket 35a pulls the carrier tape 5 in the direction opposite to the direction in which the carrier tape 5 is transported (the appearance is in a stopped state).
  • the torque applied to the drive shaft 41 1 can be controlled to a desired magnitude by controlling the voltage supplied to the drive source 41 and the like. As a result, a predetermined tension is applied to the carrier tape 5, and it is possible to prevent the displacement of the carrier tape 5 and facilitate the positioning of the TCP.
  • the main sprocket 35b moves the carrier tape 5 supported by the main sprocket 35b by the main drive source in the transport direction (right in FIGS. 1 and 2).
  • the tension sprocket 35a supporting the carrier tape 5 together with the main sprocket 35b is subjected to a forward rotation gas.
  • the drive source 41 applies a torque to the drive shaft 41 1 in a direction opposite to the carrier tape 5 transport direction.
  • the magnitude of the torque in the opposite direction is smaller than the magnitude of the torque at which the main drive source of the main sprocket 35b drives the main sprocket 35b.
  • the drive shaft 4 1 1 of the sprocket 35 a rotating shaft 35 1, connecting member 43, intermediate gears 46, 47 and drive source 41 is driven It rotates in the forward direction with the torque from source 41 applied. as a result
  • a predetermined tension is applied to the carrier tape 5, and the carrier tape 5 is conveyed at a high speed while suppressing the flapping of the carrier tape 5.
  • the processing speed by the P handler 2 can be improved.
  • a predetermined tension is applied to the carrier tape 5 while the carrier tape 5 is being transported and stopped. I can do it.
  • the optimal size of the tension of the carrier tape 5 depends on the thickness, width, strength, etc. of the carrier tape 5; the weight, size, etc. of the TCP; the transport speed, etc., and the drive source of the tension sprocket 35a
  • the tension of the carrier tape 5 can be adjusted by controlling the voltage or the like applied to 41 to a predetermined value.
  • the carrier tape 5 can be supported with an appropriate tension without applying excessive stress to the sprocket holes of the carrier tape 5.
  • the voltage applied to the drive source 41 should be appropriately changed according to changes in the transfer conditions such as the transfer speed, transfer start, and transfer stop, taking into account the carrier tape 5 and the moment of inertia of the drive system. It may be controlled.
  • vibration may be generated on the drive shaft 4 1 1, and the vibration is generated by the intermediate gears 4 6, 4 7 To the rotating shaft 45 via If such vibration is transmitted to the carrier tape 5 being conveyed through the tension sprocket 35'A, it causes the carrier tape 5 to flutter or to be displaced.
  • the connecting member 43 capable of absorbing vibration is interposed between the rotating shaft 45 and the rotating shaft 35 1 of the tension sprocket 35 a, The vibration is absorbed by the connecting member 43, and then the rotational force of the rotating shaft 45 is rotated by the rotation of the tension plate 35a. It is transmitted to shaft 3 5 1.
  • the bellows coupling is used as the connection member 43, the vibration of the rotating shaft 45 is effectively absorbed, and the rotating force of the rotating shaft 45 is reduced by the tension sprocket. Efficiently transmitted to the rotating shaft 35 1 of 35 a.
  • the connecting member 43 of the driving device 4 is a bellows coupling, and in this configuration, the rotational force is transmitted from the rotating shaft 45 to the tension sprocket 35a. Sometimes, it is preferable in that the vibration of the rotating shaft 45 is effectively absorbed.
  • connection member 43 can be arbitrarily selected within a range obvious to those skilled in the art. Specifically, it is sufficient that the connection member 43 be capable of absorbing vibration of the rotating shaft 45 by being deformed by a torsional load or the like.
  • the connecting member 43 may be a simple columnar member made of a rubber material, a bellows-shaped member made of a resin material, or a coil-shaped member made of a metal material. Good (not shown).
  • FIG. 5 and 6 are a side view (FIG. 5) and a perspective view (FIG. 6) of the tape supporting member of the pusher unit shown in FIG.
  • TCP handler 2 As shown in FIG. A pair of tape support members 39a and 39b are provided between The carrier tape 5 is supported by the tape supporting members 39a and 39b from below.
  • These tape supporting members 39 a and 39 b have a substantially L-shape when viewed from the side, and are fixed to the wall surface of the pusher frame 36 at their vertical portions, and the horizontal portions thereof are connected to the pusher frame 36. It is installed so as to protrude from the front side (in the Y-axis direction) (see Figs. 5 and 6).
  • grooves are formed on the upper surface side of the horizontal portion of the tape supporting members 39a and 39b so that the external terminals of the TCP formed on the carrier tape 5 do not contact the tape supporting members 39a and 39b. 9 1 is formed.
  • the tape supporting members 39a and 39b have a function of supporting and guiding the transported carrier tape 5 from below.
  • the carrier 5 is suspended over the tape supporting members 39a and 39b and supported from below (see FIG. 2), and the tape supporting members 39a and 39 are also supported. It is supported from above by push-sprockets 35a and 35b at the front and rear sides of b. As described above, the carrier tape 5 is supported from above and below in the vicinity of the pusher nit 3, so that unnecessary movement of the carrier tape 5 can be prevented, and higher-speed transport can be performed. Speed can be improved. Also, even if the vibration from the drive source 41 of the tension sprocket 35a is transmitted to the tension sprocket 35a as described above, the flapping and displacement of the carrier tape 5 are effective. Is suppressed.
  • the suction plate 34 of the pusher body 33 fixes the carrier tape 5 by sucking and holding the carrier tape 5 during the TCP test, thereby facilitating the positioning of the TCP under test, but the carrier tape 5 does not flutter. In such a state, stable adsorption may not be achieved.
  • the carrier tape 5 is supported from above and below by the push brackets 35a and 35b and the tape supporting members 39a and 39b, and the flapping is suppressed.
  • the adsorption of the carrier tape 5 by 34 becomes stable, and the displacement of the carrier tape 5 is effectively suppressed. Thereby, the TCP under test can be accurately positioned.
  • a pair of tape supporting members 39 a and 39 b are provided, and the carrier tape 5 is supported by these tape supporting members 39 a and 39 b.
  • the carrier tape 5 is stably supported as compared with a configuration in which only a single tape supporting member 39 is provided. As a result, flutter and displacement of the carrier tape 5 are more effectively suppressed.
  • the present invention is not limited to this, and only a single tape support member 39 may be provided, or more tape support members 39 may be provided. Further, the shape of the tape supporting member 3 is not limited to a substantially L-shaped shape in a side view. Industrial potential
  • the TCP handling apparatus of the present invention an appropriate tension can be applied to the carrier tape, the positioning of the carrier tape (TCP) can be accurately performed, and the carrier tape during transport is fluttered. Therefore, the TCP test can be performed accurately and at a high processing speed.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

Un gestionnaire TCP (2) capable de tester séquentiellement une pluralité de TCP en appuyant sur une bande porteuse (5) ayant une pluralité de TCP formés sur une bande contre une carte sonde (8) connectée électriquement à une tête d'essai tout en la soutenant au moyen d'une unité de renfort (3) et en connectant les terminaux externes du TCP à une sonde (81). L'unité de renfort (3) comprend un moteur couple (41), et un picot de tension (35a) capable de conférer une tension spécifiée à la bande porteuse (5) au moyen du moteur couple (41). Entre l'axe moteur (411) et l'axe rotatif (351) du picot de tension (35a) est interposé un élément de connexion (couplage flexible) (43) capable d'absorber les vibrations.
PCT/JP2004/006680 2004-05-12 2004-05-12 Gestionnaire tcp Ceased WO2005109016A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006512911A JPWO2005109016A1 (ja) 2004-05-12 2004-05-12 Ｔｃｐハンドリング装置
CNB2004800430112A CN100570385C (zh) 2004-05-12 2004-05-12 Tcp处理装置
PCT/JP2004/006680 WO2005109016A1 (fr) 2004-05-12 2004-05-12 Gestionnaire tcp
TW094111814A TW200538355A (en) 2004-05-12 2005-04-14 TCP handler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2004/006680 WO2005109016A1 (fr) 2004-05-12 2004-05-12 Gestionnaire tcp

Publications (1)

Publication Number Publication Date
WO2005109016A1 true WO2005109016A1 (fr) 2005-11-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2004/006680 Ceased WO2005109016A1 (fr) 2004-05-12 2004-05-12 Gestionnaire tcp

Country Status (4)

Country Link
JP (1) JPWO2005109016A1 (fr)
CN (1) CN100570385C (fr)
TW (1) TW200538355A (fr)
WO (1) WO2005109016A1 (fr)

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JP2008224399A (ja) * 2007-03-13 2008-09-25 Yokogawa Electric Corp オートハンドラ

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Publication number Priority date Publication date Assignee Title
CN119291241A (zh) * 2017-12-26 2025-01-10 日本电产理德股份有限公司 检查夹具及基板检查装置
CN114894702B (zh) * 2022-05-16 2025-02-14 中国兵器装备集团西南技术工程研究所 一种海洋环境模拟加速试验箱

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JPH07144815A (ja) * 1993-11-22 1995-06-06 Ando Electric Co Ltd Ｔａｂテープ移動用スプロケットの偏心影響の補正方法
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JP2002107410A (ja) * 2000-09-29 2002-04-10 Ando Electric Co Ltd Ｔａｂ用オートハンドラ
JP2002286798A (ja) * 2001-03-27 2002-10-03 Ando Electric Co Ltd Ｔｃｐ用ハンドラ

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JP3413976B2 (ja) * 1994-07-18 2003-06-09 日立電子エンジニアリング株式会社 Ｔｃｐの試験装置

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JPS557520U (fr) * 1978-06-28 1980-01-18
JPS6012725U (ja) * 1983-07-04 1985-01-28 篠塚　欣三 フレキシブル軸継手
JPH07144815A (ja) * 1993-11-22 1995-06-06 Ando Electric Co Ltd Ｔａｂテープ移動用スプロケットの偏心影響の補正方法
JPH10142292A (ja) * 1996-11-13 1998-05-29 Hitachi Electron Eng Co Ltd Ｔｃｐ試験装置のプローブカード寿命検出装置
JP2002107410A (ja) * 2000-09-29 2002-04-10 Ando Electric Co Ltd Ｔａｂ用オートハンドラ
JP2002286798A (ja) * 2001-03-27 2002-10-03 Ando Electric Co Ltd Ｔｃｐ用ハンドラ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008224399A (ja) * 2007-03-13 2008-09-25 Yokogawa Electric Corp オートハンドラ

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CN100570385C (zh) 2009-12-16
JPWO2005109016A1 (ja) 2008-03-21
TW200538355A (en) 2005-12-01

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