WO2008024446A3 - Interface permettant d'exploiter et de contrôler des systèmes de réduction de la pollution - Google Patents

Interface permettant d'exploiter et de contrôler des systèmes de réduction de la pollution Download PDF

Info

Publication number
WO2008024446A3
WO2008024446A3 PCT/US2007/018669 US2007018669W WO2008024446A3 WO 2008024446 A3 WO2008024446 A3 WO 2008024446A3 US 2007018669 W US2007018669 W US 2007018669W WO 2008024446 A3 WO2008024446 A3 WO 2008024446A3
Authority
WO
WIPO (PCT)
Prior art keywords
interface
operating
abatement systems
monitoring
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/018669
Other languages
English (en)
Other versions
WO2008024446A2 (fr
WO2008024446A8 (fr
Inventor
Youssef A Loldj
Shaun W Crawford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2008024446A2 publication Critical patent/WO2008024446A2/fr
Publication of WO2008024446A3 publication Critical patent/WO2008024446A3/fr
Anticipated expiration legal-status Critical
Publication of WO2008024446A8 publication Critical patent/WO2008024446A8/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0658—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Treating Waste Gases (AREA)

Abstract

L'invention concerne un procédé et des systèmes permettant de contrôler et de commander un ou plusieurs systèmes de réduction de la pollution. Le procédé selon l'invention consiste : à représenter, sur un même écran d'affichage, un ou plusieurs systèmes de réduction de la pollution et un ou plusieurs flux d'effluents issus d'outils de traitement; à recevoir une configuration de flux d'effluents sélectionnée; et à commander un collecteur d'interface afin de mettre en oeuvre la configuration de flux d'effluents sélectionnée. L'invention concerne également de nombreux autres aspects.
PCT/US2007/018669 2006-08-23 2007-08-23 Interface permettant d'exploiter et de contrôler des systèmes de réduction de la pollution Ceased WO2008024446A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US82329406P 2006-08-23 2006-08-23
US60/823,294 2006-08-23

Publications (3)

Publication Number Publication Date
WO2008024446A2 WO2008024446A2 (fr) 2008-02-28
WO2008024446A3 true WO2008024446A3 (fr) 2008-09-25
WO2008024446A8 WO2008024446A8 (fr) 2009-04-09

Family

ID=39107415

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/018669 Ceased WO2008024446A2 (fr) 2006-08-23 2007-08-23 Interface permettant d'exploiter et de contrôler des systèmes de réduction de la pollution

Country Status (2)

Country Link
TW (1) TWI444797B (fr)
WO (1) WO2008024446A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579788B (en) 2018-12-13 2021-06-30 Edwards Ltd Abatement apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040001787A1 (en) * 2001-07-11 2004-01-01 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040001787A1 (en) * 2001-07-11 2004-01-01 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber

Also Published As

Publication number Publication date
WO2008024446A2 (fr) 2008-02-28
TWI444797B (zh) 2014-07-11
WO2008024446A8 (fr) 2009-04-09
TW200827963A (en) 2008-07-01

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