WO2009016533A2 - Dispositif de capteur microélectronique avec une source de lumière - Google Patents

Dispositif de capteur microélectronique avec une source de lumière Download PDF

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Publication number
WO2009016533A2
WO2009016533A2 PCT/IB2008/052869 IB2008052869W WO2009016533A2 WO 2009016533 A2 WO2009016533 A2 WO 2009016533A2 IB 2008052869 W IB2008052869 W IB 2008052869W WO 2009016533 A2 WO2009016533 A2 WO 2009016533A2
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WO
WIPO (PCT)
Prior art keywords
light source
laser
carrier
sensor device
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2008/052869
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English (en)
Other versions
WO2009016533A3 (fr
Inventor
Dominique M. Bruls
Johannes J. H. B. Schleipen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Priority to CN2008801014979A priority Critical patent/CN101779117B/zh
Priority to EP08789335A priority patent/EP2176644B1/fr
Priority to US12/670,148 priority patent/US8228506B2/en
Publication of WO2009016533A2 publication Critical patent/WO2009016533A2/fr
Publication of WO2009016533A3 publication Critical patent/WO2009016533A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/74—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids
    • G01N27/745—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids for detecting magnetic beads used in biochemical assays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/064—Stray light conditioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/069—Supply of sources
    • G01N2201/0691—Modulated (not pulsed supply)
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/069—Supply of sources
    • G01N2201/0696—Pulsed

Definitions

  • the invention relates to a microelectronic sensor device and a method for optical examinations at a carrier with the help of a light source. Moreover, it relates to the use of such a device.
  • the US 2005/0048599 Al discloses a method for the investigation of microorganisms that are tagged with particles such that a (e.g. magnetic) force can be exerted on them.
  • a laser beam is directed through a transparent material to a surface where it is totally internally reflected.
  • Light of this beam that leaves the transparent material as an evanescent wave is scattered by microorganisms and/or other components at the surface and then detected by a photodetector or used to illuminate the microorganisms for visual observation.
  • a problem of this and similar setups is that interferences of the emitted laser light with reflections of this light may occur that change over time and thus cause undesired variations of the laser light output.
  • the microelectronic sensor device serves for optical examinations at a carrier, wherein the carrier does not necessarily belong to the device.
  • the carrier will usually be made from a transparent material, for example glass or polystyrene, to allow the propagation of light of a given spectrum. Its concrete design depends on the application it is intended for. Moreover, it should be noted that the term “examination” is to be understood in a broad sense, comprising any kind of manipulation and/or interaction of light with some entity in or at the carrier.
  • the examinations may preferably comprise the qualitative or quantitative detection of target components comprising label particles, wherein the target components may for example be biological substances like biomolecules, complexes, cell fractions or cells.
  • the microelectronic sensor device comprises the following components: a) A light source for emitting a light beam, called “input light beam” in the following, via an entrance window into the carrier, wherein said entrance window is a particular (planar or curved) part of the surface of the carrier.
  • the light source will usually have some more or less pronounced coherence, though it should be noted that this coherence may be very small and actually an (undesired) side effect.
  • the light source may for example be a laser diode or an LED (light emitting diode), optionally provided with some optics for shaping and directing the input light beam, particularly means for collimating it.
  • a modulator for modulating the light source such that optical interferences of the light source with reflections of the input light beam from the entrance window of the carrier or other components in the light path
  • the modulator may be realized in many different ways which are known to a person skilled in the art of e.g. laser design. It may for example comprise an electronic circuit for supplying a laser current, i.e. the electrical current used for driving the pumping of a laser that generates an overpopulation of excited states in the laser medium.
  • the invention further relates to a method for optical examinations at a carrier, comprising: a) Emitting with a light source an input light beam via an entrance window into the carrier. b) Modulating the light source with a modulator such that optical interferences of the (more or less coherent) light source with reflections of the input light beam from the entrance window or other components are reduced.
  • the described microelectronic sensor device and method have the advantage to provide an input light beam which has a smaller feedback with reflections from the entrance window or other components of e.g. the carrier. With the reduction of this feedback, also variations of the feedback are reduced which may occur for example from slight dimensional changes of the optical components under thermal expansion. Appropriate operation parameters of the modulation may be found by trial and error, i.e. by testing different settings of the modulator and observing the resulting optical interferences.
  • the modulation is a priori designed in so far as it comprises a pulsed emission of the input light beam, i.e. in that the input light beam consists of a series of pulses separated in time by pauses.
  • the pulses may all be different from each other or, preferably, all have (approximately) the same shape.
  • the emitted pulses of the light source may optionally be dimensioned such that they do not coincide in the light source with previous pulses of the light source that were reflected at the entrance window or other components of e.g. the carrier.
  • the pulses that are reflected at e.g. the entrance window will not have any possibility of interference. While the aforementioned approach is a way to reduce interferences to the absolute minimum of zero, this result can in many cases hardly be realized due to too short distances between the light source and the reflection site of pulses in combination with the minimally possible pulse duration.
  • the pulses are therefore designed such that a (e.g. first) relaxation minimum of a currently emitted pulse coincides in the laser light source (or, more precisely, in its internal laser cavity) with a (e.g. first) relaxation maximum of a previous pulse that was reflected at the entrance window or another component of the carrier.
  • a (e.g. first) relaxation minimum of a currently emitted pulse coincides in the laser light source (or, more precisely, in its internal laser cavity) with a (e.g. first) relaxation maximum of a previous pulse that was reflected at the entrance window or another component of the carrier.
  • timing of the laser pulses is such that the first relaxation oscillation maximum of the externally reflected pulse number (N-I) coincides with the first relaxation minimum of the currently emitted pulse number N, then the laser is rather insensitive to this optical feedback due to a depletion of the carriers in the laser device at that time instance.
  • the mentioned pulses of the input light beam are periodically repeated with a repetition frequency that ranges between approximately 100 MHz and 1 GHz. Additionally or alternatively, it is preferred that the pulses have a duty cycle which ranges between 1 % and 80 % (wherein this percentage indicates the fraction of time of the period during which the pulse is "on” in contrast to the pause or "off time). It should be noted that, if extreme short optical pulses are generated by e.g. exciting only the first relaxation oscillation of a laser, this requires an electrical addressing scheme with pulse widths in the nsec regime, regardless of modulation frequency.
  • the 1 nsec pulse width will then imply duty cycles lower than 1%.
  • the laser current that drives a laser light source is modulated for introducing sidemodes into the input light beam and for making it less coherent. Thus any constructive/destructive interference effects inside the laser can be prevented that may depend on the external cavity length (which is a rather optical effect).
  • the carrier comprises a contact surface at which the input light beam is totally internally reflected as an output light beam.
  • the contact surface must comprise an interface between two media, e.g. glass and water, at which total internal reflection (TIR) can take place if the incident light beam hits the interface at an appropriate angle (larger than the associated critical angle of TIR).
  • TIR total internal reflection
  • Such a setup is often used to examine small volumes of a sample at the TIR-interface which are probed by a non-propagating evanescent wave that is exponentially decaying into the medium with the lower refractive index (e.g. water).
  • Target components - e.g.
  • the output light beam of the sensor device will consist of the reflected light of the input light beam, wherein the small amount of light missing due to scattering of evanescent waves contains the desired information about the target components at the contact surface.
  • a light detector for determining the amount of light in the output light beam (e.g. expressed as the intensity in the cross section of the beam).
  • the detector may comprise any suitable sensor or plurality of sensors by which light of a given spectrum can be detected, for example photodiodes, photo resistors, photocells, a CCD chip, or a photo multiplier tube.
  • the microelectronic sensor device comprises an actuator for manipulating target particles in a sample chamber adjacent to the carrier.
  • the target particles may particularly be magnetic particles that can be moved by a magnetic field and thus deliberately be attracted to the contact surface of the carrier and/or washed away from it.
  • the actuator will in this case usually comprise an electromagnet or a plurality of electromagnets.
  • the operation of such an electromagnet or in general of an electrically driven actuator) will typically dissipate heat that induces thermal expansion of the surrounding components. This may cause uncontrollable and unpredictable variations in the interference of reflected light beams with the light source. However, as such interferences are from the beginning reduced due to the measures described above, disturbances due to said variations are much less critical.
  • the invention further relates to the use of the microelectronic device described above for molecular diagnostics, biological sample analysis, or chemical sample analysis, food analysis, and/or forensic analysis.
  • Molecular diagnostics may for example be accomplished with the help of magnetic beads or fluorescent particles that are directly or indirectly attached to target molecules.
  • Figure 1 shows schematically a microelectronic sensor device according to the present invention
  • Figure 2 illustrates the interference of an emitted laser pulse and a reflected previous laser pulse
  • Figure 3 illustrates a comparison between the laser output with and without a modulation according to the present invention.
  • Figure 1 shows a general setup with a microelectronic sensor device according to the present invention.
  • a central component of this setup is the carrier 11 that may for example be made from glass or transparent plastic like polystyrene.
  • the carrier 11 is located next to a sample chamber 2 in which a sample fluid with target components to be detected (e.g. drugs, antibodies, DNA, etc.) can be provided.
  • the sample further comprises magnetic particles, for example superparamagnetic beads, wherein these particles are usually bound as labels to the aforementioned target components.
  • target particle 1 For simplicity only the combination of target components and magnetic particles is shown in the Figure and will be called “target particle 1" in the following.
  • target particle 1 For simplicity only the combination of target components and magnetic particles is shown in the Figure and will be called “target particle 1" in the following.
  • target particle 1 For simplicity only the combination of target components and magnetic particles is shown in the Figure and will be called “target particle 1" in the following.
  • target particle 1 label particles
  • the sensor device comprises a magnetic field generator 41, for example an electromagnet with a coil and a core, for controllably generating a magnetic field at the contact surface 12 and in the adjacent space of the sample chamber 2.
  • a magnetic field generator 41 for example an electromagnet with a coil and a core, for controllably generating a magnetic field at the contact surface 12 and in the adjacent space of the sample chamber 2.
  • the target particles 1 can be manipulated, i.e. be magnetized and particularly be moved (if magnetic fields with gradients are used).
  • an additional magnetic field generator can be incorporated at different positions, e.g. opposite to the shown magnetic field generator 41 at the other end of the contact surface 12, e.g. to wash unbound target particles away from the contact surface after an attraction phase during measurement.
  • the sensor device further comprises a light source 21 that generates an input light beam Ll which is transmitted into the carrier 11 through an "entrance window" 14.
  • the following description of the example will refer to such a laser light source, though e.g. an LED might be used as well.
  • a collimator lens may be used to make the input light beam Ll parallel, and a pinhole of e.g. 0.5 mm may be used to reduce the beam diameter.
  • the input light beam Ll arrives at the contact surface 12 at an angle larger than the critical angle ⁇ c of total internal reflection (TIR) and is therefore totally internally reflected in an "output light beam" L2.
  • the output light beam L2 leaves the carrier 11 through another surface ("exit window” 15) and is detected by a light detector 31.
  • the light detector 31 determines the amount of light of the output light beam L2 (e.g. expressed by the light intensity of this light beam in the whole spectrum or a certain part of the spectrum).
  • the measured sensor signals S are evaluated and optionally monitored over an observation period by an evaluation and recording module 32 that is coupled to the detector 31. It is possible to use the detector 31 also for the sampling of fluorescence light emitted by fluorescent particles 1 which were stimulated by the input light beam Ll, wherein this fluorescence may for example spectrally be discriminated from reflected light L2.
  • the described microelectronic sensor device applies optical means for the detection of target particles 1.
  • the detection technique should be surface-specific. As indicated above, this is achieved by using the principle of frustrated total internal reflection. This principle is based on the fact that an evanescent wave decays (exponentially dropping) into the sample 2 when the incident light beam Ll is totally internally reflected.
  • this evanescent wave then interacts with another medium like the bound target particles 1, part of the input light will be coupled into the sample fluid (this is called “frustrated total internal reflection") or will be absorbed by the target molecules and/or label particles (e.g. magnetic beads), and the reflected intensity will be reduced (while the reflected intensity will be 100% for a clean interface and no interaction).
  • the amount of disturbance i.e. the amount of target particles on or very near (within about 200 nm) to the TIR surface (not in the rest of the sample chamber 2)
  • the reflected intensity will drop accordingly. This intensity drop is a direct measure for the amount of bound target particles 1, and therefore for the concentration of target particles in the sample.
  • the described procedure is independent of applied magnetic fields. This allows real-time optical monitoring of preparation, measurement and washing steps.
  • the monitored signals can also be used to control the measurement or the individual process steps.
  • medium A of the carrier 11 can be glass and/or some transparent plastic with a typical refractive index of 1.52.
  • the carrier 11 can consist of a relatively simple, injection-molded piece of polymer material.
  • the contact surface 12 in a disposable cartridge can be optically scanned over a large area.
  • large-area imaging is possible allowing a large detection array.
  • Such an array located on an optical transparent surface
  • the method also enables high-throughput testing in commercially available well-plates by using multiple beams and multiple detectors and multiple actuation magnets (either mechanically moved or electro-magnetically actuated).
  • - Actuation and sensing are orthogonal: Magnetic actuation of the target particles (by large magnetic fields and magnetic field gradients) does not influence the sensing process.
  • the optical method therefore allows a continuous monitoring of the signal during actuation. This provides a lot of insights into the assay process and it allows easy kinetic detection methods based on signal slopes.
  • the system is really surface sensitive due to the exponentially decaying evanescent field.
  • a particular advantage of the laser light source 21 that is used in the microelectronic sensor device of Figure 1 is that a nice narrow collimated input light beam Ll can be generated to illuminate a small investigation region 13 on the contact surface 12 where the bioassay takes place. Furthermore, the laser emits light of only one wavelength, which exactly determines the angle at which total internal reflection occurs in the carrier 11.
  • problems may arise as a result of optical feedback when the dimensions of the cartridge slightly change due to temperature changes. Similar problems may occur if other light sources than lasers are used, e.g. LEDs, which usually also show some (small) coherence that may provoke feedback effects.
  • the (disposable) cartridge comprising the carrier 11 will usually consist of only simple, cheap injection molded parts, and it would be too expensive to apply antireflective coatings to the relevant surfaces of the carrier (entrance and exit window 14, 15).
  • some part Ll' of the input light beam Ll will be reflected from the entrance window 14 back into the laser (actually, a small - unwanted - interferometer is formed in this way).
  • This will cause laser feedback, caused by the interference of the reflected light beam Ll' in the laser cavity. Normally, this will not be a problem, as the effect is constant, and the introduced noise in the laser output is averaged out easily.
  • electrical components like particularly the magnetic field generator 41 are present.
  • the electromagnet 41 When the electromagnet 41 is switched on, it will dissipate heat, which will heat up the cartridge with the carrier 11 and the microelectronic sensor device itself. Now, there is a problem: due to the heating, the distance between the light source 21 and the carrier 11 can change up to several laser wavelengths (» 1/10 ⁇ ), thereby influencing the laser feedback and causing intensity and noise irregularities in the laser output. The heating and cooling of the cartridge-reader ensemble usually takes up to 1 minute. During this time, the laser output will fluctuate, due to the continuously changing laser feedback. Also the signal from a possible forward sense diode, which may be located in the housing of the light source 21, will be influenced.
  • laser modulator 22 which supplies the laser current to the light source 21 and which is set at a proper frequency (such modulators are often used in e.g. DVD players). Modulating the laser current of the laser device causes sidemodes to appear in the optical spectrum, making the laser less coherent and consequently less sensitive for optical feedback. Furthermore, laser feedback can be eliminated to a high extent by ensuring that a reflected wave and an emitted laser pulse do not coincide inside the laser diode at the same time.
  • a constant laser output can be maintained (and misbehavior of a forward sense diode that may be incorporated inside the laser diode can be prevented) when the optical path length is changed slightly, e.g. due to heating of the cartridge and reader during magnetic actuation.
  • the laser modulator 22 can particularly switch the laser on and off at a high frequency, in the order of a few hundred MHz. It may be set in such a way that:
  • the DC value of the current through the laser is set in such a way, that in between the pulses, the laser current is set well below the lasing threshold value, i.e. the laser is really 'off .
  • the laser modulator 22 is set at such a frequency that the first relaxation oscillation of the reflected laser pulse P N-1 ' coincides with the first relaxation minimum of the currently emitted laser pulse P N .
  • the laser is less sensitive to optical feedback.
  • FIG. 2 illustrates the effect of the described laser modulation.
  • the diagram shows (for a selected point inside the laser cavity) a currently generated pulse P N and an interfering reflected previous pulse P N-1 ' (vertical axis: intensity I; horizontal axis: time t).
  • the output of the laser shows fluctuations of the intensity I at the onset of the laser pulse due to the well known relaxation oscillations of laser diodes.
  • timing of the laser pulses is such that the first relaxation oscillation maximum of the externally reflected pulse P N-1 ' coincides with the first relaxation minimum in the currently emitted pulse P N (dashed line), the laser is rather insensitive to this optical feedback, due to a depletion of the carriers in the laser device at that time instance.
  • the cavity roundtrip time is less than 1 ns. If the laser pulse duration is in the order of 1 ns or more (typical for a few hundred MHz modulation frequency), the front end of a laser pulse P N is already reflected back at the laser, whereas the end of the same pulse is still being emitted. In this case an emitted laser pulse P N can only be influenced by its preceding pulse P N-1 ' after this preceding pulse has traveled back and forth several times in the external laser cavity. In this case, by tuning the modulation frequency, the first relaxation maximum of pulse P N-1 ' can be brought into overlap (in time domain) with the first relaxation minimum of pulse P N .
  • an emitted laser pulse is always reflected back into the laser while it is still being emitted.
  • Increased noise due to optical feedback can then only be achieved by modulating the laser current, thereby introducing spectral sidemodes and making the laser incoherent.
  • Figure 3 shows in a diagram the recorded normalized optical signal S (vertical axis) that is measured by the light detector 31 over time t (horizontal axis) when an empty cartridge is put in the microelectronic sensor device and when the actuation magnet 41 is switched on for 20 seconds. Ideally, the signal should not change, as there is no bioassay inside the cartridge.
  • the diagram shows two curves:
  • the output light beam L2 that hits the light detector 31 will partly be reflected from the detector back to the carrier 11. Some of this light will be transmitted back to the light source 21, and some light will be reflected back to the detector. This will cause some interference effects on both the detector as on the laser side.
  • the use of a modulator 22 can prevent these things to occur (however, setting the light detector 31 at an angle with respect to the incoming output light beam L2 will also largely resolve these phenomena).
  • a modulator 22 not only compensates for expansion/shrinkage of the cartridge. Also other influences that alter the optical path length can be compensated for, e.g. small movements or tiltings of the cartridge during a measurement.
  • moieties can be detected with sensor devices according to the invention, e.g. cells, viruses, or fractions of cells or viruses, tissue extract, etc.
  • the detection can occur with or without scanning of the sensor element with respect to the sensor surface.
  • Measurement data can be derived as an end-point measurement, as well as by recording signals kinetically or intermittently.
  • the particles serving as labels can be detected directly by the sensing method.
  • the particles can be further processed prior to detection.
  • An example of further processing is that materials are added or that the (bio)chemical or physical properties of the label are modified to facilitate detection.
  • the device and method can be used with several biochemical assay types, e.g. binding/unbinding assay, sandwich assay, competition assay, displacement assay, enzymatic assay, etc. It is especially suitable for DNA detection because large scale multiplexing is easily possible and different oligos can be spotted via ink-jet printing on the optical substrate.
  • biochemical assay types e.g. binding/unbinding assay, sandwich assay, competition assay, displacement assay, enzymatic assay, etc.
  • the device and method are suited for sensor multiplexing (i.e. the parallel use of different sensors and sensor surfaces), label multiplexing (i.e. the parallel use of different types of labels) and chamber multiplexing (i.e. the parallel use of different reaction chambers).
  • the device and method can be used as rapid, robust, and easy to use point-of-care biosensors for small sample volumes.
  • the reaction chamber can be a disposable item to be used with a compact reader, containing the one or more field generating means and one or more detection means.
  • the device, methods and systems of the present invention can be used in automated high- throughput testing.
  • the reaction chamber is e.g. a well-plate or cuvette, fitting into an automated instrument.

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  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

L'invention concerne un dispositif de capteur microélectronique et un procédé de réalisation d'examens optiques sur un support (11), par exemple pour la détection de particules magnétiques (1) au niveau d'une surface de contact (12) du support (11) par une réflexion interne totale frustrée (FTIR). Une source de lumière (21), particulièrement une source de lumière laser, avec un modulateur laser (22) sont utilisés pour émettre un faisceau lumineux d'entrée (L1) dans le support (11) qui est modulé de telle sorte que des interférences optiques avec des réflexions (L1') du faisceau lumineux d'entrée (L1) provenant de la fenêtre d'entrée (14) ou d'autres composants du support (11) sont réduites/réduites au minimum. Ceci peut, par exemple, être réalisé par une modulation pulsée en tout ou rien dans laquelle le premier minimum de relaxation d'une impulsion actuellement émise (PN) coïncide dans la source de lumière (21) avec le premier maximum de relaxation d'une impulsion réfléchie (PN-1'). Par réduction de l'effet des interférences, le paramétrage est moins soumis à des perturbations provenant des variations dimensionnelles qui sont, par exemple, induites par une extension thermique.
PCT/IB2008/052869 2007-07-31 2008-07-17 Dispositif de capteur microélectronique avec une source de lumière Ceased WO2009016533A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2008801014979A CN101779117B (zh) 2007-07-31 2008-07-17 具有经调制的光源的微电子传感器设备
EP08789335A EP2176644B1 (fr) 2007-07-31 2008-07-17 Dispositif de capteur microélectronique avec une source de lumière
US12/670,148 US8228506B2 (en) 2007-07-31 2008-07-17 Microelectronic sensor device with a modulated light source

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07113478.7 2007-07-31
EP07113478 2007-07-31

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WO2009016533A2 true WO2009016533A2 (fr) 2009-02-05
WO2009016533A3 WO2009016533A3 (fr) 2009-08-06

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EP (1) EP2176644B1 (fr)
CN (1) CN101779117B (fr)
WO (1) WO2009016533A2 (fr)

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WO2009060358A3 (fr) * 2007-11-05 2009-07-02 Koninkl Philips Electronics Nv Procédé de détection de la redispersion de billes
WO2012147000A1 (fr) 2011-04-27 2012-11-01 Koninklijke Philips Electronics N.V. Système de capteur comportant une cartouche remplaçable et un lecteur
WO2013035028A1 (fr) 2011-09-06 2013-03-14 Koninklijke Philips Electronics N.V. Procédé et dispositif de couplage d'un faisceau lumineux dans une feuille
WO2014001985A1 (fr) 2012-06-29 2014-01-03 Koninklijke Philips N.V. Traitement de fluides contenant des particules interférentes
WO2014001982A1 (fr) 2012-06-29 2014-01-03 Koninklijke Philips N.V. Traitement de particules magnétiques liées et non liées
WO2014013372A1 (fr) 2012-07-18 2014-01-23 Koninklijke Philips N.V. Traitement d'un fluide d'échantillonnage contenant des composants cibles

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WO2009016533A3 (fr) 2009-08-06
EP2176644B1 (fr) 2012-10-31
US8228506B2 (en) 2012-07-24

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