WO2009044524A1 - 液体材料の塗布装置、塗布方法およびプログラム - Google Patents
液体材料の塗布装置、塗布方法およびプログラム Download PDFInfo
- Publication number
- WO2009044524A1 WO2009044524A1 PCT/JP2008/002705 JP2008002705W WO2009044524A1 WO 2009044524 A1 WO2009044524 A1 WO 2009044524A1 JP 2008002705 W JP2008002705 W JP 2008002705W WO 2009044524 A1 WO2009044524 A1 WO 2009044524A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- liquid material
- time
- amount
- sub
- program
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1005—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material already applied to the surface, e.g. coating thickness, weight or pattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
- B05C11/1021—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to presence or shape of target
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
- B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008801184043A CN101878071B (zh) | 2007-10-01 | 2008-09-29 | 液体材料的涂布装置以及涂布方法 |
| KR1020107009473A KR101523294B1 (ko) | 2007-10-01 | 2008-09-29 | 액체 재료의 도포 장치, 도포 방법 및 프로그램이 기억된 기억 매체 |
| HK10111843.4A HK1145474B (en) | 2007-10-01 | 2008-09-29 | Liquid material applicator and application method |
| EP08836355.1A EP2202005B1 (en) | 2007-10-01 | 2008-09-29 | Liquid material applicator, application method, and program |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-258115 | 2007-10-01 | ||
| JP2007258115A JP5154879B2 (ja) | 2007-10-01 | 2007-10-01 | 液体材料の塗布装置、塗布方法およびプログラム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2009044524A1 true WO2009044524A1 (ja) | 2009-04-09 |
Family
ID=40525956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2008/002705 Ceased WO2009044524A1 (ja) | 2007-10-01 | 2008-09-29 | 液体材料の塗布装置、塗布方法およびプログラム |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP2202005B1 (ja) |
| JP (1) | JP5154879B2 (ja) |
| KR (1) | KR101523294B1 (ja) |
| CN (1) | CN101878071B (ja) |
| MY (1) | MY155532A (ja) |
| TW (1) | TWI473662B (ja) |
| WO (1) | WO2009044524A1 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120036974A (ko) * | 2009-06-15 | 2012-04-18 | 무사시 엔지니어링 가부시키가이샤 | 액체 재료의 도포 방법, 그 장치 및 그 프로그램을 기억한 기억 매체 |
| JPWO2015083722A1 (ja) * | 2013-12-06 | 2017-03-16 | 武蔵エンジニアリング株式会社 | 液体材料塗布装置 |
| CN108480139A (zh) * | 2018-05-29 | 2018-09-04 | 天津爱码信自动化技术有限公司 | 一种智能涂布刻印机 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5638768B2 (ja) | 2009-04-24 | 2014-12-10 | 武蔵エンジニアリング株式会社 | ノズル回転機構およびそれを備える塗布装置 |
| JP5437752B2 (ja) * | 2009-09-24 | 2014-03-12 | 富士機械製造株式会社 | 塗布装置および塗布状態補正方法 |
| JP5434781B2 (ja) * | 2010-04-28 | 2014-03-05 | 東京エレクトロン株式会社 | 処理液供給機構 |
| JP6084376B2 (ja) * | 2012-06-19 | 2017-02-22 | 武蔵エンジニアリング株式会社 | 液体材料吐出装置の洗浄装置および洗浄方法 |
| KR102015793B1 (ko) | 2012-11-13 | 2019-08-29 | 엘지디스플레이 주식회사 | 디스플레이 패널과 합착재 도포장치 및 합착재 도포방법 |
| CN105050730B (zh) * | 2013-03-14 | 2019-12-03 | 武藏工业株式会社 | 液体材料吐出装置、其涂布装置及涂布方法 |
| JP6304617B2 (ja) * | 2013-09-09 | 2018-04-04 | 兵神装備株式会社 | 流体塗布システムおよび流体塗布方法 |
| JP6467132B2 (ja) * | 2013-12-27 | 2019-02-06 | 蛇の目ミシン工業株式会社 | ロボット、ロボットの制御方法、およびロボットの制御プログラム |
| CN106179887A (zh) * | 2015-05-08 | 2016-12-07 | 铕晟事业股份有限公司 | 胶体涂布方法 |
| US9789497B1 (en) | 2016-06-20 | 2017-10-17 | Nordson Corporation | Systems and methods for applying a liquid coating to a substrate |
| CN109574511A (zh) * | 2017-09-29 | 2019-04-05 | 中外炉工业株式会社 | 基板的涂布方法以及基板的涂布装置 |
| JP6787294B2 (ja) | 2017-10-31 | 2020-11-18 | セイコーエプソン株式会社 | ロボットシステム、制御方法、及びロボット |
| EP3706920B1 (en) * | 2017-11-10 | 2026-04-29 | Nordson Corporation | Systems and methods for enhanced coating dispensing controls |
| DE102019212373A1 (de) * | 2019-08-19 | 2021-02-25 | Rampf Holding Gmbh & Co. Kg | Dosieranlage |
| CN115461159B (zh) * | 2020-05-08 | 2024-06-18 | 发那科株式会社 | 模拟装置 |
| CN113318919B (zh) * | 2021-06-30 | 2022-05-10 | 成都飞机工业(集团)有限责任公司 | 一种机器人在飞机部件密封胶自动涂覆工艺 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH078872A (ja) * | 1993-06-29 | 1995-01-13 | Matsushita Electric Ind Co Ltd | 塗布剤の塗布装置 |
| JPH1110054A (ja) * | 1997-06-19 | 1999-01-19 | Dainippon Screen Mfg Co Ltd | 塗布液塗布装置 |
| JP2001126975A (ja) * | 1999-10-26 | 2001-05-11 | Dainippon Screen Mfg Co Ltd | 基板塗布装置 |
| WO2006118088A1 (ja) * | 2005-04-26 | 2006-11-09 | Shibaura Mechatronics Corporation | ペースト塗布装置及びペースト塗布方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05231546A (ja) * | 1991-03-07 | 1993-09-07 | Fanuc Ltd | 産業用ロボットによるシーリングにおけるシール材流量制御方法 |
| JP2001009339A (ja) * | 1999-06-28 | 2001-01-16 | Mitsubishi Electric Corp | 液体塗布装置とその制御方法 |
| US7048964B2 (en) * | 2000-12-08 | 2006-05-23 | Ged Integrated Solutions, Inc. | Controlled dispensing of material |
| JP4216034B2 (ja) * | 2002-10-07 | 2009-01-28 | 芝浦メカトロニクス株式会社 | 液状物質滴下装置および方法 |
| JP2005000910A (ja) * | 2003-05-19 | 2005-01-06 | Matsushita Electric Ind Co Ltd | 流体塗布装置及び流体塗布方法並びにプラズマディスプレイパネル |
| JP2006167534A (ja) * | 2004-12-14 | 2006-06-29 | Seiko Epson Corp | 液滴量測定方法、液滴吐出ヘッドの駆動信号適正化方法および液滴吐出装置 |
| CN100482447C (zh) * | 2005-02-21 | 2009-04-29 | 江南模塑科技股份有限公司 | 汽车安全扰流板中空吹塑工艺技术及其制品 |
-
2007
- 2007-10-01 JP JP2007258115A patent/JP5154879B2/ja active Active
-
2008
- 2008-09-29 WO PCT/JP2008/002705 patent/WO2009044524A1/ja not_active Ceased
- 2008-09-29 MY MYPI2010001455A patent/MY155532A/en unknown
- 2008-09-29 CN CN2008801184043A patent/CN101878071B/zh active Active
- 2008-09-29 KR KR1020107009473A patent/KR101523294B1/ko active Active
- 2008-09-29 EP EP08836355.1A patent/EP2202005B1/en active Active
- 2008-10-01 TW TW97137684A patent/TWI473662B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH078872A (ja) * | 1993-06-29 | 1995-01-13 | Matsushita Electric Ind Co Ltd | 塗布剤の塗布装置 |
| JPH1110054A (ja) * | 1997-06-19 | 1999-01-19 | Dainippon Screen Mfg Co Ltd | 塗布液塗布装置 |
| JP2001126975A (ja) * | 1999-10-26 | 2001-05-11 | Dainippon Screen Mfg Co Ltd | 基板塗布装置 |
| WO2006118088A1 (ja) * | 2005-04-26 | 2006-11-09 | Shibaura Mechatronics Corporation | ペースト塗布装置及びペースト塗布方法 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120036974A (ko) * | 2009-06-15 | 2012-04-18 | 무사시 엔지니어링 가부시키가이샤 | 액체 재료의 도포 방법, 그 장치 및 그 프로그램을 기억한 기억 매체 |
| EP2444164A4 (en) * | 2009-06-15 | 2013-10-23 | Musashi Engineering Inc | PROCESS FOR APPLYING LIQUID MATERIAL AND DEVICE AND PROGRAM THEREFOR |
| US8809075B2 (en) | 2009-06-15 | 2014-08-19 | Musashi Engineering, Inc. | Method for applying liquid material utilizing capillary phenomenon |
| JP5632838B2 (ja) * | 2009-06-15 | 2014-11-26 | 武蔵エンジニアリング株式会社 | 液体材料の塗布方法、その装置およびそのプログラム |
| KR101677487B1 (ko) | 2009-06-15 | 2016-11-18 | 무사시 엔지니어링 가부시키가이샤 | 액체 재료의 도포 방법, 그 장치 및 그 프로그램이 기억된 기억 매체 |
| JPWO2015083722A1 (ja) * | 2013-12-06 | 2017-03-16 | 武蔵エンジニアリング株式会社 | 液体材料塗布装置 |
| CN108480139A (zh) * | 2018-05-29 | 2018-09-04 | 天津爱码信自动化技术有限公司 | 一种智能涂布刻印机 |
| CN108480139B (zh) * | 2018-05-29 | 2024-04-05 | 天津爱码信自动化技术有限公司 | 一种智能涂布刻印机 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200936250A (en) | 2009-09-01 |
| KR20100072324A (ko) | 2010-06-30 |
| JP2009082859A (ja) | 2009-04-23 |
| TWI473662B (zh) | 2015-02-21 |
| EP2202005B1 (en) | 2020-01-01 |
| MY155532A (en) | 2015-10-30 |
| CN101878071A (zh) | 2010-11-03 |
| HK1145474A1 (en) | 2011-04-21 |
| EP2202005A1 (en) | 2010-06-30 |
| KR101523294B1 (ko) | 2015-05-27 |
| JP5154879B2 (ja) | 2013-02-27 |
| EP2202005A4 (en) | 2018-03-07 |
| CN101878071B (zh) | 2012-10-10 |
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