WO2009089958A1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

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Publication number
WO2009089958A1
WO2009089958A1 PCT/EP2008/066309 EP2008066309W WO2009089958A1 WO 2009089958 A1 WO2009089958 A1 WO 2009089958A1 EP 2008066309 W EP2008066309 W EP 2008066309W WO 2009089958 A1 WO2009089958 A1 WO 2009089958A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotor
stator
annular groove
rings
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/066309
Other languages
German (de)
English (en)
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to US12/812,814 priority Critical patent/US20100322799A1/en
Priority to CN2008801248308A priority patent/CN101952602A/zh
Priority to EP08870887.0A priority patent/EP2235377B1/fr
Priority to JP2010541731A priority patent/JP5546464B2/ja
Publication of WO2009089958A1 publication Critical patent/WO2009089958A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a turbomolecular pump
  • Turbomolecular pumps have a multi-rotor rotor coupled to a drive shaft.
  • Stationary stator disks are arranged between the individual rotor blades. Often, the stator discs are not directly connected to the pump housing, but supported by stator rings.
  • a stator ring is provided per rotor blade, wherein the stator rings are slipped over the rotor for mounting. There must be a gap between the rotor blades or rotor rotor tips and the stationary housing or the stator rings. This is required in all operating conditions touching the rotor! on the stationary components, ie the housing or the stator rings to prevent.
  • the width of the gap must be so large that in all operating conditions, the thermal expansion of the rotor blades occurring is possible without touching the stationary components. Furthermore, it must be taken into account in the width of the intended gap that skewing of the rotor can occur due to the rotor dynamics. In particular, in magnetgeiagerten drive shafts, the Ausienkung must also be considered due to the game to the backup bearings. Furthermore, strains of the rotor occur in particular in the radial direction by centrifugal forces. Furthermore, if necessary, adding tolerances _ _
  • the gap between the rotor blades and the housing or the stator rings is approximately 200 mm - 2 mm in turbomolecular pumps with a rotor diameter of approx. Due to the existing gap, part of the pumped gas flows back. By this backflow, the efficiency of the turbomolecular pump is significantly deteriorated.
  • the object of the invention is to provide a turbomolecular pump with which a reduction of the recirculating gas volume and thus an improvement in the efficiency can be achieved.
  • the turbomolecular pump according to the invention has a rotor with a plurality of rotor blades.
  • the rotor is connected to a drive shaft and surrounded by a stator element.
  • the cylindrically shaped stator element may be the housing of the turbomolecular pump itself or one, in particular a plurality of stator rings.
  • the stator element has at least one annular groove.
  • the circumferential annular groove is associated with a Rotorfiügel and arranged in the corresponding plane of flight of this rotor.
  • the annular groove is thus arranged at the level of the associated rotor blade in the operating state. This makes it possible that an expansion of the rotor blade takes place during operation in the radial direction in the annular groove.
  • the dimensions of the annular groove are in this case selected such that in all operating conditions, contact of the rotor blade is avoided both on the ground and on the side walls of the annular groove. Since the tip of the rotor blade protrudes into the annular groove during operation of the turbomolecular pump, the gap at the tip of the rotor blade is U-shaped in cross-section. This is significantly reduces the volume of the recirculating gas and thus improves the efficiency of the turbomolecular pump.
  • the rotor blades on a radial approach.
  • This pointing in the direction of the annular groove approach is particularly annular.
  • the annular projection thus surrounds the individual blades of the rotor blades, so that preferably during operation only the annular projection and not the blades are inserted into the annular groove.
  • Each rotor blade is preferably assigned an annular groove, wherein each rotor blade preferably has an annular projection.
  • annular grooves for a plurality, in particular at least two rotor blades, a further improvement of the tightness can be achieved. Since, in a particularly preferred embodiment, an annular groove is provided per rotor blade, a meander-shaped gap is formed during operation, which serves as a non-contact labyrinth seal, so that a considerable improvement in the efficiency of the turbomolecular pump can be achieved.
  • the at least one annular groove may be formed on an inner side of a housing designed as a stator element.
  • a plurality of stator rings are provided within a pump housing.
  • a stator ring is provided per rotor blade, wherein the stator rings are arranged one behind the other in the axial direction.
  • the stator rings are thus arranged one behind the other in the direction of the drive shaft or in the main conveying direction of the gas.
  • the annular groove according to the invention is provided in one or more stator rings.
  • an annular groove is provided in all stator rings, in particular in the associated with the corresponding rotor blades annular approach in operation penetrates.
  • the ring groove height depends on the blade heights decreasing from the inlet side to the outlet side (following the compression).
  • the groove depth varies from approx. 0.5 mm for small to approx. 4 mm for large rotors.
  • the groove width varies from 2 mm for flat blades of small rotors to 15 mm for steep blades of large rotors.
  • FIG. 1 is an enlarged schematic sectional view of part of a part of a turbomolecular pump according to the prior art
  • Fig. 2 is a schematic sectional view of an inventive
  • FIG. 3 is a schematic enlarged sectional view of the region III in FIG.
  • FIG. 1 shows a rotor 12 arranged on a drive shaft 10 (FIG. 2).
  • the rotor 12 has radially extending rotor blades 16 with respect to a longitudinal axis 14 and the axis of rotation of the shaft 10, respectively on. Every rotor fly! has rotor blades 18 which are inclined so that in the gas to be transported a main flow direction parallel to the longitudinal axis, i. is generated in Fig. 1 down in the direction of arrow 20.
  • the rotor 12 is arranged in a housing 22, wherein the housing for receiving the rotor has a cylindrical, optionally, stepped recess 24.
  • stator rings 26 are arranged one behind the other in the longitudinal direction 14 and thus clothe an inner side of the cylindrical recess 24 of the housing 22. Between adjacent stator rings 26 are facing inwardly in the direction of the rotor Stator discs 28 are provided. Each Statorschesbe 28 is thus arranged between two adjacent rotor wings 16.
  • a gap a In operation of the turbomolecule suction pump, to prevent the radially outer ends of the rotor ball 16, i. the tips of the rotor vanes 16 which contact the stator rings 26 are between the radial ends of the rotor fins 16 and the inner sides, i. formed in the direction of the rotor blades 16 facing sides 30, a gap a. Through this gap a gas to be delivered during operation flows counter to the conveying direction 20 back into a suction chamber, from which the gas is to be sucked.
  • the turbomolecular pump according to the invention also has a drive shaft 10, which carries the rotor 12.
  • the rotor 12 also has rotor blades 16 which support rotor blades 18.
  • stator rings 26 are also disposed within the housing 22.
  • 16 stator discs 28 are arranged in the illustrated embodiment between adjacent rotor blades.
  • all the stator rings have an annular groove 32 on their inner side pointing in the direction of the rotor 12.
  • the annular groove 32 is self-contained and extends along the entire inner side of each individual stator ring 26.
  • the RotorfSugei 16 have at the outer in the direction of the stator 26 facing ends in the illustrated embodiment, in each case an annular projection 34.
  • annular projection 33 shifts due to the thermal expansion of the centrifugal forces, etc. in the corresponding annular groove 32nd
  • the annular grooves 32 and the annular projections 34 are thus per rotor flights! on a common, in Fig. 3 each horizontally extending plane of flight 36, of which in Fig. 3 for clarity only one is shown.
  • the upper rotor wing 16 in FIG. 3 is not surrounded by a stator ring.
  • an annular groove 38 is provided in the housing 22.
  • a projection 34 of the upper rotor fissure 16 projects into the annular groove 38.
  • a mounting gap b is provided between the radial ends of the Rotorflugei 16 and an inner side of the stator 26. This is required to stuipen the stator 26 for mounting on the rotor 12.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

La présente invention concerne une pompe turbomoléculaire comprenant un rotor (12) relié à un arbre d'entraînement (10). Le rotor (12) comprend plusieurs pales de rotor (16). Le rotor (12) est entouré par des couronnes de stator (26). Une couronne de stator (26) par pale de rotor (16) est prévue. Afin de permettre un prolongement radial de la pale de rotor au cours d'un fonctionnement, les couronnes de stator (26) comprennent des rainures annulaires (32).
PCT/EP2008/066309 2008-01-15 2008-11-27 Pompe turbomoléculaire Ceased WO2009089958A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/812,814 US20100322799A1 (en) 2008-01-15 2008-11-27 Turbomolecular pump
CN2008801248308A CN101952602A (zh) 2008-01-15 2008-11-27 涡轮分子泵
EP08870887.0A EP2235377B1 (fr) 2008-01-15 2008-11-27 Pompe turbomoléculaire
JP2010541731A JP5546464B2 (ja) 2008-01-15 2008-11-27 ターボ分子ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008004297.8 2008-01-15
DE102008004297A DE102008004297A1 (de) 2008-01-15 2008-01-15 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
WO2009089958A1 true WO2009089958A1 (fr) 2009-07-23

Family

ID=40405030

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/066309 Ceased WO2009089958A1 (fr) 2008-01-15 2008-11-27 Pompe turbomoléculaire

Country Status (7)

Country Link
US (1) US20100322799A1 (fr)
EP (1) EP2235377B1 (fr)
JP (1) JP5546464B2 (fr)
CN (1) CN101952602A (fr)
DE (1) DE102008004297A1 (fr)
TW (1) TW200934957A (fr)
WO (1) WO2009089958A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8444127B2 (en) * 2009-12-14 2013-05-21 The Boeing Company High temperature composite patch tool
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842902A (en) * 1973-07-05 1974-10-22 Hayes Albion Corp Labyrinthian fan
US20020164247A1 (en) * 2001-05-02 2002-11-07 Sylvain Nadeau Turbomachine with double-faced rotor-shroud seal structure
EP1498612A2 (fr) 2003-07-15 2005-01-19 Pfeiffer Vacuum GmbH Pompe turbomoléculaire

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
JPS6314893U (fr) * 1986-07-11 1988-01-30
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
JPH0687691U (ja) * 1993-05-28 1994-12-22 セイコー精機株式会社 ターボ分子ポンプ
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
US20050031710A1 (en) * 2003-08-08 2005-02-10 D'adamo Peter James Method of personal care and cosmetic product preparation and composition using human blood type
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842902A (en) * 1973-07-05 1974-10-22 Hayes Albion Corp Labyrinthian fan
US20020164247A1 (en) * 2001-05-02 2002-11-07 Sylvain Nadeau Turbomachine with double-faced rotor-shroud seal structure
EP1498612A2 (fr) 2003-07-15 2005-01-19 Pfeiffer Vacuum GmbH Pompe turbomoléculaire

Also Published As

Publication number Publication date
US20100322799A1 (en) 2010-12-23
EP2235377A1 (fr) 2010-10-06
EP2235377B1 (fr) 2014-12-31
TW200934957A (en) 2009-08-16
DE102008004297A1 (de) 2009-07-16
JP5546464B2 (ja) 2014-07-09
CN101952602A (zh) 2011-01-19
JP2011510201A (ja) 2011-03-31

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