WO2009103701A1 - Système de pompe à vide et utilisation d’une pompe à vide à plusieurs paliers - Google Patents

Système de pompe à vide et utilisation d’une pompe à vide à plusieurs paliers Download PDF

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Publication number
WO2009103701A1
WO2009103701A1 PCT/EP2009/051854 EP2009051854W WO2009103701A1 WO 2009103701 A1 WO2009103701 A1 WO 2009103701A1 EP 2009051854 W EP2009051854 W EP 2009051854W WO 2009103701 A1 WO2009103701 A1 WO 2009103701A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
stage
pump
vacuum pump
last
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2009/051854
Other languages
German (de)
English (en)
Inventor
Christian Beyer
Markus Henry
Peter Klingner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of WO2009103701A1 publication Critical patent/WO2009103701A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/806—Pipes for fluids; Fittings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/70—Safety, emergency conditions or requirements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/028—Means for improving or restricting lubricant flow

Definitions

  • the invention relates to a vacuum pumping system. Furthermore, the invention relates to the use of a multi-stage vacuum pump, in particular for generating low pressures in the range of in particular 10 "10 mbar.
  • vacuum pump systems are used with several serially arranged in succession vacuum chambers. In the vacuum chambers, the vacuum gradually decreases.
  • each vacuum chamber is connected via a suction line with a vacuum pump.
  • atomize liquid For high-resolution analysis by means of mass spectrometry or other analytical methods, it is known, for example, to atomize liquid. This is then ionized in a first vacuum chamber, which is operated at about 2 to 4 mbar. In this case, an ionization of about 10 to 15% of the substance erfoigt.
  • By providing an electric field deposition and thus generation of an ion beam can take place. The particles not bound in the ion beam are sucked out of the first vacuum chamber.
  • the first vacuum chamber is adjoined by a plurality of further vacuum chambers, in which the ions are separated further, for example by electric fields, and the particles not remaining in the ion beam are always sucked away.
  • the individual chambers find at different pressures wetspectrophotometric measurements, centrifugal analyzes or TOF analyzes (Time of Flight Analyzes).
  • a detector plate can be arranged on which the remaining ions impinge.
  • stepwise pressures of 2 to 4 mbar, 10 "3 mbar, i ⁇ " 5 mbar, 10 "8 mbar and in the chamber with the lowest pressure 10 " 10 mbar prevail.
  • Such low pressures can only be achieved if the individual chambers are each connected to turbomolecular pumps.
  • To generate extremely low pressures of 10 "8 mbar or ICT 10 mbar it is possible to connect several turbomolecular pumps in series
  • a vacuum pump system with, for example, four consecutively serially arranged vacuum chambers is known.
  • the first vacuum chamber in which the highest vacuum of, for example, 2 to 4 mbar prevails, is connected to an anti-atmosphere backing pump.
  • the three further, adjacent to the first vacuum chamber vacuum chambers are connected by (separate) suction with a multi-stage vacuum pump, a so-called Mi-pump (multi-inlet pump).
  • the suction side or the inlet of the individual vacuum stages is connected via the respective suction line with the corresponding vacuum chamber.
  • the outlet or the pressure side of the individual vacuum stages is in each case connected to the inlet of the downstream vacuum stage in the pumping direction.
  • the Einiass the top vacuum level is thus connected to that vacuum chamber in which the lowest pressure prevails.
  • the outlet of this uppermost vacuum stage is then connected to the inlet of the adjoining next higher pressure vacuum stage or the intermediate vacuum stage, with the inlet of this vacuum stage
  • the suction line is connected to a further vacuum chamber. This is the vacuum chamber with the second lowest pressure.
  • the outlet of the intermediate vacuum stage is connected to the inlet of the highest vacuum stage, to which in turn a suction line is connected.
  • This suction line is connected to the vacuum chamber with the third lowest vacuum.
  • the outlet of the highest vacuum level of the multi-stage vacuum pump described in DE 43 31 589 is then connected to the backing pump. Since the individual vacuum pumps of the multi-stage vacuum pumps do not have to pump against the atmosphere, the costs can be considerably reduced.
  • the object of the invention is to increase the field of use of multistage vacuum pumps, in particular also to be able to use multistage vacuum pumps in vacuum pump systems with very low final pressures.
  • the object is achieved by a vacuum pump system according to claim 1 or the use of a multi-stage vacuum pump according to claim 11.
  • the vacuum pumping system has a plurality of vacuum chambers arranged serially or one behind the other, wherein the pressure in the vacuum chambers gradually decreases.
  • the multi-stage vacuum pump has at least two, preferably three vacuum stages, each of which is a separate vacuum pump. From the top or first level of the Multi-stage vacuum pump produces the lowest pressure. The last stage of the multi-stage vacuum pump generates the highest pressure relative to the multi-stage vacuum pump. Thus, for example, a pressure of 10 "5 mbar and of the last vacuum stage a pressure of IQ " 3 mbar is produced by the uppermost vacuum stage.
  • An inlet of the uppermost vacuum stage is connected via a Saugieitung with one of the vacuum chambers.
  • the provided in the uppermost vacuum stage vacuum pump which is preferably a turbomolecular pump, thus promotes towards a downstream vacuum stage or in the direction of the last vacuum stage.
  • an outlet of the last vacuum stage is closed.
  • This has the consequence that the conveyed by the upstream vacuum stage medium is compressed against the last vacuum stage.
  • the medium thus flows after exiting the upstream vacuum stage in the direction of the last vacuum stage, but is not further promoted by the pump in the last vacuum stage, but flows to the corresponding port of the multi-stage vacuum pump to the outside.
  • This port is used in conventional, non-inventive use, as an inlet for the last vacuum stage, which promotes in the conventional operation in the direction of the original outlet, but Erftndungsger ⁇ äß is closed.
  • the closing according to the invention of the outlet of the vacuum stage has the result that in this last vacuum stage there is a predetermined pressure, which should not be less than 10 -3 mbar, for example
  • the vacuum stages connected upstream of the last vacuum stage thus have a cantilevered rotor shaft, when in the last vacuum stage there is a pressure of 1 mbar and the multi-stage vacuum pump, for example, three Having vacuum pumps, it is possible by the last vacuum stage immediately upstream vacuum stage pressure of 10 "8 mbar and through the upstream upstream or first stage of the multi-stage vacuum pump even to produce a pressure of ICT 10 mbar reliable.
  • a fore-vacuum pump is connected to the outlet of the last effective or medium-conveying vacuum stage of the multistage vacuum pump, it being possible for the fore-vacuum pump to be a rotary valve, a scroll, a screw, a diaphragm pump or in turn a multi-stage vacuum pump.
  • the multi-stage vacuum pump preferably has at least one intermediate vacuum stage in addition to the uppermost and the last vacuum stage.
  • a triple-inlet pump that is, a multi-stage vacuum pump with three inlets and connected with the last vacuum stage-inventively sealed outlet
  • the multi-stage vacuum pump is not connected as conventional. Rather, only the inlets of the uppermost vacuum stage and the intermediate vacuum stage are used as inlets and connected via suction lines with the corresponding vacuum chambers.
  • the outlet of the last vacuum stage is closed and the inlet of the last vacuum stage, which conventionally serves as the third inlet, is used as an outlet.
  • each of the outlet of an intermediate vacuum stage with the Inlet connected to the downstream intermediate vacuum stage wherein the inlet is also connected in each case with a suction pipe connected to a vacuum chambers.
  • a second multi-stage vacuum pump is provided which optionally replaces the backing pump.
  • the second multi-stage vacuum pump is preceded by an additional backing pump.
  • the second multi-stage vacuum pump is disposed between the roughing pump and the first multi-stage vacuum pump.
  • the second multi-stage vacuum pump is preferably designed or advantageously developed as described above with reference to the first multi-stage vacuum pump. It is particularly preferred here that the inlet of the uppermost vacuum stage of the second multi-stage vacuum pump is connected to the outlet of the first multi-stage vacuum pump. It should be noted that the outlet of the first multistage vacuum pump according to the invention in conventional connection of the multi-stage vacuum pump corresponds to the third inlet, which is used there as an outlet due to the closure of the conventional outlet of the last stage.
  • the inlets of the uppermost vacuum stage and / or the intermediate vacuum stage are each connected via a separate suction line, each with a vacuum chamber in which different pressures are generated.
  • the last vacuum stage is not connected to the vacuum chamber because the vacuum pump of the last vacuum stage does not deliver any medium from one of the vacuum chambers, but acts as a stagnant pump.
  • the uppermost vacuum stage and the at least one intermediate vacuum stage is designed as a turbo-linear pump.
  • the last vacuum stage preferably has a Holweck vacuum pump.
  • the outlet of the second multi-stage vacuum pump is connected to a backing pump.
  • the latter may, for example, be a rotary vane pump or a Roots pump or a vacuum pump system.
  • the invention relates to the use of a multi-stage vacuum pump, in particular a multi-stage vacuum pump as described above.
  • the multi-stage vacuum pump has several connections, with a Ausiass the last vacuum stage is closed.
  • the bearings arranged in multi-stage vacuum pumps in the last vacuum stage are encapsulated.
  • the multi-stage vacuum pump as described above with reference to the vacuum pump system, connected and further developed according to the invention.
  • Fig. 1 is a schematic view of a first simple
  • Fig. 2 shows a preferred embodiment for the production of
  • a basic basic embodiment of the invention is shown.
  • the vacuum pump system has three vacuum chambers 10, 11, 12.
  • a first vacuum chambers 10 for example, a still relatively high pressure of 3 to 4 mbar
  • a lower pressure of 10 "3 mbar and in the last vacuum chamber 12 the lowest pressure of 10 " s mbar generated.
  • an examining a supplied through a supply line 14 gas This can be ionized in the chamber 10.
  • An ion beam which passes through the opening 16 into the second chamber 11, is then generated by an electric field.
  • a first examination of the gas by means of mass spectroscopy or other analysis methods takes place.
  • an ion beam generated for the further investigation is conducted through the opening 18 into the third chamber 12. This is then followed, for example, by an analysis by mass spectroscopy.
  • the vacuum in the first vacuum chamber 10 is generated in the illustrated embodiment by connecting the vacuum chamber 10 via a Saugieitung 20 with a backing pump 22.
  • the forevacuum pump is, for example, a rotary vane pump.
  • the backing pump 22 delivers the gas pumped out of the chamber 10 against the atmosphere in the direction of an arrow 24.
  • a multi-stage vacuum pump 26 for generating a vacuum in the vacuum chamber 11, 12.
  • This is for example a vacuum pump with three inputs of the Applicant, which is sold, for example, under the name Turbovac, TW400 / 300/25.
  • the inventively provided multi-stage vacuum pump 26 has three vacuum pumps 28, 30, 32.
  • the multi-stage vacuum pump 26 has four ports 34, 36, 38, 40.
  • the ports 34, 36, 38 are inlets and the port 40 is the outlet, but according to the invention, another connection is made to the multi-stage vacuum pump 26.
  • the two ports 34, 36 serve as inlets and are accordingly connected to suction pipes 42, 44, which are respectively connected to the chamber 12 and 11 respectively.
  • the third, usually also as an inlet port 28 is used according to the invention as an outlet and combined via a line 46 with the suction tube 20 and connected to the backing pump 22.
  • the usually serving as Ausiass port 40 is closed.
  • suction takes place through the suction line 42 by means of the pump 28, which is usually a turbomolecular pump.
  • the pump 28 thus forms the uppermost vacuum stage.
  • the pump 28 pumps the medium in the direction the next next higher pressure vacuum stage, which is formed by the pump 30, which is usually also a turbomolecular pump
  • the turbomolecular pump 30 is not only connected via a connecting line 48 to the pump 28 but also to the suction line 44, through the gas is sucked from the chamber 11.
  • the pump 30 delivers the medium via the port 38 according to the invention as an outlet through the pipe 46 in the direction of the backing pump 22.
  • the pump 32 which is usually a Holweck pump, pumps against the closed outlet 40.
  • the outlet 40 Since the outlet 40 is closed, a relatively high pressure prevails within the multi-stage vacuum pump 26 in the region of the last vacuum stage formed by the pump 32. In the exemplary embodiment shown, this is greater than 10 -3 mbar.
  • the multistage vacuum pumps preferably used according to the invention are constructed in such a way that the rotors of all pumps 28, 30, 32 are arranged on a common shaft means stored in the area of the pump 32.
  • the rotors of the pumps 28, 30 are cantilevered
  • the connection according to the invention of the multistage vacuum pump by closing the outlet 40 and using the port 38 as outlet results in the bearings being in the last vacuum stage , that is protected in the region of the pump 32, from too low a pressure. i ⁇
  • the pump 28 thus forms the uppermost vacuum stage, the pump 30, the intermediate vacuum stage and the pump 32, the last vacuum stage of the multi-stage vacuum pump 26th
  • the multi-stage vacuum pump has only two ports and an outlet and accordingly only two pumps.
  • Such a system may then be used in conjunction with a roughing pump 22 of any type to generate vacuum in two chambers. Referring to FIG. 1, this system eliminates the vacuum chamber 12, the pump 28 and the corresponding ports.
  • the chamber 50 is connected via an opening 49 to the chamber 12 and the chamber 52 via an opening 51 to the chamber 50.
  • two multi-stage vacuum pumps 26 are provided in this embodiment, which are constructed substantially as shown in FIG.
  • the right in Fig. 2 the first multi-stage vacuum pump 26 in turn has a top, formed by the pump 28 stage, a trained between by the pump 30 vacuum stage and a last formed by the pump 32 vacuum stage.
  • the two stages 28, 30 are connected via suction lines 56, 58 to the chambers 52 and 50, respectively.
  • the outlet 40 of the last vacuum stage 32 is in turn closed, so that the medium is conveyed via the connection 38 from the multi-stage vacuum pump 26 into a line 60.
  • the conduit 60 is connected to the vacuum chamber 12 and the second in Fig. 2 Unken multi-stage vacuum pump 26.
  • the uppermost formed by the pump 28 based on the second or left multi-stage vacuum pump 26 vacuum stage thus pumps the medium in the direction of the formed by the pump 30 intermediate vacuum stage of the second multi-stage vacuum pump 26, at the same time from the chamber 11 medium through the Suction line 62 is sucked.
  • the medium which in turn serves as an outlet 38, pumps the medium into the line 64, which is brought together with the suction line 20.
  • the last vacuum stage of the second multi-stage vacuum pump 26 formed by the pump 32 in turn pumps against the closed outlet 40.
  • the two multi-stage vacuum pumps are preferably each constructed such that the three pumps 28, 30, 32 are carried by a common shaft whose storage in the last vacuum stage, that is in the region of the pump 32, it is possible according to the invention even with multi-stage vacuum pumps to produce pressures of 10 "10 mbar.This is not possible with a conventional connection of a multi-stage vacuum pump, since the bearings located in the area of the last vacuum stage 32 would be damaged.
  • the second, multistage vacuum pump 26 on the left in FIG. 2 thus serves as a backing pump, with reference to the first right-hand multi-stage vacuum pump 26 in FIG.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Ce système de pompe à vide est, afin de produire de très basses pressions, en particulier de l'ordre de 10-10 mbars, relié à deux pompes à vide (26) à plusieurs paliers et une pompe à vide préliminaire (22). Dans les chambres à vide individuelles disposées en série (10, 11, 12, 50, 52), on produit une pression s'abaissant par paliers. Selon l'invention, le dernier palier de vide, qui est formé par la pompe (32) de la pompe à vide multiple (26), est fermé. La fermeture selon l'invention du branchement servant habituellement de sortie (40) garantit que les paliers qui se trouvent dans la région de la pompe (32) ne sont pas endommagés.
PCT/EP2009/051854 2008-02-19 2009-02-17 Système de pompe à vide et utilisation d’une pompe à vide à plusieurs paliers Ceased WO2009103701A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008009715A DE102008009715A1 (de) 2008-02-19 2008-02-19 Vakuumpump-System und Verwendung einer Mehrstufen-Vakuumpumpe
DE102008009715.2 2008-02-19

Publications (1)

Publication Number Publication Date
WO2009103701A1 true WO2009103701A1 (fr) 2009-08-27

Family

ID=40552061

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/051854 Ceased WO2009103701A1 (fr) 2008-02-19 2009-02-17 Système de pompe à vide et utilisation d’une pompe à vide à plusieurs paliers

Country Status (2)

Country Link
DE (1) DE102008009715A1 (fr)
WO (1) WO2009103701A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9140250B2 (en) 2010-03-31 2015-09-22 Edwards Limited Vacuum pumping system
GB2538962A (en) * 2015-06-01 2016-12-07 Edwards Ltd Vacuum pump
CN111542699A (zh) * 2018-04-16 2020-08-14 爱德华兹有限公司 多级真空泵和差异化地抽吸多个真空室的方法
CN113021942A (zh) * 2021-03-09 2021-06-25 中材科技风电叶片股份有限公司 风电叶片制造用真空集成系统以及用于其的控制方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489975A (en) 2011-04-14 2012-10-17 Edwards Ltd Vacuum pumping system
DE202012002684U1 (de) * 2012-03-15 2013-06-17 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung
GB2578138A (en) * 2018-10-18 2020-04-22 Edwards Ltd Non-mechanical vacuum pumping system and analytical instrument

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3639512A1 (de) * 1986-11-20 1988-06-01 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpsystem mit einer waelzkolbenpumpe
DE19500823A1 (de) * 1995-01-13 1996-07-18 Sgi Prozess Technik Gmbh Vakuum-Pumpstand
WO2004068099A1 (fr) * 2003-01-25 2004-08-12 Inficon Gmbh Detecteur de fuites muni d'une admission
WO2005113986A1 (fr) * 2004-05-21 2005-12-01 The Boc Group Plc Dispositif de pompage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4331589C2 (de) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3639512A1 (de) * 1986-11-20 1988-06-01 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpsystem mit einer waelzkolbenpumpe
DE19500823A1 (de) * 1995-01-13 1996-07-18 Sgi Prozess Technik Gmbh Vakuum-Pumpstand
WO2004068099A1 (fr) * 2003-01-25 2004-08-12 Inficon Gmbh Detecteur de fuites muni d'une admission
WO2005113986A1 (fr) * 2004-05-21 2005-12-01 The Boc Group Plc Dispositif de pompage

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9140250B2 (en) 2010-03-31 2015-09-22 Edwards Limited Vacuum pumping system
GB2538962A (en) * 2015-06-01 2016-12-07 Edwards Ltd Vacuum pump
GB2538962B (en) * 2015-06-01 2019-06-26 Edwards Ltd Vacuum pump
CN111542699A (zh) * 2018-04-16 2020-08-14 爱德华兹有限公司 多级真空泵和差异化地抽吸多个真空室的方法
US11326604B2 (en) 2018-04-16 2022-05-10 Edwards Limited Multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
CN113021942A (zh) * 2021-03-09 2021-06-25 中材科技风电叶片股份有限公司 风电叶片制造用真空集成系统以及用于其的控制方法

Also Published As

Publication number Publication date
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