WO2012104316A1 - Dispositif permettant de tester des composants électroniques comprenant au moins une couche intégrée contenant du métal, procédé, et utilisation d'un convertisseur électromagnétique-acoustique - Google Patents

Dispositif permettant de tester des composants électroniques comprenant au moins une couche intégrée contenant du métal, procédé, et utilisation d'un convertisseur électromagnétique-acoustique Download PDF

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Publication number
WO2012104316A1
WO2012104316A1 PCT/EP2012/051596 EP2012051596W WO2012104316A1 WO 2012104316 A1 WO2012104316 A1 WO 2012104316A1 EP 2012051596 W EP2012051596 W EP 2012051596W WO 2012104316 A1 WO2012104316 A1 WO 2012104316A1
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WO
WIPO (PCT)
Prior art keywords
component
electromagnetic
amplitude
res
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/051596
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German (de)
English (en)
Inventor
Andrej KIRIKOV
Pavel Pashkov
Fedor Durnov
Alexey Smirnov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NORDINKRAFT AG
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NORDINKRAFT AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NORDINKRAFT AG filed Critical NORDINKRAFT AG
Priority to RU2013137146/28A priority Critical patent/RU2013137146A/ru
Priority to JP2013552185A priority patent/JP2014504734A/ja
Priority to CN201280008467XA priority patent/CN103403539A/zh
Priority to KR1020137021305A priority patent/KR20140019320A/ko
Publication of WO2012104316A1 publication Critical patent/WO2012104316A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2412—Probes using the magnetostrictive properties of the material to be examined, e.g. electromagnetic acoustic transducers [EMAT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/48—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by amplitude comparison
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • G01R31/013—Testing passive components
    • G01R31/016—Testing of capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0231—Composite or layered materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Definitions

  • the present invention relates to a device for testing electronic components with at least one embedded, metal-containing layer, in particular multilayer Kerarnikkondensatoren.
  • the present invention also relates to a corresponding method and the use of an electromagnetic-acoustic transducer.
  • the most widely used technique for checking electronic components is ultrasonic technology.
  • the component is coupled to an ultrasonic head and then acted upon by an ultrasonic wave.
  • the mechanical structure of the component reflects the ultrasonic wave and the ultrasonic echo from the component is received by the ultrasonic head. Based on this echo can be determined whether the component is considered functional or defective.
  • the principle of ultrasonic testing sounds simple, the practical implementation is relatively expensive. On the one hand, it requires ultrasound technology that the component is in very good coupling to the ultrasound head. In addition, the coupling over the entire component must be uniform, otherwise the measurement results are falsified. Finally, the component must also be positioned very accurately to the ultrasound head, since even with slight deviations from a desired position, a completely different echo can occur.
  • a device for testing electronic components with at least one embedded, metal-containing layer, in particular multilayer ceramic capacitors the device with an electromagnetic-acoustic transducer having a pulse generating unit, which is designed for at least one electromagnetic To generate pulse within a component to be tested so that vibrations are generated within the component which generate an electromagnetic signal in response to the electromagnetic pulse, a receiving unit adapted to receive the electromagnetic signal, and having an evaluation unit, which is designed to evaluate the electromagnetic signal at least with respect to an amplitude of the signal at least one time, wherein the device further comprises a rating unit, which is designed for at least one of the Ausnceeinhei t to determine a detected amplitude of the signal with at least one threshold TH and depending on the comparison to produce a first output signal indicating that the component to be tested is considered functional or to generate a second output signal indicating that the one to be tested Component is considered defective.
  • Multilayer monolithic capacitors are widely used in all areas of the electrical industry.
  • a capacitor in particular ceramic capacitor, consists essentially of a ceramic block in which a plurality of metal-containing, in particular metallic, layers are arranged. These layers are also called electrodes in a capacitor.
  • the inventive device for testing electronic components with at least one embedded metal-containing layer, here the ceramic capacitor has a pulse generating unit which can generate at least one electromagnetic pulse within the ceramic capacitor. Although such an electromagnetic pulse has little or no effect on the substrate in which the layers are embedded, in this case the ceramic, the momentum exerts a force on the layers within the capacitor.
  • a force acting on the layers transmits to the ceramic, so the material in which the layers are embedded.
  • This in turn causes a vibration within the component can be, in particular a resonance vibration of the areas of the component, which are connected to the layers, or a resonance vibration of the entire component.
  • the layers of the same resonant vibration are subjected as the said areas of the component or the entire component.
  • the vibration of the layers now leads to the generation of an electromagnetic signal in response to the electromagnetic pulse.
  • This electromagnetic pulse can be received by the receiving unit of the electromagnetic-acoustic transducer.
  • the electromagnetic response signal of a functional component is distinguishable from the response signal of a defective component. This is particularly clear for the described case of a ceramic capacitor. If the layers are not sufficiently connected to the carrier material, in this case the ceramic, then the force generated by the electromagnetic pulse is only insufficiently transmitted to the carrier material. In addition, the lower vibration of the carrier material is again insufficiently transmitted to the layers, so that the vibration of the layers are significantly less pronounced in a defective component than in a functional component.
  • the amplitude of the electromagnetic response signal is now evaluated in an evaluation unit.
  • the amplitude of the response signal is evaluated immediately when the response signal arrives at the receiving unit.
  • the amplitude of the response signal over at least two, preferably at least five, more preferably at least ten, averages averages.
  • it can be advantageous for the evaluation of the amplitude to determine within which time period a predetermined relative or absolute reduction of the amplitude has taken place.
  • each component on the embedded layer of which a force can be exerted by means of an electromagnetic pulse and whose layer transmits the force to the carrier material in which the layer is embedded, can be tested by means of the inventive idea.
  • the electromagnetic signals in different components for example, in terms of the waveform, the absolute size of the amplitude or the relative difference in the amplitude of a functional component and the amplitude of a defective component, but react such components with in their amplitude distinguishable response signals, depending on whether they are functional or defective.
  • the threshold is used as a limit for whether a component is considered to be functional or defective: If the threshold is reached or exceeded, the first output signal is generated, which is a functional Indicates component. If the threshold value is undershot, the second output signal is generated which indicates a defective component.
  • a second threshold in addition to the said first threshold still a second threshold can be used.
  • the following logic is then advantageous: If the first threshold value is reached or exceeded, then the first output signal is generated. If the second threshold value is reached or undershot, the second output signal is generated. If the first threshold value is undershot and the second threshold value is exceeded, then a third output signal is generated, which indicates that the component has not been identified with sufficient reliability as defective or functional.
  • first and second output signal there only need to be distinguishable from each other. However, it is not absolutely necessary to be able to distinguish the two output signals from a further state, in particular a rest state. If it is determined, for example, that a digital HIGH signal indicates a functional component as the first output signal, then both a LOW signal and simply a failure of the HIGH signal can be understood as a second output signal. In a corresponding manner, the second output signal can also be defined as a digital HIGH signal and a lack of the HIGH signal as the first output signal.
  • the evaluation unit and the evaluation unit are preferably integrated, in particular in a microprocessor (PC) or a programmable logic circuit (Programmable Logic Device, PLD).
  • the pulse generating unit and the receiving unit are preferably realized by means of a module, so that the same module is responsible for the generation of the electromagnetic pulse as well as for the reception of the electromagnetic signal.
  • An advantageous use of the invention is expressly pointed out:
  • the test of the electronic component can be carried out in a dry environment, ie it is not necessary to introduce the component into a liquid in order to provide a coupling between a test head, in particular an ultrasound transducer. Test head, and the component manufacture. This greatly simplifies testing.
  • no coupling medium is required to allow signal transmission between the test head and the device at low attenuation.
  • the omnipresent medium of air is not understood as a coupling medium.
  • the evaluation unit is adapted to receive at least a first numerical input and to determine the threshold value TH based on the input.
  • This embodiment is advantageous because the device can be easily adjusted to a particular type of component to be tested and / or a change between different types of components can be done quickly.
  • a numerical value be accepted for the amplitude which is to represent the threshold value TH.
  • the numerical input describes the type of component to be tested and that in knowledge of the component type, a predetermined threshold value is determined, in particular on the basis of a table stored in a memory element in FIG the device is stored. The values of the table, so-called reference values, can be determined in advance by means of tests.
  • the evaluation unit is adapted to determine the threshold value TH in a first operating mode from a pilot amplitude AMPp IL0T determined by the evaluation unit.
  • the device is first placed in the first mode. This is preferably done via a switch or the receipt of a corresponding control signal.
  • pilot amplitude AMP PILO T The threshold value is then determined on the basis of the pilot amplitude: If a component known to be functional was used, then the threshold value is preferably chosen to be smaller than the pilot amplitude. If a known defective component was used, then the threshold value is preferably selected to be greater than the pilot amplitude.
  • a plurality of pilot amplitudes are determined, be it on the basis of a single component or a group of known functional or known defective components, and the threshold is determined on the basis of the average of the pilot amplitudes.
  • This embodiment is advantageous since it allows a threshold value to be determined in a simple manner on the basis of a few components, in particular a component, which is well suited for practical use.
  • the numerical values of the factors are based on the assumption that a known functional component is used to determine the pilot amplitude. If a known defective component is to be used, then the factor is selected between 1.1 and 100, preferably between 1.3 and 20, particularly preferably between 1.6 and 10 and in particular between 2 and 7.
  • the evaluation unit is adapted for, in a first mode from a first pilot amplitude, which was determined by the evaluation unit in testing a known functional component, and from a second pilot amplitude, the evaluation unit during testing a known defective component was determined to determine the threshold.
  • the threshold value in knowledge of a first pilot amplitude of a functional component and a second pilot amplitude of a defective component can be determined particularly well.
  • the threshold value is determined as the mean value of the first pilot amplitude and the second pilot amplitude, preferably taking into account a logarithmic scale.
  • the evaluation unit is adapted to evaluate the amplitude at least in the vicinity of a resonant frequency of the component.
  • This embodiment is advantageous because the evaluation of the amplitude is not broadband and therefore any side effects or interference have only a small effect or even no effect on the measurement of the amplitude.
  • the determination of the resonance frequency can be performed individually for each component, in particular by the frequency spectrum of the electromagnetic response signal is evaluated in intervals.
  • the resonant frequency for a component type is determined in advance on the basis of experiments and then assumed to be constant for all components of this type of component. As a result, a particularly high throughput can be achieved during testing.
  • This embodiment is advantageous because in a simple manner, the resonant frequency of a component can be estimated and / or a good starting value for the search for the resonance frequency can be determined. It should be noted that the following considerations are made on the basis of a substantially monolithic component, in particular a multilayer ceramic capacitor, that the considerations for the occurrence of a resonance are of a fundamental nature.
  • the evaluation unit is adapted to evaluate in a third mode, the amplitudes in a frequency interval by a frequency start value and to determine a frequency with maximum amplitude as the resonant frequency of the component.
  • the electromagnetic-acoustic transducer has an active surface for emitting the electromagnetic pulse and / or for receiving the sound waves and the device further comprises a feed device, which automates the component to be tested at least in the Near the active area leads, in particular brings into contact with the active area.
  • This embodiment offers the advantage that the testing can be carried out automatically. Initially, a component to be tested is brought into the vicinity of the active surface by means of the feed device. The component is then tested as described above. Upon completion of the test, the feeder removes the now-tested component and places the next component to be tested near the active surface. With a further test procedure the testing will be continued perpetuating.
  • the electromagnetic-acoustic transducer can also have a plurality of active surfaces or the active surface has a plurality of areas that can be controlled separately. In such a device then several components can be tested simultaneously.
  • the term "in the vicinity of the active surface” is to be understood as meaning advantageously a distance of less than 2 cm, preferably less than 5 mm, particularly preferably less than 2 mm and in particular less than 1 mm.
  • the feeding device is adapted to lead a plurality of components to be tested, which are arranged on a carrier material, one after the other at least in the vicinity of the active surface, in particular to bring into contact with the active surface.
  • This embodiment provides a particularly reliable and fast way to automatically lead the components to be tested in the vicinity of the active surface.
  • the pulse has a duration of less than 10 s, preferably less than 2 s, more preferably less than 1 s and in particular less than 500 ns.
  • This embodiment offers the advantage that a wide spectrum of frequencies in the component can be excited. This ensures particularly well that the component is excited at its resonant frequency.
  • the component is a multilayer capacitor, in particular a multilayer ceramic capacitor.
  • the device can be used particularly advantageously when testing multilayer capacitors.
  • capacitors in particular multilayer ceramic capacitors, there is a clear difference in the electromagnetic response signal, as a function of which a capacitor is functional or defective.
  • the object is also achieved by a system for testing electronic components with a device mentioned above and at least one electronic component to be tested, wherein the component is in particular a multilayer capacitor, particularly preferably a multilayer ceramic capacitor.
  • the object is further achieved by a method for testing electronic components with at least one embedded metal-containing layer, in particular of multilayer ceramic capacitors, the process comprising the following steps:
  • Emitting at least one electromagnetic pulse to a device under test such that vibrations are generated within the device that produce an electromagnetic signal in response to the electromagnetic pulse;
  • the method further has the steps
  • an electromagnetic-acoustic transducer for testing electronic components. len with at least one embedded, metal-containing layer, in particular of multilayer ceramic capacitors.
  • each embodiment of the evaluation unit and the evaluation unit also discloses a corresponding method step, which can be executed as a single instruction or small program with a processor or a programmable logic circuit.
  • the corresponding use of the device for testing electronic components with at least one embedded metal-containing layer is disclosed and claimed for all embodiments of the device. This is especially true for use in testing multilayer ceramic capacitors.
  • the mechanical resonance frequency of the component is used.
  • These are in particular mechanical, free vibrations.
  • Metal-containing and / or metallic components of the component, in particular the metallic layers of a capacitor, are used to set the component in vibration.
  • the component is applied with a magnetic field, preferably using a magnet or an electromagnet, and with an electromagnetic wave, in order to stimulate a mechanical vibration of the metallic components of the component.
  • a connection of the metallic components of the component to the body of the component is utilized in order to transmit the mechanical vibration of the metallic components to the body of the component.
  • the movement of the metallic components within said magnetic field generates an electromagnetic signal in response.
  • An electromagnetic-acoustic transducer is used to excite the free vibration of the component and to receive the response.
  • a first transducer for exciting the vibration and a second transducer for receiving the response can be used.
  • the magnetic field can also be generated with an additional magnet.
  • Fig. 2 shows a capacitor having a plurality of metallic layers, in a
  • Fig. 3 is an electromagnetic response signal of a functional
  • Fig. 4 is an electromagnetic response signal of a functional
  • FIG. 5 shows a method for testing electronic components with at least one embedded metal-containing layer, here of capacitors each having a plurality of metallic layers embedded in a carrier material;
  • Fig. 1 shows a device 10 for testing electronic components 30 with at least one embedded metal-containing layer 32 (see Fig. 2), in particular multilayer ceramic capacitors.
  • the device 10 has an electromagnetic-acoustic transducer 12 having a pulse generating unit 14 adapted to generate at least one electromagnetic pulse IMP within a device under test 30, such that within the device 30 vibrations of the layers 32 are generated which generate an electromagnetic signal RES in response to the electromagnetic pulse IMP.
  • the device 10 and the component 30 form a system 11.
  • the device 10 has a receiving unit 16, which is adapted to receive the electromagnetic signal RES.
  • a receiving unit 16 which is adapted to receive the electromagnetic signal RES.
  • the pulse generating unit 14 and the receiving unit 16 in a further, not shown, embodiment are executed separately from each other, the situation is shown in this embodiment, in which the Irapulser Wegungsein- unit 14 and receiving unit 16 are realized as an assembly. Such a realization is known in electromagnetic-acoustic transducers.
  • the device 10 has an evaluation unit 18, which is designed to evaluate the electromagnetic signal RES at least with respect to an amplitude or amplitude change of the signal RES at least one time.
  • the device 10 has an evaluation unit 20 which is designed to compare at least one amplitude or amplitude change of the signal RES determined by the evaluation unit 18 with at least one threshold value TH and, depending on the comparison, to supply a first output signal SIG1 generate, indicating that the component to be tested 30 is considered to be functional and / or to generate a second output signal SIG2, indicating that the component to be tested 30 is to be regarded as defective.
  • one of the output signals SIG1, SIG2 can also simply be executed as the absence of a signal. If it is determined that the signal SIG1 is sent in the case of a functional component 30, then the absence of the signal SIG1 can be interpreted as a second output signal SIG2 and can therefore be concluded of a defective component.
  • the output signals SIG1, SIG2 must be distinguishable from one another, but not clearly defined.
  • the electromagnetic-acoustic transducer 12 has an active surface 22 for radiating the electromagnetic pulse IMP and for receiving the electromagnetic signal RES. Furthermore, the device 10 has a feed device 24 which automatically guides the components 30 to be tested at least into the vicinity of the active surface 22, in particular in contact with the active component Area 22 brings. Concretely, the feed device 24 is designed to guide several components 22 to be tested, which are arranged on a carrier material 26, at least in the vicinity of the active surface 24, in particular in contact with the active surface 24.
  • Fig. 2 shows a component 30, which is designed here as a multilayer ceramic capacitor.
  • the metallic layers 32 of the ceramic capacitor are embedded in a carrier material 34, here a ceramic body.
  • the layers 32 are here alternately connected to a first bonding area 36 and a second connection area 38.
  • defect 40 is shown within the component 30, here a lack of connection of at least one layer 32 to the carrier material 34.
  • the relevant length h is shown when a swing of the component 30 is assumed approximately perpendicular to the surfaces of the layers 32.
  • the layers 32 are acted upon by the electromagnetic pulse IMP with a force and the force also acts on the carrier material 34.
  • the carrier material 34 including the layers 32, then returns to the rest state with a decaying oscillation.
  • the movement of the layers 32 within the magnetic field generated by the electromagnetic-acoustic transducer generates the electromagnetic response signal RES received by the receiving unit 16.
  • FIG. 3 shows by way of example an electromagnetic response signal RES in the case of a functional component 30, in this case a multilayer ceramic capacitor.
  • the time is plotted along the abscissa and along the ordinate the respective signal strength of the electromagnetic signal RES.
  • the amplitude of the electromagnetic signal RES is evaluated here with respect to its maximum.
  • the maximum of the amplitude in this functional component 30 is denoted by AMP FKT .
  • the figure also shows the threshold value TH, which was selected for this type of component of the multilayer ceramic capacitor. It can be clearly seen that the amplitude AMP PKT significantly exceeds the threshold value TH. The component 30 would therefore be considered functional.
  • FIG. 4 shows, by way of example, an electromagnetic response signal RES in the case of a defective component 30, in this case the multilayer ceramic capacitor illustrated in FIG. 2.
  • a defective component 30 in this case the multilayer ceramic capacitor illustrated in FIG. 2.
  • the amplitude of the electromagnetic signal RES is evaluated as before with respect to its maximum.
  • the maximum of the amplitude in this defective component 30 is designated AMP DEF .
  • Fig. 5 shows an embodiment of a method for testing electronic components with at least one embedded metal-containing layer. The process begins with step S1.
  • At step S5 at least one electromagnetic pulse IMP is sent out from the pulse generating unit 14 to the device under test 30 so as to generate within the device 30 vibrations that generate an electromagnetic signal RES in response to the electromagnetic pulse IMP.
  • the Electromagnetic signal RES is received by the receiving unit 16 in step S6.
  • the electromagnetic signal RES is evaluated in step S7 at least with respect to an amplitude or an amplitude change of the signal RES at least one time.
  • the evaluation preferably takes place at least in the vicinity of a resonance frequency of the component 30.
  • the resonance frequency is in particular the resonance frequency at which the layers 32 oscillate approximately perpendicular to a surface of the layers 32 together with the carrier material.
  • step S8 the determined amplitude AMP of the electromagnetic signal is compared with at least one threshold TH. If the threshold value is exceeded, the method branches off via branch J to step S9, where a first output signal is generated, which indicates that the component 30 to be tested is to be considered functional. Otherwise, the process branches via branch N to step S10, where a second output signal is generated, which indicates that the component 30 to be tested is to be regarded as defective.
  • step Sil it is checked whether the last component has been tested. If this is not the case, the method branches off via branch N to step S12, where the next electronic component 30 to be tested is brought into the test position in front of the device 10. Otherwise, the process over the branch J ends with the step S13.
  • a device, a method and a use for testing electronic components having at least one embedded metal-containing layer, in particular multilayer ceramic capacitors have been disclosed that can enable a significantly increased test speed of up to several components per second.

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Abstract

L'invention concerne un dispositif (10) permettant de tester des composants électroniques (30) comportant au moins une couche intégrée contenant du métal (32), en particulier des condensateurs en céramique multicouches. Le dispositif (10) comprend un convertisseur électromagnétique-acoustique (12) qui comporte : une unité de génération d'impulsion (14) qui est configurée pour générer au moins une impulsion électromagnétique (IMP) à l'intérieur d'un composant objet du test, de sorte qu'à l'intérieur du composant électronique (30) sont générées des vibrations qui produisent un signal électromagnétique (RES) en réponse à l'impulsion électromagnétique (IMP) ; une unité de réception (16) qui est configurée pour recevoir le signal électromagnétique (RES) ; et une unité d'interprétation (18) qui est configurée pour interpréter le signal électromagnétique (RES) au moins quant à une amplitude ou un changement d'amplitude du signal (RES) à au moins un instant. Le dispositif (10) comporte par ailleurs une unité d'évaluation (20) qui est configurée pour comparer au moins une amplitude ou un changement d'amplitude du signal (RES) déterminés par l'unité d'interprétation (18) à au moins une valeur seuil (TH) et pour générer en fonction de cette comparaison un premier signal de sortie (SIG1) qui indique que le composant objet du test (30) doit être considéré comme apte à fonctionner ou un deuxième signal de sortie (SIG2) qui indique que le composant objet du test doit être considéré comme défectueux. L'invention concerne par ailleurs un procédé associé et une utilisation d'un convertisseur électromagnétique-acoustique (12).
PCT/EP2012/051596 2011-01-31 2012-01-31 Dispositif permettant de tester des composants électroniques comprenant au moins une couche intégrée contenant du métal, procédé, et utilisation d'un convertisseur électromagnétique-acoustique Ceased WO2012104316A1 (fr)

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RU2013137146/28A RU2013137146A (ru) 2011-01-31 2012-01-31 Устройство для тестирования электронных компонентов, имеющих по меньшей мере один встроенный металлосодержащий слой, способ и применение электромагнитно-акустического преобразователя
JP2013552185A JP2014504734A (ja) 2011-01-31 2012-01-31 少なくとも１つの金属含有層が埋め込まれた電子部品を検査するための装置、方法、および電磁超音波探触子の使用
CN201280008467XA CN103403539A (zh) 2011-01-31 2012-01-31 用于测试具有至少一个嵌入的含金属的层的电子部件的装置，方法以及电磁-声学转换器的应用
KR1020137021305A KR20140019320A (ko) 2011-01-31 2012-01-31 하나 이상의 매입된 금속 함유층을 포함하는 전자 부품의 검사 장치, 방법 및 전자기 음향 변환기의 이용

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DE102011009915A DE102011009915A1 (de) 2011-01-31 2011-01-31 Vorrichtung zum Testen von elektronischen Bauteilen mit mindestens einer eingebetteten, metallhaltigen Schicht, Verfahren, und Verwendung eines elektromagnetisch-akustischen Wandlers
DE102011009915.8 2011-01-31

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DE102013207559A1 (de) * 2013-04-25 2014-10-30 Continental Teves Ag & Co. Ohg Verfahren und Anordnung zur Prüfung einer Orientierung und/oder eines Qualitätskriteriums von Keramikvielschicht-Kondensatoren
FR3050530B1 (fr) * 2016-04-20 2020-05-01 Safran Procede de controle voire de certification d'un assemblage colle
DE102017205561A1 (de) * 2017-03-31 2018-10-04 Rheinisch-Westfälische Technische Hochschule Aachen (RWTH) Diagnose von Batterien
CN111790641A (zh) * 2020-06-19 2020-10-20 南京钢铁股份有限公司 一种棒材表面缺陷的探伤分选方法
TWI780615B (zh) * 2021-03-04 2022-10-11 光頡科技股份有限公司 電阻元件金屬層雜質的檢測方法
CN115032236B (zh) * 2021-03-04 2025-04-29 光颉科技股份有限公司 电阻元件金属层杂质的检测方法
KR20230027599A (ko) * 2021-08-19 2023-02-28 삼성전기주식회사 전자부품의 결함 검출장치 및 검출방법
CN115184465A (zh) * 2022-07-29 2022-10-14 铁将军汽车电子股份有限公司 金属壳体检测装置及方法

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JP2014504734A (ja) 2014-02-24
CN103403539A (zh) 2013-11-20
DE102011009915A1 (de) 2012-08-02
KR20140019320A (ko) 2014-02-14

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