WO2012128459A3 - 솔라웨이퍼 카세트 - Google Patents

솔라웨이퍼 카세트 Download PDF

Info

Publication number
WO2012128459A3
WO2012128459A3 PCT/KR2012/000410 KR2012000410W WO2012128459A3 WO 2012128459 A3 WO2012128459 A3 WO 2012128459A3 KR 2012000410 W KR2012000410 W KR 2012000410W WO 2012128459 A3 WO2012128459 A3 WO 2012128459A3
Authority
WO
WIPO (PCT)
Prior art keywords
disposed
end plates
wafer cassette
assembly slot
solar wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2012/000410
Other languages
English (en)
French (fr)
Other versions
WO2012128459A2 (ko
Inventor
이강성
천준환
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sang A Frontec Co Ltd
Original Assignee
Sang A Frontec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sang A Frontec Co Ltd filed Critical Sang A Frontec Co Ltd
Priority to JP2013558775A priority Critical patent/JP5671160B2/ja
Publication of WO2012128459A2 publication Critical patent/WO2012128459A2/ko
Publication of WO2012128459A3 publication Critical patent/WO2012128459A3/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/13—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

솔라웨이퍼 카세트가 개시되어 있다. 개시된 솔라웨이퍼 카세트는, 일정간격을 두고 마주하게 배치되는 제1, 2 앤드플레이트, 상기 제1, 2 앤드플레이트에 양단이 고정되게 설치되어 상기 제1, 2 앤드플레이트 사이로 수납되는 다수의 솔라웨이퍼들의 측면 및 저면을 지지하는 다수의 지지바들로 이루어진 솔라웨이퍼 카세트로서, 상기 제1, 2 앤드플레이트(110,120) 중 적어도 어느 한 앤드플레이트의 내면에 상기 각 지지바(130)들을 조립하기 위해 조립슬롯(111)이 형성되되, 상기 조립슬롯(111)의 외측 및 내측에는 입출 개구부(111a) 및 안내 개구부(111b)가 각각 형성되고, 상기 안내 개구부(111b)의 내측 모서리에는 걸림턱(111c)이 형성되며, 상기 각 지지바(130)의 상기 조립슬롯(111)과 대응되는 단부에는 상기 입출 개구부(111a)를 통해 조립슬롯(111)으로 내입되는 계단형의 조립블록(140)이 구비된 것을 특징으로 한다.
PCT/KR2012/000410 2011-03-24 2012-01-18 솔라웨이퍼 카세트 Ceased WO2012128459A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013558775A JP5671160B2 (ja) 2011-03-24 2012-01-18 太陽電池ウェーハカセット

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2011-0026153 2011-03-24
KR1020110026153A KR101035552B1 (ko) 2011-03-24 2011-03-24 솔라웨이퍼 카세트

Publications (2)

Publication Number Publication Date
WO2012128459A2 WO2012128459A2 (ko) 2012-09-27
WO2012128459A3 true WO2012128459A3 (ko) 2012-11-15

Family

ID=44366278

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/000410 Ceased WO2012128459A2 (ko) 2011-03-24 2012-01-18 솔라웨이퍼 카세트

Country Status (3)

Country Link
JP (1) JP5671160B2 (ko)
KR (1) KR101035552B1 (ko)
WO (1) WO2012128459A2 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201305030A (zh) * 2011-06-15 2013-02-01 安堤格里斯公司 太陽能電池製程載具
CN104368560A (zh) * 2014-11-05 2015-02-25 东晶锐康晶体（成都）有限公司 一种大片晶片提篮
KR101564605B1 (ko) 2015-01-22 2015-11-02 (주)상아프론테크 웨이퍼 보관용 카세트
US9972740B2 (en) 2015-06-07 2018-05-15 Tesla, Inc. Chemical vapor deposition tool and process for fabrication of photovoltaic structures
US9748434B1 (en) 2016-05-24 2017-08-29 Tesla, Inc. Systems, method and apparatus for curing conductive paste
US9954136B2 (en) 2016-08-03 2018-04-24 Tesla, Inc. Cassette optimized for an inline annealing system
US10115856B2 (en) 2016-10-31 2018-10-30 Tesla, Inc. System and method for curing conductive paste using induction heating
DE102017204910B4 (de) * 2017-03-23 2018-10-04 Singulus Technologies Ag Trägerkassette und Trägerkassettenstapel
KR102038750B1 (ko) * 2017-11-08 2019-11-26 주식회사 월덱스 상압소결 실리콘 카바이드 웨이퍼 캐리어 및 결합구조와 그 결합방법
CN110444497B (zh) * 2019-08-12 2021-08-20 常州皓晟精密机械有限公司 一种太阳能光伏电池片、硅片承载盒
CN112151428B (zh) * 2020-09-28 2024-11-01 北京市塑料研究所 硅片承载装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08107080A (ja) * 1994-09-30 1996-04-23 Toshiba Ceramics Co Ltd 縦型ウェ−ハボ−ト
JP2004134800A (ja) * 2002-10-09 2004-04-30 Foxsemicon Intergated Technology Inc 基板支持用スロット棒および基板用カセット
JP2007324219A (ja) * 2006-05-30 2007-12-13 Covalent Materials Corp 縦型ウエハボート
KR20100106132A (ko) * 2009-03-23 2010-10-01 엠파워(주) 웨이퍼 케리어

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07115123A (ja) * 1993-10-15 1995-05-02 Micro Gijutsu Kenkyusho:Kk 基板収納用ラック
JPH09213645A (ja) * 1996-01-29 1997-08-15 Sumitomo Sitix Corp ウェーハ支持装置及びその製造方法
JPH09293685A (ja) * 1996-02-28 1997-11-11 Asahi Glass Co Ltd 縦型ウエハボート
JPH09266177A (ja) * 1996-03-28 1997-10-07 Tekunisuko:Kk ウェーハボート
JP3479201B2 (ja) * 1997-03-28 2003-12-15 東芝セラミックス株式会社 組立式ウエハ用ボート及びその取付治具
US6056123A (en) * 1997-12-10 2000-05-02 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
JP3798136B2 (ja) * 1997-12-24 2006-07-19 信越石英株式会社 基盤熱処理用支持治具
JP2000040667A (ja) * 1998-07-21 2000-02-08 Toshiba Ceramics Co Ltd ウエハボート
JP3544481B2 (ja) * 1998-11-25 2004-07-21 東芝セラミックス株式会社 半導体製造用炭化珪素質組立ウェーハボート
EP1171905A1 (en) * 1999-04-15 2002-01-16 Integrated Materials, Inc. Silicon fixtures for wafer processing and method of fabrication
JP2000323423A (ja) * 1999-05-13 2000-11-24 Kokusai Electric Co Ltd ウェハ保持用ボート
US6378538B1 (en) * 1999-12-13 2002-04-30 Advanced Micro Devices, Inc. Durable, multi-piece rotor for spray acid tools
KR100410982B1 (ko) * 2001-01-18 2003-12-18 삼성전자주식회사 반도체 제조장치용 보트
US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08107080A (ja) * 1994-09-30 1996-04-23 Toshiba Ceramics Co Ltd 縦型ウェ−ハボ−ト
JP2004134800A (ja) * 2002-10-09 2004-04-30 Foxsemicon Intergated Technology Inc 基板支持用スロット棒および基板用カセット
JP2007324219A (ja) * 2006-05-30 2007-12-13 Covalent Materials Corp 縦型ウエハボート
KR20100106132A (ko) * 2009-03-23 2010-10-01 엠파워(주) 웨이퍼 케리어

Also Published As

Publication number Publication date
JP5671160B2 (ja) 2015-02-18
WO2012128459A2 (ko) 2012-09-27
JP2014509788A (ja) 2014-04-21
KR101035552B1 (ko) 2011-05-23

Similar Documents

Publication Publication Date Title
WO2012128459A3 (ko) 솔라웨이퍼 카세트
USD643811S1 (en) Flat plate battery
USD643810S1 (en) Flat plate battery
WO2013052370A3 (en) Stub minimization for multi-die wirebond assemblies with parallel windows
WO2010123223A3 (ko) 프레임 부재, 프레임 어셈블리 및 전지셀 어셈블리와 이의 제조방법
EP2811535B1 (en) Solar cell module
EP2849253A3 (en) Battery pack
US8225945B2 (en) Rack frame
WO2013173887A3 (en) Construction profile, construction set, construction profile kit and fixing system for ventilated claddings
JP2014509788A5 (ko)
KR20130090100A (ko) 셀 홀더
MY157356A (en) Substrate for solar cell, and solar cell
US10312754B2 (en) Interior permanent magnet motor and rotor structure therefore
CN103158142A (zh) 托盘固定装置
KR102028168B1 (ko) 외장부재를 포함하는 배터리 팩
JP5884028B2 (ja) 太陽電池モジュール
AU2016272355A1 (en) Framework platform element, in particular for scaffolding
JP2017027796A5 (ko)
US20110204199A1 (en) Stand for information processing apparatus
TW200718914A (en) Method and device for manufacturing a heat exchanger
US20170162411A1 (en) Tray
US20130309536A1 (en) Housing structure for holding a plurality of square secondary batteries
KR20130031072A (ko) 리튬 이온 셀의 연결 블록
US20110155206A1 (en) Solar tile structure and combination thereof
TW202021880A (zh) 承載盤及承載盤堆疊組件

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12760442

Country of ref document: EP

Kind code of ref document: A2

ENP Entry into the national phase

Ref document number: 2013558775

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12760442

Country of ref document: EP

Kind code of ref document: A2