WO2012141459A3 - 기판 지지용 지지유닛 - Google Patents

기판 지지용 지지유닛 Download PDF

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Publication number
WO2012141459A3
WO2012141459A3 PCT/KR2012/002668 KR2012002668W WO2012141459A3 WO 2012141459 A3 WO2012141459 A3 WO 2012141459A3 KR 2012002668 W KR2012002668 W KR 2012002668W WO 2012141459 A3 WO2012141459 A3 WO 2012141459A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
supporting
support unit
treatment
prevents
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2012/002668
Other languages
English (en)
French (fr)
Other versions
WO2012141459A2 (ko
Inventor
강호영
조병호
박주영
김철호
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tera Semicon Corp
Original Assignee
Tera Semicon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110034246A external-priority patent/KR101243309B1/ko
Priority claimed from KR1020110041661A external-priority patent/KR101306757B1/ko
Application filed by Tera Semicon Corp filed Critical Tera Semicon Corp
Priority to CN201280017748.1A priority Critical patent/CN103477426B/zh
Priority to JP2014505066A priority patent/JP5981986B2/ja
Publication of WO2012141459A2 publication Critical patent/WO2012141459A2/ko
Publication of WO2012141459A3 publication Critical patent/WO2012141459A3/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/17—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] specially adapted for supporting large square shaped substrates

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

기판의 처리시 기판이 처짐에 의하여 변형되는 것을 방지한 기판 지지용 지지유닛이 개시된다. 본 발명에 따른 기판 지지용 지지유닛은, 기판의 처리시, 기판의 전체면이 복수의 지지핀에 의하여 균일하게 지지되므로, 기판이 자중에 의하여 휘어서 변형될 우려가 없다. 따라서, 평판 디스플레이의 신뢰성이 향상되는 효과가 있다.
PCT/KR2012/002668 2011-04-13 2012-04-09 기판 지지용 지지유닛 Ceased WO2012141459A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201280017748.1A CN103477426B (zh) 2011-04-13 2012-04-09 基板支撑用支撑单元
JP2014505066A JP5981986B2 (ja) 2011-04-13 2012-04-09 基板支持用支持ユニット

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020110034246A KR101243309B1 (ko) 2011-04-13 2011-04-13 기판 지지용 보트, 보트를 포함하는 지지 유닛 및 지지 유닛을 사용한 기판 처리 장치
KR10-2011-0034246 2011-04-13
KR1020110041661A KR101306757B1 (ko) 2011-05-02 2011-05-02 기판 지지용 지지 유닛 및 이를 사용한 기판 처리 장치
KR10-2011-0041661 2011-05-02

Publications (2)

Publication Number Publication Date
WO2012141459A2 WO2012141459A2 (ko) 2012-10-18
WO2012141459A3 true WO2012141459A3 (ko) 2013-01-03

Family

ID=47009810

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/002668 Ceased WO2012141459A2 (ko) 2011-04-13 2012-04-09 기판 지지용 지지유닛

Country Status (4)

Country Link
JP (1) JP5981986B2 (ko)
CN (1) CN103477426B (ko)
TW (1) TWI584402B (ko)
WO (1) WO2012141459A2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6362278B2 (ja) * 2014-06-30 2018-07-25 ウォンイク テラセミコン カンパニー リミテッド ボート

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003232742A (ja) * 2002-02-12 2003-08-22 Olympus Optical Co Ltd 基板支持装置
JP2004107006A (ja) * 2002-09-18 2004-04-08 Masato Toshima 基板の搬送装置
KR20100008722A (ko) * 2008-07-16 2010-01-26 주식회사 테라세미콘 배치식 열처리 장치
KR20100064504A (ko) * 2008-12-05 2010-06-15 주식회사 에스에프에이 기판 보관용 카세트 및 그를 구비한 기판 보관용 카세트 시스템

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3977481B2 (ja) * 1997-04-11 2007-09-19 淀川ヒューテック株式会社 基板用トレイカセット
JP2002154648A (ja) * 2000-11-15 2002-05-28 Fuji Photo Film Co Ltd 基板カセット
JP2004042984A (ja) * 2002-07-15 2004-02-12 Sharp Corp 超大型基板用カセット
KR100600515B1 (ko) * 2005-01-20 2006-07-13 (주)상아프론테크 크로스바 설치용 연결구가 구비된 기판 적재용 카세트
JP4317883B2 (ja) * 2007-04-18 2009-08-19 国立大学法人東北大学 支持ピンの製造方法、支持ピン、熱処理装置および基板焼成炉
JP5022855B2 (ja) * 2007-10-05 2012-09-12 古河機械金属株式会社 リフトピン機構、加熱処理装置、減圧乾燥装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003232742A (ja) * 2002-02-12 2003-08-22 Olympus Optical Co Ltd 基板支持装置
JP2004107006A (ja) * 2002-09-18 2004-04-08 Masato Toshima 基板の搬送装置
KR20100008722A (ko) * 2008-07-16 2010-01-26 주식회사 테라세미콘 배치식 열처리 장치
KR20100064504A (ko) * 2008-12-05 2010-06-15 주식회사 에스에프에이 기판 보관용 카세트 및 그를 구비한 기판 보관용 카세트 시스템

Also Published As

Publication number Publication date
JP2014512106A (ja) 2014-05-19
WO2012141459A2 (ko) 2012-10-18
CN103477426A (zh) 2013-12-25
TWI584402B (zh) 2017-05-21
TW201248771A (en) 2012-12-01
CN103477426B (zh) 2016-06-29
JP5981986B2 (ja) 2016-08-31

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