Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F24—HEATING; RANGES; VENTILATING
  • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
  • F24F7/00—Ventilation
  • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
  • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
  • F24F7/10—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with air supply, or exhaust, through perforated wall, floor or ceiling
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F24—HEATING; RANGES; VENTILATING
  • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
  • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
  • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
  • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
  • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F24—HEATING; RANGES; VENTILATING
  • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
  • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
  • F24F13/02—Ducting arrangements
  • F24F13/029—Duct comprising an opening for inspection, e.g. manhole

Definitions

• the invention relates to a plant for the ventilation of clean rooms with at least two clean rooms and a plenum above these clean rooms, the clean rooms and the plenum are separated by a load-bearing ceiling
• air ducts are used both for the supply of air to the clean room and for the removal of air from the clean room.
• air ducts are expensive, including their installation and maintenance. Cleaning the air ducts is expensive.
• Equally complex is the maintenance of the individual devices that are used for the suction, cleaning, filtering and discharge of air. These devices include at least one supply air device and an exhaust air device.
• installation and maintenance of these individual devices is expensive. There is no direct access to these devices. In case of failure of one or the other device, a complex work is required. A regular check of the individual devices is also expensive.
• a system for ventilating clean rooms with at least two clean rooms and a plenum above these clean rooms, the clean rooms and the plenum being separated by a load-bearing ceiling characterized in that the plenum is a closed room containing a lockable door for personnel and equipment accessible to personnel having an inlet for primary air and an outlet for outgoing air, that in the ceiling above each clean room there is a recess in each of which a supply air device is inserted from the plenum , wherein the supply air device has an inflow opening and an outflow opening, the inflow opening communicates with the plenum, and the outflow opening is located above the clean room, and in each case there is a recess in the ceiling above each clean room into which an exhaust air unit is inserted from the plenum is, wherein the Abluftg It has a suction opening and an outlet opening, the suction opening communicates with the clean room and the outlet opening communicates with the plenum, and the supply air and exhaust air unit each have access points for maintenance
• This system can operate completely without special air channels known from the prior art. It does not require metallic components for air ducts.
• the individual devices namely the supply air devices and exhaust air devices, which supply the individual clean rooms, are completely accessible from the plenum. They are assembled by and in plenary and can be maintained and checked there. Access to the clean rooms is not required for installation and maintenance of the equipment.
• the plenary session is also called a technical plenary, and all work on the equipment is feasible within this plenary session.
• the door is provided. She closes tight. It is sized so that the equipment and personnel can get through the door.
• the ceiling separates the clean rooms from the plenum above.
• the clean rooms are all located on a common floor or level.
• the system In plenary there is an inlet for air intake. Fresh air is supplied via this inlet opening. Furthermore, the plenum has an outlet for air outlet. Exhaust air is directed outwards into the environment via this outlet opening.
• the system is assigned a control unit that controls and preferably also monitors all functions, in particular all devices. It is connected to the individual devices, temperature and pressure sensors and other components.
• the devices are each modular. In this case, they are preferably structured in layers. This makes it possible to exchange individual assemblies and to assemble the components of larger devices only within the plenary to a finished device.
• the air pressure within the plenum is in the range zero (pressure of the outside air) up to 1,200 mm of water, preferably at zero or about 1,000 mm of water compared to the pressure of the outside air.
• the pressure within the clean rooms is at least 1000 mm water column above the pressure in the plenum and is overall above the pressure of the ambient air, the difference is at least 200 mm water column, preferably 1000 mm water column.
• the plenary has a ceiling height that is at least man-high. It is at least 1.80 m, preferably at least 2.00 m.
• the plenum preferably has a volume greater than the volume of all clean rooms combined. It is at least 20%, preferably at least 100% in volume greater than the volume of all clean rooms together.
• the extraction of air from the clean rooms takes place through the ceiling and to the plenum.
• the extraction is preferably carried out in a suction area, which is located in the floor level of the clean rooms.
• This intake opens into a vertical channel, this channel is in communication with the suction port of the exhaust device.
• the channel can be cleaned from the plenum. He is accessible from the plenary.
• the channel is preferably formed so that at least a portion of a wall of the clean room is part of the channel.
• the channel is bounded by two adjacent walls of the clean room, which collide in an inner edge of the clean room. He is then still limited by a partition that connects the two walls.
• Of the horizontal cross section of the channel is triangular. Other channel shapes are possible.
• the individual devices have access for maintenance work. These include control panels; Flaps, behind which interchangeable parts such. B. filters and the like are located; understood mechanical connections of individual modules of the respective device and electrical connection areas.
• the plenum is directly connected to the outside air. But it is also possible to provide in plenary devices that process the air in plenary, for example, provide behind the inlet opening a filter that filters the incoming air. Also may be provided in plenary a system for heating and / or cooling of the air in plenary. It is possible to maintain an overpressure with respect to the outside air already in plenary. It is possible that a pre-cleaning of the incoming air takes place in the plenum, so that the devices assigned in respective clean rooms are no longer exclusively responsible for a complete cleaning or otherwise complete treatment of the air. Usually, air pressure and / or temperature are detected within each individual clean room by means of sensors and fed to the control unit.
• FIG. 1 shows a cross-section with a vertical sectional plane through three clean rooms and a plenum located above it
• FIG Fig. 2 a section as Figure 1 for a design with pressure-free plenum.
• a plenum 20 Below a plenum 20 are three clean rooms 22, 23, 24. They are separated from the plenum 20 by a supporting ceiling 26. The clean rooms 22 to 24 are located on one level.
• the volume of the plenum 20 is preferably significantly larger, at least twice, preferably four times as large as the volume of all three clean rooms 22 to 24 together.
• the plenum 20 is a closed room. This room is accessible through a door 28.
• the door can be closed airtight.
• the door 28 is chosen so large that a person and also devices, at least parts of devices still to be discussed, can pass through the door 28.
• the plenum 20 has an inlet opening 30 for fresh air. It has an outlet opening 32 for exhaust air. All air, which is in the plenum 20 and in the clean rooms 22 to 24, has flowed through the inlet opening 30. The only outlet for air is the outlet opening 32. Behind the inlet opening 30 is an air treatment 34 in plenary 20. The air treatment has an F9 filter 36, behind an activated carbon filter 28, behind a fan 40 and behind it finally a UV station 42. In addition is in plenary 20 still a heating and cooling stage 44 arranged. It conditions the air within the plenum 20. In the example shown, it consists of an outside of the plenum 20 arranged outer part 46 and an inner part 48. It is a so-called split air conditioner. The inner part contains a UV stage and a blower.
• the supply air device 52 has an inflow opening 54 and an outflow opening 56.
• the inflow opening 54 is located in the plenum 20 and communicates with the plenum 20.
• the outflow opening 56 is located above in the respective clean room 22 to 24.
• the outflow opening 56 fills the recess 50.
• the supply air device 52 closes the recess 50 in so far as 52 air can pass through the recess 50 only by the supply air device.
• the supply air device 52 is modular. It has a number of assemblies. These modules are arranged one above the other in layers. Top assembly is a UV stage 58, including an F5 filter 60, including a conveyor step 62 and below a H 14 filter 64, which also defines the outflow opening 56. The UV stage 58 defines the inflow opening 54.
• the supply air unit 52 has a number of access points 68, through which individual areas of at least one subassembly of the supply air device 52 are accessible. Access 58 is used for maintenance, connection and installation. All accesses 68 are within plenum 20.
• each supply air device 52 conveys air from the plenum 20 into the clean room 22, 23 or 24 below it.
• each individual clean room 22, 23 or 24 located in the ceiling 26 above each individual clean room 22, 23 or 24 at least one recess 70, in the embodiment shown there are two recesses 70.
• an exhaust device 72 is used in each recess 70.
• the exhaust device 72 is inserted tightly into the recess 70, so that all the air that passes through the recess 70, the exhaust device 72 must pass.
• the exhaust air device 72 is designed as an air conveyor or fan 40.
• the exhaust air device 72 has an intake opening 74 and an outlet opening 76.
• the intake opening 76 communicates with the respective clean room 22, 23 or 24. In the specific embodiment, it communicates via a channel 78 with the respective clean room 22, 23 or 24.
• the channel 78 is bounded by two adjacent walls 80 of the clean room 22, 23 or 24 and a partition wall 87 connecting these two walls 80. He is triangular in cross section.
• the channel 78 is vertical. He is above tightly connected to the exhaust device 72.
• At the bottom of the channel 78 is an intake area 84, where the channel 78 communicates with the actual clean room 22, 23 and 24, respectively.
• a filter 86 is assigned to the intake area in each case.
• plenum 20 there is a pressure of zero Pa compared to the pressure of the ambient air.
• In each clean room there is a pressure of 20 Pa. All air flowing into a single clean room 22, 23 or 24 and all the air flowing out of this room goes through the ceiling 26 therethrough.
• all air entering a single clean room 22, 23 or 24 flows through at least one inlet opening 30 in the ceiling 26 of the respective clean room.
• the entire air, which is discharged from a single clean room 22, 23 or 24, flows through at least one outlet opening 32, which is located in the ceiling above the clean room.
• the floor of the clean rooms 22, 23 or 24 is therefore passive, it is not designed for any air circulation through it.
• the plant is preferably designed so that a complete exchange of air in each clean room 22, 23 or 24 takes place 22 times to 100 times per hour.
• the clear height of the plenum can also be only 1 m or, for example, only 1.20 m. Then, although a person can no longer stand in this room, he can still carry out work. Preferably, the height is greater than 1.80 m. For example, it is 2 m.
• the air pressure in the plenum 20 may be slightly greater than the air pressure of the outside air, for example in the range of greater than zero to 2 Pa.
• the air pressure of the plenum 20 should preferably not be less than the air pressure of the ambient air.
• the individual clean rooms 22, 23, 24, etc. can be designed differently.
• the first clean room 22 may be designed as a lock for material, then it has a first door to the outside environment (not shown) and a second door (not shown) to the clean room 24, which is the actual working space.
• the second clean room 23 is designed as a lock for personnel and constructed similarly, it has a first door (not shown) for access from the outside for staff and a second door (not shown), which connects him to the clean room for working 24.
• the inlet opening 30 is preferably associated with a valve which is set to a constant volume of air.
• the intake opening 74 of the exhaust air device 72 is not visible within the channel 78 and therefore for normal users of the respective clean room 22, 23, 24.
• the outflow opening 56 of the supply air device 52 is optically covered by a grid 90.
• This grid 80 is designed, for example, as a diffuser.
• the grid 90 Through the grid 90, the air flows into the clean room 24.
• the grid 90 is visible, it is designed visually appealing.
• the grid 90 can be mounted and dismounted from above, ie from the plenum 20. All cleaning work on grid 90 can be performed in plenum 20.
• the outer limits of the system shown may be external boundaries of the respective building.
• the left and right walls may be an outer wall 92.
• the conclusion above can be a roof.
• the exemplary embodiment according to FIG. 2 will be discussed below. However, it is only discussed insofar as it differs from the exemplary embodiment according to FIG. An important difference is that the air entering through the inlet opening 30 into the plenum 20 is no longer treated in an air treatment 34 and thus is cleaner in the plenum 20 than the ambient air outside the system, but the inlet opening 30 is only the valve 88th assigned. Thus, the quality of the air, which is in plenary 20, no other than the quality of the outside air. However, it is advantageous to associate with the valve 88 at least one coarse filter, such as the filter 36. Furthermore, no heating and cooling stage 44 is provided in plenary.
• each channel 78 is now formed as a simple opening.
• the exhaust air devices 72 have an F5 filter 60, above which there is a fan, above which there is a H EPA filter 94, which terminates upwards with the outlet opening 76. In contrast to the first embodiment, the exhaust air devices 72 are therefore formed consuming.
• the respective air flows are represented by arrows.
• all supply air devices 52 are identical for Figure 1.
• the two supply air devices 52 for the clean rooms 22, 23 in Figure 2 are identical, but the supply air device 52 for the clean room 24 according to Figure 2 is significantly larger and more expensive than the other supply air devices.
• All exhaust air devices in Figure 1 and all exhaust devices 72 in Figure 2 are identical.
• the channels 78 of the individual clean rooms 22, 23, 24 are identical.
• the supply air devices 52 in Figure 2 do not differ in their construction, only in their size. They are constructed as follows, starting from the inflow opening 54: Below the inflow opening 54 is an F5 filter 60. Beneath there is a UV stage 58. Under it, a conveyor stage 62 is provided. Below this, a HEPA filter 94 is arranged.
• the supply air devices 52 and the exhaust air devices 72 are each completely in the plenum 20.
• the outlet opening is covered by a filter to prevent dust or animals can penetrate.

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• Engineering & Computer Science (AREA)
• Chemical & Material Sciences (AREA)
• Combustion & Propulsion (AREA)
• Mechanical Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Ventilation (AREA)

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Citations (12)

• 2013
  • 2013-03-01 WO PCT/EP2013/054125 patent/WO2013127979A1/fr not_active Ceased
  • 2013-03-01 EP EP13707611.3A patent/EP2820356B1/fr active Active

Patent Citations (12)

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