WO2020064060A1 - Micro-actionneur ainsi que procédé de fabrication et utilisations - Google Patents

Micro-actionneur ainsi que procédé de fabrication et utilisations Download PDF

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Publication number
WO2020064060A1
WO2020064060A1 PCT/DE2019/100854 DE2019100854W WO2020064060A1 WO 2020064060 A1 WO2020064060 A1 WO 2020064060A1 DE 2019100854 W DE2019100854 W DE 2019100854W WO 2020064060 A1 WO2020064060 A1 WO 2020064060A1
Authority
WO
WIPO (PCT)
Prior art keywords
circuit board
microactuator
planar coil
actuator
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2019/100854
Other languages
German (de)
English (en)
Inventor
Anatol Schwersenz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TRAFAG AG
Original Assignee
TRAFAG AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRAFAG AG filed Critical TRAFAG AG
Publication of WO2020064060A1 publication Critical patent/WO2020064060A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F04B17/04—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors using solenoids
    • F04B17/042—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors using solenoids the solenoid motor being separated from the fluid flow
    • F04B17/044—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors using solenoids the solenoid motor being separated from the fluid flow using solenoids directly actuating the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/16—Rectilinearly-movable armatures
    • H01F7/1638—Armatures not entering the winding
    • H01F7/1646—Armatures or stationary parts of magnetic circuit having permanent magnet
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/26—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors consisting of printed conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F2007/068—Electromagnets; Actuators including electromagnets using printed circuit coils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistors, capacitors or inductors
    • H05K1/165—Printed circuits incorporating printed electric components, e.g. printed resistors, capacitors or inductors incorporating printed inductors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09672—Superposed layout, i.e. in different planes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4614—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination
    • H05K3/462—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination characterized by laminating only or mainly similar double-sided circuit boards

Definitions

  • the invention relates to a micro actuator.
  • the invention further relates to
  • the invention further relates to different uses of such a micro actuator and
  • Microactuators are used to actuate small or very small switching and movement processes. For example, there are micropumps and
  • Micro valves each having a micro actuator.
  • Microactuators are also used in optics, for example to control scanner mirrors in laser scanners.
  • micromechanical scanner mirrors are provided.
  • a micro actuator is understood to be a micromechanical actuator whose smallest structures are in the micrometer range and can no longer pass through
  • micromechanical components as well as the overall dimension of the micro actuator itself, are often in the millimeter range.
  • microstructuring processes are used, which preferably originate from or are derived from microelectronics.
  • Microactuators currently available on the market work with the piezo effect or as electrostatic actuators.
  • a micropump with an electrostatic micro actuator is, for example, from the
  • the invention has set itself the task of creating a powerful, reliable microactuator that can be economically manufactured in large industrial series.
  • the invention creates a micro actuator
  • Claim 1 A manufacturing process for such a micro actuator
  • the invention provides a microactuator, comprising a first actuator element with a magnetic field generation unit and a second actuator element that can be moved relative to the magnetic field generation unit by the action of a magnetic field generated by the magnetic field generation unit, the magnetic field generation unit having at least one planar coil formed on a conductor layer of a circuit board element.
  • the circuit board element is a multilayer circuit board element and that the planar coil has a multilayer planar coil formed on the multilayer circuit board element.
  • Substrate layer or an intermediate layer of the multilayer circuit board element is provided for electrical insulation.
  • the second actuator element has a permanent magnet.
  • first and the second actuator element are arranged concentrically to a central axis through the planar coil and are axially movable relative to this central axis.
  • circuit board element as the outer housing of the circuit board
  • Micro actuator is formed. It is preferred that the conductor coils of the planar coil have a width of less than 900 pm, in particular less than 500 pm, more particularly less than 100 pm.
  • the invention relates to a method for producing a microactuator, comprising lithographically forming at least one plane of a planar coil on a circuit board layer to form a
  • Magnetic field generation unit on a first actuator element joining the first actuator element with one due to the
  • Magnetic field generating unit drivably movable second actuator element such that the actuator elements are movable relative to each other.
  • the method preferably comprises:
  • Insulating material to form a multilayer circuit board element with a multilayer planar coil
  • the electrical connection step includes the step:
  • the method preferably comprises:
  • the invention relates to using a
  • Microactuator according to one of the configurations explained above or one by a method according to one of the explanations above
  • the invention provides a micropump comprising a micro actuator according to one of the above configurations and / or a micro actuator which can be obtained by a method according to one of the above configurations.
  • the invention provides a microvalve comprising a microactuator according to one of the preceding configurations and / or a microactuator obtainable by a method according to one of the preceding configurations.
  • the invention provides a microlinear motor comprising a micro actuator according to one of the above configurations and / or by a method according to one of the above
  • the invention provides an optical switching element comprising a microactuator according to one of the preceding configurations and / or by a method according to one of the preceding
  • micro actuator For example, a micro objective with a lens is provided, which is adjustable by the micro actuator.
  • the invention provides an electrical one
  • Switching element comprising a micro actuator according to one of the preceding embodiments and / or by a method according to one of the
  • the invention relates to the use of a planar coil technology as an actuator.
  • the invention provides electrodynamic microactuators.
  • electrodynamic microactuators are based on the processes of semiconductor manufacturing technology.
  • the required “smallness” of the potential products has always led to the structuring processes from semiconductor manufacturing.
  • the cost regime is always linked to this technology.
  • electrodynamic microactuator there was no known electrodynamic microactuator as a series component.
  • the invention does not use semiconductor manufacturing technologies, but rather the printed circuit board technology as used in particular for the production of multilayer printed circuit board elements.
  • the invention is based on the knowledge that it is used today in the
  • an electrodynamic actuator is an energy converter that converts electrical energy into kinetic energy using electromagnetic fields. For the described converters, it draws the energy from the change in inductance due to the path in the linear case.
  • the change in inductance is somewhat more complex.
  • the inductance increases with the spanned area of the coil and, in a first approximation, is square to the turns contained therein. With more inductance, a larger change in inductance is also possible.
  • the aim will always be to optimize the inductance in relation to a large area with a maximum number of turns and to reduce the magnetic path to a minimum.
  • Such systems are not known as products in series production (“yet”).
  • At least one planar coil preferably a lithographically produced planar coil, is provided.
  • planar coils many turns are achieved using technically available means, such as, for example, using lithographic imaging methods.
  • the magnetic field is formed by the current impressed in conductor loops.
  • Example can be formed by wound wire.
  • the conductor loops are formed planar in printed circuit boards on several layers, which are electrically connected to each other in the coil area with PrePreg (dielectric
  • Insulation layer Preimpregneted glass fiber
  • Insulation layer can be arranged insulated.
  • Electrodynamic actuators essentially consist of a first actuator element with a driving magnetic field and a second actuator element with a driven magnetic field, to which a force is exerted. As a result of this application of force, the two parts - actuator elements can move relative to one another.
  • PCB manufacturing processes further developed.
  • the technological "Process Freeze" for the PCB production was in the period from 1995 to the year 2000. At that time, for almost all PCB manufacturers
  • the current resolution limit for electrical connections is currently limited to 10pm Line / Space for structuring and
  • the arrangement geometries of the magnetic fields can be manufactured in series with very small tolerances. This is very advantageous, since in many applications only the Lorentz force can be used as the driving force, which is very sensitive to the position in relation to the static magnetic field.
  • Fig. 1 is a schematic perspective view of a multi-layer
  • Fig. 2-7 sectional views through a circuit board element during
  • FIG. 8 shows a schematic perspective illustration of a printed circuit board on which a multiplicity of planar coil layers can be produced side by side;
  • FIG. 9 shows a schematic illustration of the magnetic field distribution in a first actuator element and a second actuator element in a microactuator
  • FIG. 10 shows a section through an exemplary embodiment of a microactuator in a micropump
  • FIG. 11 shows the micropump of FIG. 10 during a filling process
  • FIG. 12 shows the micropump of FIG. 10 during an empty process
  • Fig. 13 is a partly photographic representation, which is used to build the
  • the micropump of FIGS. 11 to 12 shows a suitable first actuator element in size comparison with a 1 cent piece
  • FIG. 16 shows a section through a further embodiment of a microactuator using planar coils in printed circuit board technology for the construction of a microlinear motor
  • FIG. 19-22 different representations of a single component to build a
  • FIG. 23 shows a representation of different configurations of the individual component from FIGS. 19 to 22 in a size comparison.
  • FIGS. 9 to 12 and 16 to 18 Exemplary embodiments for the microactuator 10 are shown in FIGS. 9 to 12 and 16 to 18.
  • the micro actuator 10 has a first actuator element 12 and a second one
  • Actuator element 14 which are movable relative to each other.
  • the first actuator element 12 has a first magnetic field generation unit 16, by means of which a magnetic field 50 can be generated from an electrical current 53.
  • An embodiment of the magnetic field generating unit 16 is shown in FIG. 1.
  • FIGS. 2 to 7 show different stages in the course of the free position of such a magnetic field generating unit 16 and also in the course of the free position of the first actuator element 12.
  • the second actuator element 14 is designed to be moved by the action of the magnetic field generated by the magnetic field generating unit 16.
  • Magnetic field generating unit 16 has a planar coil 20 formed from a plurality of planar coil layers 18a-18d. Each planar coil layer 18a-18d is through
  • Spirally arranged conductor loops 22 are formed, the ends of the planar coil layers 18a-18d being connected to one another via vias 24 to form the planar coil 20.
  • planar coil 20 is fixed in printed circuit board technology, as will be explained in more detail below with reference to FIGS. 2 to 7.
  • FIG. 2 shows a circuit board layer 26 for the construction of a multilayer circuit board element 28.
  • the circuit board layer 26 has a circuit board substrate 30 made of an electrically insulating material, in particular plastic and / or fiber-reinforced
  • the circuit board substrate 30 can be rigid or flexible.
  • the printed circuit board substrate 30 has a thickness between 0.2 mm and 1.5 mm.
  • a conductor layer 32 made of an electrically conductive material, in particular metal, more particularly copper.
  • planar coil layers 18a-18d is formed on each conductor layer 32.
  • a photoresistive layer 34 is applied and an exposure mask 36 is further applied.
  • exposure masks 36 which specify the structure of the planar coil layers 18a-18d and any connections
  • other selective exposure methods for example laser exposures or beam exposures by means of beam scanning, can also be used.
  • the respectively exposed areas of the photoresistive layer 34 change their chemical properties so that the unexposed areas can be removed by etching or the like, as shown in FIG. 4.
  • planar coil layers 18a-18d are fabricated on a circuit board element 26, 28 by lithographic processes.
  • the lithographic process explained in accordance with FIGS. 2 to 5 can only be seen here as an example.
  • the electrical insulation layer 38 cannot yet
  • cured plastic be formed.
  • a prepreg material is provided.
  • the resulting sandwich structure made up of several Printed circuit board layers 26 and insulation layers 38 interposed therebetween are then cured, as shown in FIG. 6, using pressure and heat or the like.
  • a multilayer printed circuit board element blank 40 is thus created, which is shown in more detail in FIG. 7.
  • the multilayer printed circuit board element blank 40 contains only one planar coil 20 with the different planar coil layers 18a-18d as shown. However, it is particularly preferred that not only one planar coil 20 is produced in one step, but that a plurality of planar coils 20 are produced side by side.
  • Fig. 8 shows a circuit board layer 26 on each of the
  • planar coils 20 are produced side by side in a multilayer printed circuit board element blank 40, according to FIG. 7, after pressing and curing, the vias 24 are produced by means of laser drilling, a first laser beam 44 being shown to indicate laser drilling. After this
  • the multilayer printed circuit board element blank 40 is then cut to produce a multilayer printed circuit board element 28 provided with the planar coil 20.
  • the multilayer circuit board element 28 By appropriately shaping the multilayer circuit board element 28, it can be used directly as the first actuator element 12 without further ado.
  • Multilayer circuit board element 28 as a housing 64, in which the planar coil 20 with its different planar coil layers 18a-18d is embedded.
  • FIG. 9 shows the function of the microactuator 10 with the first actuator element 12 and the second actuator element 14.
  • a magnetic field is generated by passing a current 53 through a control (not shown here) through the planar coil 20.
  • FIG. 9 shows in particular the position sensitivity between the magnetic field and the coil.
  • FIG. 9 shows a radial coil, formed for example by one or more of the conductor loops 22, which is supplied with current 53.
  • the triangles in the figure represent the formation of the magnetic field 50 under the influence of the permanent magnet ring of the magnet 52.
  • the second actuator element 14 is designed to be influenced by the
  • Magnetic field 50 to be driven For example, the second one
  • Actuator element 14 has a magnet 52, in particular a permanent magnet. Depending on the polarity and strength of the magnetic field, the second actuator element 14 is attracted or repelled relative to the first actuator element 12.
  • conductor loops 22 can be made high
  • Manufacture micropump 54 an exemplary embodiment of which is shown in FIGS. 10 to 12.
  • the first actuator element 12 and the second actuator element 14 are preferably elastically connected to one another.
  • an elastic element 56 such as a spring or a membrane 58, can be provided for the connection between the actuator elements 12, 14.
  • the elastic element 56 can also be formed, for example, by an elastic body or the like.
  • the elastic element 56 can define a rest position, in particular in the relaxed state, it being possible for deflection to occur while actuating the magnetic field from the magnetic field generating unit 16.
  • the membrane 58 is provided as the elastic element 56, which also has a pump volume 60 in the
  • Micropump 54 completes.
  • micro-actuators 10 on an electromagnetic basis is that shown in FIGS. 10 to 12 shown micro diaphragm pump 55.
  • the micropump 54 has the first membrane 58 formed as an elastic element 56 and that formed by the first actuator element 12
  • the micropump 54 has a first diaphragm valve 66 and a second diaphragm valve 68, which are provided in a cover 62 of the housing 64.
  • first diaphragm valve 66 and a second diaphragm valve 68 are provided in a cover 62 of the housing 64.
  • cover 62 were selectively provided with laser bores 70 which can be closed with foil elements 72.
  • Film elements 72 can be selectively cut free with a laser. They are attached accordingly so that the first diaphragm valve 66 in a
  • the micropump 54 has the second actuator element 14, which is provided with the magnet 52, for example in the form of a magnetic ring. B. is concentric to the first actuator element 12.
  • the actuator elements 12, 14 are nested concentrically one inside the other.
  • the second actuator element 14 is preferably equipped with a static magnetic field.
  • planar coil 20 which previously correspondingly with reference to Figs. 1 to 8 has been produced, can also be seen in cross section in FIG. 10.
  • the planar coil 20 is shaped radially and serves as a drive coil.
  • Vias 74a, 74b are also shown to show the individual
  • planar coil layers 18a-18d of the winding planes of planar coil 20 To electrically connect planar coil layers 18a-18d of the winding planes of planar coil 20 to one another.
  • the electrical planar coil layers 18a-18d and the design of the housing 74 and insulation layer layers 38 result in an overall body acting as a housing 64.
  • the housing 64 is provided, for example on the outside, with a ferromagnetic layer 76 which acts as a magnetic yoke and thus reduces the magnetic path length.
  • the membrane 58 forms a suspension membrane, which the suspension of the second actuator element 14 formed by the magnet 52 and the
  • Fig. 13 shows a size comparison of the one acting as the drive system
  • Actuator element 12 with a 1 cent piece.
  • the first actuator element 12 has a diameter of only 5 mm.
  • Micropump 54 is used. As can be seen, there are different contact pads 78 for on the outside of the multilayer circuit board element 28
  • planar coil 20 has a total of 8 planar coil layers. This is just one general example
  • Printed circuit board layers 26 with n greater than or equal to 1 or 2 may be provided, in particular n is 2, 3, 4, 5, 6, 7, 8, 9 or 10.
  • Embodiments of the invention are therefore very compact and have better performance than previous piezo-operated micropumps.
  • microactuator 10 can also be used, for example, to switch electrical processes or to position optical elements, such as lenses or mirror elements. This is not shown in the drawings; it will be possible for further details on further
  • a lens could be arranged on the first and second actuator elements 12, 14 instead of a membrane as explained for the micro pump 54, focusing or other adjustment being carried out by relative displacement of the lenses.
  • an elastic lens is provided, the shape of which by relative movement of the
  • Actuator elements is changeable.
  • Actuator elements 12, 14 provided with a contact plate, which at
  • a bolt is articulated on one of the actuator elements with which a locking and unlocking process can be carried out (electronic lock).
  • a bolt could be formed by a push rod 82 of the further embodiment of the microactuator 10 explained below with reference to FIGS. 16 to 18.
  • a linear synchronous micromotor - linear motor 88 - is shown as a further example of the advantageous use of the microactuator 10.
  • extremely small linear drives can be realized. These can replace very small cylinders.
  • the function of very small cylinders can also be expanded by the positionability of a synchronous drive.
  • Such a drive can also achieve extreme accelerations.
  • Such a synchronous machine can be implemented with stacked rings made of magnets 52, which are assembled with one another via a pull rod 82. In the position of the magnetic fields shown in the figures, such a system of magnets 52 must be pulled into this position against their repulsive force and fixed accordingly, so that the superposed poles form.
  • the second actuator element 14 has a magnet system 84 formed from a plurality of magnets 52 with a rod 82.
  • the first actuator element 12 has one or more of the planar coils 20.
  • the one or more planar coils 20 are circular to the magnet system 84.
  • the coils 20 are manufactured lithographically using printed circuit board technology. This means that they are inherently stable in production.
  • first actuator element 12 - here acts as a stator 86 - and the second actuator element 14 - which acts as an output element - rotor 90.
  • the coupling of the magnetic field induced via the coils 20 to the static magnetic field of the rotor 90 is thus significantly improved.
  • the travel path and the thrust can be adjusted by duplicating the drive coils or the magnet system.
  • An air bearing can also be incorporated via the circuit board elements 28 via an air duct system (not shown here). This also integrates the linear guide function.
  • Planar coil layers 18a, 18b, 18c are rectangular.
  • FIGS. 21 and 22 show sections through the multilayer printed circuit board element 28 produced from the multilayer printed circuit board blank 40 of FIGS. 19 and 20 with a rectangular inner opening 92.
  • the opening 92 is produced as described above with reference to FIG. 7.
  • a single one of these multilayer printed circuit board elements 28 or a stacked arrangement of several of these multilayer printed circuit board elements 28 is configured as the first actuator element 12 of the microactuator 10 in a configuration as a micropump, optical element, switch or

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)

Abstract

L'objet de l'invention est de mettre au point un micro-actionneur puissant pouvant être fabriqué de manière économique en grande série. À cet effet, l'invention crée un micro-actionneur (10) comprenant un premier élément d'actionnement (12) pourvu d'une unité de génération de champ magnétique (16) et un deuxième élément d'actionnement (14) pouvant être déplacé par rapport à l'unité de génération de champ magnétique (16) par l'action d'un champ magnétique produit par l'unité de génération de champ magnétique (16), l'unité de génération de champ magnétique (16) présentant au moins une bobine plane (20) formée sur une couche conductrice (32) d'un élément de carte de circuits imprimés (26, 28).
PCT/DE2019/100854 2018-09-26 2019-09-26 Micro-actionneur ainsi que procédé de fabrication et utilisations Ceased WO2020064060A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018123801.0 2018-09-26
DE102018123801 2018-09-26

Publications (1)

Publication Number Publication Date
WO2020064060A1 true WO2020064060A1 (fr) 2020-04-02

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PCT/DE2019/100854 Ceased WO2020064060A1 (fr) 2018-09-26 2019-09-26 Micro-actionneur ainsi que procédé de fabrication et utilisations

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0703364A1 (fr) 1994-09-22 1996-03-27 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Procédé et dispositif pour commander une micropompe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0703364A1 (fr) 1994-09-22 1996-03-27 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Procédé et dispositif pour commander une micropompe

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
DE BHAILS D ET AL: "Modelling and analysis of a magnetic microactuator", SENSORS AND ACTUATORS A: PHYSICAL, ELSEVIER BV, NL, vol. 81, no. 1-3, 1 April 2000 (2000-04-01), pages 285 - 289, XP004191306, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(99)00176-4 *
HARALD SCHENK: "Ein neuartiger Mikroaktor zur ein- und zweidimensionalen Ablenkung von Licht", DISSERTATION AN DER GERHARD-MERCATOR-UNIVERSITÄT-GESAMTHOCHSCHULE-DUISBURG, 2000
KLEEN S ET AL: "ULTRAFLACHE MOTOREN IM PFENNIGFORMAT", F & M FEINWERKTECHNIK MIKROTECHNIK MIKROELEKTRONIK, HANSER, MUNCHEN, DE, vol. 108, no. 4, 1 April 2000 (2000-04-01), pages 56 - 58, XP000966545, ISSN: 1437-9503 *
MINFENG WANG ET AL: "A novel N x M array of resonance-based addressable MEMS actuators", 2013 IEEE SENSORS, IEEE, 28 October 2012 (2012-10-28), pages 1 - 4, XP032340624, ISSN: 1930-0395, DOI: 10.1109/ICSENS.2012.6411349 *
PAULINE J CHANG ET AL: "Force measurements of a magnetic micro actuator proposed for a microvalve array", JOURNAL OF MICROMECHANICS & MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 24, no. 3, 20 February 2014 (2014-02-20), pages 34005, XP020258204, ISSN: 0960-1317, [retrieved on 20140220], DOI: 10.1088/0960-1317/24/3/034005 *
THOMAS FRANK: "Untersuchungen zum Einsatz elektromagnetischer Mikroaktoren", DISSERTATION AN DER FAKULTÄT FÜR MASCHINENBAUDER TECHNISCHEN UNIVERSITÄT ILLMENAU, 2003

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