WO2020074534A3 - Integrierter kondensator und verfahren zur herstellung eines integrierten kondensators - Google Patents

Integrierter kondensator und verfahren zur herstellung eines integrierten kondensators Download PDF

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Publication number
WO2020074534A3
WO2020074534A3 PCT/EP2019/077253 EP2019077253W WO2020074534A3 WO 2020074534 A3 WO2020074534 A3 WO 2020074534A3 EP 2019077253 W EP2019077253 W EP 2019077253W WO 2020074534 A3 WO2020074534 A3 WO 2020074534A3
Authority
WO
WIPO (PCT)
Prior art keywords
integrated capacitor
layer
producing
electrode structure
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2019/077253
Other languages
English (en)
French (fr)
Other versions
WO2020074534A2 (de
Inventor
Norman Böttcher
Tobias Erlbacher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to JP2021519598A priority Critical patent/JP7208373B2/ja
Priority to EP19786544.7A priority patent/EP3864713A2/de
Publication of WO2020074534A2 publication Critical patent/WO2020074534A2/de
Publication of WO2020074534A3 publication Critical patent/WO2020074534A3/de
Priority to US17/223,799 priority patent/US11742435B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/40—Structural combinations of fixed capacitors with other electric elements, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/01—Manufacture or treatment
    • H10D1/045—Manufacture or treatment of capacitors having potential barriers, e.g. varactors
    • H10D1/047—Manufacture or treatment of capacitors having potential barriers, e.g. varactors of conductor-insulator-semiconductor capacitors, e.g. trench capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
    • H10D1/665—Trench conductor-insulator-semiconductor capacitors, e.g. trench MOS capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

Integrierter Kondensator mit einer ersten Elektrodenstruktur, einer zweiten Elektrodenstruktur und einer dazwischenliegenden Dielektrikumschichtstruktur. Die Dielektrikumschichtstruktur weist eine Schichtkombination mit einer Si02-Schicht, einer Si3N4-Schicht und einer SixNy-Schicht auf. Die SixNy-Schicht weist ein nicht-stöchiometrisches Siliciumnitrid-Material mit erhöhtem Siliciumanteil auf.
PCT/EP2019/077253 2018-10-09 2019-10-08 Integrierter kondensator und verfahren zur herstellung eines integrierten kondensators Ceased WO2020074534A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021519598A JP7208373B2 (ja) 2018-10-09 2019-10-08 集積キャパシタおよび集積キャパシタの製造方法
EP19786544.7A EP3864713A2 (de) 2018-10-09 2019-10-08 Integrierter kondensator und verfahren zur herstellung eines integrierten kondensators
US17/223,799 US11742435B2 (en) 2018-10-09 2021-04-06 Integrated capacitor and method of producing an integrated capacitor

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102018217249.8 2018-10-09
DE102018217249 2018-10-09
DE102019204503.0A DE102019204503B3 (de) 2018-10-09 2019-03-29 Integrierter Kondensator und Verfahren zur Herstellung eines integrierten Kondensators
DE102019204503.0 2019-03-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US17/223,799 Continuation US11742435B2 (en) 2018-10-09 2021-04-06 Integrated capacitor and method of producing an integrated capacitor

Publications (2)

Publication Number Publication Date
WO2020074534A2 WO2020074534A2 (de) 2020-04-16
WO2020074534A3 true WO2020074534A3 (de) 2020-06-11

Family

ID=69725689

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2019/077253 Ceased WO2020074534A2 (de) 2018-10-09 2019-10-08 Integrierter kondensator und verfahren zur herstellung eines integrierten kondensators

Country Status (5)

Country Link
US (1) US11742435B2 (de)
EP (1) EP3864713A2 (de)
JP (1) JP7208373B2 (de)
DE (1) DE102019204503B3 (de)
WO (1) WO2020074534A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019208226A1 (ja) * 2018-04-27 2019-10-31 株式会社村田製作所 キャパシタ
DE102020127640B4 (de) * 2020-07-10 2024-05-08 X-FAB Global Services GmbH Halbleiterbauelement für Leistungselektronikanwendungen und Verfahren zum Betrieb eines Leistungsmoduls
JP7563591B2 (ja) 2021-05-10 2024-10-08 株式会社村田製作所 半導体装置、マッチング回路及びフィルタ回路
JPWO2024157914A1 (de) * 2023-01-23 2024-08-02
DE102024200211B3 (de) 2024-01-10 2025-03-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren zur Herstellung einer Grabenkondensatorstruktur und Grabenkondensator
EP4618161A1 (de) * 2024-03-11 2025-09-17 Murata Manufacturing Co., Ltd. Elektrische vorrichtung mit einem kondensator mit verbesserter dielektrischer struktur
EP4718486A1 (de) * 2024-09-27 2026-04-01 Murata Manufacturing Co., Ltd. Elektrische vorrichtung mit einem kondensator für hochspannungsanwendungen und verfahren zur herstellung davon

Citations (4)

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US4990463A (en) * 1988-07-05 1991-02-05 Kabushiki Kaisha Toshiba Method of manufacturing capacitor
US20050230784A1 (en) * 2001-12-26 2005-10-20 Lucent Technologies Inc. Adhering layers to metals with dielectric adhesive layers
US20060180842A1 (en) * 2005-02-14 2006-08-17 Tdk Corporation Capacitor, method of making the same, filter using the same, and dielectric thin film used for the same
US20130134555A1 (en) * 2011-11-30 2013-05-30 Sumitomo Electric Device Innovations, Inc. Capacitive element

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JPH05190796A (ja) * 1991-07-30 1993-07-30 Internatl Business Mach Corp <Ibm> ダイナミック・ランダム・アクセス・メモリ・セル用誘電体皮膜およびその形成方法
US6077737A (en) * 1998-06-02 2000-06-20 Mosel Vitelic, Inc. Method for forming a DRAM having improved capacitor dielectric layers
US6246076B1 (en) * 1998-08-28 2001-06-12 Cree, Inc. Layered dielectric on silicon carbide semiconductor structures
KR20010017820A (ko) * 1999-08-14 2001-03-05 윤종용 반도체 소자 및 그 제조방법
US6787419B2 (en) * 2003-01-14 2004-09-07 Ememory Technology Inc. Method of forming an embedded memory including forming three silicon or polysilicon layers
US7229880B2 (en) * 2003-11-19 2007-06-12 Promos Technologies Inc. Precision creation of inter-gates insulator
JP2006222390A (ja) * 2005-02-14 2006-08-24 Tdk Corp キャパシタ及びその製造方法、それを用いたフィルタ
DE102006017487A1 (de) 2006-04-13 2007-10-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Integriertes Beschaltungsbauelement auf Halbleiterbasis zur Schaltentlastung, Spannungsbegrenzung bzw. Schwingungsdämpfung
KR100894098B1 (ko) * 2007-05-03 2009-04-20 주식회사 하이닉스반도체 빠른 소거속도 및 향상된 리텐션 특성을 갖는 불휘발성메모리소자 및 그 제조방법
DE102014223904A1 (de) * 2014-11-24 2016-05-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kondensator und Verfahren zum Herstellen desselben
WO2017145515A1 (ja) * 2016-02-22 2017-08-31 株式会社村田製作所 半導体コンデンサおよび電源モジュール

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4990463A (en) * 1988-07-05 1991-02-05 Kabushiki Kaisha Toshiba Method of manufacturing capacitor
US20050230784A1 (en) * 2001-12-26 2005-10-20 Lucent Technologies Inc. Adhering layers to metals with dielectric adhesive layers
US20060180842A1 (en) * 2005-02-14 2006-08-17 Tdk Corporation Capacitor, method of making the same, filter using the same, and dielectric thin film used for the same
US20130134555A1 (en) * 2011-11-30 2013-05-30 Sumitomo Electric Device Innovations, Inc. Capacitive element

Non-Patent Citations (3)

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AKIHIKO ISHITANI ET AL: "NON-EMPIRICAL MODELING ON SINX CVD", NEC RESEARCH AND DEVELOPMENT, NIPPON ELECTRIC LTD. TOKYO, JP, vol. 33, no. 1, January 1992 (1992-01-01), pages 1 - 06, XP000288331, ISSN: 0547-051X *
KRACH F ET AL: "Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability", 2016 74TH ANNUAL DEVICE RESEARCH CONFERENCE (DRC), IEEE, 19 June 2016 (2016-06-19), pages 1 - 2, XP032948912, DOI: 10.1109/DRC.2016.7548452 *
MATHEWS V K ET AL: "PHYSICAL AND ELECTRICAL CHARACTERISTICS OF THIN SILICON NITRIDE DIELECTRIC FILMS DEPOSITED ON SMOOTH AND RUGGED POLYCRYSTALLINE SILICON AFTER RAPID THERMAL NITRIDATION", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, ELECTROCHEMICAL SOCIETY, vol. 141, no. 4, April 1994 (1994-04-01), pages 1066 - 1070, XP000453611, ISSN: 0013-4651 *

Also Published As

Publication number Publication date
WO2020074534A2 (de) 2020-04-16
DE102019204503B3 (de) 2020-03-26
US11742435B2 (en) 2023-08-29
EP3864713A2 (de) 2021-08-18
JP2022504537A (ja) 2022-01-13
JP7208373B2 (ja) 2023-01-18
US20210257502A1 (en) 2021-08-19

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