WO2024252868A1 - Porte pour réceptacle de substrat - Google Patents

Porte pour réceptacle de substrat Download PDF

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Publication number
WO2024252868A1
WO2024252868A1 PCT/JP2024/017923 JP2024017923W WO2024252868A1 WO 2024252868 A1 WO2024252868 A1 WO 2024252868A1 JP 2024017923 W JP2024017923 W JP 2024017923W WO 2024252868 A1 WO2024252868 A1 WO 2024252868A1
Authority
WO
WIPO (PCT)
Prior art keywords
door body
cover
door
peripheral wall
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2024/017923
Other languages
English (en)
Japanese (ja)
Inventor
晃裕 長谷川
瞬 山川
紗代 田鹿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Priority to JP2025526019A priority Critical patent/JPWO2024252868A1/ja
Priority to KR1020257038404A priority patent/KR20260018807A/ko
Priority to CN202480037259.5A priority patent/CN121241427A/zh
Publication of WO2024252868A1 publication Critical patent/WO2024252868A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D45/00—Clamping or other pressure-applying devices for securing or retaining closure members
    • B65D45/32—Clamping or other pressure-applying devices for securing or retaining closure members for applying radial or radial and axial pressure, e.g. contractible bands encircling closure member
    • B65D45/34—Clamping or other pressure-applying devices for securing or retaining closure members for applying radial or radial and axial pressure, e.g. contractible bands encircling closure member lever-operated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Definitions

  • the present invention relates to a door for a substrate storage container that opens and closes the container body that stores substrates such as semiconductor wafers.
  • a conventional door for a substrate storage container comprises a door body that is detachably press-fitted into the open front of the container body that stores semiconductor wafers, and a pair of left and right covers that are attached to the front of the door body, and when the front of the container body is closed, the front retainer presses against the front edge of the semiconductor wafer to prevent the semiconductor wafer from wobbling (see Patent Document 1).
  • the container body is formed as a front-opening box, and is mounted and docked on the load port of the interface section that inserts and removes semiconductor wafers into and from the semiconductor manufacturing equipment.
  • the door body comprises a closure plate that closes the open front of the container body, a peripheral wall formed on the periphery of this closure plate, and a pair of left and right spaces that are partitioned between the center of the closure plate and the peripheral wall, and a required number of spring-like fitting claws for the cover are protrudingly formed on the center and peripheral wall of the closure plate.
  • the pair of left and right covers comprise a pair of covering plates that respectively cover the pair of left and right spaces of the door body, and each covering plate is formed to be approximately the same size as the space of the door body, and a required number of fitting holes that fit into the multiple fitting claws of the door body are drilled on the periphery of the covering plate.
  • the door body when manufacturing a door for a substrate storage container, the door body is placed on a work table and the covers are placed facing a pair of spaces from above.
  • the cover's fitting holes are positioned on the multiple fitting claws in each space and the cover is pressed down.
  • the fitting claws and fitting holes fit together, and the pair of covers can be attached from above to the front of the door body to manufacture the door for the substrate storage container.
  • a conventional door for a substrate storage container is constructed as described above, and when the front of the container body is closed, it is pressed against the front periphery of the semiconductor wafer, but this pressing causes the door to bulge outward and deform, making it difficult to improve dimensional accuracy.
  • This problem is difficult to solve since the direction in which the door for the substrate storage container deforms is the same as the direction in which the cover is attached. Furthermore, when the door for the substrate storage container deforms, a gap occurs between the door and the load port, causing a docking error, which results in the problem that it becomes difficult to open and close the door for the substrate storage container.
  • the present invention has been made in consideration of the above, and aims to provide a door for a substrate storage container that can improve dimensional accuracy, stabilize the position of the cover, and prevent docking errors with the load port.
  • the present invention provides a container comprising a door body that is detachably fitted to the open front surface of a container body that stores substrates, a cover for the door body, and an attachment mechanism for attaching the cover to the door body
  • the door body includes a closing plate member that closes the open front surface of the container body, a peripheral wall formed on the peripheral edge of the closing plate member, and a space defined between a central portion of the closing plate member and the peripheral wall
  • the cover includes a covering plate that covers the space of the door body, and the width of the covering plate is made narrower than the width of the space so that the covering plate can slide between the center of the door body and the side of the peripheral wall;
  • the mounting mechanism is characterized by including a plurality of cover mounting portions formed on the upper and lower sides of the peripheral wall of the door body, and a plurality of door body mounting portions formed on the upper and lower sides of the covering plate material of the cover and attached in a stacked manner to the plurality of cover mounting portions when the covering plate material slides
  • a locking mechanism is installed between the space in the door body and the cover, and that this locking mechanism includes an operating plate that is supported by a support portion of the closing plate material of the door body and can be rotated from outside the cover, and a locking claw that can appear and disappear from a through hole in the peripheral wall of the door body by rotating this operating plate.
  • multiple guide pieces that surround the operation plate of the locking mechanism can be arranged on the closing plate material of the door body and the covering plate material of the cover, with some of the multiple guide pieces being provided near the side of the peripheral wall of the closing plate material and the remaining multiple guide pieces being provided on the side of the opposing surface of the covering plate material that faces the closing plate material, so that the operation plate of the locking mechanism can be sandwiched between some of the multiple guide pieces and opposed.
  • the through hole in the peripheral wall of the door body is extended, and multiple guide pieces that sandwich and position the locking mechanism are arranged on the opposing surface of the covering plate of the cover that faces the closing plate, and part of the operation plate of the locking mechanism is cut out, so that when the covering plate of the cover slides from the center of the door body toward the side of the peripheral wall, the covering plate and the locking mechanism slide together, and the operation plate can be fitted into the support part of the closing plate of the door body via the cutout.
  • the mounting mechanism also includes a plurality of cover mounting openings formed on the upper and lower sides of the peripheral wall of the door body, and claws formed on at least one of the upper and lower sides of the covering plate material of the cover and the mounting portion for the door body can be engaged with these cover mounting openings.
  • the cover mounting portion of the mounting mechanism can be a cover mounting protrusion adjacent to the through hole of the door body, and the door body mounting portion can be a door body mounting protrusion capable of opposing the cover mounting protrusion, and at least one of the cover mounting protrusion and the door body mounting protrusion can be bent to form a claw that engages with the other.
  • the mounting mechanism preferably includes a mounting groove formed on the side of the peripheral wall of the door body and a mounting protrusion formed on the side of the covering plate of the cover that can face the mounting groove, and the mounting protrusion fits into the mounting groove when the covering plate of the cover slides from the center of the door body toward the side of the peripheral wall.
  • the substrate in the claims includes at least various semiconductor wafers.
  • the container body, door body, and cover may be transparent, opaque, or translucent.
  • the container body may be a FOSB for shipping, or a FOUP for transportation within a factory.
  • the upper and lower parts of the cover's covering plate material may be formed with a plurality of protruding pieces that can face the through-hole of the door body.
  • the cover mounting portion and the door body mounting portion of the mounting mechanism may be attached by a concave-convex fit, or may be attached by being penetrated by a pin or the like.
  • the locking mechanism includes a required number of reciprocating members that reciprocate in the vertical direction of the door body as the operation plate rotates, and that the reciprocating movements of the required number of reciprocating members cause the required number of locking claws to appear and disappear.
  • the cover covering plate material when assembling a door for a substrate storage container, the cover covering plate material is placed facing each other in the space of the door body and brought close to the center of the door body, the cover covering plate material is slid from the center of the door body toward the side of the peripheral wall so as to contact the side of the peripheral wall, and the multiple cover mounting parts and door body mounting parts of the mounting mechanism are overlapped and attached, whereby the door for the substrate storage container can be assembled. Because the deformation direction of the door for the substrate storage container differs from the direction in which the cover is slid and attached, the dimensional accuracy of the door for the substrate storage container can be improved.
  • the present invention has the effect of improving the dimensional accuracy of the door for the substrate storage container and stabilizing the position of the cover. It also has the effect of preventing docking errors with the load port.
  • the load direction acting on the locking mechanism differs from the sliding installation direction of the cover, improving the dimensional accuracy of the door for the substrate storage container.
  • some of the guide pieces are provided near the side of the peripheral wall of the closing plate of the door body, and the remaining guide pieces are provided on the side of the opposing surface of the covering plate of the cover that faces the closing plate, so that the operating plate of the locking mechanism can be sandwiched between some of the guide pieces. Therefore, even if the covering plate of the cover is slid from the center of the door body toward the side of the peripheral wall, the locking mechanism rarely interferes with the assembly of the door for the substrate storage container.
  • FIG. 1 is a perspective explanatory view showing a schematic view of a door body in an embodiment of a door for a substrate storage container according to the present invention
  • 1 is a plan view illustrating a door body in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. 1 is a perspective explanatory view showing a state in which a locking claw of a locking mechanism is arranged on one side of the space of a door body in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. 1 is a perspective explanatory view showing a state in which a reciprocating bar of a locking mechanism is disposed on one side of the space of a door body in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. 1 is a perspective explanatory view showing a state in which an operation plate of a locking mechanism is disposed on one side of the space of a door body in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. 1 is a perspective explanatory view showing a state in which most of the space on one side of a door body is covered with a cover in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. 7 is a plan view showing a state in which the cover of FIG. 6 is slid toward a side portion of a peripheral wall of the door body
  • FIG. 8 is a plan view showing a state in which the cover of FIG. 7 is slid into contact with a side portion of a peripheral wall of the door body;
  • FIG. 1 is a perspective explanatory view showing a state in which an operation plate of a locking mechanism is disposed on one side of the space of a door body in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. 1 is a main explanatory diagram showing a schematic relationship between a cover mounting opening of a mounting mechanism and an alignment claw of a mounting protrusion for a door body in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. 1 is a perspective explanatory view showing a state in which a locking mechanism is disposed in a space of a door body in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. FIG. 2 is a perspective view illustrating a cover in an embodiment of a door for a substrate storage container according to the present invention.
  • FIG. 12 is a perspective explanatory view showing a schematic rear surface of the cover shown in FIG. 11 .
  • FIG. 1 is a perspective explanatory view showing a schematic relationship between the back surface of the cover and a locking mechanism in an embodiment of a door for a substrate storage container according to the present invention
  • FIG. FIG. 11 is a perspective explanatory view that illustrates a door body in a second embodiment of a door for a substrate storage container according to the present invention.
  • 13 is a plan view illustrating a door body in a second embodiment of a door for a substrate storage container according to the present invention;
  • FIG. 13 is an explanatory perspective view showing a state in which a locking claw of a locking mechanism is arranged in one space of a door body in a second embodiment of a door for a substrate storage container according to the present invention and positioned in a waiting area.
  • FIG. 11 is a perspective explanatory view that illustrates a door body in a second embodiment of a door for a substrate storage container according to the present invention.
  • 13 is a plan view illustrating a door body in a second embodiment of a
  • FIG. 13 is an explanatory oblique view showing a schematic diagram of a state in which a reciprocating bar of a locking mechanism is arranged in one waiting area of the space in a second embodiment of a door for a substrate storage container according to the present invention and its tip is connected to a locking claw.
  • 13 is a perspective explanatory view showing a state in which an operation plate of a locking mechanism is disposed in one waiting area of the space in a second embodiment of a door for a substrate storage container according to the present invention
  • FIG. 13 is a perspective explanatory view showing a state in which a cover is opposed to most of one side space of a door body in a second embodiment of a door for a substrate storage container according to the present invention;
  • FIG. 20 is a plan view showing a state in which the cover of FIG. 19 is slid toward a side portion of a peripheral wall of the door body;
  • FIG. 21 is a plan view showing a state in which the cover of FIG. 20 is slid into contact with a side portion of a peripheral wall of the door body;
  • FIG. 13 is a main explanatory diagram showing a schematic view of a cover mounting opening of a mounting mechanism and an alignment tab of a mounting protrusion for a door body in a second embodiment of a door for a substrate storage container according to the present invention.
  • FIG. 13 is a perspective explanatory view showing a state in which a locking mechanism in a door for a substrate storage container according to a second embodiment of the present invention has slid out of a waiting area of the space.
  • FIG. 13 is a perspective explanatory view showing a schematic relationship between a cover and a locking mechanism in a door for a substrate storage container according to a second embodiment of the present invention.
  • FIG. 13 is a perspective explanatory view showing a schematic relationship between the back surface of the cover and a locking mechanism in a door for a substrate storage container according to a second embodiment of the present invention.
  • FIG. 13 is a perspective explanatory view showing a schematic rear surface of a cover in a door for a substrate storage container according to a second embodiment of the present invention;
  • FIG. 13 is an explanatory diagram showing a state in which an operation plate is about to fit into a support cylinder in a space through a notch in a second embodiment of a door for a substrate storage container according to
  • the door for a substrate storage container in this embodiment comprises a door body 1 that is detachably fitted to the open front of the container body that stores and aligns a plurality of semiconductor wafers, which are substrates; a pair of left and right covers 20 for the door body 1; an attachment mechanism 30 for attaching the pair of left and right covers 20 to the door body 1; and a locking mechanism 40 that is interposed and installed between the door body 1 and the pair of left and right covers 20.
  • the door By attaching the covers 20 by sliding them from the center 6 of the door body 1 toward the sides of the peripheral wall 4, the door contributes to the achievement of Goal 9 of the SDGs (the United Nations' international goals for sustainable development, consisting of 17 global goals and 169 targets (achievement criteria)) adopted at the United Nations Summit.
  • Goal 9 of the SDGs the United Nations' international goals for sustainable development, consisting of 17 global goals and 169 targets (achievement criteria)
  • the semiconductor wafers are not shown, but are made of thin, brittle, high-quality silicon wafers, for example, ⁇ 300 mm, stored horizontally inside the container body, with 25 of them aligned vertically at a specified interval.
  • the container body, door body 1, pair of covers 20, mounting mechanism 30, and locking mechanism 40 are molded from a molding material containing the required resin.
  • the resin in the molding material include thermoplastic resins such as polycarbonate resin, cycloolefin polymer, polyetherimide resin, polyetherketone resin, polyetheretherketone resin, polybutylene terephthalate resin, polyacetal resin, and liquid crystal polymer, as well as alloys of these resins.
  • the container body is injection molded into a front-open box with a roughly rectangular opening at the front, and is mounted and docked on the load port of the interface section that loads and unloads semiconductor wafers into and from the semiconductor manufacturing equipment, and the door for the substrate storage container is fitted and removed by this load port.
  • a pair of left and right support pieces that support the semiconductor wafers horizontally are provided opposite each other on both sides of the inside of the container body, and multiple pairs of left and right support pieces are arranged at a predetermined interval in the vertical direction.
  • Locking holes for the locking mechanism 40 are recessed and formed on both upper and lower sides of the inner periphery of the front of the container body, and each locking hole is formed in a rectangular shape in plan view.
  • the door body 1 is formed with an approximately tray-shaped or dish-shaped cross section, and is equipped with a roughly rectangular closure plate 2 that closes the open front of the container body, an endless frame-shaped peripheral wall 4 that is attached around the periphery of this closure plate 2, and a pair of left and right spaces 7 that are partitioned between the peripheral wall 4 and a slightly raised central part 6 of the roughly rectangular front of the closure plate 2, and through holes 5 that face the locking holes of the container body are drilled on both the upper and lower sides of the peripheral wall 4.
  • the closure plate 2 is formed to a size and shape that corresponds to the front of the container body, and horizontally long rectangular guide blocks 3 are arranged at the four corners of the front surface, which hold the cover 20 between themselves and the mounting mechanism 30 via a gap, and an elastic front retainer is attached detachably to the center of the back surface, which presses against the front edge of the semiconductor wafer to hold it in place.
  • the pair of spaces 7 are each partitioned into a vertically long rectangular shape, house a locking mechanism 40, and are mostly covered by the cover 20.
  • a support tube 8 for the locking mechanism 40 a curved guide piece 9 with a roughly semicircular arc shape in plan view, and multiple guide pieces 10 are arranged.
  • the support tube 8 is formed into a cylindrical shape that protrudes from the closure plate surface and is located near the center of the space 7.
  • the curved guide piece 9 is provided on a circumference centered on the support tube 8 and is located near the side of the peripheral wall of the closure plate surface, semi-enclosing the support tube 8.
  • the multiple guide pieces 10 are formed linearly and combined to function to position the locking mechanism 40.
  • the pair of covers 20, as shown in Figures 6 to 9 and Figures 11 to 13, are made of covering plates 21 that each cover most of a pair of spaces 7 in the door body 1.
  • Each covering plate 21 is formed in a vertically long rectangular shape with a width narrower than the width of the space 7, and functions to slide between the center 6 of the door body 1 and the side of the peripheral wall 4.
  • a rectangular operation opening 22 for the locking mechanism 40 is drilled in the center of this covering plate 21, and manual operation holes 23 for the locking mechanism 40 are cut out in a roughly fan-shaped shape near both sides of this operation opening 22.
  • protruding pieces 24 that can face the through opening 5 of the door body 1 are formed at the center of the upper end and the center of the lower end of the covering plate 21.
  • a curved guide piece 9A with a roughly semicircular arc shape in plan view and multiple guide pieces 10A for the locking mechanism 40 are arranged on the back surface of the covering plate 21 facing the front surface of the closing plate.
  • the curved guide piece 9A is provided on a circumference centered on the operation opening 22 and is located toward the inside of the back surface of the covering plate 21, partially surrounding one of the manual operation holes 23 and facing the curved guide piece 9 in the space 7 from the center of the door body 1.
  • the multiple guide pieces 10A are also provided at intervals on the back surface of the covering plate 21 and its protruding piece 24, and extend linearly in the vertical direction of the covering plate 21.
  • the mounting mechanism 30 is configured with a plurality of cover mounting projections 31, 31A formed on both upper and lower sides of the peripheral wall 4 of the door body 1, a plurality of cover mounting holes 32 drilled on both upper and lower sides of the peripheral wall 4 of the door body 1, a plurality of door body mounting projections 33 formed on both upper and lower sides of the covering plate 21 of the cover 20 and attached to the plurality of cover mounting projections 31, 31A, a plurality of mounting grooves 34 cut out at predetermined intervals on the inner periphery of the side of the peripheral wall 4 of the door body 1, and a plurality of mounting protrusions 35 formed on the outer side of the covering plate 21 near the side of the peripheral wall and capable of being fitted opposite the plurality of mounting grooves 34.
  • the cover mounting projections 31, 31A are formed, for example, as rectangular projections on the inner periphery of the peripheral wall 4 of the door body 1, and are adjacent to both sides of the through hole 5 of the door body 1.
  • the cover mounting projection 31 near the center of the door body 1 is integrated with a stopper block 36 on the inner periphery of the peripheral wall 4, and its side end is bent to form a positioning claw 37 that positions the door body mounting projection 33 (see Figures 1, 3 to 5, and 10).
  • the stopper block 36 is formed vertically in the thickness direction of the door body 1, and contacts the door body mounting projection 33 of the cover plate 21 to prevent excessive sliding.
  • each cover mounting opening 32 is formed in a rectangular shape and is close to the cover mounting projection 31 and the stopper block 36.
  • the multiple door body mounting protrusions 33 are formed as rectangular protrusions on both upper and lower ends of the cover plate 21, and when the cover 20 does not slide from the center 6 of the door body 1 toward the outer peripheral wall side, they are adjacent to the cover mounting protrusions 31, 31A, and when the cover 20 slides from the center 6 of the door body 1 toward the outer peripheral wall side, they overlap and face the cover mounting protrusions 31, 31A, thereby preventing the cover 20 from falling off.
  • the door body mounting projections 33 near the center of the door body 1 engage with the positioning claws 37 of the cover mounting projections 31 when the cover 20 is completely slid from the center 6 of the door body 1 toward the side of the peripheral wall 4.
  • alignment claws 38 that engage with the peripheral edge of the cover mounting opening 32 are formed protruding from the ends of the door body mounting projections 33 near the center of the door body 1 as necessary (see FIG. 9).
  • the locking mechanism 40 is composed of a pair of left and right operating plates 41 that are supported by the support tube 8 of the closing plate 2 of the door body 1 and rotated from a load port outside the cover 20, a number of reciprocating bars 45 that reciprocate in the vertical direction of the door body 1 as each operating plate 41 rotates, and a number of locking claws 47 that can appear and disappear through gaps from the through holes 5 in the peripheral wall 4 of the door body 1 as each reciprocating bar 45 reciprocates.
  • Each operation plate 41 is formed, for example, in a generally cylindrical shape with a generally U-shaped cross section, and has a rectangular operation hole 42 for operation facing the operation port 22 of the cover 20 drilled on its closed surface, and is rotatably fitted into the support cylinder 8 of the closing plate 2 and surrounded by the curved guide piece 9 of the space 7 and the curved guide piece 9A of the cover 20.
  • a disk 43 is integrally formed on the outer periphery of this operation plate 41, which is sandwiched between the multiple curved guide pieces 9 and 9A with a gap between them and is visible from the pair of manual operation holes 23 of the cover 20, and this disk 43 has fan holes of approximately the same shape as the pair of manual operation holes 23 drilled in a generally fan-shaped plane at intervals of 180°, and a pair of connecting grooves 44 for the reciprocating bar 45 are cut out in a semicircular arc shape at intervals of 180° on the periphery of the disk 43, and these multiple fan holes and connecting grooves 44 are adjacent to each other.
  • Each reciprocating bar 45 is formed, for example, as a thick rectangular plate, and is slidably clamped between the guide pieces 10 in the space 7 and the guide pieces 10A of the cover plate 21 via multiple pins, and a connecting pin 46 is formed protruding from the end of the surface, which fits loosely into the connecting groove 44 of the operation plate 41 via a gap.
  • each locking claw 47 is formed, for example, as a plate shape or approximately Y shape, and is swingably connected to the tip of the reciprocating bar 45 via a pin, and when the substrate storage container door is locked, it protrudes from the through hole 5 of the door body 1 while drawing an arc to the outside and locks into the locking hole on the front inner circumference of the container body via a roller, and when the substrate storage container door is unlocked, it retreats from the locking hole of the container body while drawing an arc and returns to the through hole 5 of the door body 1.
  • each space 7 of the door body 1 is covered with a cover 20 and adjacent to the central portion 6 of the door body 1 (see Figure 6), and the cover mounting projections 31 and 31A of the mounting mechanism 30 are adjacent to the door body mounting projections 33.
  • Each cover 20 is slid from the central portion of the door body 1 toward the side of the peripheral wall 4 (see Figure 7) so that it contacts the side of the peripheral wall 4 (see Figure 8).
  • the mounting projections 35 are fitted into the multiple mounting grooves 34 of the mounting mechanism 30, and the mounting mechanism 30 is positioned and fixed, allowing the door for the substrate storage container to be assembled.
  • the adjacent cover mounting projections 31, 31A of the mounting mechanism 30 overlap and face the door body mounting projection 33 (see Figure 8), preventing the cover 20 from falling off the door body 1.
  • the positioning claw 37 of the cover mounting projection 31 engages with the door body mounting projection 33
  • the alignment claw 38 of the door body mounting projection 33 engages with the cover mounting opening 32 (see Figure 9), restricting the cover 20 from sliding toward the center of the door body.
  • the deformation direction of the door for the substrate storage container and the load direction acting on the locking mechanism 40 (backward in FIG. 2) are different from the sliding attachment direction of the cover 20 (left-right direction in FIG. 2), so deformation of the door for the substrate storage container can be suppressed and the dimensional accuracy of the door for the substrate storage container can be significantly improved.
  • the position of the cover 20 is stabilized by the attachment mechanism 30, which does not depend on the strength or springiness of the door for the substrate storage container, so that displacement of the cover 20 can be effectively prevented.
  • the curved guide piece 9A on the inner back surface of the cover 20 faces the curved guide piece 9 in the space 7 across the operation plate 41 of the locking mechanism 40, so that even if the cover 20 slides from the center 6 of the door body 1 toward the side of the peripheral wall 4, the locking mechanism 40 does not hinder the assembly of the door for the substrate storage container.
  • Figures 14 to 27 show a second embodiment of the present invention.
  • the configuration of the door body 1, cover 20, and locking mechanism 40 is changed so that when the cover plate 21 of the cover 20 slides from the center 6 of the door body 1 toward the side of the peripheral wall 4, not only the cover plate 21 but also the cover plate 21 and the locking mechanism 40 slide together.
  • the door body 1 has multiple through holes 5 formed in a horizontally long rectangle extending toward the center 6 of the door body 1 to allow for the locking mechanism 40 to slide, and the through holes 5 are loosely inserted through gaps by the locking claws 47 of the locking mechanism 40.
  • a support tube 8 exists in the space 7, the approximately semicircular curved guide piece 9 and multiple guide pieces 10 are omitted.
  • a waiting area 11 for the locking mechanism 40 adjacent to the support tube 8 is formed vertically and offset toward the center of the door body 1, and near the center of this waiting area 11, multiple straight guide ribs 12 for the operation plate 41 of the locking mechanism 40 and a planar approximately semicircular guide rib 13 are formed in combination.
  • the cover 20 has a pair of curved guide pieces 9, 9A for the operation plate 41, multiple guide pieces 10A, and a rattle prevention rib 25 arranged on the back surface of the cover plate 21.
  • the pair of curved guide pieces 9, 9A are each provided on a circumference centered on the operation port 22, and roughly surround the pair of manual operation holes 23.
  • the multiple guide pieces 10A are spaced apart and connected to a pair of curved guide pieces 9, 9A on the back surface of the covering plate 21 and its protruding piece 24, and extend linearly in the vertical direction of the covering plate 21 to slidably clamp the reciprocating bar 45 and the locking claw 47 of the locking mechanism 40.
  • the rattle prevention rib 25 is disposed on the back surface of the covering plate 21 and is interposed between the multiple guide ribs 13 that clamp the reciprocating bar 45 of the locking mechanism 40, extends linearly in the vertical direction of the covering plate 21, and comes into sliding contact with the reciprocating bar 45 to prevent rattle.
  • the locking mechanism 40 is basically the same as the above embodiment, but a notch 48 corresponding to the size of the support cylinder 8 in the space 7 is formed in the peripheral wall of the operation plate 41. As shown in FIG. 27, this operation plate 41 is slidably fitted to the support cylinder 8 in the space 7 via the notch 48 so as to be rotatable from the lateral direction.
  • a pair of locking claws 47 of the locking mechanism 40 are placed in each space 7 of the door body 1 and positioned in the waiting area 11 (see Figure 16), a pair of reciprocating bars 45 of the locking mechanism 40 are placed in the waiting area 11 of each space 7 and their tips are connected to the locking claws 47 (see Figure 17), the operation plate 41 of the locking mechanism 40 is placed in the waiting area 11 of each space 7 and brought into contact with the guide rib 13, the pair of connecting grooves 44 of the operation plate 41 are loosely fitted into the connecting pins 46 of the reciprocating bars 45, and the notches 48 of the operation plate 41 are oriented toward the support tube 8 (see Figure 18).
  • each space 7 of the door body 1 is covered with a cover 20 and adjacent to the center 6 of the door body 1 (see FIG. 19), and the cover mounting projections 31 and 31A of the mounting mechanism 30 are adjacent to the door body mounting projections 33, and the pair of curved guide pieces 9 and 9A and the multiple guide pieces 10A of the cover 20 are fitted into the locking mechanism 40 to position the locking mechanism 40 (see FIG. 25).
  • each cover 20 is slid from the center of the door body 1 toward the side of the peripheral wall 4 (see FIG. 20) to contact the side of the peripheral wall 4 (see FIG. 21), and the mounting projections 35 are inserted into the multiple mounting grooves 34 of the mounting mechanism 30 to position and fix them, and the door for the substrate storage container can be assembled.
  • the locking mechanism 40 slides from the waiting area 11 toward the side of the peripheral wall 4 and is placed in the correct fixed position, and the operation plate 41 is rotatably fitted into the support cylinder 8 in the space 7 using the notch 48 (see Figure 27).
  • the locking mechanism 40 is clamped between the curved guide pieces 9 and 9A and the multiple guide pieces 10A, so the locking mechanism 40 does not come apart when it slides.
  • the other parts are the same as in the above embodiment, so a description will be omitted.
  • cover mounting projections 31 and 31A, door body mounting projections 33, mounting grooves 34, and mounting protrusions 35 of the mounting mechanism 30 in the above embodiment may be increased or decreased as necessary.
  • cover mounting opening 32 of the mounting mechanism 30 and the alignment claws 38 of the door body mounting projections 33 may be omitted as necessary.
  • positioning claws 37 and alignment claws 38 may be omitted by arranging the cover mounting projections 31 and 31A and the door body mounting projections 33 facing each other and inserting fastening pins into them to position the cover 20.
  • the door for substrate storage containers according to the present invention is used in fields such as semiconductor wafer manufacturing.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

L'invention concerne une porte pour un réceptacle de substrat dont on attend qu'elle améliore la précision dimensionnelle et stabilise la position du couvercle, et qui peut empêcher une erreur de branchement à un orifice de chargement.　La porte comprend : un corps de porte 1 qui s'adapte à une surface avant ouverte d'un corps de réceptacle qui reçoit une tranche de semi-conducteur ; un couvercle 20 pour le corps de porte 1, et un mécanisme de fixation 30 pour fixer le couvercle 20 au corps de porte 1. Le corps de porte 1 est pourvu d'une plaque de fermeture 2 qui ferme la surface avant du corps de réceptacle, d'une paroi périphérique 4 qui forme une partie périphérique de la plaque de fermeture 2, et d'une paire d'espaces 7 séparés entre une partie centrale 6 de la plaque de fermeture 2 et la paroi périphérique 4. Le couvercle 20 comporte une plaque de recouvrement 21 recouvrant les espaces 7, dont la largeur inférieure à celle des espaces lui permet de coulisser entre la partie centrale 6 et une partie latérale de la paroi périphérique 4. Le mécanisme de fixation 30 est pourvu de pièces de fixation de couvercle en saillie 31, 31A qui sont formées des deux côtés d'une partie supérieure et des deux côtés d'une partie inférieure de la paroi périphérique 4, et des pièces de fixation de corps de porte en saillie 33 qui sont formées des deux côtés d'une partie supérieure et des deux côtés d'une partie inférieure de la plaque de recouvrement 21 et qui sont fixées de manière à chevaucher les pièces de fixation de couvercle en saillie 31, 31A.
PCT/JP2024/017923 2023-06-05 2024-05-15 Porte pour réceptacle de substrat Ceased WO2024252868A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2025526019A JPWO2024252868A1 (fr) 2023-06-05 2024-05-15
KR1020257038404A KR20260018807A (ko) 2023-06-05 2024-05-15 기판 수납 용기용 도어
CN202480037259.5A CN121241427A (zh) 2023-06-05 2024-05-15 基板收纳容器用门

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023-092468 2023-06-05
JP2023092468 2023-06-05

Publications (1)

Publication Number Publication Date
WO2024252868A1 true WO2024252868A1 (fr) 2024-12-12

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PCT/JP2024/017923 Ceased WO2024252868A1 (fr) 2023-06-05 2024-05-15 Porte pour réceptacle de substrat

Country Status (5)

Country Link
JP (1) JPWO2024252868A1 (fr)
KR (1) KR20260018807A (fr)
CN (1) CN121241427A (fr)
TW (1) TW202448780A (fr)
WO (1) WO2024252868A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006129715A1 (fr) * 2005-05-31 2006-12-07 Vantec Co., Ltd. Structure d’ouverture/fermeture de recipient de transport de plaque mince
JP2008098236A (ja) * 2006-10-06 2008-04-24 Shin Etsu Polymer Co Ltd 蓋体及び基板収納容器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006129715A1 (fr) * 2005-05-31 2006-12-07 Vantec Co., Ltd. Structure d’ouverture/fermeture de recipient de transport de plaque mince
JP2008098236A (ja) * 2006-10-06 2008-04-24 Shin Etsu Polymer Co Ltd 蓋体及び基板収納容器

Also Published As

Publication number Publication date
TW202448780A (zh) 2024-12-16
JPWO2024252868A1 (fr) 2024-12-12
CN121241427A (zh) 2025-12-30
KR20260018807A (ko) 2026-02-09

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