WO2024253411A1 - Soupape de commande de type pendule - Google Patents

Soupape de commande de type pendule Download PDF

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Publication number
WO2024253411A1
WO2024253411A1 PCT/KR2024/007659 KR2024007659W WO2024253411A1 WO 2024253411 A1 WO2024253411 A1 WO 2024253411A1 KR 2024007659 W KR2024007659 W KR 2024007659W WO 2024253411 A1 WO2024253411 A1 WO 2024253411A1
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WO
WIPO (PCT)
Prior art keywords
gate
shaft
sealing ring
gas
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2024/007659
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English (en)
Korean (ko)
Inventor
안희준
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gangchul Tech Co ltd
Vacuum All Co Ltd
Original Assignee
Gangchul Tech Co ltd
Vacuum All Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gangchul Tech Co ltd, Vacuum All Co Ltd filed Critical Gangchul Tech Co ltd
Priority to CN202480037965.XA priority Critical patent/CN121311702A/zh
Publication of WO2024253411A1 publication Critical patent/WO2024253411A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/22—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with sealing faces shaped as surfaces of solids of revolution
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof

Definitions

  • the present invention relates to a pendulum control valve, and more specifically, to a pendulum control valve capable of minimizing damage to a wafer by preventing particle generation when opening and closing a gate.
  • FIG 1 is a schematic diagram schematically illustrating the configuration of a typical etching device.
  • the etching device has a process chamber (20) equipped with a substrate loading table (21) on which a substrate (W) is loaded, and a vacuum pump (30) equipped at the bottom of the process chamber (20).
  • a gas supply port (25) is formed at the top of the process chamber (20) to supply gas (G) required for the etching process, and a gas discharge passage (23) is provided at the bottom to discharge the gas (G) to a vacuum pump (30).
  • the process chamber (20) generates plasma using gas (G) and performs an etching process using the plasma. As the etching process is performed, residual gas inside is discharged through a vacuum pump (30).
  • a pendulum-type control valve (10) is used, which is provided in the gas discharge passage (23) connecting the process chamber (20) and the vacuum pump (30) and controls the internal pressure by adjusting the conductance of the gas discharge passage (23).
  • the pendulum control valve (10) has a gate (16) positioned inside the valve body (12) to close the gas discharge passage (23), and as shown in (b) of Fig. 2, the gate (16) rotates toward the cover (17) to open the gas discharge passage (23). In this way, the pendulum control valve (10) controls the degree of opening and closing of the gas discharge passage (23) by rotating the gate (16) between the valve body (12) and the cover (17).
  • Figure 3 is a cross-sectional view of a conventional pendulum-type control valve (10) in an open state
  • Figure 4 is a cross-sectional view of a conventional pendulum-type control valve (10) in a closed state.
  • the conventional pendulum control valve (10) has a gate (16) that rotates by a rotating shaft (15) to open and close a gas discharge port (12b) connected to a gas discharge passage (23), and the valve body (12) is provided with a sealing ring (11) that moves up and down to pressurize the gate (16) to prevent gas leakage.
  • sealing members (11a, 11b) are provided on the bottom surface and upper outer periphery of the sealing ring (11) to prevent gas leakage.
  • the sealing ring (11) moves up and down by the elastic force of the hydraulic member (13) and the spring (13a) and pressurizes the sealing ring (11).
  • the conventional pendulum control valve (10) is provided with a shaft sealing member (15a) that wraps around the rotation shaft (15) to prevent gas leakage when the gate (16) is switched from a closed state as shown in FIG. 4 to an open state as shown in FIG. 3. Since the shaft sealing member (15a) is in continuous contact with the rotation shaft (15) during rotation, it is greatly damaged by friction. To prevent this, a large amount of lubricant is applied to the shaft sealing member (15a), but the shaft sealing member (15a) is exposed toward the chamber (20), comes into contact with the high-temperature gas, hardens, and then becomes particles. The lubricant particles formed by hardening fly and flow into the process chamber (20), and then attach to the surface of the substrate (W), contaminating and damaging the substrate (W), and causing defects in the substrate (W).
  • the conventional pendulum control valve (10) rotates while the gate (16) is in contact with the lower part of the valve body (11) over a certain area. Accordingly, friction occurs on the bottom surface of the gate (16) that is in contact with the valve body (11) during rotation, and more damage occurs to the rotation shaft (15) and the shaft sealing member (15a).
  • the purpose of the present invention is to solve the above-described problem, and to provide a pendulum-type control valve in which the shaft sealing member is designed to be concealed so as not to be exposed to the process chamber, thereby preventing particles generated by hardening of lubricating oil from contaminating the substrate.
  • a pendulum-type control valve is provided that allows the gate to rise and fall a certain height when rotating, thereby allowing smoother rotation without friction with the valve body.
  • the above-described object of the present invention can be achieved by a pendulum-type control valve provided in a gas discharge passage between a process chamber and a vacuum pump to open and close the gas discharge passage.
  • the pendulum-type control valve of the present invention comprises: a valve body (110) having a gas inlet (111) provided at the upper portion and communicating with the gas discharge passage, and a gas discharge port (113) provided at the lower portion and communicating with the vacuum pump; a cover (120) coupled to one side of the valve body (110); a gate (150) that rotates inside the valve body (110) and the cover (120) to close or open the gas discharge port (113); It is characterized by including a sealing ring (130) that moves up and down between the gas inlet (111) and the gas outlet (113) and pressurizes the gate (150) downward to prevent gas leakage; a sealing ring lifting unit (140) that drives the sealing ring (130) so that the sealing ring (130) moves up and down; a gate driving unit (160
  • the gate driving unit (160) comprises: an internal horizontal frame (180) provided inside the driving box (170) and having a rotational shaft lifting hole (181) and a driving shaft exposure hole (183) formed on a plate surface; a driving motor (168) that generates a rotational driving force and is fixed to an upper surface of the internal horizontal frame (180), and has a driving shaft (168a) exposed to the lower portion of the internal horizontal frame (180) through the driving shaft exposure hole (183); a rotational shaft (161) that is vertically accommodated in the rotational shaft lifting hole (181) and receives the rotational driving force of the driving motor (168) to rotate forward and backward; a shaft body (162) that is fixedly coupled to a joining area of the gate (150) and the rotational shaft (161) and supports the rotational shaft (161) so as to rotate; A plurality of O-rings (165, 165a) provided in the joining area of the above-mentioned shaft body (162) and the above-mentioned rotary shaft (161) to prevent gas leakage;
  • a body cap (163) may be further included that is coupled to the upper portion of the rotation shaft (161) and covers the upper portion of the rotation shaft (161) and an upper portion of the shaft body (162) to prevent gas leakage.
  • the pendulum control valve according to the present invention opens and closes the gas discharge port of the valve body by rotating the gate and moving it up and down at a certain height.
  • the discharge sealing member at the bottom of the gate is raised vertically, so friction is almost eliminated, which reduces the use of lubricating oil. Accordingly, the problem of particles generated when the lubricating oil comes into contact with gas and hardens, contaminating the substrate, can be solved.
  • Figure 1 is a schematic diagram schematically illustrating the configuration of a typical etching device.
  • Figure 2 is a plan view illustrating the operation process of a conventional pendulum control valve.
  • Figures 3 and 4 are cross-sectional examples showing the open and closed states of a conventional pendulum control valve.
  • Figure 5 is a cross-sectional view showing the cross-sectional configuration of the open state of the pendulum control valve according to the present invention.
  • Figure 6 is a cross-sectional view showing the cross-sectional configuration of a pendulum control valve in a mid-open state according to the present invention.
  • Figure 7 is a cross-sectional view showing the cross-sectional configuration of a closed state of a pendulum control valve according to the present invention.
  • Figure 8 is a perspective view showing the configuration of the gate driving part of the pendulum control valve according to the present invention.
  • FIGS. 9 and 10 are exploded perspective views showing the configuration of the gate drive unit of the pendulum control valve according to the present invention from different directions.
  • FIG. 5 is a cross-sectional example diagram showing the configuration of an open state of a pendulum control valve (100) according to the present invention
  • FIG. 6 is a cross-sectional example diagram showing the configuration of an intermediate open state of a pendulum control valve (100)
  • FIG. 7 is a cross-sectional example diagram showing the configuration of a closed state of a pendulum control valve (100).
  • the pendulum control valve (100) according to the present invention is provided in the gas discharge passage (23) between the process chamber (20) and the vacuum pump (30) shown in FIG. 1, and controls the internal pressure by controlling whether or not the gas (G) that performs the process on the substrate (W) in the process chamber (20) is discharged.
  • the pendulum control valve (100) of the present invention comprises a valve body (110) provided in a gas discharge passage (23), a cover (120) coupled to one side of the valve body (110), a gate (150) that rotates horizontally between the valve body (110) and the cover (120) to open and close the gas discharge passage (23), a sealing ring (130) that moves up and down between the gas inlet (111) and the gas discharge port (113) of the valve body (110) and pressurizes the gate (150) downward to prevent gas leakage, a sealing ring lifting unit (140) that drives the sealing ring (130) to move up and down, a gate driving unit (160) that supports the gate (150) that drives the gate (130) to rotate and move up and down, It includes a drive box (170) that is coupled to the lower part of the valve body (110) and accommodates a gate drive unit (160).
  • the pendulum control valve (100) of the present invention compared to the conventional pendulum control valve (10) of FIG. 3, is provided with a rotating shaft (161) that can be raised and lowered by a certain height, so that leakage of gas (G) can be more reliably prevented, wear of the discharge port sealing member (151) due to friction of the gate (150) can be reduced, and use of lubricating oil can be eliminated. As a result, there is an effect of preventing the generation of particles or particles caused by hardening of the lubricating oil.
  • the sealing member (11a, 11b) exposed toward the inside of the process chamber between the rotation shaft (161) and the valve body (110) is provided concealed inside the shaft body (162) and double-covered by the body cap (163) to block leakage of gas (G) and prevent particles or particles generated by hardening of the lubricant applied for the operation of the O-ring (165, 165a) from entering the inside of the process chamber (20).
  • gas (G) gas
  • particles or particles generated by hardening of the lubricant applied for the operation of the O-ring (165, 165a) from entering the inside of the process chamber (20).
  • valve body (110) and the cover (120) are connected to each other so as to form a space inside in which a gate (130) can rotate.
  • a gas inlet (111) is formed through the upper surface of the valve body (110) to communicate with the gas discharge passage (23) and through which gas (G) flows in from the gas discharge passage (23), and a gas discharge port (113) is formed through the lower surface to discharge gas (G) moved to the gas inlet (111) to a vacuum pump (30).
  • the side of the valve body (110) is formed through a hole to communicate with the cover (120).
  • An external sealing member (121) is provided in the joint area of the valve body (110) and the cover (120) to prevent external leakage of gas (G).
  • An axle body joint hole (115) is formed through the joint area with the drive box (170) at the bottom of the valve body (110) to accommodate a shaft body (162) so that the rotation shaft (161) can rotate.
  • the cover (120) is combined with the valve body (110), and a space in which the gate (130) can rotate is formed inside the valve body (110) and the cover (120).
  • the sealing ring (130) moves up and down between the gas inlet (111) and the gas outlet (113) of the valve body (110) and presses the gate (150) downward to support the gate (150) so that it closes the gas outlet (113).
  • the sealing ring elevating unit (140) drives the sealing ring (130) to move up and down.
  • the sealing ring elevating unit (140) includes a hydraulic member (141) and a spring (143).
  • the sealing ring (130) maintains a raised state when the gate (150) is in the open state and the mid-open state. As a result, the gate (150) is maintained at a certain distance (d) from the lower part of the valve body (110).
  • the hydraulic member (141) operates and the sealing ring (130) is lowered to pressurize the gate (150) downward as shown in Fig. 7.
  • the gate (150) is maintained in a closed state that closes the gas discharge port (113).
  • a lower sealing member (131) and an upper sealing member (132) are provided on the lower and upper portions of the sealing ring (130), respectively, to prevent gas from leaking between the sealing ring (130) and the gate (150) and between the sealing ring (130) and the inner wall of the valve body (110).
  • the gate (150) is rotated by the gate driving part (160) and opens and closes the gas discharge port (113) of the valve body (110) to control the movement of gas (G).
  • the gate (150) is formed in a disc shape and is provided with an outer diameter larger than the gas discharge port (113).
  • An discharge port sealing member (151) is provided on the bottom surface of the gate (150) to prevent leakage of gas (G) between the gate and the gas discharge port (113).
  • the gate driving unit (160) causes the gate (150) to rotate and rise and fall elastically to open and close the gas discharge port (113).
  • Fig. 8 is a perspective view showing the gate driving unit (160) in a coupled state
  • Figs. 9 and 10 are exploded perspective views showing the configuration of the gate driving unit (160) from different angles.
  • the gate driving unit (160) includes a rotation shaft (161), a shaft body (162) that is coupled to the shaft body coupling hole (115) of the valve body (110) to support the rotation shaft (161) to rotate, a body cap (163) that is coupled to the upper portion of the shaft body (162) to block the upper portion of the rotation shaft (161), a coupling member (169) that couples the gate (150) and the rotation shaft (161), a bushing (164) that supports the coupling member (169) to be coupled to the gate (150), a pair of O-rings (165, 165a) that support the rotation shaft (161) to prevent gas leakage when it rotates inside the shaft body (162), and a pair of O-rings (165, 165a) that are provided above and below the pair of O-rings to guide the rotation shaft (161) to rotate in the correct position.
  • It includes an elastic member (167) that provides elasticity to the rotation shaft (161) so that the rotation shaft (161) can be rotated at a predetermined height (d) relative to the bottom of the valve body (110) without pressurization of the guide ring (166, 166a) and the sealing ring (130), and a driving motor (168) that transmits driving force to the rotation shaft (161) so that the rotation shaft (161) rotates forward and backward.
  • the gate drive unit (160) is accommodated inside the drive box (170), and an internal horizontal frame (180) is provided horizontally at a certain height inside the drive box (170).
  • the internal horizontal frame (180) has a rotation shaft lifting hole (181) and a drive shaft exposure hole (183) formed through the plate surface, and a rotation shaft (161) is inserted into the rotation shaft lifting hole (181) so as to be able to move up and down, and a drive shaft (168a) of a drive motor (168) is inserted downward into the drive shaft exposure hole (183).
  • the rotation shaft (161) is provided in the form of a shaft having a constant length. As shown in FIG. 9, the rotation shaft (161) is provided with a coupling member fastening groove (161a) in which a coupling member (169) is fastened by being sunken into the upper portion and inserted through the bushing (164) and the body cap (163).
  • An O-ring fastening groove (161c) in which a pair of O-rings (165, 165a) are fastened is provided upper and lower on the upper outer periphery of the upper portion of the rotation shaft (161), and a guide ring fastening surface (161b) in which a guide ring (166, 166a) is fastened is provided on the upper and lower portions of the O-ring fastening groove (161c).
  • An elastic member winding groove (161d) in which an elastic member (167) is wound is provided on the lower portion of the rotation shaft (161).
  • the shaft body (162) is fixed to the shaft body joining hole (115) of the valve body (110) and supports the rotation shaft (161) so that the rotation shaft (161) can be raised and lowered.
  • the upper part of the rotation shaft (161) is wrapped, and a pair of O-rings (165, 165a) coupled to the outer periphery of the rotation shaft (161) are wrapped to cover the O-rings (165, 165a) so that they are not exposed toward the process chamber (20).
  • a cap-joining hole (162a) is formed in the shaft body (162), and a body cap (163) is joined to the cap-joining hole (162a).
  • the body cap (163) is joined to the upper end of the body cap (163) to cover the upper end of the rotation shaft (161).
  • the upper end of the rotation shaft (161) is not directly exposed to the process chamber (20), and the O-rings (165, 165a) are not exposed to the outside. Due to this joint structure of the shaft body (162) and the body cap (163), particles or particles generated from a pair of O-rings (165, 165a) are fundamentally blocked from entering the process chamber (20), thereby preventing contamination of the substrate (W).
  • the bush (164) is placed on the upper part of the gate (150) and guides the coupling member (169) to be coupled to the rotation shaft (161) by penetrating the gate (150).
  • the bush (164) is provided with a coupling member guide hole (164a) that guides the coupling member (169) to the coupling member insertion hole (163a) of the body cap (163).
  • O-rings (165, 165a) are vertically connected to the O-ring coupling grooves (161c) of the rotating shaft (161).
  • the O-rings (165, 165a) are provided between the rotating shaft (161) and the shaft body (162) to support the rotating shaft (161) so that gas does not leak through the gap when the rotating shaft (161) rotates.
  • a pair of guide rings (166, 166a) are arranged above and below the O-rings (165, 165a) as shown in an enlarged view in Fig. 5 to guide the rotation of the rotation shaft (161).
  • a pair of guide rings (166, 166a) are made of engineering plastic and wrap around the outside of the rotation shaft (161) to guide the rotation of the rotation shaft (161).
  • the upper guide ring (166) is provided on the guide ring engagement surface (161b) of the rotation shaft (161) to guide the rotation shaft (161) to rotate smoothly within the shaft body (162), and the lower guide ring (166a) is provided on the boundary area between the lower portion of the shaft body (162) and the rotation shaft (161) to support the rotation shaft (161) so that it rotates without being biased.
  • This pair of guide rings (166, 166a) can support the rotation of the rotation shaft (161) together with the O-ring (165, 165a) to prevent gas leakage and movement of particles and reduce wear of the O-ring (165, 165a).
  • the drive shaft (168a) is connected to the drive motor (168) and rotates in conjunction with the forward and reverse rotation of the drive motor (168).
  • the drive shaft (168a) is formed to have a certain length, and drive gear teeth (168a-1) are formed along the circumferential direction in a vertical direction on the outer surface.
  • the electric plate (168d) is formed in a fan shape, and is provided with an electric gear tooth (168d-1) that meshes with a driving gear tooth (168a-1) at one end.
  • the electric gear tooth (168d-1) meshes with the driving gear tooth (168a-1) and receives rotation.
  • the electric gear tooth (168d-1) of the electric plate (168d) meshes with the driving gear tooth (168a-1) and not only receives rotation but also moves up and down along the driving gear tooth (168a-1) of the driving shaft (168a) together with the rotating shaft (161) when the rotating shaft (161) moves up and down.
  • the elastic member (167) supports the rotating shaft (161) and the gate (150) coupled thereto to rise and fall a predetermined height (d) relative to the lower portion of the valve body (110) depending on whether the sealing ring (130) is pressurized.
  • the elastic member (167) is provided in the form of a coil spring having a predetermined length, and is wound at a predetermined height in the elastic member winding groove (161d) of the rotating shaft (161), as shown in an enlarged view in FIG. 8 and FIG. 5.
  • the rotation shaft (161) is positioned at a position where the gate (150) is spaced apart from the lower end of the valve body (110) by a certain distance (d).
  • the gate (150) rotates while being spaced apart from the valve body (110) by a certain height (d), and the gate (150) is lowered only when the gas discharge port (113) is closed. Accordingly, there is an advantage in that wear of the discharge port sealing member (151) at the bottom of the gate (150) can be significantly reduced.
  • the gate driving unit (160) rotates the driving motor (168) in the forward direction under the control of the control unit (not shown) so that the gate (150) is positioned coaxially with the gas discharge port (113) and rotates the rotation shaft (144) to a position covering the gas discharge port (113).
  • the gate (150) is switched to a mid-open state as shown in Fig. 6.
  • the rotational shaft (161) is raised to a certain height with respect to the internal horizontal frame (180) by the elastic force of the elastic member (167), and the gate (150) fixedly connected to the upper portion of the rotational shaft (161) is spaced apart from the valve body (110) by a height (d) corresponding to the height to which the rotational shaft (161) is raised by the elastic member (167).
  • the electric gear tooth (168d-1) of the electric plate (168d) is positioned at the center height of the driving gear tooth (168a-1).
  • the gate (150) is pressurized by the sealing ring (130) and comes into close contact with the lower portion of the valve body (110) to block the gas discharge port (113) and prevent the discharge of gas (G).
  • the discharge port sealing member (151) at the lower portion of the gate (150) presses and blocks the inner wall surface around the gas discharge port (113), thereby preventing the gas (G) from leaking into the gas discharge port (113).
  • the control unit applies an opening signal to the gate (130).
  • the driving motor (168) rotates in reverse, so that the gate (150) is switched to an open state as shown in Fig. 5, and discharge of residual gas (G) begins.
  • the gate (150) of the pendulum control valve (100) of the present invention moves vertically along the inner wall surface of the valve body (110) forming the gas discharge port (113) as the sealing ring (130) rises and falls, and then rotates internally while being spaced apart from the lower portion of the valve body (110) by the rotation of the rotation shaft (161). Accordingly, the discharge port sealing member (151) formed on the bottom of the gate (150) moves only up and down, so no frictional force is applied to the inner wall surface of the valve body (110), and no lubricant needs to be applied to the discharge port sealing member (151).
  • the pendulum control valve (100) of the present invention since no lubricant is applied to the gate (150) and the discharge port sealing member (151) that rotate inside the valve body (110) and the cover (120), the pendulum control valve (100) of the present invention has the advantage that particles or particles do not occur due to hardening of the lubricant and damage to the substrate does not occur due to particles.
  • the body cap (163) covers the upper part of the rotation shaft (161) by the height at which the gate (150) is spaced from the bottom of the valve body (110), an O-ring (165, 165a) is provided inside the shaft body (162), and a guide ring (166, 166a) is provided above and below the O-ring (165, 165a), so that leakage of gas (G) into the drive box (170) is prevented and wear of the O-ring (165, 165a) can also be reduced.
  • the pendulum control valve according to the present invention opens and closes the gas outlet of the valve body by rotating the gate and moving up and down a certain height.
  • the discharge sealing member at the bottom of the gate is raised vertically, so friction is almost eliminated, which reduces the use of lubricating oil. Accordingly, the problem of particles generated when the lubricating oil comes into contact with gas and hardens, contaminating the substrate, can be solved.
  • Pendulum control valve 110 Valve body
  • External sealing member 130 Sealing ring
  • Joint member 170 Drive box

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Lift Valve (AREA)

Abstract

La présente invention se rapporte à une soupape de commande de type pendule qui est installée dans un passage d'évacuation de gaz entre une chambre de traitement et une pompe à vide et ouvre et ferme le passage d'évacuation de gaz, la soupape de commande de type pendule étant caractérisée en ce qu'elle comprend : un corps de soupape (110) qui est pourvu d'une entrée de gaz (111), formée dans une partie supérieure de celui-ci et communiquant avec le passage d'évacuation de gaz, et d'une sortie de gaz (113), formée dans une partie inférieure de celui-ci et communiquant avec la pompe à vide; un couvercle (120) accouplé à un côté du corps de soupape (110); une porte (150) qui tourne à l'intérieur du corps de soupape (110) et du couvercle (120), et ferme la sortie de gaz (113) ou ouvre la sortie de gaz (113); une bague d'étanchéité (130) qui se déplace vers le haut et vers le bas entre l'entrée de gaz (111) et la sortie de gaz (113) et presse la porte (150) vers le bas pour empêcher une fuite de gaz; une unité d'élévation/abaissement de bague d'étanchéité (140) qui entraîne la bague d'étanchéité (130) de telle sorte que la bague d'étanchéité (130) se déplace vers le haut et vers le bas; une unité d'entraînement de porte (160) qui tourne entre un état ouvert, dans lequel la porte (150) ouvre la sortie de gaz (113), et un état fermé, dans lequel la porte (150) ferme la sortie de gaz (113), et entraîne la porte (150) de telle sorte que la porte (150) est soulevée ou abaissée élastiquement à une certaine hauteur selon que la porte (150) est pressée ou non par la bague d'étanchéité (130); et une boîte d'entraînement (170) qui est accouplée à une partie inférieure d'une région limite entre le corps de soupape (110) et le couvercle (120) et reçoit l'unité d'entraînement de porte (160) à l'intérieur de celle-ci.
PCT/KR2024/007659 2023-06-07 2024-06-04 Soupape de commande de type pendule Ceased WO2024253411A1 (fr)

Priority Applications (1)

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KR10-2023-0073085 2023-06-07
KR1020230073085A KR102637091B1 (ko) 2023-06-07 2023-06-07 진자식 컨트롤밸브

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WO2024253411A1 true WO2024253411A1 (fr) 2024-12-12

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CN (1) CN121311702A (fr)
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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102637091B1 (ko) * 2023-06-07 2024-02-15 (주)배큠올 진자식 컨트롤밸브

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6409149B1 (en) * 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
KR20190002255U (ko) * 2019-06-10 2019-09-05 김주택 진자 밸브
KR102174139B1 (ko) * 2020-03-12 2020-11-04 아이케이씨코리아 주식회사 진자식 게이트 밸브
KR102196440B1 (ko) * 2020-05-12 2020-12-29 안희준 진자 밸브
KR102637091B1 (ko) * 2023-06-07 2024-02-15 (주)배큠올 진자식 컨트롤밸브

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6409149B1 (en) * 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
KR20190002255U (ko) * 2019-06-10 2019-09-05 김주택 진자 밸브
KR102174139B1 (ko) * 2020-03-12 2020-11-04 아이케이씨코리아 주식회사 진자식 게이트 밸브
KR102196440B1 (ko) * 2020-05-12 2020-12-29 안희준 진자 밸브
KR102637091B1 (ko) * 2023-06-07 2024-02-15 (주)배큠올 진자식 컨트롤밸브

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CN121311702A (zh) 2026-01-09
KR102637091B1 (ko) 2024-02-15

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