WO2024255900A1 - 气体冷却装置及热炉 - Google Patents

气体冷却装置及热炉 Download PDF

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Publication number
WO2024255900A1
WO2024255900A1 PCT/CN2024/099451 CN2024099451W WO2024255900A1 WO 2024255900 A1 WO2024255900 A1 WO 2024255900A1 CN 2024099451 W CN2024099451 W CN 2024099451W WO 2024255900 A1 WO2024255900 A1 WO 2024255900A1
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WO
WIPO (PCT)
Prior art keywords
liquid
channel
gas
air flow
flow channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/CN2024/099451
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English (en)
French (fr)
Other versions
WO2024255900A9 (zh
Inventor
庞爱锁
郭永胜
林佳继
张武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laplace Renewable Energy Technology Co Ltd
Original Assignee
Laplace Renewable Energy Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN202321541270.4U external-priority patent/CN220169999U/zh
Priority claimed from CN202310716600.7A external-priority patent/CN116772222A/zh
Application filed by Laplace Renewable Energy Technology Co Ltd filed Critical Laplace Renewable Energy Technology Co Ltd
Publication of WO2024255900A1 publication Critical patent/WO2024255900A1/zh
Anticipated expiration legal-status Critical
Publication of WO2024255900A9 publication Critical patent/WO2024255900A9/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/06—Arrangements of devices for treating smoke or fumes of coolers

Definitions

  • the present application relates to the field of semiconductor processing technology, and in particular to a gas cooling device and a heat furnace.
  • the equipment used in processes such as photovoltaic deposition or diffusion is a hot furnace.
  • the temperature inside the hot furnace can reach thousands of degrees Celsius.
  • the gas exhausted from the hot furnace needs to be cooled before it can be discharged.
  • the existing exhaust cooling structure usually wraps a cold water pipe around the exhaust pipe to achieve exhaust cooling.
  • this cooling method is inefficient, and the cold water pipe is very easy to be burned by the exhaust pipe, requiring regular inspection and replacement, which makes the maintenance operation of the exhaust cooling structure very complicated and inconvenient to use.
  • the first purpose of the present application is to provide a gas cooling device and a hot furnace.
  • the gas cooling device has a simple structure, is easy to use, has a fast cooling rate for high-temperature gas, and uses less cooling liquid.
  • the present application discloses a gas cooling device, including a pipeline structure, which defines an air flow channel and a liquid channel.
  • the air flow channel is used to circulate high-temperature gas.
  • the liquid channel is located outside the air flow channel and has a liquid spray portion connected to the air flow channel.
  • the pipeline structure also has an air jet portion connected to the air flow channel. The liquid sprayed by the liquid spray portion can be vaporized under the action of the high-temperature gas in the air flow channel and the high-pressure gas sprayed by the air jet portion.
  • the gas channel includes a high-temperature zone, which is located at one end of the gas channel close to the inflow direction of the high-temperature gas;
  • the liquid channel includes a cooling channel and a liquid storage cavity, the cooling channel has a liquid inlet, the liquid inlet is connected to an external liquid source, and the cooling channel is located outside the high-temperature zone;
  • the liquid storage cavity has a connecting port and a liquid spraying portion, the connecting port is connected to the cooling channel, and the flow area of the connecting port is smaller than the flow areas of the cooling channel and the liquid storage cavity.
  • the gas cooling device further includes a liquid inlet pipe, one end of which is connected to the pipeline structure and communicates with the liquid inlet, and the other end of which is connected to an external liquid source.
  • the gas cooling device further includes a flow guide pipe, which is located in the cooling channel and is used to allow the liquid in the cooling channel to substantially fill the cooling channel before flowing into the liquid storage cavity.
  • the inlet of the guide tube is connected to the cooling channel, the inlet of the guide tube is located at the air inlet end of the air flow channel, and the outlet of the guide tube is connected to the liquid storage cavity, so that the liquid in the cooling channel flows into the liquid storage cavity along the guide tube.
  • the flow guide tube includes a first tube segment and a second tube segment, the first tube segment is connected to the liquid channel, the second tube segment is connected to the liquid storage chamber, and the position where the first tube segment and the second tube segment are connected is higher than the air inlet end of the air flow channel.
  • the flow guide tube is a bent tube, the inlet of the bent tube is connected to the liquid channel, the outlet of the bent tube is connected to the liquid storage chamber, and the bending part of the bent tube is higher than the air inlet end of the air flow channel.
  • the air jet portion is arranged obliquely, and an extension direction of the liquid jet portion intersects with an extension direction of the air jet portion.
  • the pipeline structure further defines an air storage cavity, which can be connected to an external air source, and the air injection portion is in communication with the air storage cavity.
  • the flow area of the air storage cavity gradually decreases, and the air injection portion is arranged on an inclined side wall of the air storage cavity facing the air flow channel.
  • the gas cooling device further includes an air inlet pipe, one end of which is connected to the air storage chamber, and the other end of which is connected to an external high-pressure air source.
  • the air flow channel includes a high temperature zone, an atomization zone and a vaporization zone arranged in sequence along the air flow direction, part of the liquid channel is located outside the high temperature zone, and the air injection part and the liquid injection part are both connected to the atomization zone.
  • the present application discloses a gas cooling device, including a pipeline structure, which defines an air flow channel and a liquid channel.
  • the air flow channel is used to circulate high-temperature gas
  • the liquid channel is located outside the air flow channel and has a liquid spraying portion connected to the air flow channel, and the liquid spraying portion is used to spray liquid toward the air flow channel.
  • the air flow channel has an air inlet end and an air outlet end, the air inlet end is used to introduce high-temperature gas, and the liquid channel has a liquid inlet;
  • the liquid channel also includes a connecting pipe, the outlet of the connecting pipe is arranged at the air outlet end, the inlet of the connecting pipe is connected with the liquid channel, and the outlet of the connecting pipe is connected with the air flow channel to spray liquid toward the air flow channel; wherein, the liquid spraying part is arranged at the outlet of the connecting pipe, and the outlet of the connecting pipe sprays liquid toward the air flow channel through the liquid spraying part.
  • the air flow channel is arranged obliquely, and the air inlet end is higher than the air outlet end.
  • the connecting tube includes a first tube body and a second tube body, the first tube body is connected to the liquid channel, the second tube body is connected to the air flow channel, and the position where the first tube body and the second tube body are connected is higher than the air inlet end of the air flow channel.
  • the connecting tube further includes a third tube body, two ends of the third tube body are respectively connected to the first tube body and the second tube body, and the third tube body is higher than the air inlet end of the air flow channel.
  • the connecting tube is a bent tube, and the inlet of the bent tube is connected to the liquid channel.
  • the outlet of the bent tube is communicated with the air flow channel, and the bent portion of the bent tube is higher than the air inlet end of the air flow channel.
  • the gas cooling device further includes a fan, which is disposed in the pipeline structure to drive the gas in the air flow channel to flow forcibly.
  • the gas cooling device further comprises an exhaust pipe, one end of which is connected to the air outlet of the air flow channel, and the other end is used to install a fan, and the end of the exhaust pipe where the fan is installed is lower than the end connected to the air outlet.
  • the gas cooling device further includes an exhaust pipe connected to a side of the fan facing away from the exhaust pipe.
  • the application discloses a hot furnace, comprising a furnace body and the above-mentioned gas cooling device, wherein the furnace body has an exhaust pipe; the gas cooling device is used for cooling the gas released from the furnace body through the exhaust pipe.
  • the gas cooling device of the present application has the following beneficial effects: compared with the technical solution of winding a cold water pipe on the exhaust pipe in the prior art, the pipeline structure of the high-temperature gas cooling device of the present application is connected to the air outlet of the exhaust pipe, which is easy to use, not easily damaged by the exhaust pipe, and has a long service life; during operation, after the high-temperature gas enters the air flow channel, since a liquid channel is arranged outside the air flow channel, the liquid channel can cool the high-temperature gas, and the liquid in the liquid channel can also be sprayed from the liquid spraying part to the air flow channel, and the sprayed liquid will be sequentially vaporized under the combined action of the high-pressure gas sprayed by the jet part and the high-temperature gas, and the liquid vaporization can take away a large amount of heat.
  • the gas cooling device can take away a large amount of heat through liquid cooling and liquid vaporization, it can achieve rapid cooling of the high-temperature gas, thereby improving the cooling rate and cooling efficiency; since the jet part can spray high-pressure gas toward the air flow channel to atomize the liquid sprayed toward the air flow channel, the sprayed liquid can be fully utilized to cool the high-temperature gas, thereby reducing the amount of sprayed liquid; since the liquid channel is arranged outside the air flow channel, the structural material of the entire pipeline can adopt conventional materials, without the need to use special high-temperature resistant materials, thereby reducing the manufacturing cost of the gas cooling device.
  • FIG1 is a schematic cross-sectional view of a gas cooling device in one embodiment of the present application.
  • Fig. 2 is a partial enlarged view of position II in Fig. 1;
  • FIG3 is a schematic structural diagram of a gas cooling device in one embodiment of the present application.
  • FIG4 is a partial cross-sectional structural schematic diagram of a gas cooling device in one embodiment of the present application.
  • FIG5 is a schematic diagram of the internal structure of a gas cooling device in one embodiment of the present application.
  • FIG6 is a schematic diagram of the three-dimensional structure of a gas cooling device in one embodiment of the present application.
  • FIG7 is a schematic cross-sectional view of the gas cooling device shown in FIG6 ;
  • FIG8 is a partial cross-sectional structural schematic diagram of the gas cooling device shown in FIG6;
  • FIG. 9 is a structural block diagram of a heat furnace in one embodiment of the present application.
  • the reference numerals in the specification are as follows: 1. hot furnace; 100. gas cooling device; 200. furnace body; 10. Pipeline structure; 11. Air flow channel; 111. High temperature zone; 112. Atomization zone; 1121. Gradient section; 1122. Straight section; 113. Vaporization zone; 114. Air inlet; 115. Air outlet; 12. Liquid channel; 121. Cooling channel; 1211. Liquid inlet; 1212. First section; 1213. Second section; 122. Liquid storage chamber; 1221. Communication port; 13. Liquid spraying section; 14. Air spraying section; 15. Air storage chamber; 20. Liquid inlet pipe; 30. flow guide pipe; 31. first pipe section; 32. second pipe section; 33. inlet; 40. Intake pipe; 50. Connecting pipe; 51. First pipe body; 52. Second pipe body; 53. Third pipe body; 60. Fan; 70. Air extraction pipe; 80. Exhaust pipe.
  • the gas cooling device 100 includes a pipeline structure 10, the pipeline structure 10 defines an air flow channel 11 and a liquid channel 12, the air flow channel 11 is used to circulate high-temperature gas, the liquid channel 12 is located outside the air flow channel 11, and has a liquid spraying portion 13 connected to the air flow channel 11, the pipeline structure 10 also has an air jet portion 14 connected to the air flow channel 11, the liquid sprayed by the liquid spraying portion 13 can be vaporized under the action of the high-temperature gas in the air flow channel 11 and the high-pressure gas sprayed by the air jet portion 14.
  • the pipeline structure 10 is connected to the exhaust pipe of the hot furnace 1.
  • the liquid channel 12 is provided outside the airflow channel 11, and the liquid channel 12 can cool the high-temperature gas.
  • the liquid in the liquid channel 12 can also be sprayed from the liquid spraying part 13 to the airflow channel 11.
  • the sprayed liquid will be quickly atomized when it encounters the high-pressure gas sprayed from the jet part 14, and the atomized liquid will be mixed with the high-temperature gas.
  • the atomized liquid encounters the high-temperature gas, it will quickly vaporize and become steam. When the liquid vaporizes, it absorbs a large amount of heat, thereby ensuring that the temperature of the high-temperature gas can be rapidly reduced, and the high-temperature gas will have a lower temperature when it is discharged from the pipeline structure 10.
  • the sprayed liquid may be atomized under the action of high-pressure gas and then vaporized under the action of high-temperature gas. It may also be directly vaporized under the combined action of high-pressure gas and high-temperature gas. In the actual working process, the phase change process of the liquid may be more complicated.
  • the atomization process is described as follows for the convenience of explanation. and vaporization process are described separately.
  • the pipeline structure 10 of the present application is connected to the air outlet of the exhaust pipe, is easy to use, is not easily damaged by the exhaust pipe, and has a long service life; during operation, a large amount of heat can be taken away by liquid cooling and liquid vaporization, thereby achieving rapid cooling of the high-temperature gas, and improving the cooling rate and cooling efficiency; since the jet part 14 is set up to spray high-pressure gas toward the airflow channel 11, the liquid sprayed toward the airflow channel 11 is atomized, and the sprayed liquid can be fully utilized to cool the high-temperature gas, thereby reducing the amount of sprayed liquid.
  • the existence of the liquid channel 12 can, on the one hand, ensure that the temperature of the outer tube of the pipeline structure 10 is relatively safe, and the temperature of the outer wall cannot be higher than the boiling point of water; on the other hand, it can reduce the temperature of the inner tube of the pipeline structure 10, so that the material of the pipeline structure 10 can be conventional stainless steel pipes, without the need to use special heat-resistant materials, thereby reducing the manufacturing cost of the gas cooling device 100, ensuring the sealing characteristics of the gas cooling device 100, and avoiding leakage.
  • both the liquid channel 12 and the air flow channel 11 can be multi-layered.
  • the pipeline structure 10 is a three-layer structure
  • the middle layer is the air flow channel 11
  • the inner and outer layers are both liquid channels 12, wherein the outermost and innermost liquid channels 12 can both spray liquid into the air flow channel 11, and the jet part 14 is arranged at the position of the outermost liquid channel 12 of the pipeline structure 10, and is isolated from the liquid channel 12, so as to spray external gas into the air flow channel 11.
  • the number of layers of the liquid channel 12 and the air flow channel 11 can also be selected according to actual needs.
  • the jet portion 14 is a jet hole.
  • the pressure of the gas ejected from the jet portion 14 can be relatively large, which is conducive to liquid atomization.
  • the cross-sectional shape of the jet hole can be selected according to actual needs, and the cross-sectional shape of the jet hole is not limited here.
  • the liquid spraying portion 13 is a liquid spraying hole.
  • the flow rate of the liquid sprayed by the liquid spraying portion 13 can be relatively large, which is conducive to liquid atomization.
  • the cross-sectional shape of the liquid spraying hole can be selected according to actual needs, and the cross-sectional shape of the liquid spraying hole is not limited here.
  • the air flow channel 11 includes a high temperature zone 111, an atomization zone 112, and a vaporization zone 113 arranged in sequence along the air flow direction, and a portion of the liquid channel 12 is located outside the high temperature zone 111.
  • the jet section 14 and the liquid spray section 13 are all connected to the atomization area 112.
  • the high-temperature gas when the high-temperature gas flows through the high-temperature zone 111, it can be cooled down by the coolant in the liquid channel 12.
  • the high-temperature gas moves to the atomization zone 112, it can contact the droplets atomized by the high-pressure gas, and can fully contact with the atomized liquid in the vaporization zone 113, so that the atomized droplets are quickly vaporized to cool the high-temperature gas.
  • the liquid channel 12 includes a cooling channel 121 and a liquid storage chamber 122
  • the cooling channel 121 has a liquid inlet 1211
  • the liquid inlet 1211 is connected to an external liquid source (not marked in the figure)
  • the cooling channel 121 is located outside the high temperature zone 111
  • the liquid storage chamber 122 has a connecting port 1221 and a liquid spraying portion 13
  • the connecting port 1221 is connected to the cooling channel 121
  • the flow area of the connecting port 1221 is smaller than the flow areas of the cooling channel 121 and the liquid storage chamber 122.
  • the high-temperature gas flows through the high-temperature zone 111, it can be cooled down by the coolant in the cooling channel 121, so that the high-temperature gas can be cooled down by heat exchange, which is conducive to improving the cooling rate.
  • the coolant enters the liquid storage chamber 122 from the cooling channel 121 and then sprays. Since the flow area of the connecting port 1221 is smaller than the flow area of the cooling channel 121 and the liquid storage chamber 122, the coolant can have a greater pressure after entering the liquid storage chamber 122, so that the liquid sprayed to the airflow channel 11 through the liquid spraying part 13 has a higher pressure, thereby facilitating atomization.
  • the cooling channel 121 is located upstream of the pipeline structure 10.
  • the high-temperature gas can be first cooled by the coolant in the liquid channel 12 in the pipeline structure 10, and then cooled by the atomized liquid, which can better improve the cooling effect on the high-temperature gas.
  • the gas cooling device 100 further includes a flow guide 30, which is located in the cooling channel 121.
  • the flow guide 30 is used to allow the liquid in the cooling channel 121 to substantially fill the cooling channel 121 before flowing into the liquid storage chamber 122. This helps to ensure that the cooling channel 121 is always filled with liquid, so that when the high-temperature gas flows into the pipeline structure 10, it can be first cooled by the coolant in the liquid channel 12.
  • the guide pipe 30 in the cooling channel 121, not only can the guide pipe 30 be protected and the risk of damage to the guide pipe 30 due to impact be reduced, but also the gas cooling device 100 can be made
  • the structure is more compact, which reduces the overall space occupied by the gas cooling device 100 and is easy to use.
  • the guide tube 30 may also be disposed on the outer wall of the pipeline structure 10 , and the present application does not limit this, and skilled technicians may select according to actual conditions.
  • the inlet 33 of the guide tube 30 is connected to the cooling channel 121, and the inlet 33 of the guide tube 30 is located at one end of the high temperature zone 111 away from the atomization zone 112, and the outlet of the guide tube 30 is connected to the liquid storage chamber 122, so that the liquid in the cooling channel 121 flows into the liquid storage chamber 122 along the guide tube 30.
  • the flow guide tube 30 includes a first tube section 31 and a second tube section 32, the first tube section 31 is connected to the liquid channel 12, the second tube section 32 is connected to the liquid storage chamber 122, and the position where the first tube section 31 and the second tube section 32 are connected is higher than the air inlet end 114 of the air flow channel 11.
  • the flow guide tube 30 includes the first tube section 31 and the second tube section 32, which facilitates the connection of the flow guide tube 30 with the liquid channel 12 and the liquid storage chamber 122, and the position where the first tube section 31 and the second tube section 32 are connected is higher than the air inlet end 114 of the air flow channel 11, which can increase the pressure of the liquid flowing from the second tube section 32 into the liquid storage chamber 122 to a certain extent, increase the total amount of liquid, thereby increasing the contact between the high-temperature gas and the liquid, and accelerating the cooling efficiency.
  • the highest point of the guide tube 30 (the position where the first tube section 31 and the second tube section 32 are connected) is higher than the air inlet end 114 of the air flow channel 11.
  • the liquid passes through the pipeline structure 10, since the highest point of the guide tube 30 is higher than the highest point of the multi-layer tube structure, the liquid is ensured to fill the multi-layer tube structure and can be stably sprayed into the air flow channel 11, thereby ensuring the cooling effect.
  • a portion of the cooling channel 121 can serve as a portion of the flow guide tube 30.
  • a portion of the cooling channel 121 serves as the first pipe section 31 of the flow guide tube 30.
  • the guide tube 30 is a bent tube, the inlet 33 of the bent tube is connected to the liquid channel 12, the outlet of the bent tube is connected to the liquid storage chamber 122, and the bend of the bent tube is higher than the air inlet end 114 of the air flow channel 11. It can be understood that the highest point (bend) of the guide tube 30 is higher than the air inlet end 114 of the air flow channel 11.
  • the guide tube 30 is manufactured by bending a straight tube. The manufacture of the flow guide tube 30 is facilitated.
  • the cooling channel 121 has a bending portion (not marked in the figure), and the cooling channel 121 includes a first section 1212 and a second section 1213 arranged at an angle, the first section 1212 is located upstream of the second section 1213, the first section 1212 intersects with the extension direction of the airflow channel 11, and the second section 1213 is arranged parallel to the extension direction of the airflow channel 11.
  • the high-temperature gas can enter the second section 1213 under the guidance of the first section 1212, which is beneficial for the high-temperature gas in the airflow channel 11 to contact with the coolant in the cooling channel 121, thereby facilitating the cooling of the high-temperature gas.
  • the liquid inlet 1211 of the cooling channel 121 is located downstream of the second section 1213. It can be understood that the location of the liquid inlet 1211 can ensure that when the liquid spraying part 13 sprays liquid toward the air flow channel 11, the liquid has a greater pressure, thereby facilitating liquid atomization and facilitating high-temperature gas cooling.
  • the inlet 33 of the flow guide tube 30 is disposed on the first section 1212. It is understandable that the inlet 33 of the flow guide tube 30 is a liquid replenishing port.
  • the inlet 33 of the flow guide tube 30 By disposing the inlet 33 of the flow guide tube 30 on the first section 1212, on the one hand, it can ensure that the coolant almost fills the cooling channel 121 before flowing into the liquid storage chamber 122. As a result, the high-temperature gas can be cooled by the coolant in the liquid channel 12 in the cooling channel 121, and the cooling effect of the high-temperature gas can be improved by cooling with the atomized coolant. On the other hand, it can ensure that there is enough coolant in the cooling channel 121, which is conducive to cooling the high-temperature gas.
  • the liquid spraying part 13 is arranged close to the side wall of the liquid storage chamber 122 arranged toward the air flow channel 11.
  • the liquid sprayed by the liquid spraying part 13 can be as close as possible to the high-temperature gas in the air flow channel 11, which is conducive to cooling the high-temperature gas.
  • the pipeline structure 10 has a first pipe body (not labeled in the figure) and a second pipe body (not labeled in the figure), the first pipe body forms the liquid channel 12 and the high temperature zone 111 and the atomization zone 112 of the air flow channel 11.
  • the second pipe body forms the vaporization zone 113 of the air flow channel 11.
  • the first pipe body and the second pipe body are connected by a flange.
  • the liquid channel 12 is outside, and the high temperature area 111 and the atomization area 112 of the air flow channel 11 are inside, that is, the pipeline structure 10 needs to be a multi-layer structure at the position of the first tube body, and can be set as a single-layer tube at the position of the second tube body. Splitting the pipeline structure 10 into the first tube body and the second tube body can facilitate the manufacture of the pipeline structure 10 and facilitate the assembly of the pipeline structure 10.
  • the atomization zone 112 includes a tapered section 1121 and a straight section 1122 , thereby being more conducive to atomization of the sprayed liquid under the action of the sprayed gas.
  • the flow area of the small end of the tapered section 1121 of the atomization zone 112 is larger than the flow area of the high temperature zone 111. Therefore, the high temperature gas flows from the high temperature zone 111 to the atomization zone 112 in a jet-like flow, and this flow contacts the atomized liquid more fully, which is beneficial to the cooling of the high temperature gas.
  • the gas flow area gradually increases from the high temperature zone 111 to the atomization zone 112 and then to the vaporization zone 113.
  • a larger space is provided for the high temperature gas to dissipate heat.
  • the high temperature gas is in a jet shape, which is conducive to more complete contact with the atomized liquid, thereby being more conducive to the cooling of the high temperature gas.
  • the atomization area 112 is entirely a straight section 1122 to ensure that the high-temperature gas flows at a uniform speed, reduce turbulence of the high-temperature gas in the atomization area 112, and reduce the risk of cooling effect.
  • the gas cooling device 100 further includes a liquid inlet pipe 20, which is connected to the pipeline structure 10 and communicates with the liquid inlet 1211.
  • a liquid inlet pipe 20 which is connected to the pipeline structure 10 and communicates with the liquid inlet 1211.
  • the liquid of the external cold source can enter the liquid channel 12 from the liquid inlet 1211 through the liquid inlet pipe 20, and the liquid inlet 1211 is located downstream of the second section 1213, so that in the entire working process, there is always sufficient liquid in the liquid channel 12, which is conducive to continuously spraying liquid toward the gas flow channel 11.
  • the liquid inlet pipe 20 and the liquid inlet port 1211 connected to the liquid inlet pipe 20 can be located at the upstream position of the pipeline structure 10, and the liquid spraying part 13 is located at the downstream position of the pipeline structure 10. It can be understood that since the liquid inlet pipe 20 is located at the upstream position of the pipeline structure 10, there is always sufficient liquid in the liquid channel 12 during the entire working process, and the high-temperature gas can be first cooled by the coolant in the liquid channel 12 in the pipeline structure 10, and then cooled by the atomized liquid, which can better Improves the cooling effect on high-temperature gases.
  • the pipeline structure 10 includes a bending structure (not shown), which is located at the connection between the first section 1212 and the second section 1213, and the air inlet direction and the air outlet direction of the pipeline structure 10 are arranged at an angle.
  • the pipeline structure 10 of this embodiment has a bending structure, which can reduce the total length of the pipeline structure 10 in a certain direction while ensuring a longer air flow path, thereby facilitating the use of the pipeline structure 10.
  • the embodiment of the present application does not limit the specific shape of the bending structure of the pipeline structure 10.
  • the bending part of the pipeline structure 10 can adopt the method described in FIG. 1 to form a sharp angle at the connection between the first section 1212 and the second section 1213.
  • the bending part of the pipeline structure 10 can adopt a smooth transition method to form a certain arc at the connection between the first section 1212 and the second section 1213.
  • the liquid spraying portion 13 is extended along the air flow direction in the air flow channel 11, the air jet portion 14 is inclined, and the extension direction of the liquid spraying portion 13 intersects with the extension direction of the air jet portion 14.
  • the air jet portion 14 is inclined so that the air flow injected into the air flow channel 11 generates angular inertia and can form a vortex cyclone, which can increase the contact area between the high-pressure gas and the liquid, and can improve the atomization efficiency of the liquid, thereby facilitating the improvement of the cooling efficiency of the high-temperature gas.
  • the flow area of the gas storage chamber 15 gradually decreases, and the jet portion 14 is arranged on the inclined side wall of the gas storage chamber 15 facing the gas flow channel 11.
  • the inner wall of the gas storage chamber 15 is formed as an inclined side wall (for example, the cross section of the gas storage chamber 15 is a triangle, and the inclined side wall is the hypotenuse of the triangle), which can increase the angular kinetic inertia generated by the gas flow injected into the gas flow channel 11 to a certain extent, making the vortex cyclone more intense, and can further increase the contact area between the high-pressure gas and the liquid, and further improve the atomization efficiency of the liquid, thereby facilitating the improvement of the cooling efficiency of the high-temperature gas.
  • the air storage chamber 15 may also adopt other shapes.
  • the cross section of the air storage chamber 15 is rectangular. It is only necessary to ensure that the jet part 14 is arranged toward the air flow channel 11 and the extension of the jet part 14 is The direction only needs to intersect with the extension direction of the liquid spraying portion 13, and this application does not limit this.
  • the gas cooling device 100 further includes an air inlet pipe 40 , one end of which is connected to the air storage chamber 15 , and the other end of which is connected to an external high-pressure air source, so that air can be easily supplied to the pipeline structure 10 .
  • the multiple liquid spraying parts 13 are distributed at intervals along the circumference of the gas flow channel 11. It can be understood that the multiple liquid spraying parts 13 are distributed at intervals along the circumference of the gas flow channel 11, so that the liquid can be evenly sprayed into the gas flow channel 11, which is beneficial to increase the contact area between the high-temperature gas and the liquid, thereby facilitating the improvement of the cooling rate.
  • the liquid can be sprayed into the gas flow channel 11 evenly, which is beneficial to increase the contact area between the high-temperature gas and the liquid, thereby facilitating the improvement of the cooling rate.
  • liquid spraying part 13 can be arranged in multiple circles along the air flow channel 11, and each circle is provided with multiple liquid spraying parts 13 distributed at intervals along the circumference of the air flow channel 11.
  • the distribution of the liquid spraying parts 13 can be selected according to actual needs.
  • the size of the liquid spraying portion 13 is less than mm.
  • the liquid sprayed from the liquid spraying portion 13 has a higher pressure, which is conducive to the atomization of the liquid under the action of the high-pressure gas.
  • the shape and size of the liquid spraying portion 13 can be selected according to actual needs and are not limited to the above limitations.
  • the liquid spraying portion 13 is formed as a narrow and long hole, which can further increase the pressure of the liquid sprayed by the liquid spraying portion 13, and is conducive to atomization of the liquid under the action of the high-pressure gas.
  • the multiple jet parts 14 are spaced apart along the circumference of the airflow channel 11. It can be understood that the multiple jet parts 14 are spaced apart along the circumference of the airflow channel 11, so that the high-pressure gas can be evenly sprayed into the airflow channel 11, which is beneficial to increase the contact area between the high-pressure gas and the liquid, and facilitate the atomization of the liquid sprayed into the airflow channel 11, thereby facilitating the cooling rate.
  • the axial spacing distribution of 11 enables the high-pressure gas to be uniformly sprayed into the air flow channel 11, which is beneficial to increasing the contact area between the high-pressure gas and the liquid, facilitating the atomization of the liquid sprayed into the air flow channel 11, and thus facilitating the cooling rate.
  • the air jets 14 may be arranged in multiple circles along the air flow channel 11, and each circle is provided with multiple air jets 14 distributed at intervals along the circumference of the air flow channel 11.
  • the distribution of the air jets 14 may be selected according to actual needs.
  • the aperture of the jet part 14 is less than mm.
  • the liquid ejected from the jet part 14 has a relatively high pressure, which is conducive to atomization of the liquid under the action of the high-pressure gas.
  • the shape and size of the jet part 14 can be selected according to actual needs and are not limited to the above limitations.
  • the distribution forms of the air jet portion 14 and the liquid jet portion 13 can be arbitrarily combined according to actual needs.
  • the air jet portion 14 is multiple circles and the liquid jet portion 13 is also multiple circles; for another example, in some embodiments, the air jet portion 14 and the liquid jet portion 13 are both one circle.
  • a gas cooling device 100 is also provided in an embodiment of the present application. As shown in Figures 5 to 8, the gas cooling device 100 includes a pipeline structure 10, which defines an air flow channel 11 and a liquid channel 12. The air flow channel 11 is used to circulate high-temperature gas. The liquid channel 12 is located outside the air flow channel 11 and has a liquid spraying portion 13 connected to the air flow channel 11. The liquid spraying portion 13 is used to spray liquid toward the air flow channel 11.
  • the air flow channel 11 has an air inlet end 114 and an air outlet end 115, the air inlet end 114 is used to introduce high temperature gas, and the liquid channel 12 has a liquid inlet 1211.
  • the liquid channel 12 also includes a connecting pipe 50, the outlet of the connecting pipe 50 is arranged at the air outlet end 115, the inlet 33 of the connecting pipe 50 is connected to the liquid channel 12, and the outlet of the connecting pipe 50 is connected to the air flow channel 11 to spray liquid toward the air flow channel 11.
  • the liquid spraying part 13 is arranged at the outlet of the connecting pipe 50, and the outlet of the connecting pipe 50 sprays liquid toward the air flow channel 11 through the liquid spraying part 13.
  • this embodiment utilizes the principle that a large amount of heat needs to be absorbed when the liquid changes from liquid phase to gas phase, so that the high-temperature gas can be cooled quickly, thereby improving the cooling effect and cooling efficiency.
  • the existence of the liquid channel 12 can, on the one hand, ensure that the temperature of the outer tube of the pipeline structure 10 is relatively safe, and the temperature of the outer wall cannot be higher than the boiling point of water. On the other hand, it can reduce the temperature of the inner tube of the pipeline structure 10, so that the material of the pipeline structure 10 can be conventional stainless steel pipes, without the need to use special heat-resistant materials, thereby reducing the manufacturing cost of the pipeline structure 10, ensuring the sealing characteristics of the pipeline structure 10, and avoiding leakage.
  • connecting pipes 50 there can be only one or more connecting pipes 50.
  • the connecting pipes 50 can be distributed at intervals along the axial direction of the pipeline structure 10, or distributed at intervals along the circumferential direction of the pipeline structure 10.
  • the connecting pipes 50 can also be arranged in multiple circles along the axial direction of the pipeline structure 10, and each circle includes connecting pipes 50 distributed at intervals along the circumferential direction of the pipeline structure 10. Therefore, in actual use, the arrangement of the connecting pipes 50 can be selected according to actual needs, and it is only necessary to ensure a good cooling effect.
  • the air flow channel 11 is tilted, and the air inlet end 114 is higher than the air outlet end 115. It is understandable that the tilted air flow channel 11 can make the liquid channel 12 located outside the air flow channel 11 also tilted, and the air inlet end 114 is higher than the air outlet end 115 to avoid the liquid in the liquid channel 12 from flowing back.
  • the connecting tube 50 includes a first tube body 51 and a second tube body 52, the first tube body 51 is connected to the liquid channel 12, and the second tube body 52 is connected to the air flow channel 11, and the position where the first tube body 51 and the second tube body 52 are connected is higher than the air inlet end 114 of the air flow channel 11.
  • the connecting tube 50 includes a first tube body 51 and a second tube body 52, which facilitates connecting the connecting tube 50 with the liquid storage chamber 122 and the gas channel.
  • the position where the first tube body 51 and the second tube body 52 are connected is higher than the air inlet end 114 of the air flow channel 11, which can increase the liquid pressure sprayed from the second tube body 52 to a certain extent, increase the total amount of liquid, thereby increasing the contact between the high-temperature gas and the liquid, and accelerating the cooling efficiency.
  • the connecting tube 50 further includes a third tube body 53, and the two ends of the third tube body 53 are respectively The third tube body 53 is connected to the first tube body 51 and the second tube body 52, and is higher than the air inlet end 114 of the air flow channel 11. It can be understood that the highest point of the connecting tube 50 (the position of the third tube body 53) is higher than the highest point of the pipeline structure 10 (the air inlet end 114). When the liquid passes through the pipeline structure 10, since the highest point of the U-shaped tube is higher than the highest point of the pipeline structure 10, it is ensured that the liquid fills the pipeline structure 10 and can be stably sprayed into the air flow channel 11, thereby ensuring the cooling effect.
  • the third tube body 53 is arranged horizontally, and the first tube body 51 and the second tube body 52 are both perpendicular to the third tube body 53.
  • the angles between the first tube body 51, the third tube body 53 and the second tube body 52 can be selected according to actual needs and are not limited to the limitations of this embodiment.
  • the connecting tube 50 is a bent tube, the inlet 33 of the bent tube is connected to the liquid channel 12, the outlet of the bent tube is connected to the air flow channel 11, and the bend of the bent tube is higher than the air inlet end 114 of the air flow channel 11. It is understandable that the highest point (bend) of the connecting tube 50 is higher than the highest point (air inlet end 114) of the pipeline structure 10.
  • the connecting tube 50 is manufactured by bending a straight tube, which facilitates the manufacture of the connecting tube 50.
  • the connecting pipe 50 is a straight pipe, the inlet 33 of the straight pipe is connected to the liquid channel 12, and the outlet of the straight pipe is connected to the air flow channel 11. That is, in the embodiments of the present application, the connecting pipe 50 is not limited to the U-shaped pipe structure described above.
  • the gas channel 11 includes a high temperature zone (not marked in the figure), and the high temperature zone is located at one end of the gas channel 11 close to the inflow direction of the high temperature gas.
  • the liquid channel 12 may also include a cooling channel (not marked in the figure) and a liquid storage chamber (not marked in the figure), and the liquid inlet 1211 is arranged in the cooling channel, and the liquid inlet 1211 is connected to an external liquid source, and the cooling channel is located outside the high temperature zone.
  • the liquid storage chamber has a connecting port and a liquid spraying portion 13, and the connecting port is connected to the cooling channel, and the flow area of the connecting port is smaller than the flow area of the cooling channel and the liquid storage chamber.
  • the connecting port of the liquid storage chamber is connected to the connecting pipe 50 to obtain liquid from the cooling channel through the connecting pipe 50. Coolant.
  • the high-temperature gas when the high-temperature gas flows through the high-temperature zone, it can be cooled down by the coolant in the cooling channel, so that the high-temperature gas can be cooled down by heat exchange, which is conducive to improving the cooling rate.
  • the coolant enters the liquid storage cavity from the cooling channel and then is sprayed. Since the flow area of the connecting port is smaller than the flow area of the cooling channel and the liquid storage cavity, the coolant can have a greater pressure after entering the liquid storage cavity, so that the liquid sprayed to the airflow channel 11 through the spray part 13 has a higher pressure.
  • the multiple liquid spraying parts 13 are distributed at intervals along the circumference of the gas flow channel 11. It can be understood that the multiple liquid spraying parts 13 are distributed at intervals along the circumference of the gas flow channel 11, so that the liquid can be evenly sprayed into the gas flow channel 11, which is beneficial to increase the contact area between the high-temperature gas and the liquid, thereby facilitating the improvement of the cooling rate.
  • the gas cooling device 100 further includes a fan 60, which is connected to the gas outlet 115 of the air flow channel 11, and the fan 60 is used to drive the gas in the air flow channel 11 to flow forcibly. It can be understood that the fan 60 can drive the gas flow in the air flow channel 11, thereby increasing the air flow velocity in the air flow channel 11, which is conducive to improving the cooling efficiency.
  • the gas cooling device 100 further includes an exhaust pipe 70, one end of which is connected to the outlet end 115 of the air flow channel 11, and the other end is used to install the fan 60, and the end of the exhaust pipe 70 where the fan 60 is installed is lower than the end connected to the outlet end 115 of the air flow channel 11.
  • the fan 60 is connected to the outlet end 115 of the air flow channel 11 through the exhaust pipe 70, which can ensure that the air flow is at a relatively low temperature when it reaches the position of the fan 60, thereby avoiding the corrosion of the fan 60 caused by the relatively high air flow temperature, which is conducive to extending the service life of the fan 60.
  • the gas cooling device 100 further includes an exhaust pipe, which is connected to the side of the fan 60 away from the exhaust pipe 70. It can be understood that the additional exhaust pipe can exhaust gas toward a designated position, and when harmful gas exists in the high-temperature gas, the harmful gas can be discharged into a designated space, thereby improving work safety.
  • the heat furnace 1 includes a furnace body 200 and an upper The gas cooling device 100 described above, the furnace body 200 has an exhaust pipe 80, and the gas cooling device 100 is used to cool the gas released by the furnace body 200 through the exhaust pipe 80.
  • the pipeline structure 10 is connected to the exhaust pipe 80 of the hot furnace 1. After the high-temperature gas enters the air flow channel 11, since the liquid channel 12 is provided outside the air flow channel 11, the liquid channel 12 can cool the high-temperature gas. The liquid in the liquid channel 12 can also be sprayed from the liquid spraying part 13 to the air flow channel 11.
  • the sprayed liquid will be quickly atomized when encountering the high-pressure gas sprayed by the jet part 14, and the atomized liquid will be mixed with the high-temperature gas. After the atomized liquid encounters the high-temperature gas, it will quickly vaporize and become steam. When the liquid vaporizes, it absorbs a large amount of heat, thereby ensuring that the temperature of the high-temperature gas can be rapidly reduced, and the high-temperature gas will have a lower temperature when it is discharged from the pipeline structure 10.
  • the pipeline structure 10 of the present application is connected to the air outlet of the exhaust pipe (for example, the exhaust pipe 80), is easy to use, not easily damaged by the exhaust pipe, and has a long service life; during operation, a large amount of heat can be taken away by liquid cooling and liquid vaporization, thereby achieving rapid cooling of the high-temperature gas, and improving the cooling rate and cooling efficiency; since the jet part 14 is set up to spray high-pressure gas toward the airflow channel 11, the liquid sprayed toward the airflow channel 11 is atomized, and the sprayed liquid can be fully utilized to cool the high-temperature gas, thereby reducing the amount of sprayed liquid.
  • the existence of the liquid channel 12 can, on the one hand, ensure that the temperature of the outer tube of the pipeline structure 10 is relatively safe, and the temperature of the outer wall cannot be higher than the boiling point of water; on the other hand, it can reduce the temperature of the inner tube of the pipeline structure 10, so that the material of the pipeline structure 10 can be conventional stainless steel pipes, without the need to use special heat-resistant materials, thereby reducing the manufacturing cost of the gas cooling device 100, ensuring the sealing characteristics of the gas cooling device 100, and avoiding leakage.

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Abstract

本申请公开了一种气体冷却装置及热炉，该气体冷却装置包括管路结构，管路结构限定出气流通道和液体通道，气流通道用于流通高温气体，液体通道位于气流通道的外部，且具有与气流通道连通的喷液部，管路结构还具有与气流通道连通的喷气部，喷液部喷出的液体能够在气流通道内的高温气体和喷气部喷出的高压气体的作用下雾化。该气体冷却装置的结构简单，方便使用，对高温气体的冷却速率较快，且冷却液体的利用量较少。

Description

气体冷却装置及热炉
本申请要求于2023年06月16日提交中国专利局，申请号为202321541270.4，发明名称为“气体冷却装置”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
本申请要求于2023年06月16日提交中国专利局，申请号为202310716600.7，发明名称为“一种散热装置”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及半导体加工技术领域，尤其涉及一种气体冷却装置及热炉。
背景技术
光伏沉积或者扩散等工艺使用的设备为热炉，热炉在工作过程中，炉内温度最高可达到上千摄氏度，从热炉排出的气体需要经过降温冷却才能够排出，现有的排气降温结构通常就是在排气管道上缠绕冷水管，以实现排气降温，但是这种降温方式效率较差，且冷水管非常容易被排气管道烫坏，需要定期检修和更换，使得排气降温结构的维护操作非常复杂，不方便使用。
因此，亟需一种能够实现快速降温且使用方便的气体冷却装置。
发明内容
本申请的第一目的在于提出一种气体冷却装置及热炉，该气体冷却装置的结构简单，方便使用，对高温气体的冷却速率较快，且冷却液体的利用量较少。
为实现上述技术效果，本申请的技术方案如下：
本申请公开了一种气体冷却装置，包括管路结构，管路结构限定出气流通道和液体通道，气流通道用于流通高温气体，液体通道位于气流通道的外部，且具有与气流通道连通的喷液部，管路结构还具有与气流通道连通的喷气部，喷液部喷出的液体能够在气流通道内的高温气体和喷气部喷出的高压气体的作用下汽化。
在一些具体的实施例中，气体通道包括高温区，高温区位于气体通道靠近高温气体流入方向的一端；液体通道包括冷却通道和储液腔，冷却通道具有进液口，进液口与外部液源相连，且冷却通道位于高温区的外部；储液腔具有连通口和喷液部，连通口与冷却通道连通，连通口的流通面积小于冷却通道及储液腔的流通面积。
在一些具体的实施例中，气体冷却装置还包括进液管，进液管的一端连接于管路结构且与进液口连通，进液管的另一端连接于外部液源。
在一些具体的实施例中，气体冷却装置还包括导流管，导流管位于冷却通道内，导流管用于使冷却通道内的液体大致充满冷却通道后再流入储液腔。
在一些具体的实施例中，导流管的入口与冷却通道连通，导流管的入口位于气流通道的进气端，导流管的出口与储液腔连通，以使冷却通道内的液体沿导流管流入储液腔。
在一些具体的实施例中，导流管包括第一管段和第二管段，第一管段与液体通道连通，第二管段与储液腔连通，第一管段和第二管段相连的位置高于气流通道的进气端。
在一些具体的实施例中，导流管为折弯管，折弯管入口与液体通道连通折弯管的出口与储液腔连通，且折弯管的折弯处高于气流通道的进气端。
在一些具体的实施例中，喷液部为多个，且多个喷液部沿气流通道的周向间隔分布。
在一些具体的实施例中，喷气部倾斜设置，且喷液部的延伸方向与喷气部的延伸方向相交。
在一些具体的实施例中，管路结构还限定出储气腔，储气腔能够与外部气源相连，喷气部与储气腔连通。
在一些具体的实施例中，沿气流通道内的气体流通方向，储气腔的流通面积逐渐减小，喷气部设置在储气腔朝向气流通道的倾斜侧壁上。
在一些具体的实施例中，气体冷却装置还包括进气管，进气管的一端与储气腔相连，另一端与外部高压气源相连。
在一些具体的实施例中，喷气部为多个，且多个喷气部沿气流通道的周向间隔分布。
在一些具体的实施例中，气流通道包括沿气流方向依次排布的高温区、雾化区以及汽化区，液体通道的部分位于高温区的外部，喷气部及喷液部均与雾化区连通。
本申请公开了一种气体冷却装置，包括管路结构，管路结构限定出气流通道和液体通道，气流通道用于流通高温气体，液体通道位于气流通道的外部，且具有与气流通道连通的喷液部，喷液部用于朝向气流通道喷液。
在一些具体的实施例中，气流通道具有进气端和出气端，进气端用于引入高温气体，液体通道具有进液口；液体通道还包括连接管，连接管的出口设置在出气端，连接管的入口与液体通道连通，连接管的出口与气流通道连通以朝向气流通道喷液；其中，喷液部设置在连接管的出口，连接管的出口通过喷液部朝向气流通道喷液。
在一些具体的实施例中，气流通道倾斜设置，且进气端高于出气端。
在一些具体的实施例中，连接管包括第一管体和第二管体，第一管体与液体通道连通，第二管体与气流通道连通，第一管体和第二管体相连的位置高于气流通道的进气端。
在一些具体的实施例中，连接管还包括第三管体，第三管体的两端分别与第一管体和第二管体相连，第三管体高于气流通道的进气端。
在一些具体的实施例中，连接管为折弯管，折弯管的入口与液体通道连通， 折弯管的出口与气流通道连通，且折弯管的折弯处高于气流通道的进气端。
在一些具体的实施例中，气体冷却装置还包括风机，风机设在管路结构内以驱动气流通道内的气体强制流动。
在一些具体的实施例中，气体冷却装置还包括抽气管，抽气管的一端与气流通道的出气端相连，另一端用于安装风机，抽气管安装风机的一端低于与出气端相连的一端。
在一些具体的实施例中，气体冷却装置还包括排气管，排气管连接于风机背离抽气管的一侧。
本申请公开了一种热炉，包括炉体和上述的气体冷却装置，炉体具有排气管；气体冷却装置用于冷却炉体通过排气管释放的气体。
本申请的气体冷却装置的有益效果：相比于现有技术中在排气管道上缠绕冷水管的技术方案，本申请的高温气体降温装置的管路结构连接于排气管道的出气口，使用方便，且不容易被排气管道烫坏，使用寿命较长；在工作过程中，高温气体进入气流通道后，由于气流通道的外部设置有液体通道，液体通道能够对高温气体进行冷却，液体通道内的液体还可以从喷液部喷向气流通道，喷出的液体遇到喷气部喷出的高压气体以及高温气体的共同作用下会顺序汽化，而液体汽化能够带走大量的热量，由于该气体冷却装置通过液冷以及液体汽化能够带走大量的热量，实现对高温气体的快速降温，提升了冷却速率和冷却效率；由于设置的喷气部能够朝向气流通道喷射高压气体使得喷向气流通道的液体雾化，能够充分利用喷射的液体进行高温气体降温，降低了喷射液体的用量；由于气流通道外部设置液体通道，这样整个管路的结构材料就可以采用常规的材料，无需使用特别的耐高温材料，降低了气体冷却装置的制造成本。
本申请的附加方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本申请的实践了解到。
附图说明
图1是本申请一实施例中气体冷却装置的剖面结构示意图；
图2是图1中Ⅱ处的局部放大图；
图3是本申请一实施例中气体冷却装置的结构示意图；
图4是本申请一实施例中气体冷却装置的部分剖面结构示意图；
图5是本申请一实施例中气体冷却装置的内部结构示意图；
图6是本申请一实施例中气体冷却装置的立体结构示意图；
图7是图6所示的气体冷却装置的剖面结构示意图；
图8是图6所示的气体冷却装置的部分剖面结构示意图；
图9是本申请一实施例中热炉的结构框图。
说明书中的附图标记如下：
1、热炉；100、气体冷却装置；200、炉体；
10、管路结构；11、气流通道；111、高温区；112、雾化区；1121、渐缩
段；1122、平直段；113、汽化区；114、进气端；115、出气端；12、液体通道；121、冷却通道；1211、进液口；1212、第一段；1213、第二段；122、储液腔；1221、连通口；13、喷液部；14、喷气部；15、储气腔；
20、进液管；
30、导流管；31、第一管段；32、第二管段；33、入口；
40、进气管；
50、连接管；51、第一管体；52、第二管体；53、第三管体；
60、风机；
70、抽气管；
80、排气管。
具体实施方式
为了使本发明所解决的技术问题、技术方案及有益效果更加清楚明白，以 下接合附图及实施例，对本发明进行进一步的详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
本申请公开了一种气体冷却装置100，如图1、图2以及图9所示，该气体冷却装置100包括管路结构10，管路结构10限定出气流通道11和液体通道12，气流通道11用于流通高温气体，液体通道12位于气流通道11的外部，且具有与气流通道11连通的喷液部13，管路结构10还具有与气流通道11连通的喷气部14，喷液部13喷出的液体能够在气流通道11内的高温气体以及喷气部14喷出的高压气体的作用下汽化。
首先需要说明的是，以液体通道12内的液体为水作为例子，水的比热容为.J(g·℃)，在℃的汽化潜热为.kJ/kg，所以汽化相变时，吸收热能远大于常规水冷方案。
可以理解，本申请实施例所描述的“高温气体”和“高压气体”中的“高温”、“高压”为本领域技术人员通常理解的含义，且并不对气体的温度和压力作具体的数值限制。
可以理解的是，在实际使用过程中，将管路结构10与热炉1的排气管道相连，高温气体进入气流通道11后，由于气流通道11的外部设置有液体通道12，液体通道12能够对高温气体进行冷却。液体通道12内的液体还可以从喷液部13喷向气流通道11，喷出的液体遇到喷气部14喷出的高压气体会迅速雾化，而雾化后的液体会与高温气体混合，雾化后的液体遇高温气体后，迅速汽化，变为蒸气，液体汽化时，则吸收大量热量，从而保证高温气体温度得以迅速下降，高温气体排出管路结构10时就会具有较低的温度。
这里需要补充说明的是，雾化过程以及汽化汽化过程可能并不是严格的先后顺序，喷出的液体可能在高压气体的作用下雾化，然后在高温气体的作用下汽化，也可能直接在高压气体和高温气体的共同作用下直接汽化，在实际工作过程中，液体的相变过程可能是较为复杂的，这里为了方便说明才将雾化过程 和汽化过程分离描述。
相比于现有技术中在排气管道上缠绕冷水管的技术方案，本申请的管路结构10连接于排气管道的出气口，使用方便，且不容易被排气管道烫坏，使用寿命较长；在工作过程中，通过液冷以及液体汽化能够带走大量的热量，实现对高温气体的快速降温，提升了冷却速率和冷却效率；由于设置的喷气部14能够朝向气流通道11喷射高压气体使得喷向气流通道11的液体雾化，能够充分利用喷射的液体进行高温气体降温，降低了喷射液体的用量。
需要额外说明的是，由于气流通道11外部设置液体通道12，液体通道12的存在一方面可以保证管路结构10的外管温度相对安全，外壁温度不可能高于水的沸点温度，另一方面降低管路结构10的内管温度，使得管路结构10的材料可采常规不锈钢管，无需采用特殊耐热材料，降低了气体冷却装置100的制造成本，确保气体冷却装置100的密封特性，避免漏液的现象发生。
可选的，在实际工作过程中，液体通道12和气流通道11均可以为多层，例如，在有的实施例中，管路结构10为三层结构，中间一层为气流通道11，内外两层均为液体通道12其中最外侧和最内侧的液体通道12均能朝向气流通道11内喷射液体，喷气部14设置在管路结构10的最外侧液体通道12的位置，且与液体通道12隔绝设置，以将外部气体喷入气流通道11内。当然，在本申请的其他实施例中，液体通道12和气流通道11的层数还可以根据实际需要选择。
可选的，喷气部14为喷气孔。由此，能够使得喷气部14喷出的气体的压强相对较大，有利于液体雾化。在本实施例中，喷气孔的截面形状可以根据实际需要选择，在此不对喷气孔的截面形状做出限定。
可选的，喷液部13为喷液孔。由此，能够使得喷液部13喷出的液体的流速相对较大，有利于液体雾化。在本实施例中，喷液孔的截面形状可以根据实际需要选择，在此不对喷液孔的截面形状做出限定。
在一些实施例中，如图1所示，气流通道11包括沿气流方向依次排布的高温区111、雾化区112以及汽化区113，液体通道12的部分位于高温区111的外 部，喷气部14及喷液部13均与雾化区112连通。
可以理解的是，高温气体流过高温区111时，能够在液体通道12内的冷却液的作用下进行降温，当高温气体运动到雾化区112时，能够接触到被高压气体雾化的液滴，在汽化区113能够与雾化液体充分接触，使得雾化的液滴迅速汽化实现对高温气体的降温。
在一些具体的实施例中，如图1和图2所示，液体通道12包括冷却通道121和储液腔122，冷却通道121具有进液口1211，进液口1211与外部液源(图未标)相连，且冷却通道121位于高温区111的外部，储液腔122具有连通口1221和喷液部13，连通口1221与冷却通道121相连，且连通口1221的流通面积小于冷却通道121及储液腔122的流通面积。
可以理解的是，高温气体流过高温区111时，能够在冷却通道121内的冷却液的作用下进行降温，这样能够通过换热对高温气体进行降温，有利于提升降温速率。冷却液从冷却通道121内进入储液腔122后再喷射，由于连通口1221的流通面积小于冷却通道121及储液腔122的流通面积，冷却液在进入储液腔122内后能够具有较大的压力，使得通过喷液部13喷向气流通道11的液体具有更高的压力，从而便于雾化。
在一些具体的实施例中，冷却通道121位于管路结构10的上游位置。由此，高温气体能够在管路结构10内先被液体通道12内的冷却液进行冷却，再通过雾化的液体进行冷却，能够较好地提升对高温气体的冷却效果。
在一些具体的实施例中，如图1和图3所示，气体冷却装置100还包括导流管30，导流管30位于冷却通道121内，导流管30用于使冷却通道121内的液体大致充满冷却通道121后在流入储液腔122。由此，有助于确保冷却通道121内始终保持液体充盈，以使高温气体流在入管路结构10内时，能够先被液体通道12内的冷却液进行冷却。
需要说明的是，通过将导流管30设置于冷却通道121内，不仅能够保护导流管30，降低导流管30因撞击发生损坏的风险，还能够使气体冷却装置100的 结构更加紧凑，降低气体冷却装置100整体的占用空间，便于使用。
当然，在其他实施例中，导流管30也可以设置于管路结构10的外壁，本申请对此不做限定，本领技术人员可以根据实际情况选择。
在一些具体的实施例中，导流管30的入口33与冷却通道121连通，且导流管30的入口33位于高温区111远离雾化区112的一端，导流管30的出口与储液腔122连通，以使冷却通道121内的液体沿导流管30流入储液腔122。
在一些具体的实施例中，导流管30包括第一管段31和第二管段32，第一管段31与液体通道12连通，第二管段32与储液腔122连通，第一管段31和第二管段32相连的位置高于气流通道11的进气端114。可以理解的是，导流管30包括第一管段31和第二管段32，方便了将导流管30与液体通道12以及储液腔122相连，而第一管段31和第二管段32相连的位置高于气流通道11的进气端114能够在一定程度上提升第二管段32流入储液腔122中的液体压力，增加液体的总量，从而增加高温气体与液体的接触，加快冷却效率。
值得注意的是，导流管30的最高点(第一管段31和第二管段32相连的位置)高于气流通道11的进气端114，当液体经过管路结构10后，由于导流管30的最高点高于多层管结构的最高点，保证了液体充满多层管结构，并且能够稳定地喷入气流通道11，从而确保冷却效果。
在一些具体的实施例中，冷却通道121的一部分可以充当导流管30的一部分。例如，冷却通道121的一部分作为导流管30的第一管段31。由此，能够减少导流管30的使用，降低制作成本。
在一些具体的实施例中，导流管30为折弯管，折弯管的入口33与液体通道12连通，折弯管的出口与储液腔122连通，且折弯管的折弯处高于气流通道11的进气端114。可以理解的是，导流管30的最高点(折弯处)高于气流通道11的进气端114，当液体经过管路结构10后，由于导流管30的最高点高于气流通道11的进气端114，保证了液体充满液体通道12，并且能够稳定地流入储液腔122，从而确保冷却效果。与此同时，导流管30采用一根直管折弯制造， 方便了导流管30的制造。
在一些更具体的实施例中，如图1所示，冷却通道121具有折弯部(图未标)，冷却通道121包括呈夹角设置的第一段1212和第二段1213，第一段1212位于第二段1213的上游，第一段1212与气流通道11的延伸方向相交，第二段1213与气流通道11的延伸方向平行设置。
可以理解的是，在实际工作过程中，高温气体进入气流通道11后，由于第一段1212与气流通道11的延伸方向相交，高温气体能够在第一段1212的导向下进入第二段1213，这样有利于气流通道11内的高温气体与冷却通道121内的冷却液接触，从而利于高温气体的降温。
在一些更具体的实施例中，冷却通道121的进液口1211位于第二段1213的下游。可以理解，进液口1211的设置位置能够确保喷液部13朝向气流通道11喷射液体时，液体具有较大的压力，从而便于液体雾化，以方便高温气体冷却。
在一些实施例中，导流管30的入口33设置于第一段1212上。可以理解的是，导流管30的入口33为补液口，通过将导流管30的入口33设置于第一段1212上，一方面，能够保证冷却液几乎充满冷却通道121后再流入储液腔122内。由此，高温气体能够在冷却通道121被液体通道12内的冷却液进行冷却，配合通过雾化的冷却液进行冷却，能够较好地提升对高温气体的冷却效果。另一方面，能够确保冷却通道121内具有足够的冷却液，有利于高温气体的降温。
在一些具体的实施例中，如图2所示，喷液部13靠近储液腔122的朝向气流通道11设置的侧壁设置。由此，能够使得喷液部13喷出的液体尽可能地靠近气流通道11内的高温气体，从而有利于实现高温气体的降温。
在一些具体的实施例中，管路结构10具有第一管本体(图未标)和第二管本体(图未标)，第一管本体形成液体通道12和气流通道11的高温区111和雾化区112。第二管本体形成气流通道11的汽化区113。第一管本体和第二管本体通过法兰连接。
可以理解的是，液体通道12在外，气流通道11的高温区111和雾化区112在内，也就是说管路结构10在第一管本体的位置需要是多层结构，而在第二管本体的位置可以设置为单层管。将管路结构10拆分成第一管本体和第二管本体能够便于管路结构10的制造，方便管路结构10的组装。
在一些具体的实施例中，如图1和图2所示，雾化区112包括渐缩段1121和平直段1122，由此，更有利于喷射的液体在喷射的气体的作用下雾化。
在一些具体的实施例中，雾化区112的渐缩段1121的小端的流通面积大于高温区111的流通面积。由此，高温气体再从高温区111流动到雾化区112会成喷射状气流，这种气流与雾化的液体的接触更加充分，从而有利于高温气体的冷却。
需要补充说明的是，从高温区111到雾化区112再到汽化区113，气体的流通面积逐渐增加，一方面提供了更大的空间给予高温气体散热，另一方面，高温气体呈现出喷射状，有利于与雾化的液体的接触更加充分，从而更有利于高温气体的冷却。
在一些具体的实施例中，雾化区112全部为平直段1122，以确保高温气体匀速流动，减少雾化区112内高温气体出现湍流，降低降温效果的风险。
在一些更具体的实施例中，如图1至图4所示，气体冷却装置100还包括进液管20，进液管20连接于管路结构10且与进液口1211连通。由此，外部冷源的液体可以通过进液管20从进液口1211进入液体通道12，且进液口1211位于第二段1213的下游，使得在整个工作流程中，液体通道12内始终具有充足的液体，有利于朝向气流通道11不断喷射液体。
在另外一些更具体的实施例中，进液管20和与进液管20对接的进液口1211可以位于管路结构10的上游位置，喷液部13位于管路结构10的下游位置。可以理解的是，由于进液管20位于管路结构10的上游位置，使得在整个工作流程中，液体通道12内始终具有充足的液体，高温气体能够在管路结构10内先被液体通道12内的冷却液进行冷却，再通过雾化的液体进行冷却，能够较好地 提升对高温气体的冷却效果。
在一些实施例中，如图1所示，管路结构10包括折弯结构(图未标)，折弯结构位于第一段1212和第二段1213的连接处，管路结构10的进气方向与出气方向呈夹角设置。相比于一个直管，本实施例的管路结构10具有折弯结构，能够使得管路结构10在确保气流路径较长的情况下，减小了在某个方向的总长度，从而方便管路结构10的使用。
本申请的实施例对管路结构10的折弯结构的具体形状不作限制。在一种可能的情形下，管路结构10的折弯处可以采用如图1所述的方式以在第一段1212和第二段1213的连接处形成尖角，在另一种可能的情形下，管路结构10的折弯处可以采用圆滑过渡的方式以在第一段1212和第二段1213的连接处形成一定弧度。
在一些具体的实施例中，如图2和图3所示，喷液部13沿气流通道11内的气流流通方向延伸设置，喷气部14倾斜设置，且喷液部13的延伸方向与喷气部14的延伸方向相交。可以理解的是，喷气部14倾斜设置使得喷入气流通道11的气流产生角动惯量，能形成涡流旋风，涡流旋风能够提升高压气体与液体的接触面积，能够提升液体的雾化效率，从而有利于提升高温气体的冷却效率。
在一些具体的实施例中，如图2所示，沿气流通道11内的气体流通方向，储气腔15的流通面积逐渐减小，喷气部14设置在储气腔15朝向气流通道11的倾斜侧壁上。可以理解的是，储气腔15的内壁形成为倾斜侧壁(例如，储气腔15的横截面为三角形，倾斜侧壁为三角形的斜边)，能够在一定程度上增加喷入气流通道11的气流产生的角动惯量，使得涡流旋风更加剧烈，能够进一步提升高压气体与液体的接触面积，进一步提升了液体的雾化效率，从而有利于提升高温气体的冷却效率。
在其他实施例中，储气腔15也可以采用其他形状，例如储气腔15的横截面为矩形，只需要保证喷气部14朝向气流通道11设置，并且喷气部14的延伸 方向与喷液部13的延伸方向相交即可，本申请对此不做限定。
在一些具体的实施例中，如图1、图3以及图4所示，气体冷却装置100还包括进气管40，进气管40的一端与储气腔15相连，另一端与外部高压气源相连。由此，能够方便朝向管路结构10供气。
在一些具体的实施例中，喷液部13为多个，且多个喷液部13沿气流通道11的周向间隔分布。可以理解的是，多个喷液部13沿气流通道11的周向间隔分布，能够使得液体被均匀地喷入气流通道11，有利于增大高温气体与液体的接触面积，从而有利于提升冷却速率。
在一些具体的实施例中，喷液部13为多个，且多个喷液部13沿气流通道11的轴向间隔分布。能够使得液体被均匀地喷入气流通道11，有利于增大高温气体与液体的接触面积，从而有利于提升冷却速率。
需要说明的是，在实际设计中，喷液部13可以设置沿气流通道11的方式设置多圈，每一圈均设有沿气流通道11的周向间隔分布的多个喷液部13。喷液部13的分布可以根据实际需要选择。
在一些具体的实施例中，喷液部13的尺寸小于mm。由此，从喷液部13喷出的液体具有较高的压力，有利于液体在高压气体的作用下雾化。这里需要补充说明的是，喷液部13的形状以及尺寸可以根据实际需要做出选择，并不限于上述限定。
在一些具体的实施例中，喷液部13形成为狭长孔型孔。这样能够进一步提升喷液部13喷出的液体的压力，有利于液体在高压气体的作用下雾化。
在一些具体的实施例中，如图4所示，喷气部14为多个，且多个喷气部14沿气流通道11的周向间隔分布。可以理解的是，多个喷气部14沿气流通道11的周向间隔分布，能够使得高压气体被均匀地喷入气流通道11，有利于增大高压气体与液体的接触面积，方便喷射进入气流通道11的液体雾化，从而有利于提升冷却速率。
在一些具体的实施例中，喷气部14为多个，且多个喷气部14沿气流通道 11的轴向间隔分布。能够使得高压气体被均匀地喷入气流通道11，有利于增大高压气体与液体的接触面积，方便喷射进入气流通道11的液体雾化，从而有利于提升冷却速率。
需要说明的是，在实际设计中，喷气部14可以设置沿气流通道11的方式设置多圈，每一圈均设有沿气流通道11的周向间隔分布的多个喷气部14。喷气部14的分布可以根据实际需要选择。
在一些具体的实施例中，喷气部14的孔径小于mm。由此，从喷气部14喷出的液体具有较高的压力，有利于液体在高压气体的作用下雾化。这里需要补充说明的是，喷气部14的形状以及尺寸可以根据实际需要做出选择，并不限于上述限定。
这里需要补充说明的是，在本申请的实施例中，喷气部14和喷液部13的分布形式可以根据实际需要任意组合，例如在有的实施例中，喷气部14为多圈，喷液部13也为多圈；又例如，在有的实施例中，喷气部14和喷液部13均为一圈。
在本申请的实施例还提供一种气体冷却装置100，如图5至图8所示，该气体冷却装置100包括管路结构10，管路结构10限定出气流通道11和液体通道12，气流通道11用于流通高温气体，液体通道12位于气流通道11的外部，且具有与气流通道11连通的喷液部13，喷液部13用于朝向气流通道11喷液。
具体来说，气流通道11具有进气端114和出气端115，进气端114用于引入高温气体，液体通道12具有进液口1211。液体通道12还包括连接管50，连接管50的出口设置在出气端115，连接管50的入口33与液体通道12连通，连接管50的出口与气流通道11连通以朝向气流通道11喷液。其中，喷液部13设置在连接管50的出口，连接管50的出口通过喷液部13朝向气流通道11喷液。
可以理解的是，本实施例的气体冷却装置100，液体从连接管50的出口喷向气流通道11时，在遇到高温的气体后，大部分的液体会迅速汽化，而在汽化 过程中会吸收大量的热，这样高温气体所带的热量就会在液体汽化过程中被大量消耗，快速地实现了高温气体的冷却，相比于现有技术水冷换热的降温方式，本实施例利用液体由液相变气相时需吸收大量热量的原理，让高温气体得以快速冷却，提升了冷却效果和冷却效率。
此外，液体通道12的存在一方面可以保证管路结构10的外管温度相对安全，外壁温度不可能高于水的沸点温度，另一方面降低管路结构10的内管温度，使得管路结构10的材料可采常规不锈钢管，无需采用特殊耐热材料，降低了管路结构10的制造成本，确保管路结构10的密封特性，避免漏液的现象发生。
需要额外说明的是，在本申请中，连接管50可以仅有一个，也可以为多个，当连接管50为多个时，多个连接管50既可以沿管路结构10的轴向间隔分布，多个连接管50也可以沿管路结构10的周向间隔分布，多个连接管50还可以沿管路结构10的轴向布置多圈，每一圈均包括沿管路结构10的周向间隔分布的连接管50。由此，在实际使用过程中，连接管50的排布可以根据实际需要选择，只需要保证具有较好的冷却效果即可。
在一些具体的实施例中，气流通道11倾斜设置，且进气端114高于出气端115。可以理解的是，气流通道11倾斜设置能够使得位于气流通道11外侧的液体通道12也是倾斜设置，进气端114高于出气端115能够避免液体通道12内的液体出现倒流现象。
在一些具体的实施例中，如图5至图8所示，连接管50包括第一管体51和第二管体52，第一管体51与液体通道12连通，第二管体52与气流通道11连通，第一管体51和第二管体52相连的位置高于气流通道11的进气端114。
可以理解的是，连接管50包括第一管体51和第二管体52，方便了将连接管50与储液腔122以及气体通道相连，而第一管体51和第二管体52相连的位置高于气流通道11的进气端114能够在一定程度上提升第二管体52喷出的液体压力，增加液体的总量，从而增加高温气体与液体的接触，加快冷却效率。
在一些实施例中，连接管50还包括第三管体53，第三管体53的两端分别 与第一管体51和第二管体52相连，第三管体53高于气流通道11的进气端114。可以理解的是，连接管50的最高点(第三管体53的位置)高于管路结构10的最高点(进气端114)，当液体经过管路结构10后，由于U形管的最高点高于管路结构10的最高点，保证了液体充满管路结构10，并且能够稳定地喷入气流通道11，从而确保冷却效果。
在一些具体的实施例中，如图5所示，第三管体53水平设置，且第一管体51和第二管体52均垂直于第三管体53。由此，保证了液体充满多层管结构，并且能够稳定地喷入气流通道11，从而确保冷却效果。当然，在本申请的其他实施例中，第一管体51、第三管体53和第二管体52的夹角可以根据实际需要选择，并不限于本实施例的限定。
在一些具体的实施例中，连接管50为折弯管，折弯管的入口33与液体通道12连通，折弯管的出口与气流通道11连通，且折弯管的折弯处高于气流通道11的进气端114。可以理解的是，连接管50的最高点(折弯处)高于管路结构10的最高点(进气端114)，当液体经过管路结构10后，由于连接管50的最高点高于管路结构10的最高点，保证了液体充满管路结构10，并且能够稳定地喷入气流通道11，从而确保冷却效果。与此同时，连接管50采用一根直管折弯制造，方便了连接管50的制造。
在其他实施例中，连接管50为一个直管，直管的入口33与液体通道12连通，直管的出口与气流通道11连通，也就是说，在本申请的实施例中，连接管50并不限于前文所述的U型管结构。
在一些实施例中，气体通道11包括高温区(图未标)，高温区位于气体通道11靠近高温气体流入方向的一端。液体通道12还可以包括冷却通道(图未标)和储液腔(图未标)，进液口1211设置于冷却通道，进液口1211与外部液源相连，且冷却通道位于高温区的外部。储液腔具有连通口和喷液部13，连通口与冷却通道连通，连通口的流通面积小于冷却通道及储液腔的流通面积。示例性地，储液腔的连通口与连接管50连通，以通过连接管50从冷却通道获取 冷却液。
可以理解的是，高温气体流过高温区时，能够在冷却通道内的冷却液的作用下进行降温，这样能够通过换热对高温气体进行降温，有利于提升降温速率。冷却液从冷却通道内进入储液腔后再喷射，由于连通口的流通面积小于冷却通道及储液腔的流通面积，冷却液在进入储液腔内后能够具有较大的压力，使得通过喷液部13喷向气流通道11的液体具有更高的压力。
在一些具体的实施例中，喷液部13为多个，且多个喷液部13沿气流通道11的周向间隔分布。可以理解的是，多个喷液部13沿气流通道11的周向间隔分布，能够使得液体被均匀地喷入气流通道11，有利于增大高温气体与液体的接触面积，从而有利于提升冷却速率。
在一些具体的实施例中，如图1和图5所示，气体冷却装置100还包括风机60，风机60连接于气流通道11的出气端115，风机60用于驱动气流通道11气流通道11内的气体强制流动。可以理解的是，风机60能够驱动气流通道11气流通道11内的气体流动，从而提升气流通道11气流通道11内的气流流速，有利于提升冷却效率。
在一些具体的实施例中，如图1和图5所示，气体冷却装置100还包括抽气管70，抽气管70的一端与气流通道11气流通道11的出气端115相连，另一端用于安装风机60，抽气管70安装风机60的一端低于与气流通道11的出气端115相连的一端。可以理解的是，风机60与气流通道11的出气端115通过抽气管70相连，能够保证气流到风机60位置时已经处于较低的温度，从而避免气流温度相对较高导致对风机60的腐蚀现象，有利于延长风机60的使用寿命。
在一些更具体的实施例中，如图1和图5所示，气体冷却装置100还包括排气管，排气管连接于风机60背离抽气管70的一侧。可以理解的是，增设的排气管能够朝向指定位置排气，当高温气体中存在有害气体时，能够将有害气体排放至指定空间内，提升了工作安全性。
本申请的实施例还提供一种热炉1，如图9所示，热炉1包括炉体200和上 述的气体冷却装置100，炉体200具有排气管80，气体冷却装置100用于冷却炉体200通过排气管80释放的气体。可以理解的是，在实际使用过程中，将管路结构10与热炉1的排气管80相连，高温气体进入气流通道11后，由于气流通道11的外部设置有液体通道12，液体通道12能够对高温气体进行冷却。液体通道12内的液体还可以从喷液部13喷向气流通道11，喷出的液体遇到喷气部14喷出的高压气体会迅速雾化，而雾化后的液体会与高温气体混合，雾化后的液体遇高温气体后，迅速汽化，变为蒸气，液体汽化时，则吸收大量热量，从而保证高温气体温度得以迅速下降，高温气体排出管路结构10时就会具有较低的温度。
相比于现有技术中在排气管道上缠绕冷水管的技术方案，本申请的管路结构10连接于排气管道(例如排气管80)的出气口，使用方便，且不容易被排气管道烫坏，使用寿命较长；在工作过程中，通过液冷以及液体汽化能够带走大量的热量，实现对高温气体的快速降温，提升了冷却速率和冷却效率；由于设置的喷气部14能够朝向气流通道11喷射高压气体使得喷向气流通道11的液体雾化，能够充分利用喷射的液体进行高温气体降温，降低了喷射液体的用量。
需要额外说明的是，由于气流通道11外部设置液体通道12，液体通道12的存在一方面可以保证管路结构10的外管温度相对安全，外壁温度不可能高于水的沸点温度，另一方面降低管路结构10的内管温度，使得管路结构10的材料可采常规不锈钢管，无需采用特殊耐热材料，降低了气体冷却装置100的制造成本，确保气体冷却装置100的密封特性，避免漏液的现象发生。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (24)

  1. 一种气体冷却装置，其特征在于，包括管路结构，所述管路结构限定出气流通道和液体通道，所述气流通道用于流通高温气体，所述液体通道位于所述气流通道的外部，且具有与所述气流通道连通的喷液部，所述管路结构还具有与所述气流通道连通的喷气部，所述喷液部喷出的液体能够在所述气流通道内的高温气体和所述喷气部喷出的高压气体的作用下汽化。
  2. 一种气体冷却装置，其特征在于，包括管路结构，所述管路结构限定出气流通道和液体通道，所述气流通道用于流通高温气体，所述液体通道位于所述气流通道的外部，且具有与所述气流通道连通的喷液部，所述喷液部用于朝向所述气流通道喷液。
  3. 根据权利要求1或2所述的气体冷却装置，其特征在于，所述气体通道包括高温区，所述高温区位于所述气体通道靠近所述高温气体流入方向的一端；
    所述液体通道包括：
    冷却通道，所述冷却通道具有进液口，所述进液口与外部液源相连，且所述冷却通道位于所述高温区的外部；
    储液腔，所述储液腔具有连通口和所述喷液部，所述连通口与所述冷却通道连通，所述连通口的流通面积小于所述冷却通道及所述储液腔的流通面积。
  4. 根据权利要求3所述的气体冷却装置，其特征在于，所述气体冷却装置还包括进液管，所述进液管的一端连接于所述管路结构且与所述进液口连通，所述进液管的另一端连接于外部液源。
  5. 根据权利要求3所述的气体冷却装置，其特征在于，所述气体冷却装置还包括导流管，所述导流管位于所冷却通道内，所述导流管用于使所述冷却通道内的液体大致充满所述冷却通道后再流入所述储液腔。
  6. 根据权利要求5所述的气体冷却装置，其特征在于，所述导流管的入口与 所述冷却通道连通，所述导流管的入口位于所述气流通道的进气端，所述导流管的出口与所述储液腔连通，以使所述冷却通道内的液体沿所述导流管流入所述储液腔。
  7. 根据权利要求5所述的气体冷却装置，其特征在于，所述导流管包括第一管段和第二管段，所述第一管段与所述液体通道连通，所述第二管段与所述储液腔连通，所述第一管段和所述第二管段相连的位置高于所述气流通道的进气端。
  8. 根据权利要求5所述的气体冷却装置，其特征在于，所述导流管为折弯管，所述折弯管入口与所述液体通道连通，所述折弯管的出口与所述储液腔连通，且所述折弯管的折弯处高于所述气流通道的进气端。
  9. 根据权利要求1或2所述的气体冷却装置，其特征在于，所述喷液部为多个，且多个所述喷液部沿所述气流通道的周向间隔分布。
  10. 根据权利要求1所述的气体冷却装置，其特征在于，所述喷气部倾斜设置，且所述喷液部的延伸方向与所述喷气部的延伸方向相交。
  11. 根据权利要求10所述的气体冷却装置，其特征在于，所述管路结构还限定出储气腔，所述储气腔能够与外部气源相连，所述喷气部与所述储气腔连通。
  12. 根据权利要求11所述的气体冷却装置，其特征在于，沿所述气流通道内的气体流通方向，所述储气腔的流通面积逐渐减小，所述喷气部设置在所述储气腔朝向所述气流通道的倾斜侧壁上。
  13. 根据权利要求11所述的气体冷却装置，其特征在于，所述气体冷却装置还包括进气管，所述进气管的一端与所述储气腔相连，另一端与外部高压气源相连。
  14. 根据权利要求1所述的气体冷却装置，其特征在于，所述喷气部为多个，且多个所述喷气部沿所述气流通道的周向间隔分布。
  15. 根据权利要求1所述的气体冷却装置，其特征在于，所述气流通道包括 沿气流方向依次排布的高温区、雾化区以及汽化区，所述液体通道的部分位于所述高温区的外部，所述喷气部及所述喷液部均与所述雾化区连通。
  16. 根据权利要求2所述的气体冷却装置，其特征在于，所述气流通道具有进气端和出气端，所述进气端用于引入高温气体，所述液体通道具有进液口；
    所述液体通道还包括连接管，所述连接管的出口设置在所述出气端，所述连接管的入口与所述液体通道连通，所述连接管的出口与所述气流通道连通以朝向所述气流通道喷液；
    其中，所述喷液部设置在所述连接管的出口，所述连接管的出口通过所述喷液部朝向所述气流通道喷液。
  17. 根据权利要求16所述的气体冷却装置，其特征在于，所述气流通道倾斜设置，且所述进气端高于所述出气端。
  18. 根据权利要求16所述的气体冷却装置，其特征在于，所述连接管包括第一管体和第二管体，所述第一管体与所述液体通道连通，所述第二管体与所述气流通道连通，所述第一管体和所述第二管体相连的位置高于气流通道的所述进气端。
  19. 根据权利要求18所述的气体冷却装置，其特征在于，所述连接管还包括第三管体，所述第三管体的两端分别与所述第一管体和所述第二管体相连，所述第三管体高于所述气流通道的所述进气端。
  20. 根据权利要求16所述的气体冷却装置，其特征在于，所述连接管为折弯管，所述折弯管的入口与所述液体通道连通，所述折弯管的出口与所述气流通道连通，且所述折弯管的折弯处高于所述气流通道的所述进气端。
  21. 根据权利要求1或2中任一项所述气体冷却装置，其特征在于，所述气体冷却装置还包括风机，所述风机设在所述管路结构内以驱动所述气流通道内的气体强制流动。
  22. 根据权利要求21所述的气体冷却装置，其特征在于，所述气体冷却装置还包括抽气管，所述抽气管的一端与所述气流通道的所述出气端相连，另一端 用于安装所述风机，所述抽气管安装所述风机的一端低于与所述出气端相连的一端。
  23. 根据权利要求22所述的气体冷却装置，其特征在于，所述气体冷却装置还包括排气管，所述排气管连接于所述风机背离所述抽气管的一侧。
  24. 一种热炉，其特征在于，包括：
    炉体，所述炉体具有排气管；
    如权利要求1至2、10至20中任一项所述的气体冷却装置，所述气体冷却装置用于冷却所述炉体通过所述排气管释放的气体。
PCT/CN2024/099451 2023-06-16 2024-06-14 气体冷却装置及热炉 Pending WO2024255900A1 (zh)

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