WO2024256009A1 - Dispositif et système de rouleau et procédé d'introduction de structure de surface dans un objet - Google Patents

Dispositif et système de rouleau et procédé d'introduction de structure de surface dans un objet Download PDF

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Publication number
WO2024256009A1
WO2024256009A1 PCT/EP2023/066089 EP2023066089W WO2024256009A1 WO 2024256009 A1 WO2024256009 A1 WO 2024256009A1 EP 2023066089 W EP2023066089 W EP 2023066089W WO 2024256009 A1 WO2024256009 A1 WO 2024256009A1
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WO
WIPO (PCT)
Prior art keywords
rolling device
embossing
core element
core
along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2023/066089
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German (de)
English (en)
Inventor
Walter ZORBACH
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EV Group E Thallner GmbH
Original Assignee
EV Group E Thallner GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EV Group E Thallner GmbH filed Critical EV Group E Thallner GmbH
Priority to DE112023006504.7T priority Critical patent/DE112023006504A5/de
Priority to PCT/EP2023/066089 priority patent/WO2024256009A1/fr
Publication of WO2024256009A1 publication Critical patent/WO2024256009A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Definitions

  • the present invention relates to a rolling device as well as a system and a method for embedding a surface structure in an object.
  • a very frequently used roller is the embossing roller.
  • the embossing roller has structures on its outermost surface that are to be embossed into an embossing compound.
  • Embossing rollers can be made from a single, solid component. The structures of the embossing roller can then be incorporated directly into the solid embossing roller surface.
  • some embossing rollers have a solid core made of a solid material and a soft shell in which the embossing structures are located. In this case, the embossing roller is itself a type of roller stamp and is used directly for embossing.
  • WO 2014 037 044 A1 Another method for embedding a surface structure in an object is known from WO 2014 037 044 A1.
  • a surface structure in the micrometer or nanometer range is embedded in the outside of the object.
  • an embossing element designed as a stamp is pressed into the outside of the object.
  • the force required for this comes from a rolling device that acts on the back of the embossing element via a contact surface and in this way causes the embossing element to engage the outside of the object in order to form the surface structure in the area of the contact surface.
  • a rolling device that acts on the back of the embossing element via a contact surface and in this way causes the embossing element to engage the outside of the object in order to form the surface structure in the area of the contact surface.
  • a roller can also be referred to as a pressure application roller.
  • the pressure application roller is mainly used to apply a line force that is as homogeneous as possible to an embossed element underneath.
  • the embossing element is a stamp, preferably a soft stamp.
  • the soft stamp can be applied to a carrier substrate, for example. This means that no embossing roller is used to press embossed structures into an embossing compound, but rather a stamp that is subjected to pressure from the back with a pressure application roller.
  • a disadvantage of the state of the art is that due to the force applied to the pressure roller on the side, the line force is generally no longer homogeneous and thus the pressure exerted on the stamp is no longer uniform. However, uniform pressure is necessary in order to correctly press the stamp's embossed structures into the embossing compound.
  • a rolling device is also known from the prior art in which a displaceable component is provided within a partial section along the circumference, which is pre-tensioned with a spring.
  • a rolling device is known from US 5,662,574 which comprises a casing element and a core element, wherein the core element has an outer circumference which is not completely rotationally symmetrical with respect to the axis of rotation about which the core element rotates.
  • the present invention has for its object to provide a rolling device which presses the embossing element into the embossing mass, i.e. the object to be embossed, in the most positionally accurate and reproducible manner possible.
  • the present invention solves the problem of the present invention by means of a rolling device according to claim 1, by means of a system for embedding a surface structure in an object according to claim 13 and by means of a method for embedding a surface structure in an object according to claim 15.
  • a rolling device for applying pressure to an embossing element, which in an embossing process creates or creates a surface structure in an object, in particular in an embossing compound, wherein during the embossing process the rolling device acts on the embossing element via a contact surface and moves along a translation direction while rotating about an axis of rotation, in particular while maintaining a pressure on the embossing element in order to act on the embossing element via contact surfaces offset from one another along the translation direction, in particular one after the other, comprising: a core element and a casing element surrounding the core element, wherein the core element and the casing element, in particular by their geometric shape along an axial direction or longitudinal direction of the rolling device, are designed such that a force acts homogeneously on the embossing element both via the contact surface along a direction perpendicular to the translation direction and via several contact surfaces following one another in the translation direction, in particular one after the
  • the invention provides that the force can be applied homogeneously to the embossing element, in particular over a two-dimensional surface that extends both perpendicular to the translation direction, in particular over more than 50%, preferably over more than 75% and particularly preferably over more than 90% of the extension of the rolling device, and over several contact surfaces along the translation direction.
  • the rolling device which is rotatably mounted in a corresponding holder, for example, comprises suitable configurations of the core element and the casing element in order to realize the homogenization or homogeneity of the force application over the two-dimensional surface.
  • the rolling device is structurally designed accordingly, for example by means of a suitable peripheral geometry of the core element and/or an inner side geometry of the casing element, which preferably changes along the axial direction of the rolling device.
  • the radial extension of the core element and/or the casing element changes in the axial direction to adjust the homogeneous force action along a direction that runs perpendicular to the translation direction.
  • the rolling device is in particular a pressure application roller.
  • the casing element surrounds the core element at least 80%, preferably at least 90% and particularly preferably at least 95%, and for example only the end faces of the core element are not enclosed or surrounded by the casing element.
  • the casing element is made of a material whose hardness can be specified in Shore A, the following preferred values apply:
  • Shore A hardness is between 10 and 100, preferably between 15 and 70, even more preferably between 20 and 60, most preferably between 30 and 50, most preferably between 40 and 45.
  • the homogeneous application of force along a direction perpendicular to the translation direction is to be understood in comparison to a reference rolling device in which the core element and the casing element have the same, in particular constant, geometry along the axial direction or extension.
  • the reference rolling device has a core element and a casing element, both of which do not change their outer circumference along the axial direction, wherein the outer sides of the casing element and the core element are arranged concentrically to one another and their distance measured in the radial direction does not change along the axial direction.
  • the rolling device according to the invention is in particular homogenized, i.e. has a more homogeneous force profile, i.e. a more homogeneous, spatially distributed force action on the embossing element.
  • this force curve or the force effect on the embossing element along the axial direction can be homogenized in comparison to the force effect of the reference rolling device.
  • the core element and the shell element have a changing outer geometry and/or circumferential geometry along the axial direction, with which the force that acts on the embossing element from the rolling device during the embossing process can be specifically influenced.
  • a radially measured distance between an outer circumference of the core element and an outer circumference of the shell element changes along the axial direction, for example decreasing or increasing towards the center of the rolling device.
  • the rolling device is designed so that during a translational movement, i.e.
  • rolling devices or rolling embossing bodies which, for example, have core elements which are not completely rotationally symmetrical and, for example, have arc sections in a plane running perpendicular to the axial direction which have a different structure or geometry than the rest of the outer circumference of the core element.
  • the rolling device is designed in particular to ensure, through the suitable geometric design or geometric shape of the casing element and core element, that an essentially homogeneous force effect is realized along the translation direction for several consecutive contact surfaces and also to ensure that a homogenized force profile or force effect profile is generated along a direction that runs perpendicular to this translation direction.
  • the outer shape of the core element is modified or modulated in a direction that runs parallel to the axial extension or axial direction or longitudinal direction.
  • the force acts homogeneously on the embossing element across several contact surfaces that follow one another in the translation direction, even if the contact surface changes in size, in particular in a length measured perpendicular to the translation direction, or if the size or length of the object to be processed changes.
  • the object to be embossed has a geometry that deviates from a rectangle and is, for example, round or elliptical.
  • a controlled, i.e. i.e. controlled application of force ensures that the force applied to successive contact surfaces is nevertheless homogeneous along the translation direction. For example, the force applied is increased for a larger area to be embossed on the object.
  • a corresponding control unit is required on the device that is designed for this purpose.
  • Appropriate adaptation of the force applied to the contact surface or the surface to be embossed proves to be particularly advantageous for circular or elliptical objects, such as silicon wafers. These are preferably circular.
  • an outer circumference of the rolling device is cylindrically shaped, in particular is designed cylindrically in such a way that a constant circular cross-section is set or is set or is realized in a plane running perpendicular to the axis of rotation along the entire axial extent of the rolling device.
  • the embossing element has a stamping area that is designed in particular to embed a micrometer and/or nanometer structure in the object, which is in particular an embossing compound.
  • the embossing element is designed for a molding accuracy in the micrometer and/or nanometer range.
  • a molding accuracy is understood to mean the smallest structure size that can still be produced without errors.
  • the molding accuracy of the embossing element is less than 1000 nm, preferably less than 500 nm, more preferably less than 100 nm, most preferably less than 10 nm.
  • the rolling device is used in a system that is designed to produce substrates that have a defined surface structure, in particular in the micrometer or nanometer range.
  • the substrate is preferably a component for the semiconductor industry, for example a part of a microchip.
  • the contact surface is essentially linear.
  • the contact surface for one position extends over a length parallel to the axis of rotation that is more than 5 times, preferably more than 10 times and particularly preferably more than 20 times as large as a maximum width of the contact surface measured perpendicularly thereto.
  • a homogeneous force effect is to be understood as meaning that the force effects for different points, either for different contact surfaces or for different points within the contact surface, do not deviate by more than 15%, preferably not more than 10% and particularly preferably not more than 5% from an average value of the force effects on the embossed element in the different points or areas.
  • the force effect in particular its spatial or two-dimensional distribution, is determined, for example, by determining the respective force effect point by point or area and then reproducing this depending on the spatial distribution, for example with pressure sensors integrated into the rolling device. In the case of a homogeneous force effect, an essentially constant force effect profile is then formed.
  • the core element has a circumferential geometry that is completely rotationally symmetrical to the axis of rotation, i.e. the circumferential geometry of the core element can be converted into itself by rotation through any angle. Even if the outer circumference of the core element changes in the axial direction, in particular changes in such a way that a homogenized force profile or a constant force application profile is obtained along the axial direction of the rolling device, it is particularly preferably provided that there is complete rotational symmetry with respect to the axis of rotation with regard to the outer circumference for the core element.
  • concentric circles are provided for the core element along the axial direction as a circumferential cross-section, which can change along the axial direction to adapt to the homogenization, but are designed to be circular in order to advantageously ensure that homogeneous force applications are realized for successive contact surfaces during the rolling movement in the translation direction.
  • the contact surfaces generated during the rotation have a substantially homogeneous force effect or a corresponding homogeneous force effect profile is assigned to them.
  • the core element is made from a first material and the casing element is made from a second material, whereby the first material differs from the second material.
  • the core element comprises a metal and/or the casing element comprises a plastic.
  • the peripheral geometry of the core element is changeable. This advantageously makes it possible, for example over several cycles of embossing processes, to create an optimized and adapted peripheral geometry in order to ensure the best possible conditions for the embossing process, particularly with regard to its precision. This also makes it possible to make adjustments over the entire service life of the rolling device if, for example, an adjustment is required due to wear or abrasion of the outer surface in order to ensure precise embossing in the long term. An adjustment in a real-time control loop is also conceivable, particularly if pressure sensors are built into the rolling device.
  • the peripheral geometry of the core element can be adjusted by means of at least one electrode and/or a piezo element in or on the core element.
  • this advantageously makes it possible to adjust the circumference, in particular its size, using simple electronic control signals.
  • This allows the force effect along the axial direction of the rolling device to be adjusted and optimized, for example within the framework of a control loop. This preferably takes place automatically or in a preparatory measuring process.
  • certain core sections can be changed in their circumference, for example by electrical and/or thermal energy.
  • the peripheral geometry changes or can be changed gradually or continuously along the axial direction.
  • the core element has a core element interior for receiving a fluid.
  • the core element interior is a cavity that can be filled with a liquid.
  • a wall of the core element in particular a wall that delimits the core element interior, is elastically deformable. This advantageously makes it possible to deliberately cause a curvature by filling the core element interior with the fluid, for example with a gas or a liquid, which in turn can be used to realize a corresponding geometry on the outer circumference of the core element.
  • the thickness of the wall changes along the axial direction in order to realize a corresponding geometry of the core element when the core element interior is filled.
  • the rolling device has a connection for fluid communication with the core element interior.
  • an opening is provided on one of the end faces of the rolling device through which a fluid can enter or be sucked out.
  • the geometry of the core element is influenced by an appropriate vacuum in such a way that a concave outer structure is formed.
  • the core element has a peripheral geometry with a concave and/or convex profile extending in the axial direction.
  • the outer circumference of the core element is wave-shaped along the axial direction.
  • the core element has at least one groove.
  • a targeted groove sequence or sequence of groove profiles along the axial direction leads to the desired force profile that is to act on the embossing element by means of the rolling device.
  • the individual elevations, in particular the grooves or trenches are determined with regard to their position and/or size and these are then particularly preferably implemented in a rotating device.
  • the rolling device has a core element and a casing element which are of different thicknesses.
  • the casing element has a first dimension measured in the radial direction, in particular averaged over an axial extent of the rolling device
  • the core element has a second dimension measured in the radial direction, in particular averaged over an axial extension of the rolling device, wherein a ratio of the first extension to the second extension assumes a value that is less than 0.2, preferably less than 0.1 and preferably less than 0.05.
  • the diameter of the core element is less than 50 mm, preferably less than 30 mm, more preferably less than 20 mm, most preferably less than 15 mm, most preferably less than 10 mm.
  • the material of the core element is preferably taken from one of the following material classes.
  • Another subject of the present invention is a system for embedding a surface structure in an object, in particular in an embossing compound, by means of a rolling device according to the invention and the embossing element. All advantages and properties described for the rolling device can be transferred analogously to the system.
  • the system has a roller carrier for the rolling device, wherein the roller carrier has a means for adjusting the height of the rolling device and/or a signaling device that makes a maximum position of the rolling device and/or the roller carrier recognizable and/or a spring element.
  • the embossing element for example comprising a carrier and a stamp, is designed to allow a micro and/or nanometer structure to be embedded in the embossing compound.
  • the means for height adjustment comprises a bellows whose volume can be changed by fluid in order to make the smallest possible changes.
  • the alternative or additional use of a piezo element is also conceivable.
  • a further subject of the present invention is a method for embedding a surface structure using a system as described above, wherein a surface structure is embedded in an object, in particular in an embossing compound, in an embossing process, wherein during the embossing process the rolling device acts on the embossing element via a contact surface and is moved along a translation direction while rotating about an axis of rotation in order to act on the embossing element via contact surfaces offset from one another along the translation direction.
  • the core element surface i.e. an outer circumference of the core element
  • the curvature can be convex and/or concave.
  • a waviness as a function of the position along the longitudinal direction or the axial direction or extension of the rolling device is also conceivable.
  • the core element surface is not convex, concave and/or wavy, but rather stepped.
  • the gradation can be understood as a waviness with lower resolution.
  • a combination of the features mentioned is also conceivable, for example a core element with a wavy core element surface and a structure placed on top of it.
  • the core element is hollow and has a relatively thin core wall thickness.
  • the core element can be pumped up with a fluid via a fluid opening or evacuated via the fluid opening.
  • a convex or concave core element surface can be set accordingly.
  • the disadvantage of this embodiment is that the lateral surface follows the core element surface and is therefore probably no longer cylindrical. A strong deviation from the cylindrical shape can, however, be prevented by making small changes to the core element.
  • the core diameter as a function of pressure only varies in the micrometer or nanometer range.
  • the core element surface is structured.
  • the core element is preferably produced from a solid shaft and structured by the introduction of full-circumferential grooves, in particular with different widths.
  • the width, depth and density of the grooves allow the variation of the pressure and thus the force acting on the embossing element in the subsequent embossing process.
  • the core element comprises several disc-shaped, preferably radially symmetrical core sections, which can change their diameter by means of an electronic control.
  • Such core sections are preferably made of piezo materials.
  • Each core section comprises a piezoelectric material and is coated or connected in particular to an inner and outer ring with an electrical material that serves as the respective electrode.
  • an electrical field is built up across the piezo material, which leads to a radially symmetrical expansion of the core section due to the piezoelectric field.
  • This embodiment enables in particular a local change in the radius of the core element, which allows the targeted control or regulation of the embossing pressure, i.e. the impact force.
  • the core element comprises several disc-shaped, preferably radially symmetrical core sections, which can be individually heated by a heater or cooled by a cooler.
  • the diameter can also be changed accordingly by applying the temperature.
  • core sections are made of materials with a thermal expansion coefficient that is as linear as possible, which allows a corresponding thermal expansion within the applicable temperature range.
  • the core element comprises several disk-shaped, preferably radially symmetrical core sections, which can be individually evacuated or acted upon by a fluid.
  • the core element would then not be deformed as a whole, but only the explicitly controlled core sections would be deformed.
  • Sensors are preferably located in the casing element and/or in the core element and/or in the individual core sections.
  • the sensors are preferably pressure sensors, with the help of which it can be determined as quickly as possible or in real time whether the desired homogeneous pressure distribution is achieved. Accordingly, a control or regulation system can be used to control or regulate the pressure during the application of pressure. This has a particularly advantageous effect on achieving the desired spatial distribution of the applied force. It is also conceivable to use temperature sensors or pressure sensors that measure the pressure inside the core or a core element. This allows the parameters that can be set from the outside to be associated or coupled with the pressure of the application of pressure or the effects of force.
  • the casing element can basically be made of any material. However, it has been shown that a polymer produced around a hard core has optimal pressure transfer properties. A metal casing is also conceivable. The core element could be coated with a metal. The rolling device produced in this way could then be turned very easily in a lathe so that the casing surface has a high quality and a low roughness.
  • a ceramic shell i.e. a shell element that includes ceramic or is made entirely of at least one ceramic, would also be conceivable.
  • the core element could be coated with a ceramic, for example an oxide, a nitride, a carbide and/or boride. Turning such materials is difficult because it is unlikely that any chips will be formed. However, other machining options are welcome and will not be discussed in detail here.
  • the rolling device can be used in a system that allows very simple control of the contact of the rolling device with a body to be acted upon, in particular a carrier substrate.
  • the system comprises a base that has the most vibration-damping effect possible.
  • the base has a fixation for the substrate on which an embossing compound is deposited.
  • the system also has a roller carrier, at one end of which the rolling device is fixed to a suspension system.
  • the other end of the roller carrier is not clamped in a fixed bearing or attached to a joint, but is secured by a floating bearing against vertical displacement solely against gravity.
  • the floating bearing is preferably a spring element, in particular a leaf spring, which is supported by a spring element fixation.
  • a support element which can be moved vertically as a whole by a coarse adjustment element.
  • the support element can also be located between the stamp to be embossed and the end of the roller carrier or right at the end of the roller carrier.
  • On the support element there is a fine adjustment element, preferably made up of at least a bellows and/or a piezo element or a piezo column, as well as a contact element holder with a contact element located therein.
  • the contact element is preferably a ball.
  • a pressure sensor is located in the contact element holder and below the contact element.
  • the coarse adjustment element roughly positions the roller carrier and thus the rolling device.
  • the fine adjustment element allows fine positioning of the roller carrier and the rolling device.
  • the contact element serves as a detector if the roller carrier lowers too far.
  • the rolling device itself moves within the roller carrier in a range of motion S and can apply the corresponding pressure there.
  • the diameter of the rolling device is less than 100 mm, preferably less than 80 mm, even more preferably less than 60 mm, most preferably less than 40 mm, and most preferably less than 30 mm.
  • the smaller the diameter of the rolling device the larger the angle between the tangent to the rolling device and the flat surface of the embossing element. With a larger angle, the air displacement between the rolling device and the embossing element improves and thus the embossing result.
  • a further advantage of a small diameter is that the amount of electrostatic charge generated, which can arise from the rolling process via contact or frictional electricity, is minimized.
  • the larger the diameter of the rolling device the larger the area over which charge carriers can be transferred from the rolling device to the embossing element or vice versa. In particular, the ratio of length to diameter of the rolling device should be as large as possible.
  • the rolling device is therefore designed to be earthed in order to be able to dissipate electrostatic charges.
  • Figure 1 shows an embodiment according to the prior art
  • Figure 2a shows a first exemplary embodiment of a rolling device according to the present invention
  • Figure 2b shows a second exemplary embodiment of a rolling device according to the present invention
  • Figure 2c shows a third exemplary embodiment of a rolling device according to the present invention
  • Figure 2d shows a fourth exemplary embodiment of a rolling device according to the present invention
  • Figure 2e shows a fifth exemplary embodiment of a rolling device according to the present invention
  • Figure 3 shows the third embodiment of a rolling device in use
  • Fig. 4a/4b an abstracted top view of an embossing process in two positions or for two consecutive contact surfaces
  • Figure 5 shows a system according to an exemplary embodiment of the present invention.
  • Figure 1 shows a rolling device 1 from the prior art, consisting of a core element 2 and a casing element 3.
  • Figure 2a shows a first preferred embodiment of a rolling device 1 according to the present invention, which comprises a core element 2 and a casing element 3.
  • the core element 2 is a solid body with, in the present case, a convex curvature of the core element surface 2o. It is also conceivable that the core element surface 2o is concavely curved or wavy.
  • Figure 2b shows a second preferred embodiment of a rolling device 1 according to the present invention, which comprises a core element 2 and a casing element 3.
  • the core element 2 is designed as a hollow body in order to be able to supply a core element interior 4 with a fluid and/or evacuate it.
  • a Pressure in the core element interior 4 is increased by a fluid so that the core element surface 2o takes on a convex shape.
  • the core element surface 2o is concavely curved, in particular by creating a vacuum in the core element interior 4.
  • the shell element surface 3o will also deform accordingly in this embodiment.
  • the core element interior 4 is filled or evacuated with a fluid via a fluid opening 5.
  • the curvature of the shell element surface 3o shown in the figure is not to scale and is only shown explicitly for the sake of clarity. This embodiment is particularly suitable for pressurization in which an increased pressure must be applied in the center of the rolling device 1.
  • Figure 2c shows a third preferred embodiment of a rolling device 1, which comprises a core element 2 and a casing element 3.
  • the core element 2 was structured directly from a shaft 7, preferably by milling, even more preferably by turning.
  • the core element 2 comprises a sequence of radially symmetrical grooves 17, in particular obtained directly by calculation or by simulation.
  • the width and position of the grooves 17 of this groove sequence is preferably selected so that when pressure is applied, the line force generated in a contact surface is as homogeneous as possible (see Figure 3 below).
  • this embodiment is an elegant way of imitating the pressure behavior of a rolling device 1 according to Figure 2a.
  • Convex rolling devices 1 according to Figure 2a are relatively difficult to form with small tolerances for large ratios of roller length to roller diameter. By structuring the core of the rolling device 1, however, at least the pressure behavior of a rolling device 1 according to Figure 2a can be simulated.
  • rolling devices 1 that can be switched and/or controlled in a spatially resolved manner.
  • Figure 2d shows a fourth preferred embodiment of a rolling device 1 according to the present invention, which comprises a core element 2 and a casing element 3, wherein the core element 2 is constructed from a plurality of core sections 6, particularly preferably eight individual core sections 6.
  • the core sections 6 are fixed on a shaft 7.
  • the third and sixth core sections 6 from the left were cut halfway in order to be able to illustrate the construction of an individual core section 6.
  • a core section 6 comprises at least a first annular electrode 8, a piezoelectric ring 9 and a second annular electrode 8.
  • the first annular electrode rode 8 rests on the shaft 7.
  • the second ring-shaped electrode 8 contacts the casing element 3.
  • the piezoelectric ring 8 is enclosed by the two ring electrodes 8.
  • a voltage can be applied between the two ring-shaped electrodes 8 of each core section 6.
  • a voltage U>0 see sixth core element 6 from the left
  • the piezoelectric ring 9 expands radially.
  • Wiring is preferably carried out via the shaft 7 and is continued at the edge of the shaft 7 in a manner not specified in more detail.
  • Figure 2e shows a fifth preferred embodiment of a rolling device 1 of the present invention, which comprises a core element 2, which is made up of a plurality of core sections 6, shown as eight individual core sections 6.
  • the core sections 6 are fixed on a shaft 7.
  • the third and sixth core sections 6 from the left have been cut open on one side in order to be able to show the structure of a core section 6.
  • a core section 6 comprises at least one annular expansion element 15, which can experience a change in length due to thermal expansion when thermally applied.
  • the annular expansion element 15 rests on the shaft 7.
  • the annular expansion element 15 contains a heater 16, preferably a simple heating wire, which converts electricity into Joule heat. A voltage can be applied to the heater 16 in order to generate the flow of current.
  • the ring-shaped expansion element 15 expands radially due to thermal expansion.
  • the wiring is preferably carried out via the shaft 7 and is continued at the edge of the shaft 7 in a manner not specified in more detail.
  • Figure 3 shows the rolling device 1 according to Figure 2c, which transmits a force, in particular a line force, to an embossing element 30, in particular with a stamp 11, wherein the stamp 11 was manufactured on a carrier 10.
  • the carrier 10 is usually referred to in English as a "back-plane".
  • the carrier 10 is preferably made of a transparent material, in particular glass, so that the embossing compound 12, which is embossed by the stamp 11, can be cured from the side of the carrier 10 by means of UV light.
  • the embossing compound 12 was cured on a Substrate 13 is deposited.
  • the lower part of Figure 3 shows a pressure-location diagram.
  • the abscissa represents the position and the ordinate the pressure along a line of the substrate 13.
  • the rolling device 1 is pressed onto the carrier 10 on the left and right sides by the forces F and thus generates a line pressure along the stamp 11 or the embossing mass 12.
  • the pressure line has a width of less than 10 mm, preferably less than 8 mm, even more preferably less than 5 mm, most preferably less than 3 mm, most preferably less than 1 mm.
  • Figure 4a shows an abstract top view of an embossing process or a top view of an embossing process in a first position in the sense of the present invention. Only the most important components are shown.
  • the embossing element 30 embosses the circular substrate 13 by applying pressure to the rolling device 1.
  • the rolling device 1 is shown semi-transparently in order to be able to show the approximate length L1 of the force effect or the contact area. It can be seen that the length L1 of the line pressure at the beginning of the substrate 13 is much smaller than the diameter of the substrate 13.
  • the left and right forces F acting on the rolling device 1 (see Figure 3) must also be correspondingly small.
  • the force as a function of the translation direction y of the rolling device 1 for the left and right bearings of the rolling device 1 are shown on the left and right sides.
  • Figure 4b shows an abstracted top view of an embossing process or a top view of the embossing process in a second position, wherein in the second position the rolling device 1 rests against an adjacent contact surface with a greater length, namely L2.
  • the rolling device 1 was moved along the translation direction y and is located in the middle of the substrate 13.
  • the length of the line pressure has also increased accordingly to L2.
  • the control of the line pressure along the translation direction of the rolling device 1 is force-controlled and the line pressure along a normal to the translation direction is geometry-controlled.
  • Figure 5 shows an abstracted side view of a system 26 with a rolling device 1 according to the invention.
  • the suspension of the rolling device 1 on a roller carrier 21, as well as the components for the translational movement along the translation direction T of the rolling device 1 are not shown.
  • the rolling device 1 can be moved along a range of motion S, in particular along a translation direction T.
  • the rolling device 1 is connected to a spring element 19 via a roller carrier 21.
  • the spring element 19 is fixed by a spring element fixation 20.
  • the roller carrier 21 is supported between the spring element fixation 20 and the rolling device 1, in particular in the middle, by a fine adjustment element 25.
  • the fine adjustment element 25 is able to raise or lower the roller carrier 21 and all components fixed to it with a small travel path.
  • the fine adjustment element 25 is in particular a bellows, a piezo element or a piezo column and can be regulated or controlled by switching elements (not shown).
  • a contact element 22 is mounted in a contact element holder 23.
  • a readable pressure sensor (not shown).
  • the fine adjustment element 25 and the contact element 22 can be positioned together in height by a coarse adjustment element 24.
  • the coarse adjustment element 24 can be a motor with or without a gear, in particular a linear motor.
  • the elements 22, 23, 24 and 25 together form a support element 27.
  • the support element 27 can also be located at the end of the roller carrier 21.
  • the coarse adjustment element 24 ensures that the roller carrier 21 and thus the rolling device 1 can assume their starting position. In particular, this is the position in which the rolling device 1 just touches the carrier 10 on which the stamp 11 was produced. In this position, the fine adjustment element 25 can then carry out the fine positioning.
  • the contact element 22 allows the force exerted by the roller carrier 21 and all of the components fixed to it to be measured via the pressure sensor installed in the contact element fixation 23.
  • the position of the rolling device 1 and the existing lever arm can be used to calculate the average pressure applied by the rolling device 1 to the carrier 10 and thus to the stamp 11 and the embossing compound 12 to be embossed with it.
  • the actual pressure distribution is preferably measured by pressure sensors in the rolling device 1.
  • the advantage of this system 26 is that it is easy to implement and economical. It is also conceivable that the substrate 13 does not lie directly on the base 18, but that a substrate holder is located between the substrate 13 and the base 18. Sensors, preferably pressure sensors, can also be installed in the base 13 and/or in a substrate holder. Any substrate holder could be tempered, i.e. heated or cooled, in order to be able to adjust the temperature of the embossing process. By increasing the temperature, the viscosity of the material to be The temperature can be influenced by the embossing mass 12. Peltier elements would be particularly preferred for heating and/or cooling, as these can be easily installed and are particularly easy to control electrically. Furthermore, temperature control can have a positive influence on the pressure homogeneity to be achieved.
  • the floating bearing design with the aid of a spring 19 allows a design in which the bearing does not react on the rolling device 1 and influence the embossing.
  • the roller carrier 21 preferably rests only on the spring element 19 and is pressed downwards exclusively by gravity, i.e. a vertical force.
  • the fine adjustment element 25 and the contact element 22 apply the corresponding counterforce. Ideally, this means that no horizontal forces are generated that would cause the rolling device 1 to slide during the contacting process and thus destroy the embossing pattern.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Abstract

L'invention concerne un dispositif de rouleau (1) servant à appliquer une pression sur un élément de gaufrage (30) qui, pendant un processus de gaufrage, introduit une structure de surface dans un objet, en particulier un composé de gaufrage (12). Lors du processus de gaufrage, le dispositif de rouleau (1) agit sur l'élément de gaufrage (30) par l'intermédiaire d'une face de contact et se déplace de manière rotative le long d'une direction de translation (T) autour d'un axe de rotation (R) afin d'agir sur l'élément de gaufrage (30) sur des faces de contact qui sont décalées l'une par rapport à l'autre le long de la direction de translation (T), en particulier l'une après l'autre. Le dispositif comprend : - un élément de noyau (2) et - un élément de boîtier (3) entourant l'élément de noyau (2), l'élément de noyau (2) et l'élément de boîtier (3) étant conçus de telle sorte qu'un effet de force agit de manière homogène sur l'élément de gaufrage tant sur la face de contact le long d'une direction perpendiculaire à la direction de translation (T) que sur une pluralité de faces de contact qui se suivent dans la direction de translation (T).
PCT/EP2023/066089 2023-06-15 2023-06-15 Dispositif et système de rouleau et procédé d'introduction de structure de surface dans un objet Ceased WO2024256009A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112023006504.7T DE112023006504A5 (de) 2023-06-15 2023-06-15 Rollvorrichtung sowie Anlage und Verfahren zum Einlassen einer Oberflächenstruktur in einem Objekt
PCT/EP2023/066089 WO2024256009A1 (fr) 2023-06-15 2023-06-15 Dispositif et système de rouleau et procédé d'introduction de structure de surface dans un objet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2023/066089 WO2024256009A1 (fr) 2023-06-15 2023-06-15 Dispositif et système de rouleau et procédé d'introduction de structure de surface dans un objet

Publications (1)

Publication Number Publication Date
WO2024256009A1 true WO2024256009A1 (fr) 2024-12-19

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DE (1) DE112023006504A5 (fr)
WO (1) WO2024256009A1 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0130452A1 (fr) * 1983-06-27 1985-01-09 Hoechst Aktiengesellschaft Dispositif de fusion à rouleaux comprenant un rouleau de fusion chauffé à l'intérieur et un rouleau de pression
US5195430A (en) * 1989-05-24 1993-03-23 Tektronix, Inc. Dual roller apparatus for pressure fixing sheet material
US5662574A (en) 1995-03-20 1997-09-02 Slotten; John A. Pressure roller
US20120247355A1 (en) * 2009-12-22 2012-10-04 Berniard Tracie J Apparatus and method for microcontact printing using a pressurized roller
WO2014037044A1 (fr) 2012-09-06 2014-03-13 Ev Group E. Thallner Gmbh Poinçon structuré, dispositif et procédé pour l'estampage
WO2021098953A1 (fr) * 2019-11-19 2021-05-27 Ev Group E. Thallner Gmbh Appareil et procédé de formation de motifs de microstructures et/ou de nanostructures
US20220396026A1 (en) * 2019-11-12 2022-12-15 Morphotonics Holding B.V. Apparatus for a roll-to-plate imprinting process comprising a plate carrier with cavity

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0130452A1 (fr) * 1983-06-27 1985-01-09 Hoechst Aktiengesellschaft Dispositif de fusion à rouleaux comprenant un rouleau de fusion chauffé à l'intérieur et un rouleau de pression
US5195430A (en) * 1989-05-24 1993-03-23 Tektronix, Inc. Dual roller apparatus for pressure fixing sheet material
US5662574A (en) 1995-03-20 1997-09-02 Slotten; John A. Pressure roller
US20120247355A1 (en) * 2009-12-22 2012-10-04 Berniard Tracie J Apparatus and method for microcontact printing using a pressurized roller
WO2014037044A1 (fr) 2012-09-06 2014-03-13 Ev Group E. Thallner Gmbh Poinçon structuré, dispositif et procédé pour l'estampage
US20220396026A1 (en) * 2019-11-12 2022-12-15 Morphotonics Holding B.V. Apparatus for a roll-to-plate imprinting process comprising a plate carrier with cavity
WO2021098953A1 (fr) * 2019-11-19 2021-05-27 Ev Group E. Thallner Gmbh Appareil et procédé de formation de motifs de microstructures et/ou de nanostructures

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