WO2026038403A1 - Système de traitement par membrane d'osmose inverse à plusieurs étages - Google Patents

Système de traitement par membrane d'osmose inverse à plusieurs étages

Info

Publication number
WO2026038403A1
WO2026038403A1 PCT/JP2025/019656 JP2025019656W WO2026038403A1 WO 2026038403 A1 WO2026038403 A1 WO 2026038403A1 JP 2025019656 W JP2025019656 W JP 2025019656W WO 2026038403 A1 WO2026038403 A1 WO 2026038403A1
Authority
WO
WIPO (PCT)
Prior art keywords
reverse osmosis
osmosis membrane
water
stage
treatment system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2025/019656
Other languages
English (en)
Japanese (ja)
Inventor
幸也 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kurita Water Industries Ltd
Original Assignee
Kurita Water Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Industries Ltd filed Critical Kurita Water Industries Ltd
Publication of WO2026038403A1 publication Critical patent/WO2026038403A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/10—Accessories; Auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/12—Controlling or regulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/58—Multistep processes

Definitions

  • the present invention relates to a multi-stage reverse osmosis membrane treatment system, and in particular to a multi-stage reverse osmosis membrane treatment system that can produce treated water of a predetermined level of quality while reducing operating energy.
  • Pure water such as ultrapure water, from which organic matter, ionic components, fine particles, bacteria, etc. have been highly removed, has traditionally been used as cleaning water in the manufacturing processes for semiconductor devices and liquid crystal displays.
  • pure water production equipment using a multi-stage reverse osmosis membrane treatment system, in which two or more stages of reverse osmosis membranes (RO membranes) are connected in series, is widely used, as it is highly versatile and can easily produce the desired water quality.
  • RO membranes reverse osmosis membranes
  • Patent Document 1 proposes a reverse osmosis membrane treatment system comprising a first reverse osmosis membrane treatment means that passes water to be treated through a first reverse osmosis membrane to obtain a first permeate and a first concentrate, and a second reverse osmosis membrane treatment means that passes at least the first permeate through a second reverse osmosis membrane to obtain a second permeate and a second concentrate, wherein the permeation flux per 1 MPa of effective pressure of the second reverse osmosis membrane is lower than the permeation flux per 1 MPa of effective pressure of the first reverse osmosis membrane, and the permeation flux per 1 MPa of effective pressure of the second reverse osmosis membrane is 0.5 m3 / m2 /d or less.
  • Patent Document 2 discloses a pure water production system 11 including a storage tank 12 for storing raw water (water to be treated W0) and a water supply pipe 13 connected to the storage tank 12, the water supply pipe 13 sequentially provided with a liquid feed pump 14, a first reverse osmosis membrane 15, a second reverse osmosis membrane 16, and an ion exchange device 17.
  • a reverse osmosis membrane having a permeation flux of 0.8 m 3 /(m 2 ⁇ day) or more per effective membrane surface pressure of 1 MPa (water temperature 25°C, pure water (RO permeate)) is used as the first reverse osmosis membrane 15, and a reverse osmosis membrane having a permeation flux of 2.0 m 3 /(m 2 ⁇ day) or more per effective membrane surface pressure of 1 MPa (water temperature 25°C, pure water (RO permeate)) is used as the second reverse osmosis membrane 16, thereby achieving both reduced operating energy and good water quality.
  • the reverse osmosis membrane treatment system described in Patent Document 1 aims to improve water quality by removing IPA from the permeate water, and has the problem of being less effective in reducing operating energy. Therefore, it is possible to consider combining it with a reverse osmosis membrane, which requires less operating energy, but this creates the problem of making it difficult to obtain treated water from which weakly acidic ionic species such as boron and silica have been sufficiently removed.
  • the multi-stage reverse osmosis membrane treatment system described in Patent Document 2 is capable of removing weakly acidic ion species such as boron and silica while reducing operating energy consumption, but there is still room for improvement in terms of water quality.
  • the present invention was made in consideration of the above-mentioned problems, and aims to provide a multi-stage reverse osmosis membrane treatment system that can produce high-quality treated water while reducing operating energy consumption.
  • the present invention provides a multistage reverse osmosis membrane treatment system in which reverse osmosis membranes are arranged in series in two stages, wherein of the two stages of reverse osmosis membranes, the first reverse osmosis membrane in the front stage has a permeation flux of 2.0 m3 /( m2 ⁇ day) or more per effective membrane surface pressure of 1 MPa (water temperature 25°C, pure water (RO permeate)), and the second reverse osmosis membrane in the rear stage has a permeation flux of 0.8 m3 /( m2 ⁇ day) or more but less than 2.0 m3 /( m2 ⁇ day) per effective membrane surface pressure of 1 MPa (water temperature 25°C, pure water (RO permeate)), and the multistage reverse osmosis membrane treatment system has alkali addition means for adjusting the pH of the water to be treated by the first reverse osmosis membrane to the alkaline side.
  • invention 1 by using a reverse osmosis membrane (first reverse osmosis membrane) with a high permeation flux per 1 MPa of effective membrane surface pressure (low effective membrane surface pressure at the same permeation flux), it is possible to significantly reduce operating energy compared to a multi-stage reverse osmosis membrane treatment system constructed solely with reverse osmosis membranes with lower permeation fluxes.
  • boron and TOC can be maintained at or above predetermined levels. This makes it possible to achieve both reduced operating energy and water quality.
  • the boron removal rate can be improved compared to when the order of the first and second reverse osmosis membranes is reversed.
  • upstream reverse osmosis membranes have a higher water supply load and are more susceptible to membrane degradation than downstream reverse osmosis membranes.
  • the upstream reverse osmosis membrane is an ultra-low-pressure reverse osmosis membrane, its degradation will lead to a deterioration in water quality throughout the system.
  • the upstream reverse osmosis membrane is an extremely ultra-low-pressure reverse osmosis membrane, as in Invention 1, the impact on the TOC removal rate of the entire system will be minimal, as long as the downstream ultra-low-pressure membrane is in good condition.
  • the upstream reverse osmosis membrane which handles a large amount of water, is at a lower pressure, power consumption can be reduced.
  • the first reverse osmosis membrane has a Ca and Mg removal rate of 99% or more and a SiO2 removal rate of 95% or more (Invention 2).
  • invention 2 by using such a first reverse osmosis membrane, scaling in the subsequent second reverse osmosis membrane can be suppressed when treatment is performed at a high pH in the second reverse osmosis membrane.
  • invention 1 it is preferable to have a means for adding a scale inhibitor to the treated water of the second reverse osmosis membrane (Invention 3).
  • This invention makes it possible to prevent scaling in the second reverse osmosis membrane when treatment is performed at a high pH in the subsequent second reverse osmosis membrane.
  • the water quality of the water to be treated in the multi-stage reverse osmosis membrane treatment system has a boron concentration of 1 to 500 ⁇ g/L (Invention 4).
  • invention 4 by treating water with the above boron concentration using a multi-stage reverse osmosis membrane treatment system, it is possible to remove boron from the treated water at a high level of 95% or more.
  • the multi-stage reverse osmosis membrane treatment system of the present invention uses a reverse osmosis membrane in the first stage with a permeation flux per 1 MPa of effective membrane surface pressure greater than a predetermined value, and a reverse osmosis membrane in the second stage with a permeation flux per 1 MPa of effective membrane surface pressure less than a predetermined value.
  • FIG. 1 is a flow diagram showing a multistage reverse osmosis membrane treatment system according to an embodiment of the present invention.
  • FIG. 1 is a flow diagram showing a multistage reverse osmosis membrane treatment system of Comparative Example 1.
  • FIG. 1 is a flow diagram showing a pure water production apparatus using a conventional multistage reverse osmosis membrane treatment system.
  • Fig. 1 shows a multistage reverse osmosis membrane treatment system according to one embodiment of the present invention.
  • the multistage reverse osmosis membrane treatment system (two-stage reverse osmosis membrane treatment system) 1 includes a storage tank 2 for storing raw water to be treated (water WO), and a water supply pipe 3 connected to the storage tank 2.
  • the water supply pipe 3 is sequentially provided with a liquid feed pump 4, a first reverse osmosis membrane 5, and a second reverse osmosis membrane 6.
  • An NaOH aqueous solution supplying means 7 is connected upstream of the second reverse osmosis membrane 6, and a control mechanism (not shown) can control the amount of NaOH solution added to the second reverse osmosis membrane 6 based on the flow rate of the water supply pipe 3 and the pH of the water WO, so that the water reaches an alkaline region.
  • the first reverse osmosis membrane and the second reverse osmosis membrane are defined as having the following performance: Note that although there are reverse osmosis membranes that have a smaller permeation flux per 1 MPa of effective membrane surface pressure than the first reverse osmosis membrane and the second reverse osmosis membrane, these are very general-purpose reverse osmosis membranes.
  • this first reverse osmosis membrane have an effective membrane surface pressure of 0.3 MPa, a Ca and Mg removal rate of 99% or more, and a SiO2 removal rate of 95% or more.
  • ⁇ Second reverse osmosis membrane> A permeation flux (flux) of 0.6 m 3 /(m 2 ⁇ day) or more under a membrane surface effective pressure of 0.75 MPa (water temperature 25°C, pure water (RO permeate)), and a permeation flux of 0.8 to less than 2.0 m 3 /(m 2 ⁇ day) per membrane surface effective pressure of 1 MPa (water temperature 25°C, pure water (RO permeate)) Salt rejection rate: 98% or more (membrane surface effective pressure 0.75 MPa (water temperature 25°C, feed water 500 mg/L at NaCl) IPA removal rate: 80% or more (membrane surface effective pressure 0.75 MPa (water temperature 25°C, feed water 500 mg/L at IPA)
  • the liquid feed pump 4 is driven to supply the water to be treated W0 stored in the storage tank 2 to the first reverse osmosis membrane 5.
  • the water to be treated W0 preferably has a boron concentration of 1 to 500 ⁇ g/L. Ionic impurities are removed to a certain extent by the first reverse osmosis membrane 5, thereby obtaining primary treated water W1.
  • the water supply pressure of the water to be treated W0 from the liquid feed pump 4 at this time may be set based on the configuration of the reverse osmosis membrane and the desired permeation flux.
  • the water supply pressure from the liquid feed pump 4 can be set to approximate the sum of the effective membrane surface pressures at that flux.
  • the effective membrane surface pressure of the first reverse osmosis membrane 5 is 1.00 m 3 /(m 2 ⁇ day)
  • the effective membrane surface pressure of the second reverse osmosis membrane 6 is 1.0 MPa, so they should be set to 1.4 ( ⁇ 0.39 + 1.0) MPa.
  • NaOH aqueous solution is added to this primary treated water W1 using the NaOH aqueous solution adding means 7 to adjust the pH of the primary treated water W1 to the alkaline side before being treated by the second reverse osmosis membrane 6.
  • the removal rate of weakly acidic ionic species such as boron and silica remaining in the primary treated water W1 can be improved.
  • a scale inhibitor may also be added to the primary treated water W1. There are no particular restrictions on this scale inhibitor and it can be selected appropriately depending on the water quality of the primary treated water W1.
  • phosphonic acids such as 2-phosphonobutane-1,2,4-tricarboxylic acid, copolymers of acrylic acid and 2-acrylamido-2-methylpropanesulfonic acid, polyacrylic acid, phosphonic acids such as 2-phosphonobutane-1,2,4-tricarboxylic acid, polyacrylic acid, etc. can be used.
  • the amount of these scale inhibitors added is approximately 10 to 1000 mg/L.
  • the residence time of the water W0 to be treated in the first reverse osmosis membrane 5 and the second reverse osmosis membrane 6 is preferably 10 seconds or more, particularly 30 seconds or more.
  • a residence time of less than 30 seconds, particularly less than 10 seconds, is undesirable because it becomes impossible to maintain a sufficiently high removal rate of boron, as well as Ca, Mg, and SiO2 .
  • this secondary treated water W2 can be treated, if necessary, in an ion exchange device or the like to further remove remaining ionic impurities, thereby producing pure water.
  • the multistage reverse osmosis membrane treatment system 1 of this embodiment uses a first reverse osmosis membrane 5 with a permeation flux of 2.0 m3 /( m2 ⁇ day) or more per membrane surface effective pressure of 1 MPa (water temperature 25°C, pure water (RO permeate)), and the pH of the primary treated water W1 treated by this second reverse osmosis membrane 6 is adjusted to the alkaline side, so the boron removal rate of the resulting secondary treated water W2 can be maintained at a high level (e.g., 95% or more).
  • a high level e.g. 95% or more
  • the operating energy of the multistage reverse osmosis membrane treatment system 1 is approximately proportional to the water supply pressure of the water to be treated W0 from the liquid feed pump 4, i.e., the output of the liquid feed pump 4, and this can be used to compare the magnitude of operating energy.
  • the water supply pressure of the liquid supply pump 4 will theoretically be 2.0 ( ⁇ 1.0 ⁇ 2) MPa, and the operating energy reduction rate will be approximately 30% ((2.0 - 1.4) / 2.0 ⁇ 100 ⁇ 30).
  • the present invention has been described above based on the above embodiment, but the present invention is not limited to the above embodiment and can be implemented in various modified forms.
  • a case has been described in which a first reverse osmosis membrane and a second reverse osmosis membrane are connected in two stages in series.
  • the first reverse osmosis membrane is used as the reverse osmosis membrane in the previous stage, and the pH of the liquid being treated is adjusted to the alkaline side in the subsequent stage, and the system may be configured with three or more stages of reverse osmosis membranes.
  • the first reverse osmosis membrane 5 and the second reverse osmosis membrane 6 used were reverse osmosis membranes having a permeation flow rate (flux) per membrane surface effective pressure of 1 MPa (water temperature 25°C, pure water (RO permeate)) as shown in Table 1.
  • these reverse osmosis membranes were configured as an extremely low-pressure reverse osmosis membrane (first reverse osmosis membrane 5) in the first stage and an ultra-low-pressure reverse osmosis membrane (second reverse osmosis membrane 6) in the second stage.
  • Pure water to which 500 ⁇ g/L of boron had been added was used to treat treated water, the pH of which had been adjusted by the second-stage reverse osmosis membrane treatment.
  • the boron concentration was measured, and the boron removal rate was calculated.
  • Table 2 As shown in FIG. 2 , the first stage was an ultra-low pressure reverse osmosis membrane (second reverse osmosis membrane 6) and the second stage was an extremely low pressure reverse osmosis membrane (first reverse osmosis membrane 5).
  • Pure water was treated with 500 ⁇ g/L of boron added, and the treated water was used to adjust the pH of the water treated by the second reverse osmosis membrane.
  • the boron concentration was measured and the boron removal rate was calculated.
  • Table 2 Pure water to which 500 ⁇ g/L of boron had been added was used to treat treated water, the pH of which had been adjusted by the second-stage reverse osmosis membrane treatment.
  • the boron concentration was measured, and
  • Examples 1 to 4 As shown in Figure 1, in a multi-stage reverse osmosis membrane treatment system 1 with a first-stage extremely low-pressure reverse osmosis membrane (first reverse osmosis membrane 5) and a second-stage ultra-low-pressure reverse osmosis membrane (second reverse osmosis membrane 6), pure water to be treated (W0) with 20 ⁇ g/L of boron (B) added was used as feedwater, and an aqueous NaOH solution was added via an aqueous NaOH solution adding means 7 to adjust the pH to 7, 9, 10, or 11, respectively.
  • pure water to be treated W0
  • B boron
  • the boron concentrations of the treated water from the first-stage reverse osmosis membrane and the second-stage reverse osmosis membrane were measured when the recovery rate of the first-stage reverse osmosis membrane was 85% and the recovery rate of the second-stage reverse osmosis membrane was 90%.
  • the results are shown in Table 3, along with the boron concentration of the feedwater and the pH of the treated water from the second-stage reverse osmosis membrane.
  • the treatment performance of various components of the extremely low-pressure reverse osmosis membrane (first reverse osmosis membrane 5) used is shown in Table 4.
  • Comparative Examples 1 to 4 In a multi-stage reverse osmosis membrane treatment system 1 shown in Figure 2, which uses an ultra-low-pressure reverse osmosis membrane (second reverse osmosis membrane 6) as the first stage and an extremely low-pressure reverse osmosis membrane (first reverse osmosis membrane 5) as the second stage, pure water to be treated (W0) with 20 ⁇ g/L of boron (B) added was used as feedwater, and an aqueous NaOH solution was added via an aqueous NaOH solution adding means 7 to adjust the pH to 7, 9, 10, or 11, respectively.
  • W0 ultra-low-pressure reverse osmosis membrane
  • first reverse osmosis membrane 5 extremely low-pressure reverse osmosis membrane
  • the boron concentrations of the water treated by the first-stage reverse osmosis membrane and the second-stage reverse osmosis membrane were measured when the recovery rate of the first-stage reverse osmosis membrane was 85% and the recovery rate of the second-stage reverse osmosis membrane was 90%, respectively.
  • the results are shown in Table 1, along with the boron concentration of the feedwater and the pH of the water treated by the second-stage reverse osmosis membrane.
  • Example 1 in which the pH was not adjusted, had a higher boron concentration than Comparative Example 1, but Examples 2 to 4, in which the pH was adjusted, had a lower boron concentration than Comparative Examples 2 to 4, and it can be seen that the effect of reducing the boron concentration was greater as the pH increased, especially within the pH range of 9 to 11.
  • Table 4 shows that the extremely low-pressure reverse osmosis membrane (first reverse osmosis membrane 5) used in this example did not have a high boron removal performance, but achieved high removal rates of Ca, Mg, and SiO2, and is expected to be effective in suppressing scaling relative to the second-stage ultra-low-pressure reverse osmosis membrane. This is an effect that cannot be obtained with NF membranes.
  • Multi-stage reverse osmosis membrane treatment system two-stage reverse osmosis membrane treatment system
  • Storage tank 3
  • Water supply pipe 4
  • Liquid supply pump 5
  • First reverse osmosis membrane 6
  • Second reverse osmosis membrane 7
  • NaOH aqueous solution adding means alkali adding mechanism

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

L'invention porte sur un système de traitement (1) par membrane d'osmose inverse à plusieurs étages qui comprend un réservoir de stockage (2) stockant de l'eau à traiter W0 et une tuyauterie d'eau (3) reliée au réservoir de stockage (2), avec une pompe de liquide (4), une première membrane d'osmose inverse (5), et une seconde membrane d'osmose inverse (6) étant disposées dans cet ordre dans la tuyauterie d'eau (3). Un moyen d'ajout de solution NaOH (7) est relié en amont de la seconde membrane d'osmose inverse (6), et la quantité d'une solution de NaOH à ajouter peut être commandée de telle sorte que l'eau à traiter au niveau de la seconde membrane d'osmose inverse (6) atteint la plage alcaline en fonction du débit de la tuyauterie d'eau (3) et du pH de l'eau à traiter W0. La première membrane d'osmose inverse (5) a un flux de perméat d'au moins 2,0 m3 / (m2 · jour) par pression efficace de surface de membrane de 1 MPa (température d'eau 25°C, eau pure (perméat RO)). La seconde membrane d'osmose inverse (6) a un flux de perméat d'au moins 0,8 m3 / (m2 · jour) et inférieur à 2,0 m3 / (m2 · jour) par pression efficace de surface de membrane de 1 MPa (température d'eau 25°C, eau pure (perméat RO)). Un tel système de traitement par membrane d'osmose inverse à plusieurs étages peut être utilisé pour obtenir de l'eau traitée de haute qualité tout en maîtrisant la consommation d'énergie.
PCT/JP2025/019656 2024-08-14 2025-05-30 Système de traitement par membrane d'osmose inverse à plusieurs étages Pending WO2026038403A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2024-135253 2024-08-14
JP2024135253A JP2026032608A (ja) 2024-08-14 2024-08-14 多段逆浸透膜処理システム

Publications (1)

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WO2026038403A1 true WO2026038403A1 (fr) 2026-02-19

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JP (1) JP2026032608A (fr)
TW (1) TW202606971A (fr)
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09290275A (ja) * 1996-02-29 1997-11-11 Toray Ind Inc 水中のほう素の除去装置およびその方法
JP2005342587A (ja) * 2004-06-01 2005-12-15 Toray Ind Inc 造水方法および造水装置
WO2018092852A1 (fr) * 2016-11-18 2018-05-24 オルガノ株式会社 Système et procédé de traitement par membrane d'osmose inverse
WO2019244443A1 (fr) * 2018-06-20 2019-12-26 オルガノ株式会社 Procédé d'élimination de bore d'eau à traiter, système d'élimination de bore, système de production d'eau ultrapure et procédé de mesure de la concentration en bore
WO2023084902A1 (fr) * 2021-11-09 2023-05-19 栗田工業株式会社 Système de traitement par membrane d'osmose inverse à plusieurs étages

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09290275A (ja) * 1996-02-29 1997-11-11 Toray Ind Inc 水中のほう素の除去装置およびその方法
JP2005342587A (ja) * 2004-06-01 2005-12-15 Toray Ind Inc 造水方法および造水装置
WO2018092852A1 (fr) * 2016-11-18 2018-05-24 オルガノ株式会社 Système et procédé de traitement par membrane d'osmose inverse
WO2019244443A1 (fr) * 2018-06-20 2019-12-26 オルガノ株式会社 Procédé d'élimination de bore d'eau à traiter, système d'élimination de bore, système de production d'eau ultrapure et procédé de mesure de la concentration en bore
WO2023084902A1 (fr) * 2021-11-09 2023-05-19 栗田工業株式会社 Système de traitement par membrane d'osmose inverse à plusieurs étages

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