ZA200302246B - Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride. - Google Patents

Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride.

Info

Publication number: ZA200302246B
Authority: ZA; South Africa
Prior art keywords: liquid; elimination; manufacture; reduction; mfz
Prior art date: 2002-03-20

Application number

ZA200302246A

Other languages

English (en)

Inventor

Athanasios Tsirukis

John Theodore Leleck

Howard Paul Whithers Jr

Kenneth E Fegley

Original Assignee

Air Prod & Chem

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-03-20

Filing date

2003-03-20

Publication date

2004-09-20

2003-03-20 Application filed by Air Prod & Chem filed Critical Air Prod & Chem

2004-09-20 Publication of ZA200302246B publication Critical patent/ZA200302246B/xx

Links

238000000034 method Methods 0.000 title abstract 3
230000008030 elimination Effects 0.000 title abstract 2
238000003379 elimination reaction Methods 0.000 title abstract 2
238000004519 manufacturing process Methods 0.000 title abstract 2
239000006227 byproduct Substances 0.000 title 1
QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 title 1
GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 abstract 4
239000007788 liquid Substances 0.000 abstract 3
239000010808 liquid waste Substances 0.000 abstract 2
239000000203 mixture Substances 0.000 abstract 2
238000006243 chemical reaction Methods 0.000 abstract 1
239000002699 waste material Substances 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
- C01B7/195—Separation; Purification
- C01B7/196—Separation; Purification by distillation

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Inorganic Chemistry (AREA)
Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Treating Waste Gases (AREA)
Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Degasification And Air Bubble Elimination (AREA)
Gas Separation By Absorption (AREA)

ZA200302246A 2002-03-20 2003-03-20 Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride. ZA200302246B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US10/102,488 US6790428B2 (en)	2002-03-20	2002-03-20	Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride

Publications (1)

Publication Number	Publication Date
ZA200302246B true ZA200302246B (en)	2004-09-20

Family

ID=27788359

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
ZA200302246A ZA200302246B (en)	2002-03-20	2003-03-20	Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride.

Country Status (8)

Country	Link
US (1)	US6790428B2 (de)
EP (1)	EP1346952B1 (de)
JP (1)	JP4125620B2 (de)
KR (1)	KR100559919B1 (de)
AT (1)	ATE393118T1 (de)
DE (1)	DE60320477T2 (de)
TW (1)	TW593131B (de)
ZA (1)	ZA200302246B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6986874B2 (en) *	2000-12-14	2006-01-17	The Boc Group, Inc.	Method and apparatus for the production of nitrogen trifluoride
KR100452233B1 (ko) *	2002-07-19	2004-10-12	한국과학기술연구원	젯트루프식 분사형 반응기를 이용한 삼불화질소 제조방법
US7128885B2 (en) *	2002-12-23	2006-10-31	The Boc Group, Inc.	NF3 production reactor
CN101103638B (zh) *	2003-12-01	2013-03-27	美商内数位科技公司	最佳化存取点信道选择的无线通信方法及装置
US7045107B2 (en) *	2004-09-20	2006-05-16	Air Products And Chemicals, Inc.	Process for the production of nitrogen trifluoride
US20110023908A1 (en) *	2009-07-30	2011-02-03	Applied Materials, Inc.	Methods and apparatus for process abatement with recovery and reuse of abatement effluent
CN102821825B (zh) *	2010-04-08	2015-12-02	索尔维公司	使用纯化过的氟制造电子器件的方法
KR101380719B1 (ko) *	2011-08-10	2014-04-07	주식회사 에너엔비텍	분리막 투과증발을 이용한 불산폐액 농축장치 및 방법
US20130341178A1 (en) *	2012-06-21	2013-12-26	Air Products And Chemicals Inc.	Method and Apparatus for Removing Contaminants from Nitrogen Trifluoride
KR20180064753A (ko)	2016-12-06	2018-06-15	에스케이이노베이션 주식회사	삼불화질소(nf3) 가스 제조 공정의 폐수처리 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4091081A (en)	1977-04-19	1978-05-23	Air Products And Chemicals, Inc.	Preparation of nitrogen trifluoride
JPS6071503A (ja) *	1983-09-27	1985-04-23	Central Glass Co Ltd	Νｆ↓３の製造法
US5637285A (en) *	1996-01-30	1997-06-10	Air Products And Chemicals, Inc.	Process for nitrogen trifluoride synthesis
JP3727797B2 (ja) *	1998-05-22	2005-12-14	セントラル硝子株式会社	三フッ化窒素の製造方法

2002
- 2002-03-20 US US10/102,488 patent/US6790428B2/en not_active Expired - Fee Related
2003
- 2003-03-19 TW TW092106110A patent/TW593131B/zh not_active IP Right Cessation
- 2003-03-20 ZA ZA200302246A patent/ZA200302246B/xx unknown
- 2003-03-20 JP JP2003078342A patent/JP4125620B2/ja not_active Expired - Fee Related
- 2003-03-20 EP EP03006215A patent/EP1346952B1/de not_active Expired - Lifetime
- 2003-03-20 DE DE60320477T patent/DE60320477T2/de not_active Expired - Lifetime
- 2003-03-20 AT AT03006215T patent/ATE393118T1/de not_active IP Right Cessation
- 2003-03-20 KR KR1020030017304A patent/KR100559919B1/ko not_active Expired - Fee Related

Also Published As

Publication number	Publication date
US6790428B2 (en)	2004-09-14
EP1346952A3 (de)	2004-04-07
JP4125620B2 (ja)	2008-07-30
JP2004035391A (ja)	2004-02-05
EP1346952A2 (de)	2003-09-24
KR100559919B1 (ko)	2006-03-13
US20030180211A1 (en)	2003-09-25
EP1346952B1 (de)	2008-04-23
ATE393118T1 (de)	2008-05-15
DE60320477D1 (de)	2008-06-05
KR20030076390A (ko)	2003-09-26
DE60320477T2 (de)	2009-05-07
TW593131B (en)	2004-06-21
TW200304426A (en)	2003-10-01

Similar Documents

Publication	Publication Date	Title
ZA200302246B (en)	2004-09-20	Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride.
WO2004094023A3 (en)	2005-06-09	Process for the treatment of waste or gaseous streams
WO2004094569A3 (en)	2005-02-24	Urea based composition and system for same
WO2003037497A3 (en)	2004-04-15	Method of etching high aspect ratio features
EP0787684A3 (de)	1998-03-11	Verfahren zur Herstellung von Stickstofftrifluorid
BR0309140A (pt)	2005-02-01	Processo para a remoção de óxidos de nitrogênio
WO2002066378A3 (en)	2003-03-27	Methods of producing substantially anatase-free titanium dioxide with silicon halide addition
TW200501241A (en)	2005-01-01	Method for cleaning thin-film forming apparatus
WO2007081492A3 (en)	2008-02-14	High growth rate methods of producing high-quality diamonds
WO2005104215A3 (en)	2005-12-22	Method and system for adjusting a chemical oxide removal process using partial pressure
ZA200110101B (en)	2002-07-03	Method and apparatus for the production of nitrogen trifluoride.
WO2006105875A3 (de)	2007-02-01	Verfahren und vorrichtung zur gewinnung von stickstoffdünger und zur phosphatentfernung aus organischen abfallprodukten sowie zur begrenzung des kaliumgehaltes
MXPA04005443A (es)	2006-02-24	Proceso para preparacion de metionina.
NZ539707A (en)	2006-03-31	Process for preparing 4-substituted 2,2,6,6-tetramethylpiperidin-N-oxy and 2,2,6,6-tetramethylpiperidin-N-hydroxy compounds
WO2003089389A3 (en)	2004-03-18	Method for manufacturing ionic liquid catalysts
ATE511495T1 (de)	2011-06-15	Verfahren zur verarbeitung von organischem material
ATE277710T1 (de)	2004-10-15	Verfahren zur herstellung eines aufschäumbaren halbzeuges sowie halbzeug
ZA200308992B (en)	2005-07-27	Method for nitrogen triflouride production
WO2001085603A3 (en)	2002-04-18	Process for producing nitrogen trifluoride and use thereof
MXPA05010108A (es)	2006-03-23	Proceso para la produccion de trifluoruro de nitrogeno.
WO2005080267A3 (en)	2006-02-09	Reactor and process
AU7433100A (en)	2001-07-09	Process for the preparation of diazomethane
WO2000058208A3 (de)	2001-04-26	Verfahren zur herstellung hochreiner lösungen unter verwendung von gasförmigem fluorwasserstoff
TW372937B (en)	1999-11-01	Improvement in and relating to the storage, transportation and production of active fluorine
EP0895801A3 (de)	1999-04-14	Verfahren zur Zersetzung von Stickstofffluorid oder Schwefelfluorid und Zersetzungsmittel dafür