ATE393118T1 - Verfahren zur erniedrigung oder entfernung von nh3/hf nebenprodukten bei der hestellung von stickstofftriflourid - Google Patents

Verfahren zur erniedrigung oder entfernung von nh3/hf nebenprodukten bei der hestellung von stickstofftriflourid

Info

Publication number: ATE393118T1
Authority: AT; Austria
Prior art keywords: liquid; mfz; products; decrease; removal
Prior art date: 2002-03-20

Application number

AT03006215T

Other languages

English (en)

Inventor

Athanasios Tsirukis

John Theodore Lileck

Howard Paul Withers

Kenneth E Fegley

Original Assignee

Air Prod & Chem

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-03-20

Filing date

2003-03-20

Publication date

2008-05-15

2003-03-20 Application filed by Air Prod & Chem filed Critical Air Prod & Chem

2008-05-15 Application granted granted Critical

2008-05-15 Publication of ATE393118T1 publication Critical patent/ATE393118T1/de

Links

238000000034 method Methods 0.000 title abstract 3
238000004519 manufacturing process Methods 0.000 title abstract 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title 2
239000006227 byproduct Substances 0.000 title 1
229910052757 nitrogen Inorganic materials 0.000 title 1
GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 abstract 4
239000007788 liquid Substances 0.000 abstract 3
239000010808 liquid waste Substances 0.000 abstract 2
239000000203 mixture Substances 0.000 abstract 2
238000006243 chemical reaction Methods 0.000 abstract 1
230000008030 elimination Effects 0.000 abstract 1
238000003379 elimination reaction Methods 0.000 abstract 1
239000002699 waste material Substances 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
- C01B7/195—Separation; Purification
- C01B7/196—Separation; Purification by distillation

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Inorganic Chemistry (AREA)
Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Treating Waste Gases (AREA)
Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Degasification And Air Bubble Elimination (AREA)
Gas Separation By Absorption (AREA)

AT03006215T 2002-03-20 2003-03-20 Verfahren zur erniedrigung oder entfernung von nh3/hf nebenprodukten bei der hestellung von stickstofftriflourid ATE393118T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US10/102,488 US6790428B2 (en)	2002-03-20	2002-03-20	Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride

Publications (1)

Publication Number	Publication Date
ATE393118T1 true ATE393118T1 (de)	2008-05-15

Family

ID=27788359

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT03006215T ATE393118T1 (de)	2002-03-20	2003-03-20	Verfahren zur erniedrigung oder entfernung von nh3/hf nebenprodukten bei der hestellung von stickstofftriflourid

Country Status (8)

Country	Link
US (1)	US6790428B2 (de)
EP (1)	EP1346952B1 (de)
JP (1)	JP4125620B2 (de)
KR (1)	KR100559919B1 (de)
AT (1)	ATE393118T1 (de)
DE (1)	DE60320477T2 (de)
TW (1)	TW593131B (de)
ZA (1)	ZA200302246B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6986874B2 (en) *	2000-12-14	2006-01-17	The Boc Group, Inc.	Method and apparatus for the production of nitrogen trifluoride
KR100452233B1 (ko) *	2002-07-19	2004-10-12	한국과학기술연구원	젯트루프식 분사형 반응기를 이용한 삼불화질소 제조방법
US7128885B2 (en) *	2002-12-23	2006-10-31	The Boc Group, Inc.	NF3 production reactor
CN101103638B (zh) *	2003-12-01	2013-03-27	美商内数位科技公司	最佳化存取点信道选择的无线通信方法及装置
US7045107B2 (en) *	2004-09-20	2006-05-16	Air Products And Chemicals, Inc.	Process for the production of nitrogen trifluoride
US20110023908A1 (en) *	2009-07-30	2011-02-03	Applied Materials, Inc.	Methods and apparatus for process abatement with recovery and reuse of abatement effluent
CN102821825B (zh) *	2010-04-08	2015-12-02	索尔维公司	使用纯化过的氟制造电子器件的方法
KR101380719B1 (ko) *	2011-08-10	2014-04-07	주식회사 에너엔비텍	분리막 투과증발을 이용한 불산폐액 농축장치 및 방법
US20130341178A1 (en) *	2012-06-21	2013-12-26	Air Products And Chemicals Inc.	Method and Apparatus for Removing Contaminants from Nitrogen Trifluoride
KR20180064753A (ko)	2016-12-06	2018-06-15	에스케이이노베이션 주식회사	삼불화질소(nf3) 가스 제조 공정의 폐수처리 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4091081A (en)	1977-04-19	1978-05-23	Air Products And Chemicals, Inc.	Preparation of nitrogen trifluoride
JPS6071503A (ja) *	1983-09-27	1985-04-23	Central Glass Co Ltd	Νｆ↓３の製造法
US5637285A (en) *	1996-01-30	1997-06-10	Air Products And Chemicals, Inc.	Process for nitrogen trifluoride synthesis
JP3727797B2 (ja) *	1998-05-22	2005-12-14	セントラル硝子株式会社	三フッ化窒素の製造方法

2002
- 2002-03-20 US US10/102,488 patent/US6790428B2/en not_active Expired - Fee Related
2003
- 2003-03-19 TW TW092106110A patent/TW593131B/zh not_active IP Right Cessation
- 2003-03-20 ZA ZA200302246A patent/ZA200302246B/xx unknown
- 2003-03-20 JP JP2003078342A patent/JP4125620B2/ja not_active Expired - Fee Related
- 2003-03-20 EP EP03006215A patent/EP1346952B1/de not_active Expired - Lifetime
- 2003-03-20 DE DE60320477T patent/DE60320477T2/de not_active Expired - Lifetime
- 2003-03-20 AT AT03006215T patent/ATE393118T1/de not_active IP Right Cessation
- 2003-03-20 KR KR1020030017304A patent/KR100559919B1/ko not_active Expired - Fee Related

Also Published As

Publication number	Publication date
US6790428B2 (en)	2004-09-14
EP1346952A3 (de)	2004-04-07
JP4125620B2 (ja)	2008-07-30
JP2004035391A (ja)	2004-02-05
EP1346952A2 (de)	2003-09-24
KR100559919B1 (ko)	2006-03-13
US20030180211A1 (en)	2003-09-25
EP1346952B1 (de)	2008-04-23
DE60320477D1 (de)	2008-06-05
KR20030076390A (ko)	2003-09-26
DE60320477T2 (de)	2009-05-07
TW593131B (en)	2004-06-21
ZA200302246B (en)	2004-09-20
TW200304426A (en)	2003-10-01

Similar Documents

Publication	Publication Date	Title
ATE393118T1 (de)	2008-05-15	Verfahren zur erniedrigung oder entfernung von nh3/hf nebenprodukten bei der hestellung von stickstofftriflourid
ATE240938T1 (de)	2003-06-15	Verfahren zur herstellung von alkansulfonsäuren
ATE293014T1 (de)	2005-04-15	Katalysator zum abbau von distickstoffoxid sowie methode zur durchführung von verfahren, welche die bildung von distickstoffoxid beinhalten
ATE367436T1 (de)	2007-08-15	Verfahren und materialien zur produktion von d- milchsäure in hefe
ATE484492T1 (de)	2010-10-15	Verfahren zur kontinuierlichen herstellung von isocyanaten
ATE527233T1 (de)	2011-10-15	Verfahren zur herstellung von alkandiol
EP0877009A4 (de)	1999-03-17	Verfahren zur herstellung von 1,1,1,3,3,-pentafluoropropanen
ATE207859T1 (de)	2001-11-15	Verfahren zur herstellung von pentafluorethan
WO2004048207A3 (de)	2004-11-25	Verfahren zur herstellung und/oder handhabung eines hochreinen gegenstandes
DE60327457D1 (de)	2009-06-10	Verfahren zur mononitrierung von alkandiolen
DE60118329D1 (de)	2006-05-18	Verfahren und Vorrichtung zur Herstellung von Stickstofftrifluorid
DE602004019068D1 (de)	2009-03-05	Verbessertes verfahren zur herstellung von ethylenoxid
TWI265141B (en)	2006-11-01	Process for the purification of NF3
DE60231588D1 (de)	2009-04-30	Verfahren zur Herstellung von Carbamaten und Verfahren zur Herstelung von Isocyanaten
ATE404523T1 (de)	2008-08-15	Verfahren zur ethylen-rückgewinnung in einem kreisgasprozess zur herstellung von vinylacetat
ATE521572T1 (de)	2011-09-15	Verfahren und systeme zur herstellung von phosgen
DE69910113D1 (de)	2003-09-11	Verfahren zur Herstellung von Stickstofftrifluorid durch Gas-Feststoffreaktion
DE60201973D1 (de)	2004-12-23	Zersetzung von fluorhaltigen verbindungen
ATE494064T1 (de)	2011-01-15	Verfahren zur regenerierung eines hydrierkatalysators
ATE376550T1 (de)	2007-11-15	Katalytisches verfahren zur herstellung von hydromorphone und hydrocodone
DE60103759D1 (de)	2004-07-15	Kontinuierliches verfahren zur herstellung von oxiranen
ATE394360T1 (de)	2008-05-15	Verfahren zur verminderung von von der verwendung von fluorphosphitkatalysatoren herruehrenden fluoridverunreinigungen
ATE509890T1 (de)	2011-06-15	Verfahren zur herstellung von stickstofftrifluorid
ATE549295T1 (de)	2012-03-15	Verfahren zur entfernung von n2o bei der salpetersäureherstellung
WO2005098054A8 (en)	2006-01-05	Method in connection with steel production

Legal Events

Date	Code	Title	Description
2008-10-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties