ZA932405B - A process and an electrolytic cell for the production of fluorine - Google Patents
A process and an electrolytic cell for the production of fluorineInfo
- Publication number
- ZA932405B ZA932405B ZA932405A ZA932405A ZA932405B ZA 932405 B ZA932405 B ZA 932405B ZA 932405 A ZA932405 A ZA 932405A ZA 932405 A ZA932405 A ZA 932405A ZA 932405 B ZA932405 B ZA 932405B
- Authority
- ZA
- South Africa
- Prior art keywords
- fluorine
- production
- electrolytic cell
- electrolytic
- cell
- Prior art date
Links
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 title 1
- 229910052731 fluorine Inorganic materials 0.000 title 1
- 239000011737 fluorine Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/24—Halogens or compounds thereof
- C25B1/245—Fluorine; Compounds thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB929207424A GB9207424D0 (en) | 1992-04-04 | 1992-04-04 | A process and an electrolytic cell for the production of fluorine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ZA932405B true ZA932405B (en) | 1994-06-14 |
Family
ID=10713483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ZA932405A ZA932405B (en) | 1992-04-04 | 1993-04-02 | A process and an electrolytic cell for the production of fluorine |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5378324A (fr) |
| EP (1) | EP0565330B1 (fr) |
| JP (1) | JPH0673587A (fr) |
| CA (1) | CA2093299A1 (fr) |
| DE (1) | DE69311946T2 (fr) |
| ES (1) | ES2105107T3 (fr) |
| GB (1) | GB9207424D0 (fr) |
| ZA (1) | ZA932405B (fr) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6210549B1 (en) | 1998-11-13 | 2001-04-03 | Larry A. Tharp | Fluorine gas generation system |
| US20030010354A1 (en) * | 2000-03-27 | 2003-01-16 | Applied Materials, Inc. | Fluorine process for cleaning semiconductor process chamber |
| US6500356B2 (en) * | 2000-03-27 | 2002-12-31 | Applied Materials, Inc. | Selectively etching silicon using fluorine without plasma |
| US6843258B2 (en) * | 2000-12-19 | 2005-01-18 | Applied Materials, Inc. | On-site cleaning gas generation for process chamber cleaning |
| US20090001524A1 (en) * | 2001-11-26 | 2009-01-01 | Siegele Stephen H | Generation and distribution of a fluorine gas |
| US20030121796A1 (en) * | 2001-11-26 | 2003-07-03 | Siegele Stephen H | Generation and distribution of molecular fluorine within a fabrication facility |
| US20040037768A1 (en) * | 2001-11-26 | 2004-02-26 | Robert Jackson | Method and system for on-site generation and distribution of a process gas |
| US20040151656A1 (en) * | 2001-11-26 | 2004-08-05 | Siegele Stephen H. | Modular molecular halogen gas generation system |
| US6902629B2 (en) * | 2002-04-12 | 2005-06-07 | Applied Materials, Inc. | Method for cleaning a process chamber |
| US20050191225A1 (en) * | 2004-01-16 | 2005-09-01 | Hogle Richard A. | Methods and apparatus for disposal of hydrogen from fluorine generation, and fluorine generators including same |
| US20060054183A1 (en) * | 2004-08-27 | 2006-03-16 | Thomas Nowak | Method to reduce plasma damage during cleaning of semiconductor wafer processing chamber |
| US20060090773A1 (en) * | 2004-11-04 | 2006-05-04 | Applied Materials, Inc. | Sulfur hexafluoride remote plasma source clean |
| US20060266288A1 (en) * | 2005-05-27 | 2006-11-30 | Applied Materials, Inc. | High plasma utilization for remote plasma clean |
| JP5699576B2 (ja) * | 2010-12-08 | 2015-04-15 | ソニー株式会社 | 積層型微多孔膜、電池用セパレータおよび非水電解質電池 |
| US10907262B2 (en) | 2014-10-20 | 2021-02-02 | Ecole Polytechnique Federale De Lausanne (Epfl) | Membrane-less electrolyzer |
| JP6369489B2 (ja) * | 2016-02-26 | 2018-08-08 | コベルコ建機株式会社 | 作業機械 |
| CN111005032A (zh) * | 2019-12-26 | 2020-04-14 | 福建德尔科技有限公司 | 一种便携式全自动高纯氟气生产装置系统 |
| ES3061708T3 (en) * | 2022-06-03 | 2026-04-07 | Univ Antwerpen | Electrolysis reactor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1570004A (en) * | 1976-10-19 | 1980-06-25 | British Nuclear Fuels Ltd | Electrolytic production of fluorine |
| US4511440A (en) * | 1983-12-22 | 1985-04-16 | Allied Corporation | Process for the electrolytic production of fluorine and novel cell therefor |
| US4950370A (en) * | 1988-07-19 | 1990-08-21 | Liquid Air Corporation | Electrolytic gas generator |
-
1992
- 1992-04-04 GB GB929207424A patent/GB9207424D0/en active Pending
-
1993
- 1993-04-02 ZA ZA932405A patent/ZA932405B/xx unknown
- 1993-04-02 CA CA002093299A patent/CA2093299A1/fr not_active Abandoned
- 1993-04-02 US US08/042,263 patent/US5378324A/en not_active Expired - Fee Related
- 1993-04-02 JP JP5100235A patent/JPH0673587A/ja active Pending
- 1993-04-05 EP EP93302660A patent/EP0565330B1/fr not_active Expired - Lifetime
- 1993-04-05 DE DE69311946T patent/DE69311946T2/de not_active Expired - Fee Related
- 1993-04-05 ES ES93302660T patent/ES2105107T3/es not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB9207424D0 (en) | 1992-05-20 |
| EP0565330B1 (fr) | 1997-07-09 |
| EP0565330A1 (fr) | 1993-10-13 |
| JPH0673587A (ja) | 1994-03-15 |
| ES2105107T3 (es) | 1997-10-16 |
| CA2093299A1 (fr) | 1993-10-05 |
| DE69311946D1 (de) | 1997-08-14 |
| US5378324A (en) | 1995-01-03 |
| DE69311946T2 (de) | 1998-02-26 |
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