ZA943301B - Polishing tool component. - Google Patents

Polishing tool component.

Info

Publication number: ZA943301B
Authority: ZA; South Africa
Prior art keywords: pct; polishing tool; elements; working; tool component
Prior art date: 1993-05-14

Application number

ZA943301A

Other languages

English (en)

Inventor

Stuart Martin Wilson

John Stirling Sexton

Derek Norman Wright

Original Assignee

De Beers Ind Diamond

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-05-14

Filing date

1994-05-13

Publication date

1995-01-16

1994-05-13 Application filed by De Beers Ind Diamond filed Critical De Beers Ind Diamond

1995-01-16 Publication of ZA943301B publication Critical patent/ZA943301B/xx

Links

238000005498 polishing Methods 0.000 title abstract 2
239000011159 matrix material Substances 0.000 abstract 2
229910052582 BN Inorganic materials 0.000 abstract 1
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract 1
239000000919 ceramic Substances 0.000 abstract 1
229910003460 diamond Inorganic materials 0.000 abstract 1
239000010432 diamond Substances 0.000 abstract 1
239000002184 metal Substances 0.000 abstract 1
239000002245 particle Substances 0.000 abstract 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D99/00—Subject matter not provided for in other groups of this subclass
- B24D99/005—Segments of abrasive wheels
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
- B24D7/066—Grinding blocks; their mountings or supports

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Polishing Bodies And Polishing Tools (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Mechanical Treatment Of Semiconductor (AREA)
Cutting Tools, Boring Holders, And Turrets (AREA)
Processing Of Terminals (AREA)
Gripping On Spindles (AREA)

ZA943301A 1993-05-14 1994-05-13 Polishing tool component. ZA943301B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GB939309972A GB9309972D0 (en)	1993-05-14	1993-05-14	Tool insert

Publications (1)

Publication Number	Publication Date
ZA943301B true ZA943301B (en)	1995-01-16

Family

ID=10735491

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
ZA943301A ZA943301B (en)	1993-05-14	1994-05-13	Polishing tool component.

Country Status (12)

Country	Link
US (1)	US5607346A (de)
EP (1)	EP0655024B1 (de)
JP (1)	JPH08502930A (de)
AT (1)	ATE187377T1 (de)
AU (1)	AU682184B2 (de)
CA (1)	CA2136014A1 (de)
DE (1)	DE69422004T2 (de)
ES (1)	ES2139075T3 (de)
GB (1)	GB9309972D0 (de)
IL (1)	IL109638A (de)
WO (1)	WO1994026470A1 (de)
ZA (1)	ZA943301B (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IT1269964B (it) *	1994-06-29	1997-04-16	S E A Utensili Diamantati S P	Utensile porta-inserti diamantati per macchine automatiche e manuali tipo calibratrici, levigatrici e lucidatrici per l'industria lapidea, ceramica e piastrelle
US5958794A (en)	1995-09-22	1999-09-28	Minnesota Mining And Manufacturing Company	Method of modifying an exposed surface of a semiconductor wafer
US5692950A (en) *	1996-08-08	1997-12-02	Minnesota Mining And Manufacturing Company	Abrasive construction for semiconductor wafer modification
US6368198B1 (en) *	1999-11-22	2002-04-09	Kinik Company	Diamond grid CMP pad dresser
US6194317B1 (en)	1998-04-30	2001-02-27	3M Innovative Properties Company	Method of planarizing the upper surface of a semiconductor wafer
US8092707B2 (en)	1997-04-30	2012-01-10	3M Innovative Properties Company	Compositions and methods for modifying a surface suited for semiconductor fabrication
IT246526Y1 (it) *	1999-02-16	2002-04-09	Master Service S R L	Spazzola per il trattamento superficiale di materiali
JP2002050016A (ja) *	2000-07-28	2002-02-15	Fujitsu Ltd	磁気ヘッドスライダの製造方法及び装置
JP3789744B2 (ja)	2000-10-27	2006-06-28	富士通株式会社	ラッピング装置及びラッピング方法
SG90192A1 (en) *	2000-11-06	2002-07-23	Kinik Co	A diamond grid cmp pad dresser
USD501857S1 (en) *	2003-04-24	2005-02-15	3M Innovative Properties Company	Abrasive member
USD498654S1 (en)	2003-10-20	2004-11-23	Smith Abrasives, Inc.	Diamond bench stone
CN100513082C (zh) *	2004-10-06	2009-07-15	拉杰夫·巴贾	用于改善的化学机械抛光的方法和设备
WO2006042010A1 (en) *	2004-10-06	2006-04-20	Rajeev Bajaj	Method and apparatus for improved chemical mechanical planarization
US7815778B2 (en) *	2005-11-23	2010-10-19	Semiquest Inc.	Electro-chemical mechanical planarization pad with uniform polish performance
WO2006057713A2 (en) *	2004-11-29	2006-06-01	Rajeev Bajaj	Electro-method and apparatus for improved chemical mechanical planarization pad with uniform polish performance
US7846008B2 (en) *	2004-11-29	2010-12-07	Semiquest Inc.	Method and apparatus for improved chemical mechanical planarization and CMP pad
US20080318505A1 (en) *	2004-11-29	2008-12-25	Rajeev Bajaj	Chemical mechanical planarization pad and method of use thereof
US20090061744A1 (en) *	2007-08-28	2009-03-05	Rajeev Bajaj	Polishing pad and method of use
US20070224925A1 (en) *	2006-03-21	2007-09-27	Rajeev Bajaj	Chemical Mechanical Polishing Pad
US7530880B2 (en) *	2004-11-29	2009-05-12	Semiquest Inc.	Method and apparatus for improved chemical mechanical planarization pad with pressure control and process monitor
US8398463B2 (en) *	2005-03-07	2013-03-19	Rajeev Bajaj	Pad conditioner and method
US7762871B2 (en) *	2005-03-07	2010-07-27	Rajeev Bajaj	Pad conditioner design and method of use
USD576185S1 (en) *	2006-11-23	2008-09-02	Rin-Soon Park	Abrasive segment
USD566141S1 (en) *	2007-02-23	2008-04-08	Rin-Soon Park	Abrasive agent
US20090011679A1 (en) *	2007-04-06	2009-01-08	Rajeev Bajaj	Method of removal profile modulation in cmp pads
US8894731B2 (en) *	2007-10-01	2014-11-25	Saint-Gobain Abrasives, Inc.	Abrasive processing of hard and /or brittle materials
USD594889S1 (en) *	2007-12-07	2009-06-23	Rin-Soon Park	Grinding tip for grinder
US8177603B2 (en) *	2008-04-29	2012-05-15	Semiquest, Inc.	Polishing pad composition
US20090266002A1 (en) *	2008-04-29	2009-10-29	Rajeev Bajaj	Polishing pad and method of use
US20090313905A1 (en) *	2008-06-18	2009-12-24	Stephen Fisher	Method and apparatus for assembly of cmp polishing pads
US8882868B2 (en) *	2008-07-02	2014-11-11	Saint-Gobain Abrasives, Inc.	Abrasive slicing tool for electronics industry
US8292692B2 (en) *	2008-11-26	2012-10-23	Semiquest, Inc.	Polishing pad with endpoint window and systems and method using the same
CH701596B1 (de) *	2009-08-11	2013-08-15	Meister Abrasives Ag	Abrichtwerkzeug.
ES1071330Y (es) *	2009-09-30	2010-05-12	Matilla Botella Raquel	Pieza multicapa para el pulido de piedra
US10226853B2 (en)	2013-01-18	2019-03-12	Applied Materials, Inc.	Methods and apparatus for conditioning of chemical mechanical polishing pads
JP2024535447A (ja) *	2021-09-29	2024-09-30	インテグリス・インコーポレーテッド	両面パッドコンディショナー

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US1290990A (en) *	1916-05-09	1919-01-14	Francis Bancroft	Abrading-disk.
US1953983A (en) *	1928-02-07	1934-04-10	Carborundum Co	Manufacture of rubber bonded abrasive articles
US2000772A (en) *	1934-09-24	1935-05-07	William H Mcgill	Grindstone
US2145888A (en) *	1936-06-06	1939-02-07	American Optical Corp	Abrading tool
US2225193A (en) *	1937-09-15	1940-12-17	Carborundum Co	Abrasive wheel
FR894614A (fr) *	1943-02-05	1944-12-29	Fromholt Et Janssens Ets	Perfectionnements apportés aux meules abrasives
US3343308A (en) *	1965-12-30	1967-09-26	Fessel Paul	Cutting and grinding devices
FR1533693A (fr) *	1967-08-04	1968-07-19	Tyrolit Schleifmittel Werke Sw	Meule flexible
DE2238387A1 (de) *	1972-08-04	1974-03-28	Winter & Sohn Ernst	Mehrschneidiges zerspanwerkzeug
DE2601788A1 (de) *	1976-01-20	1977-07-21	Effgen Fa Guenter	Schleifscheibe o.dgl.
ZA781154B (en) *	1978-02-28	1979-09-26	De Beers Ind Diamond	Abrasive bodies
FR2532875A1 (fr) *	1982-09-14	1984-03-16	Sti Applic Indles Diamant	Meule a patins abrasifs multiples
JPS59156669A (ja) *	1983-02-21	1984-09-05	Sumitomo Electric Ind Ltd	ソ−ブレ−ド用セグメント
DE8706303U1 (de) *	1987-05-02	1987-06-19	FAG Kugelfischer Georg Schäfer KGaA, 8720 Schweinfurt	Schleifkörper
GB8720498D0 (en) *	1987-08-29	1987-10-07	Saville P A	Tool/tools

1993
- 1993-05-14 GB GB939309972A patent/GB9309972D0/en active Pending
1994
- 1994-05-12 IL IL10963894A patent/IL109638A/en not_active IP Right Cessation
- 1994-05-13 ZA ZA943301A patent/ZA943301B/xx unknown
- 1994-05-13 WO PCT/GB1994/001034 patent/WO1994026470A1/en not_active Ceased
- 1994-05-13 AU AU66551/94A patent/AU682184B2/en not_active Ceased
- 1994-05-13 ES ES94915222T patent/ES2139075T3/es not_active Expired - Lifetime
- 1994-05-13 JP JP6525167A patent/JPH08502930A/ja active Pending
- 1994-05-13 AT AT94915222T patent/ATE187377T1/de active
- 1994-05-13 DE DE69422004T patent/DE69422004T2/de not_active Expired - Fee Related
- 1994-05-13 US US08/367,301 patent/US5607346A/en not_active Expired - Fee Related
- 1994-05-13 EP EP94915222A patent/EP0655024B1/de not_active Expired - Lifetime
- 1994-05-13 CA CA002136014A patent/CA2136014A1/en not_active Abandoned

Also Published As

Publication number	Publication date
IL109638A0 (en)	1994-08-26
AU6655194A (en)	1994-12-12
ATE187377T1 (de)	1999-12-15
EP0655024B1 (de)	1999-12-08
IL109638A (en)	1998-09-24
US5607346A (en)	1997-03-04
DE69422004T2 (de)	2000-06-29
AU682184B2 (en)	1997-09-25
WO1994026470A1 (en)	1994-11-24
ES2139075T3 (es)	2000-02-01
GB9309972D0 (en)	1993-06-30
JPH08502930A (ja)	1996-04-02
EP0655024A1 (de)	1995-05-31
DE69422004D1 (de)	2000-01-13
CA2136014A1 (en)	1994-11-24

Publication	Publication Date	Title
IL109638A0 (en)	1994-08-26	Polishing tool component
TW241215B (de)	1995-02-21
CA2164494A1 (en)	1996-06-07	Abrasive body
ZA889115B (en)	1989-08-30	Diamond and cubic boron nitride abrasive compacts
EP0870578A4 (de)	2002-03-13	Susperabrasives hochabrasives werkzeug und verfahren zu seiner herstellung
CA2272258A1 (en)	1998-06-11	Abrasive tool
NO962738L (no)	1996-08-27	aluminabasert slipemiddelkorn som har en sintret ytteroverflate
TW200518876A (en)	2005-06-16	Chemical mechanical polishing pad and chemical mechanical polishing method
MX9709110A (es)	1998-02-28	Rueda abrasiva de alumina con retencion de esquema mejorada.
ES2112393T3 (es)	1998-04-01	Esmeriladora flexible de plastico.
ATE242083T1 (de)	2003-06-15	Werkzeug zur spanabhebenden bearbeitung von werkstücken
AR006580A1 (es)	1999-09-08	Herramienta rectificadora vitrea que contiene material abrasivo recubierto con metal
HU9301582D0 (en)	1993-11-29	Method for manufacturing sintered grinding materials
DE59804662D1 (de)	2002-08-08	Honschleifwerkzeug zur spanabhebenden bearbeitung von werkstücken
JP2837972B2 (ja)	1998-12-16	のこぎり及びその構成要素
EP0347214A3 (de)	1991-06-05	Diamantbesetztes Werkzeug
JPH0673819B2 (ja)	1994-09-21	溝付きラッピング材
IT216129Z2 (it)	1991-04-26	Utensile abrasivo particolarmente per lavorare prodotti lapidei naturali e/o sintetici.
IE883726L (en)	1989-08-12	Diamond and cubic boron nitride abrasive compacts
Juchem	1990	VARIOUS DIAMOND GRIT TYPES USED FOR OPTIMISED GRINDING OF NON-METALLIC MATERIALS
Lewis	1980	Borazon CBN Grinding Wheels--Improving Productivity in the 80's
ITTV920006A1 (it)	1993-07-21	Utensile portaabrasivi per la levigatura e la lucidatura di manufatti di materiale lapideo
JPH0639358U (ja)	1994-05-24	研磨具
RU93044099A (ru)	1997-03-10	Способ изготовления правящего инструмента
IT9009316A1 (it)	1991-08-14	Stampo perfezionato per la fabbricazione di utensili abrasivi per la lucidatura di manufatti in marmo, granito e pietre similari e utensile abrasivo prodotto.