ATE103106T1 - Dampf- und ionenquelle. - Google Patents

Dampf- und ionenquelle.

Info

Publication number
ATE103106T1
ATE103106T1 AT89420467T AT89420467T ATE103106T1 AT E103106 T1 ATE103106 T1 AT E103106T1 AT 89420467 T AT89420467 T AT 89420467T AT 89420467 T AT89420467 T AT 89420467T AT E103106 T1 ATE103106 T1 AT E103106T1
Authority
AT
Austria
Prior art keywords
steam
cathode
ion source
orifice
magnetic field
Prior art date
Application number
AT89420467T
Other languages
English (en)
Inventor
Jacques Menet
Gabrielli Olivier De
Original Assignee
Centre Nat Rech Scient
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Nat Rech Scient filed Critical Centre Nat Rech Scient
Application granted granted Critical
Publication of ATE103106T1 publication Critical patent/ATE103106T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic-beam generation, e.g. resonant beam generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
AT89420467T 1988-11-30 1989-11-27 Dampf- und ionenquelle. ATE103106T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8816012A FR2639756B1 (fr) 1988-11-30 1988-11-30 Source de vapeurs et d'ions
EP89420467A EP0371894B1 (de) 1988-11-30 1989-11-27 Dampf- und Ionenquelle

Publications (1)

Publication Number Publication Date
ATE103106T1 true ATE103106T1 (de) 1994-04-15

Family

ID=9372645

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89420467T ATE103106T1 (de) 1988-11-30 1989-11-27 Dampf- und ionenquelle.

Country Status (6)

Country Link
US (1) US5025194A (de)
EP (1) EP0371894B1 (de)
JP (1) JPH03114122A (de)
AT (1) ATE103106T1 (de)
DE (1) DE68913920T2 (de)
FR (1) FR2639756B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6271529B1 (en) 1997-12-01 2001-08-07 Ebara Corporation Ion implantation with charge neutralization
DE10062665A1 (de) 2000-12-15 2002-06-20 Bsh Bosch Siemens Hausgeraete Magnetventil für einen Kältemittelkreislauf

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1209092A (fr) * 1958-05-03 1960-02-29 Commissariat Energie Atomique Nouvelle source d'ions
US3223885A (en) * 1963-04-29 1965-12-14 Gen Electric Stabilization circuit for electron beam apparatus
US3414702A (en) * 1965-05-28 1968-12-03 Gen Electric Nonthermionic electron beam apparatus
US3411035A (en) * 1966-05-31 1968-11-12 Gen Electric Multi-chamber hollow cathode low voltage electron beam apparatus
FR2595868B1 (fr) * 1986-03-13 1988-05-13 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques
US4894546A (en) * 1987-03-11 1990-01-16 Nihon Shinku Gijutsu Kabushiki Kaisha Hollow cathode ion sources
FR2618602B1 (fr) * 1987-07-22 1990-01-05 Centre Nat Rech Scient Source d'electrons

Also Published As

Publication number Publication date
EP0371894B1 (de) 1994-03-16
DE68913920D1 (de) 1994-04-21
JPH03114122A (ja) 1991-05-15
US5025194A (en) 1991-06-18
FR2639756B1 (fr) 1994-05-13
EP0371894A1 (de) 1990-06-06
DE68913920T2 (de) 1994-11-03
FR2639756A1 (fr) 1990-06-01

Similar Documents

Publication Publication Date Title
EP0346131A3 (de) Trockenätz-Gerät
HK67587A (en) Method for pure ion plating using magnetic fields
ES2068890T3 (es) Generador de iones de resonancia en un ciclotron electronico.
JPS53121454A (en) Electron source of thin film electric field emission type and its manufacture
GB1450320A (en) Multiconfiguration ionization source
CA2030965A1 (en) Ionizable substance detector
DE68913920D1 (de) Dampf- und Ionenquelle.
DE3870919D1 (de) Elektromagnetische dichtungsanordnung.
ATE148265T1 (de) Ionenaustauschermembran mit verbessertem wirkungsgrad in protonenaustauscherverfahren
CA2049876A1 (en) Capacitively coupled radiofrequency plasma source
JPS5246300A (en) Ionic source
EP0192251A3 (de) Elektrode eines Vakuumschalters
ES2031952T3 (es) Disparador electromagnetico para un interruptor de proteccion de corriente de fallo.
DK0590046T3 (da) Basiske acceleratoropløsninger til direkte elektroplettering
JPS5292473A (en) Main lens electric field forming method of inline type 3 beam electron gun
JPS5727554A (en) Tetrode mass spectrograph
JPS5326189A (en) Ion source
JPS5787041A (en) Electron gun
JPS5360561A (en) Injection method of ion to treated substance surface
JPS57154833A (en) Etching method by reactive ion
GB1507087A (en) Extractor ion source
JPS55104483A (en) Ion etching method
JPS5278363A (en) Manufacture of in-line type electronic gun
SU1545829A1 (ru) Источник возбуждения ионов
JPS6418568U (de)

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties