ATE105266T1 - Verfahren zur herstellung von siliziumnitrid. - Google Patents
Verfahren zur herstellung von siliziumnitrid.Info
- Publication number
- ATE105266T1 ATE105266T1 AT9090116511T AT90116511T ATE105266T1 AT E105266 T1 ATE105266 T1 AT E105266T1 AT 9090116511 T AT9090116511 T AT 9090116511T AT 90116511 T AT90116511 T AT 90116511T AT E105266 T1 ATE105266 T1 AT E105266T1
- Authority
- AT
- Austria
- Prior art keywords
- silicon nitride
- production
- less
- content
- silicon
- Prior art date
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title abstract 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/479,773 US4970057A (en) | 1989-04-28 | 1990-02-14 | Silicon nitride vacuum furnace process |
| EP90116511A EP0442032B1 (de) | 1990-02-14 | 1990-08-28 | Verfahren zur Herstellung von Siliziumnitrid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE105266T1 true ATE105266T1 (de) | 1994-05-15 |
Family
ID=23905366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT9090116511T ATE105266T1 (de) | 1990-02-14 | 1990-08-28 | Verfahren zur herstellung von siliziumnitrid. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4970057A (de) |
| EP (1) | EP0442032B1 (de) |
| AT (1) | ATE105266T1 (de) |
| AU (1) | AU622092B2 (de) |
| CA (1) | CA2024139A1 (de) |
| DD (1) | DD297534A5 (de) |
| DE (1) | DE69008706T2 (de) |
| NO (1) | NO179899C (de) |
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5160719A (en) * | 1990-07-24 | 1992-11-03 | Eaton Corporation | Process for nitriding silicon containing materials |
| JP2699770B2 (ja) * | 1992-07-14 | 1998-01-19 | 信越化学工業株式会社 | 高充填性窒化ケイ素粉末及びその製造方法 |
| US6007789A (en) * | 1992-11-03 | 1999-12-28 | Eaton Corporation | Method of nitriding silicon |
| JPH0733411A (ja) * | 1993-07-16 | 1995-02-03 | Shin Etsu Chem Co Ltd | 高α型窒化ケイ素粉末の製造方法 |
| JP4136380B2 (ja) * | 2001-12-21 | 2008-08-20 | 日本碍子株式会社 | 高熱伝導性含Ｓｉ材料及びその製造方法 |
| US7763205B2 (en) * | 2004-10-22 | 2010-07-27 | Ceradyne, Inc. | Continuous process for fabricating reaction bonded silicon nitride articles |
| US8758461B2 (en) | 2010-12-31 | 2014-06-24 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| US8840694B2 (en) | 2011-06-30 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| CN108262695A (zh) | 2011-06-30 | 2018-07-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
| CN103826802B (zh) | 2011-09-26 | 2018-06-12 | 圣戈本陶瓷及塑料股份有限公司 | 包括磨料颗粒材料的磨料制品，使用磨料颗粒材料的涂布磨料及其形成方法 |
| CN104114327B (zh) | 2011-12-30 | 2018-06-05 | 圣戈本陶瓷及塑料股份有限公司 | 复合成型研磨颗粒及其形成方法 |
| RU2014130167A (ru) | 2011-12-30 | 2016-02-27 | Сэнт-Гобэйн Керамикс Энд Пластикс Инк. | Получение формованных абразивных частиц |
| EP3517245B1 (de) | 2011-12-30 | 2023-12-13 | Saint-Gobain Ceramics & Plastics Inc. | Geformte schleifpartikel und verfahren zu ihrer herstellung |
| WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| EP2802436B1 (de) | 2012-01-10 | 2019-09-25 | Saint-Gobain Ceramics & Plastics, Inc. | Schleifpartikel mit komplexen formen |
| WO2013149209A1 (en) | 2012-03-30 | 2013-10-03 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| EP2852473B1 (de) | 2012-05-23 | 2020-12-23 | Saint-Gobain Ceramics & Plastics Inc. | Geformte schleifpartikel und verfahren zur herstellung davon |
| KR20150023034A (ko) | 2012-06-29 | 2015-03-04 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 특정 형상을 가지는 연마입자들 및 이러한 입자들 형성방법 |
| US9440332B2 (en) | 2012-10-15 | 2016-09-13 | Saint-Gobain Abrasives, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| KR101818946B1 (ko) | 2012-12-31 | 2018-01-17 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 미립자 소재 및 이의 형성방법 |
| MX378491B (es) | 2013-03-29 | 2025-03-11 | Saint Gobain Abrasives Inc | Particulas abrasivas con formas particulares y metodos para elaborar las particulas. |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| US9783718B2 (en) | 2013-09-30 | 2017-10-10 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
| WO2015102992A1 (en) | 2013-12-31 | 2015-07-09 | Saint-Gobain Abrasives, Inc. | Abrasive article including shaped abrasive particles |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| EP3131706B8 (de) | 2014-04-14 | 2024-01-10 | Saint-Gobain Ceramics & Plastics, Inc. | Schleifartikel mit geformten schleifpartikeln |
| CA2945493C (en) | 2014-04-14 | 2020-08-04 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2015184355A1 (en) | 2014-05-30 | 2015-12-03 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| EP3277459B1 (de) | 2015-03-31 | 2023-08-16 | Saint-Gobain Abrasives, Inc. | Feste schleifartikel und verfahren zur formung davon |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| KR102006615B1 (ko) | 2015-06-11 | 2019-08-02 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마 입자들을 포함하는 연마 물품 |
| WO2017197002A1 (en) | 2016-05-10 | 2017-11-16 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles and methods of forming same |
| KR102481559B1 (ko) | 2016-05-10 | 2022-12-28 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자 및 이의 형성 방법 |
| WO2018064642A1 (en) | 2016-09-29 | 2018-04-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| EP3642293A4 (de) | 2017-06-21 | 2021-03-17 | Saint-Gobain Ceramics&Plastics, Inc. | Teilchenförmige materialien und verfahren zur herstellung davon |
| KR102765343B1 (ko) | 2019-12-27 | 2025-02-13 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| CN114846112A (zh) | 2019-12-27 | 2022-08-02 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| KR102719159B1 (ko) | 2019-12-27 | 2024-10-21 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| JP7738568B2 (ja) * | 2020-03-19 | 2025-09-12 | エアマー・テクノロジー・コーポレーション | 音響トランスデューサ用多孔質セラミックスの作製方法 |
| EP4457055A4 (de) | 2021-12-30 | 2025-12-24 | Saint Gobain Abrasives Inc | Schleifartikel und verfahren zur formung davon |
| WO2023130051A1 (en) | 2021-12-30 | 2023-07-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| WO2023130053A1 (en) | 2021-12-30 | 2023-07-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| JP2024114129A (ja) * | 2023-02-13 | 2024-08-23 | 株式会社Maruwa | 窒化ケイ素粉末の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1414143A (en) * | 1972-03-03 | 1975-11-19 | Lucas Industries Ltd | Method of manufacturing silicon nitride powder |
| US4235857A (en) * | 1979-07-02 | 1980-11-25 | Ford Motor Company | Method of nitriding silicon |
| JPS61158804A (ja) * | 1984-12-28 | 1986-07-18 | Onoda Cement Co Ltd | 窒化けい素の製法 |
| CA1282943C (en) * | 1985-01-17 | 1991-04-16 | George A. Rossetti, Jr. | Fiber-reinforced ceramic and process therefor |
-
1990
- 1990-02-14 US US07/479,773 patent/US4970057A/en not_active Expired - Fee Related
- 1990-08-15 AU AU60975/90A patent/AU622092B2/en not_active Ceased
- 1990-08-28 CA CA002024139A patent/CA2024139A1/en not_active Abandoned
- 1990-08-28 AT AT9090116511T patent/ATE105266T1/de not_active IP Right Cessation
- 1990-08-28 DE DE69008706T patent/DE69008706T2/de not_active Expired - Fee Related
- 1990-08-28 EP EP90116511A patent/EP0442032B1/de not_active Expired - Lifetime
- 1990-08-28 DD DD90343678A patent/DD297534A5/de not_active IP Right Cessation
- 1990-09-06 NO NO903897A patent/NO179899C/no unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NO179899C (no) | 1997-01-08 |
| DE69008706T2 (de) | 1994-12-01 |
| DE69008706D1 (de) | 1994-06-09 |
| AU6097590A (en) | 1991-08-15 |
| CA2024139A1 (en) | 1991-08-15 |
| DD297534A5 (de) | 1992-01-09 |
| NO179899B (no) | 1996-09-30 |
| AU622092B2 (en) | 1992-03-26 |
| US4970057A (en) | 1990-11-13 |
| NO903897L (no) | 1991-08-15 |
| NO903897D0 (no) | 1990-09-06 |
| EP0442032B1 (de) | 1994-05-04 |
| EP0442032A1 (de) | 1991-08-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |