ATE111216T1 - Feldbegründeter bewegungssensor (messzelle). - Google Patents

Feldbegründeter bewegungssensor (messzelle).

Info

Publication number
ATE111216T1
ATE111216T1 AT90105848T AT90105848T ATE111216T1 AT E111216 T1 ATE111216 T1 AT E111216T1 AT 90105848 T AT90105848 T AT 90105848T AT 90105848 T AT90105848 T AT 90105848T AT E111216 T1 ATE111216 T1 AT E111216T1
Authority
AT
Austria
Prior art keywords
pair
fingers
finger
strain
field
Prior art date
Application number
AT90105848T
Other languages
English (en)
Inventor
Stephen C Jacobsen
John E Wood
Original Assignee
Sarcos Group
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sarcos Group filed Critical Sarcos Group
Application granted granted Critical
Publication of ATE111216T1 publication Critical patent/ATE111216T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Body Structure For Vehicles (AREA)
  • Vehicle Body Suspensions (AREA)
  • Pressure Sensors (AREA)
AT90105848T 1989-04-03 1990-03-27 Feldbegründeter bewegungssensor (messzelle). ATE111216T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/332,593 US4964306A (en) 1989-04-03 1989-04-03 Field-based movement sensor

Publications (1)

Publication Number Publication Date
ATE111216T1 true ATE111216T1 (de) 1994-09-15

Family

ID=23298925

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90105848T ATE111216T1 (de) 1989-04-03 1990-03-27 Feldbegründeter bewegungssensor (messzelle).

Country Status (7)

Country Link
US (1) US4964306A (de)
EP (1) EP0391217B1 (de)
JP (1) JP2937399B2 (de)
KR (1) KR0172591B1 (de)
AT (1) ATE111216T1 (de)
CA (1) CA2013029C (de)
DE (1) DE69012186T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5481184A (en) * 1991-12-31 1996-01-02 Sarcos Group Movement actuator/sensor systems
DE4115786A1 (de) * 1991-05-15 1992-11-19 Micro Epsilon Messtechnik Verfahren und vorrichtung zum ueberwachen mechanischer kraftuebertragungssysteme
CA2070739A1 (en) * 1991-06-21 1992-12-22 Stephen C. Jacobsen Rotary displacement measuring apparatus
JP2852886B2 (ja) * 1995-09-04 1999-02-03 本田技研工業株式会社 半導体応力センサ
USD384298S (en) * 1995-11-02 1997-09-30 Boyd Darry L Load gauge block
DE10023838C2 (de) * 2000-05-16 2002-11-28 Siemens Ag Vorrichtung zum Messen einer Wegänderung zwischen Abschnitten eines Bauteils und Verwendung dieser Vorrichtung
DE10238721A1 (de) * 2002-08-23 2004-03-11 Robert Bosch Gmbh Vorrichtung zur Messung einer Kraft, Vorrichtung zur Messung eines Drucks und Drucksensor
US7451658B2 (en) * 2003-01-07 2008-11-18 Sensopad Limited Sensing apparatus and method
DE10307360A1 (de) * 2003-02-21 2004-10-07 Ceramics Gmbh & Co. Kg Dehnungssensor, insbesondere für einen piezokeramischen Biegewandler
US7325327B2 (en) * 2003-09-12 2008-02-05 Fischer David C Method and apparatus for measuring angular or linear displacement
DE102004034277B4 (de) * 2004-07-15 2009-12-03 Infineon Technologies Ag Vorrichtung, insbesondere in einer integrierten Schaltungsanordnung, und Verfahren zur Erfassung eines mechanischen Stresszustands in einem Halbleitersubstrat
TWI468880B (zh) 2012-06-15 2015-01-11 Asml Netherlands Bv 定位系統、微影裝置及器件製造方法
US10732055B2 (en) * 2015-10-30 2020-08-04 Northwestern University Dielectrostrictive sensors for shear stress measurement, process monitoring, and quality examination of viscoelastic materials
KR101965051B1 (ko) * 2017-03-24 2019-04-02 고려대학교 세종산학협력단 스트레인 게이지 및 그를 포함하는 스트레인 센서
WO2020247891A1 (en) * 2019-06-07 2020-12-10 The Regents Of The University Of California Electrical stiffness-based sensor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4092856A (en) * 1977-05-13 1978-06-06 The United States Of America As Represented By The Secretary Of The Army Kilobar range stress gauge
FR2453396A1 (fr) * 1979-04-02 1980-10-31 Testut Aequitas Recepteur de charge a parallelogramme d'une seule piece et transducteur capacitif
DE3008573A1 (de) * 1980-03-06 1981-09-17 Robert Bosch Gmbh, 7000 Stuttgart Druckaufnehmer
US4649759A (en) * 1981-05-19 1987-03-17 Setra Systems, Inc. Force transducer
GB2123157B (en) * 1982-06-22 1986-10-15 Peter Caleb Frederi Wolfendale Load cells
DE3515349A1 (de) * 1985-04-27 1986-10-30 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Elektrischer geber zur messung mechanischer groessen
DE3635462A1 (de) * 1985-10-21 1987-04-23 Sharp Kk Feldeffekt-drucksensor
US4767973A (en) * 1987-07-06 1988-08-30 Sarcos Incorporated Systems and methods for sensing position and movement
US4873871A (en) * 1988-06-17 1989-10-17 Motorola, Inc. Mechanical field effect transistor sensor

Also Published As

Publication number Publication date
JPH0361861A (ja) 1991-03-18
KR900016746A (ko) 1990-11-14
CA2013029C (en) 1997-08-19
KR0172591B1 (ko) 1999-05-01
DE69012186T2 (de) 1995-02-02
CA2013029A1 (en) 1990-10-03
EP0391217B1 (de) 1994-09-07
EP0391217A2 (de) 1990-10-10
US4964306A (en) 1990-10-23
DE69012186D1 (de) 1994-10-13
JP2937399B2 (ja) 1999-08-23
EP0391217A3 (de) 1992-04-15

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Legal Events

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