ATE148582T1 - Antriebsvorrichtung eines wandlers, seine herstellung und apparatur und antrieb mit solcher vorrichtung - Google Patents

Antriebsvorrichtung eines wandlers, seine herstellung und apparatur und antrieb mit solcher vorrichtung

Info

Publication number
ATE148582T1
ATE148582T1 AT92304846T AT92304846T ATE148582T1 AT E148582 T1 ATE148582 T1 AT E148582T1 AT 92304846 T AT92304846 T AT 92304846T AT 92304846 T AT92304846 T AT 92304846T AT E148582 T1 ATE148582 T1 AT E148582T1
Authority
AT
Austria
Prior art keywords
probe
support
cantilever
drive
insulating layer
Prior art date
Application number
AT92304846T
Other languages
English (en)
Inventor
Masaru Nakayama
Yutaka Hira
Takayuki Yagi
Yuji Kasanuki
Keisuke Yamamoto
Yasuhiro Shimada
Yoshio Suzuki
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE148582T1 publication Critical patent/ATE148582T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Micromachines (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
AT92304846T 1991-05-30 1992-05-28 Antriebsvorrichtung eines wandlers, seine herstellung und apparatur und antrieb mit solcher vorrichtung ATE148582T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP15377591 1991-05-30
JP15125792A JP3148946B2 (ja) 1991-05-30 1992-05-20 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ

Publications (1)

Publication Number Publication Date
ATE148582T1 true ATE148582T1 (de) 1997-02-15

Family

ID=26480559

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92304846T ATE148582T1 (de) 1991-05-30 1992-05-28 Antriebsvorrichtung eines wandlers, seine herstellung und apparatur und antrieb mit solcher vorrichtung

Country Status (6)

Country Link
US (1) US5966787A (de)
EP (1) EP0516418B1 (de)
JP (1) JP3148946B2 (de)
AT (1) ATE148582T1 (de)
CA (1) CA2069708C (de)
DE (1) DE69217120T2 (de)

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KR100203577B1 (ko) * 1994-12-19 1999-06-15 배순훈 광로조절장치와 그 제조방법
US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
US7104134B2 (en) * 2004-03-05 2006-09-12 Agilent Technologies, Inc. Piezoelectric cantilever pressure sensor
US7497133B2 (en) * 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
KR100595523B1 (ko) * 2004-07-20 2006-07-03 엘지전자 주식회사 캔틸레버 전사를 이용한 나노 정보 저장장치 및 그 제조방법
US7447140B2 (en) * 2004-07-30 2008-11-04 Seagate Technology Llc Ferroelectric probe storage apparatus
KR101061846B1 (ko) * 2004-08-19 2011-09-02 삼성전자주식회사 표시 장치용 구동 장치
JP4670495B2 (ja) * 2004-09-06 2011-04-13 Ｔｄｋ株式会社 電子デバイス及びその製造方法
JP2007335399A (ja) * 2006-05-19 2007-12-27 Canon Inc 画像表示装置及び画像表示装置の駆動方法
US8481335B2 (en) * 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
EP2100125A4 (de) 2006-11-28 2012-02-15 Univ Drexel Piezoelektrische mikrocantilever-sensoren für biosensorik
US7992431B2 (en) * 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
JP2010518380A (ja) * 2007-02-01 2010-05-27 ドレクセル・ユニバーシティー センサー用途向けハンドヘルド型位相シフト検出器
US7732991B2 (en) * 2007-09-28 2010-06-08 Freescale Semiconductor, Inc. Self-poling piezoelectric MEMs device
US8241569B2 (en) 2007-11-23 2012-08-14 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
US8741663B2 (en) 2008-03-11 2014-06-03 Drexel University Enhanced detection sensitivity with piezoelectric sensors
EP2104111A1 (de) * 2008-03-20 2009-09-23 Nanoworld AG SPM-Sonde mit verkürztem Federbalken
EP2281192A4 (de) 2008-05-16 2014-02-05 Univ Drexel System und verfahren zur gewebebeurteilung
GB2467848B (en) * 2009-02-13 2011-01-12 Wolfson Microelectronics Plc MEMS device and process
CN101580223B (zh) * 2009-06-18 2011-04-27 大连理工大学 一种压电微悬臂梁探针的制作方法
US8722427B2 (en) * 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US20110086368A1 (en) * 2009-10-08 2011-04-14 Drexel University Method for immune response detection
EP2562836A4 (de) * 2010-04-23 2014-07-23 Murata Manufacturing Co Piezoelektrischer aktuator und herstellungsverfahren für den piezoelektrischen aktuator
JP4962663B2 (ja) 2010-08-23 2012-06-27 パナソニック株式会社 アクチュエータ、及びアクチュエータを駆動する方法
EP2502876B1 (de) 2011-03-24 2014-11-19 NanoWorld AG Mikromechanisches Bauelement mit Federbalken und integriertem elektrischen Funktionselement
TWI509259B (zh) * 2014-03-18 2015-11-21 Nat Applied Res Laboratories 傳導式電流探頭
US9761787B2 (en) * 2015-06-02 2017-09-12 The Board Of Trustees Of The University Of Alabama Consensus-based multi-piezoelectric microcantilever sensor
CN112198412B (zh) * 2019-06-21 2023-02-28 成都辰显光电有限公司 一种测试结构及测试结构的制备方法
WO2025071479A1 (en) * 2023-09-26 2025-04-03 Agency For Science, Technology And Research Piezoelectric device and method of forming the same

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JPS60189307A (ja) * 1984-03-09 1985-09-26 Toshiba Corp 圧電薄膜共振器およびその製造方法
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JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
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US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
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JP2891510B2 (ja) * 1990-05-09 1999-05-17 日本電子株式会社 圧電素子駆動体
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US5162691A (en) * 1991-01-22 1992-11-10 The United States Of America As Represented By The Secretary Of The Army Cantilevered air-gap type thin film piezoelectric resonator
US5173605A (en) * 1991-05-02 1992-12-22 Wyko Corporation Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control
EP0596522A1 (de) * 1992-11-06 1994-05-11 AVANCE TECHNOLOGY, Inc. Hochfrequenter Kristallresonator

Also Published As

Publication number Publication date
JPH05187867A (ja) 1993-07-27
EP0516418A1 (de) 1992-12-02
DE69217120D1 (de) 1997-03-13
DE69217120T2 (de) 1997-06-12
JP3148946B2 (ja) 2001-03-26
US5966787A (en) 1999-10-19
CA2069708C (en) 1997-10-14
CA2069708A1 (en) 1992-12-01
EP0516418B1 (de) 1997-01-29

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