ATE148805T1 - Elektroner emittierende vorrichtung - Google Patents

Elektroner emittierende vorrichtung

Info

Publication number
ATE148805T1
ATE148805T1 AT94114875T AT94114875T ATE148805T1 AT E148805 T1 ATE148805 T1 AT E148805T1 AT 94114875 T AT94114875 T AT 94114875T AT 94114875 T AT94114875 T AT 94114875T AT E148805 T1 ATE148805 T1 AT E148805T1
Authority
AT
Austria
Prior art keywords
type diamond
emitter portion
diamond layer
vacuum
electrons
Prior art date
Application number
AT94114875T
Other languages
English (en)
Inventor
Yoshiki C O Itami Nishibayashi
Ltd - Koyakita -Cho Industries
Tadashi C O Itami Wor Tomikawa
-Chome Koyakita
Shin-Ichi C O Itami Wo Shikata
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Application granted granted Critical
Publication of ATE148805T1 publication Critical patent/ATE148805T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • H01J1/3042Field-emissive cathodes microengineered, e.g. Spindt-type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30453Carbon types
    • H01J2201/30457Diamond

Landscapes

  • Cold Cathode And The Manufacture (AREA)
  • Electroluminescent Light Sources (AREA)
  • Saccharide Compounds (AREA)
AT94114875T 1993-09-24 1994-09-21 Elektroner emittierende vorrichtung ATE148805T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23857193A JP3269065B2 (ja) 1993-09-24 1993-09-24 電子デバイス

Publications (1)

Publication Number Publication Date
ATE148805T1 true ATE148805T1 (de) 1997-02-15

Family

ID=17032205

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94114875T ATE148805T1 (de) 1993-09-24 1994-09-21 Elektroner emittierende vorrichtung

Country Status (5)

Country Link
US (1) US5552613A (de)
EP (1) EP0645793B1 (de)
JP (1) JP3269065B2 (de)
AT (1) ATE148805T1 (de)
DE (1) DE69401694T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5532177A (en) * 1993-07-07 1996-07-02 Micron Display Technology Method for forming electron emitters
KR100314830B1 (ko) * 1994-07-27 2002-02-28 김순택 전계방출표시장치의제조방법
JPH08180824A (ja) * 1994-12-22 1996-07-12 Hitachi Ltd 電子線源、その製造方法、電子線源装置及びそれを用いた電子線装置
US5703380A (en) * 1995-06-13 1997-12-30 Advanced Vision Technologies Inc. Laminar composite lateral field-emission cathode
CA2227322A1 (en) * 1995-08-04 1997-02-20 Printable Field Emitters Limited Field electron emission materials and devices
WO1997016843A1 (en) * 1995-10-30 1997-05-09 Advanced Vision Technologies, Inc. Dual carrier display device and fabrication process
US5831384A (en) * 1995-10-30 1998-11-03 Advanced Vision Technologies, Inc. Dual carrier display device
JP3580930B2 (ja) * 1996-01-18 2004-10-27 住友電気工業株式会社 電子放出装置
US6504311B1 (en) * 1996-03-25 2003-01-07 Si Diamond Technology, Inc. Cold-cathode cathodoluminescent lamp
KR100284272B1 (ko) * 1996-03-27 2001-04-02 모리시타 요이찌 전자방출소자 및 그 제조방법
US5729094A (en) * 1996-04-15 1998-03-17 Massachusetts Institute Of Technology Energetic-electron emitters
EP0974156B1 (de) 1996-06-25 2004-10-13 Vanderbilt University Strukturen, anordnungen und vorrichtungen mit vakuum-feldemissions-mikrospitzen und verfahren zu deren herstellung
DE69817642T2 (de) 1997-03-10 2004-08-05 Sumitomo Electric Industries, Ltd. Elektronen-emittierendes Element, Herstellungsverfahren desselben, und Elektronenvorrichtung
JP4792625B2 (ja) * 2000-08-31 2011-10-12 住友電気工業株式会社 電子放出素子の製造方法及び電子デバイス
JP3851861B2 (ja) * 2002-09-20 2006-11-29 財団法人ファインセラミックスセンター 電子放出素子
JP2005310724A (ja) * 2003-05-12 2005-11-04 Sumitomo Electric Ind Ltd 電界放射型電子源およびその製造方法
JP4112449B2 (ja) * 2003-07-28 2008-07-02 株式会社東芝 放電電極及び放電灯
EP1667188A4 (de) * 2003-09-16 2008-09-10 Sumitomo Electric Industries Diamantelektronenemitter und elektronenstrahlquelle damit
DE602004030360D1 (de) 2003-09-30 2011-01-13 Sumitomo Electric Industries Elektronenemitter
JP4765245B2 (ja) * 2003-09-30 2011-09-07 住友電気工業株式会社 電子線源
JP4496748B2 (ja) * 2003-09-30 2010-07-07 住友電気工業株式会社 電子放出素子及びそれを用いた電子素子
JP5082186B2 (ja) * 2004-03-29 2012-11-28 住友電気工業株式会社 炭素系材料突起の形成方法及び炭素系材料突起
JP4596451B2 (ja) * 2004-04-19 2010-12-08 住友電気工業株式会社 突起構造の形成方法、突起構造、および電子放出素子
JP2006351410A (ja) * 2005-06-17 2006-12-28 Toppan Printing Co Ltd 電子放出素子
CA2608851A1 (en) * 2005-06-17 2006-12-21 Sumitomo Electric Industries, Ltd. Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device
JP2010020946A (ja) * 2008-07-09 2010-01-28 Sumitomo Electric Ind Ltd ダイヤモンド電子源
JP5354598B2 (ja) * 2009-12-17 2013-11-27 独立行政法人産業技術総合研究所 電子源

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283501A (en) * 1991-07-18 1994-02-01 Motorola, Inc. Electron device employing a low/negative electron affinity electron source
US5138237A (en) * 1991-08-20 1992-08-11 Motorola, Inc. Field emission electron device employing a modulatable diamond semiconductor emitter
US5199918A (en) * 1991-11-07 1993-04-06 Microelectronics And Computer Technology Corporation Method of forming field emitter device with diamond emission tips
US5670788A (en) * 1992-01-22 1997-09-23 Massachusetts Institute Of Technology Diamond cold cathode

Also Published As

Publication number Publication date
DE69401694D1 (de) 1997-03-20
US5552613A (en) 1996-09-03
EP0645793A3 (de) 1995-09-13
DE69401694T2 (de) 1997-05-28
JPH0794077A (ja) 1995-04-07
EP0645793A2 (de) 1995-03-29
EP0645793B1 (de) 1997-02-05
JP3269065B2 (ja) 2002-03-25

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