ATE167947T1 - Vorrichtung und verfahren zur entwicklung eines bildes - Google Patents

Vorrichtung und verfahren zur entwicklung eines bildes

Info

Publication number
ATE167947T1
ATE167947T1 AT93302243T AT93302243T ATE167947T1 AT E167947 T1 ATE167947 T1 AT E167947T1 AT 93302243 T AT93302243 T AT 93302243T AT 93302243 T AT93302243 T AT 93302243T AT E167947 T1 ATE167947 T1 AT E167947T1
Authority
AT
Austria
Prior art keywords
light
laser
disk
laser beam
sensitive film
Prior art date
Application number
AT93302243T
Other languages
English (en)
Inventor
Kiyotaka Wakamiya
Yuuichi Aki
Minoru Inagaki
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP04066518A external-priority patent/JP3079754B2/ja
Priority claimed from JP04066519A external-priority patent/JP3079755B2/ja
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of ATE167947T1 publication Critical patent/ATE167947T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Photographic Developing Apparatuses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AT93302243T 1992-03-25 1993-03-24 Vorrichtung und verfahren zur entwicklung eines bildes ATE167947T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP04066518A JP3079754B2 (ja) 1992-03-25 1992-03-25 現像方法及び現像装置
JP04066519A JP3079755B2 (ja) 1992-03-25 1992-03-25 現像装置

Publications (1)

Publication Number Publication Date
ATE167947T1 true ATE167947T1 (de) 1998-07-15

Family

ID=26407703

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93302243T ATE167947T1 (de) 1992-03-25 1993-03-24 Vorrichtung und verfahren zur entwicklung eines bildes

Country Status (4)

Country Link
US (1) US5357304A (de)
EP (1) EP0562841B1 (de)
AT (1) ATE167947T1 (de)
DE (1) DE69319363T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9307239D0 (en) * 1993-04-07 1993-06-02 Nimbus Communications Int Ltd Method and apparatus for process control
US5674115A (en) * 1994-07-06 1997-10-07 Sony Corporation Apparatus for grinding a master disc
RU2214629C2 (ru) * 1996-12-24 2003-10-20 Конинклейке Филипс Электроникс Н.В. Способ оптической записи и устройство, использующее этот способ
KR101700547B1 (ko) * 2004-09-17 2017-01-26 가부시키가이샤 니콘 노광 장치, 노광 방법 및 디바이스 제조 방법

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4142107A (en) * 1977-06-30 1979-02-27 International Business Machines Corporation Resist development control system
US4136940A (en) * 1977-12-19 1979-01-30 Rca Corporation Resist development control system
GB2108707B (en) * 1981-07-08 1985-06-19 Pioneer Electronic Corp Method and system for developing a photo-resist material used as a recording medium
JPS5857843U (ja) * 1981-10-16 1983-04-19 パイオニア株式会社 フオトレジスト湿式現像装置
US4462860A (en) * 1982-05-24 1984-07-31 At&T Bell Laboratories End point detection
US4569717A (en) * 1983-05-24 1986-02-11 Dainippon Screen Mfg. Co., Ltd. Method of surface treatment
US4647172A (en) * 1985-05-17 1987-03-03 Gca Corporation Resist development method
JPS6263430A (ja) * 1985-09-13 1987-03-20 Mitsubishi Cable Ind Ltd 終点検出方法
FR2598508B1 (fr) * 1986-05-09 1989-05-12 Guillaume Michel Procede et appareil de determination de fin d'attaque d'une surface gravee
US4857430A (en) * 1987-12-17 1989-08-15 Texas Instruments Incorporated Process and system for determining photoresist development endpoint by effluent analysis
JPH01162254A (ja) * 1987-12-18 1989-06-26 Sanyo Electric Co Ltd 光ディスク原盤の製造方法
JPH01286142A (ja) * 1988-05-12 1989-11-17 Nec Corp 現像モニタ方法
JPH01298356A (ja) * 1988-05-27 1989-12-01 Hitachi Ltd フォトレジスト湿式現像装置
JPH02125764A (ja) * 1988-11-04 1990-05-14 Konica Corp 光量安定化光源ユニット
JPH02137852A (ja) * 1988-11-18 1990-05-28 Dainippon Screen Mfg Co Ltd フォトレジストの現像終点検出方法
US5131752A (en) * 1990-06-28 1992-07-21 Tamarack Scientific Co., Inc. Method for film thickness endpoint control

Also Published As

Publication number Publication date
DE69319363T2 (de) 1998-10-29
EP0562841B1 (de) 1998-07-01
DE69319363D1 (de) 1998-08-06
US5357304A (en) 1994-10-18
EP0562841A1 (de) 1993-09-29

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee