ATE171112T1 - Herstellungsverfahren für einen tintenstrahl- aufzeichnungskopf und ein mit diesem verfahren hergestellter tintenstrahlkopf - Google Patents

Herstellungsverfahren für einen tintenstrahl- aufzeichnungskopf und ein mit diesem verfahren hergestellter tintenstrahlkopf

Info

Publication number
ATE171112T1
ATE171112T1 AT95101223T AT95101223T ATE171112T1 AT E171112 T1 ATE171112 T1 AT E171112T1 AT 95101223 T AT95101223 T AT 95101223T AT 95101223 T AT95101223 T AT 95101223T AT E171112 T1 ATE171112 T1 AT E171112T1
Authority
AT
Austria
Prior art keywords
inkjet
recording head
manufacturing
head
substrate
Prior art date
Application number
AT95101223T
Other languages
English (en)
Inventor
Norio C O Canon K K Ohkuma
Masashi C O Canon K K Miyagawa
Hiroaki C O Canon K K Toshima
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE171112T1 publication Critical patent/ATE171112T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Epoxy Resins (AREA)
  • Paints Or Removers (AREA)
AT95101223T 1994-01-31 1995-01-30 Herstellungsverfahren für einen tintenstrahl- aufzeichnungskopf und ein mit diesem verfahren hergestellter tintenstrahlkopf ATE171112T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06010079A JP3143308B2 (ja) 1994-01-31 1994-01-31 インクジェット記録ヘッドの製造方法

Publications (1)

Publication Number Publication Date
ATE171112T1 true ATE171112T1 (de) 1998-10-15

Family

ID=11740351

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95101223T ATE171112T1 (de) 1994-01-31 1995-01-30 Herstellungsverfahren für einen tintenstrahl- aufzeichnungskopf und ein mit diesem verfahren hergestellter tintenstrahlkopf

Country Status (6)

Country Link
US (1) US6455112B1 (de)
EP (1) EP0665107B1 (de)
JP (1) JP3143308B2 (de)
AT (1) ATE171112T1 (de)
DE (1) DE69504714T2 (de)
ES (1) ES2121238T3 (de)

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JP4078070B2 (ja) * 2000-12-28 2008-04-23 キヤノン株式会社 インクジェットヘッドの製造方法
JP4532785B2 (ja) 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
JP4095368B2 (ja) 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
US6793326B2 (en) * 2001-12-28 2004-09-21 Canon Kabushiki Kaisha Flow path constituting member for ink jet recording head, ink jet recording head having flow path constituting member and method for producing ink jet recording head
CN1545451A (zh) 2002-04-10 2004-11-10 ������������ʽ���� 液体排出头、液体排出装置以及制造液体排出头的方法
JP2003300323A (ja) 2002-04-11 2003-10-21 Canon Inc インクジェットヘッド及びその製造方法
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ATE551195T1 (de) * 2003-07-22 2012-04-15 Canon Kk Tintenstrahlkopf und dazugehöriges herstellungsverfahren
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DE60332288D1 (de) * 2003-07-22 2010-06-02 Canon Kk Tintenstrahlkopf und herstellungsverfahren dafür
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JP4447974B2 (ja) 2004-06-28 2010-04-07 キヤノン株式会社 インクジェットヘッドの製造方法
US7575851B2 (en) 2004-06-28 2009-08-18 Canon Kabushiki Kaisha Cationic photopolymerizable epoxy resin composition, minute structural member using the same and method for manufacturing minute structural member
JP4274556B2 (ja) * 2004-07-16 2009-06-10 キヤノン株式会社 液体吐出素子の製造方法
JP4667028B2 (ja) * 2004-12-09 2011-04-06 キヤノン株式会社 構造体の形成方法及びインクジェット記録ヘッドの製造方法
TWI295632B (en) * 2005-01-21 2008-04-11 Canon Kk Ink jet recording head, producing method therefor and composition for ink jet recording head
DE102005002960A1 (de) * 2005-01-21 2006-08-03 Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh Kompositzusammensetzung für mikrogemusterte Schichten mit hohem Relaxationsvermögen, hoher chemischer Beständigkeit und mechanischer Stabilität
US7810904B2 (en) * 2005-01-21 2010-10-12 Canon Kabushiki Kaisha Ink jet recording head, producing method therefor and composition for ink jet recording head
DE602005012486D1 (de) * 2005-06-02 2009-03-12 Agfa Graphics Nv Tintenstrahlsicherheitsmarkierung für ein Produkt oder eine Produktverpackung
US7637013B2 (en) * 2005-08-23 2009-12-29 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
DE602006016179D1 (de) * 2006-06-01 2010-09-23 Telecom Italia Spa Tintenstrahldruckkopf
WO2007148822A1 (en) * 2006-06-23 2007-12-27 Canon Kabushiki Kaisha Polyfunctional epoxy compound, epoxy resin, cationic photopolymerizable epoxy resin composition, micro structured member, producing method therefor and liquid discharge head
DE602006013356D1 (de) * 2006-07-13 2010-05-12 Telecom Italia Spa Tintenstrahlpatrone mit einer aus einer härtbaren harzzusammensetzung hergestellten schicht
DE102006033280A1 (de) * 2006-07-18 2008-01-24 Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh Kompositzusammensetzung für mikrostrukturierte Schichten
JP2008023715A (ja) * 2006-07-18 2008-02-07 Canon Inc 液体吐出ヘッドおよびその製造方法
US7605009B2 (en) 2007-03-12 2009-10-20 Silverbrook Research Pty Ltd Method of fabrication MEMS integrated circuits
CN101610909B (zh) * 2007-03-12 2010-12-29 西尔弗布鲁克研究股份有限公司 制造具有疏水喷墨面的打印头的方法以及打印头
JP2009119650A (ja) 2007-11-13 2009-06-04 Canon Inc インクジェットヘッドの製造方法
US20090136875A1 (en) * 2007-11-15 2009-05-28 Canon Kabushiki Kaisha Manufacturing method of liquid ejection head
KR101452705B1 (ko) * 2008-01-10 2014-10-24 삼성전자주식회사 잉크젯 프린터 헤드의 제조 방법 및 상기 방법에 의하여제조된 잉크젯 프린터 헤드
JP2009220286A (ja) 2008-03-13 2009-10-01 Canon Inc 液体吐出記録ヘッド及その製造方法
PL2276632T3 (pl) 2008-04-18 2014-02-28 Sicpa Holding Sa Sposób wytwarzania atramentowej głowicy drukującej o adhezji zwiększonej z upływem czasu i jej zastosowanie w kombinacji z tuszem na bazie wody zawierającym substancje kwasowe
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CA2136514C (en) 1993-11-26 2000-01-11 Masashi Kitani An ink jet recording head, an ink jet unit and an ink jet apparatus using said recording head
JP3184868B2 (ja) 1997-06-05 2001-07-09 株式会社日立製作所 Ｗｅｂページの真正性確認システム

Also Published As

Publication number Publication date
DE69504714D1 (de) 1998-10-22
ES2121238T3 (es) 1998-11-16
JPH07214783A (ja) 1995-08-15
EP0665107B1 (de) 1998-09-16
JP3143308B2 (ja) 2001-03-07
US6455112B1 (en) 2002-09-24
EP0665107A2 (de) 1995-08-02
EP0665107A3 (de) 1996-05-08
DE69504714T2 (de) 1999-05-06

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