ATE174835T1 - Vakuumplatte - Google Patents

Vakuumplatte

Info

Publication number
ATE174835T1
ATE174835T1 AT93911897T AT93911897T ATE174835T1 AT E174835 T1 ATE174835 T1 AT E174835T1 AT 93911897 T AT93911897 T AT 93911897T AT 93911897 T AT93911897 T AT 93911897T AT E174835 T1 ATE174835 T1 AT E174835T1
Authority
AT
Austria
Prior art keywords
support plate
vacuum
pct
modules
lip seals
Prior art date
Application number
AT93911897T
Other languages
English (en)
Inventor
David Davies
Laurence Ross Petrie
Original Assignee
Carne James Christopher
Carne Charles Nicholas
David Davies
Laurence Ross Petrie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB929209716A external-priority patent/GB9209716D0/en
Application filed by Carne James Christopher, Carne Charles Nicholas, David Davies, Laurence Ross Petrie filed Critical Carne James Christopher
Application granted granted Critical
Publication of ATE174835T1 publication Critical patent/ATE174835T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Laminated Bodies (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Manipulator (AREA)
  • Jigs For Machine Tools (AREA)
AT93911897T 1992-05-06 1993-04-29 Vakuumplatte ATE174835T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB929209716A GB9209716D0 (en) 1992-05-06 1992-05-06 Vacuum plates
IL10404092A IL104040A (en) 1992-05-06 1992-12-09 Vacuum plates and a vacuum plate system

Publications (1)

Publication Number Publication Date
ATE174835T1 true ATE174835T1 (de) 1999-01-15

Family

ID=26300829

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93911897T ATE174835T1 (de) 1992-05-06 1993-04-29 Vakuumplatte

Country Status (9)

Country Link
US (1) US5671910A (de)
EP (1) EP0640024B1 (de)
JP (1) JPH08500296A (de)
CN (1) CN1086163A (de)
AT (1) ATE174835T1 (de)
AU (1) AU4268193A (de)
DE (1) DE69322778T2 (de)
MY (1) MY109505A (de)
WO (1) WO1993022104A1 (de)

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US6073681A (en) * 1997-12-31 2000-06-13 Temptronic Corporation Workpiece chuck
US6328096B1 (en) * 1997-12-31 2001-12-11 Temptronic Corporation Workpiece chuck
US6058676A (en) * 1998-10-07 2000-05-09 Lucent Technologies Inc. Lid guide for electronic devices
US6203621B1 (en) * 1999-05-24 2001-03-20 Trw Inc. Vacuum chuck for holding thin sheet material
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JP4470199B2 (ja) * 2003-09-25 2010-06-02 Ｓｍｃ株式会社 半導体基板の温度調節装置
EP1750895A1 (de) * 2004-05-08 2007-02-14 Hueck Folien GmbH & Co. KG Spannvorrichtung für das laserschweissen von nickel-shims
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DE102004031863B3 (de) * 2004-07-01 2006-03-09 Airbus Deutschland Gmbh Vorrichtung zur Fixierung von insbesondere flächenhaften Werkstücken mit einer Anlagefläche
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CN100391696C (zh) * 2005-09-15 2008-06-04 江南大学 自适应真空吸盘工作台
CN100515662C (zh) * 2006-01-24 2009-07-22 鸿富锦精密工业（深圳）有限公司 一种滚圆镜片的治具
DE102006059963A1 (de) * 2006-12-19 2008-06-26 GM Global Technology Operations, Inc., Detroit Bördelbett, Bördeleinrichtung sowie Verfahren zum Bördeln von Werkstücken
US20080164646A1 (en) * 2007-01-09 2008-07-10 Chi Wah Cheng Workholder for supporting electronic devices
CN101733651B (zh) * 2008-11-11 2012-05-30 苏州春兴精工股份有限公司 用于多孔薄板加工用的真空夹具及其使用方法
DE102009018434B4 (de) * 2009-04-22 2023-11-30 Ev Group Gmbh Aufnahmeeinrichtung zur Aufnahme von Halbleitersubstraten
DE102009044305A1 (de) * 2009-10-21 2011-05-05 Fooke Gmbh Verfahren zum Halten und Bearbeiten eines Werkstückes mit Spannplatte, sowie Vorrichtung zum Aussteifen eines Werkstückes mit Spannplatte
IL203353A (en) * 2010-01-17 2015-10-29 Orbotech Ltd Empty grip system
CN102270596B (zh) * 2010-06-02 2013-09-11 上海微电子装备有限公司 吸盘及其承片台
US8849620B2 (en) 2011-11-18 2014-09-30 Nike, Inc. Automated 3-D modeling of shoe parts
US8858744B2 (en) 2011-11-18 2014-10-14 Nike, Inc. Multi-functional manufacturing tool
US9010827B2 (en) * 2011-11-18 2015-04-21 Nike, Inc. Switchable plate manufacturing vacuum tool
JP5918003B2 (ja) * 2012-04-27 2016-05-18 Ｔｏｗａ株式会社 個片化装置用真空吸着シート及びそれを用いた固定治具の製造方法
CN103264362A (zh) * 2013-05-06 2013-08-28 苏州金牛精密机械有限公司 一种真空吸盘定位治具
ITMI20131002A1 (it) * 2013-06-18 2014-12-19 Atom Spa Tavolo di taglio con aspirazione differenziata per la stabilizzazione del materiale da recidere
CN105745081B (zh) * 2013-07-28 2019-10-25 惠普工业印刷有限公司 介质支承装置
US9227261B2 (en) * 2013-08-06 2016-01-05 Globalfoundries Inc. Vacuum carriers for substrate bonding
WO2015038082A2 (en) * 2013-09-16 2015-03-19 Yüksel Eyüp Osman Segmented plate system
CN104669762B (zh) * 2015-03-24 2017-03-29 京东方科技集团股份有限公司 一种真空贴合装置
CN105108355B (zh) * 2015-09-18 2017-10-17 京东方科技集团股份有限公司 承载台、承载装置和激光切割设备
JP6782087B2 (ja) * 2016-03-28 2020-11-11 株式会社日本マイクロニクス シート治具、ステージ、製造装置、及び二次電池の製造方法
US10151338B2 (en) * 2016-06-06 2018-12-11 Adam Thomas Ochrimenko Pliable material with integral suction recess for attachment to a surface
CN105965420B (zh) * 2016-07-04 2018-07-06 湖北三江航天红阳机电有限公司 一种真空夹持装置及方法
CN106252058A (zh) * 2016-08-22 2016-12-21 泰州新源电工器材有限公司 一种撑条台阶的加工设备及其加工方法
WO2019053752A1 (de) * 2017-09-13 2019-03-21 Esto Srl Vakuumspann vorrichtung zum aufspannen von werkstücken mittels unterdruck
CN108098412B (zh) * 2018-01-04 2024-11-08 鄂州富晶电子技术有限公司 一种免密封模块化真空夹具
KR102194573B1 (ko) * 2019-01-08 2020-12-23 이효길 진공척 모듈 및 그를 가지는 공정시스템
EP3909723A1 (de) * 2020-05-13 2021-11-17 Joulin Cemma Vakuumgreifvorrichtung mit durch magnetische anziehung gesicherter schaumstoffschicht
KR102856528B1 (ko) * 2022-08-17 2025-09-05 배정요 가구재 조립용 진공흡착장치

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US2782574A (en) * 1954-09-16 1957-02-26 Gen Dynamics Corp Work holder
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US4778326A (en) * 1983-05-24 1988-10-18 Vichem Corporation Method and means for handling semiconductor and similar electronic devices
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EP0269566B1 (de) * 1986-11-10 1990-06-13 Haas-Laser Systems AG Transportvorrichtung für perforierte plattenförmige Objekte
DE8703223U1 (de) * 1987-03-03 1987-04-16 Modellbau Paul Apitz, 7913 Senden Vakuum-Spannplatte
NL8701603A (nl) * 1987-07-08 1989-02-01 Philips & Du Pont Optical Vacuuminrichting voor het vastzuigen van werkstukken.
JPH03270048A (ja) * 1990-03-19 1991-12-02 Fujitsu Ltd 真空チャック
US5028182A (en) * 1990-03-23 1991-07-02 Kyung Park Vacuum absorption device for use in glass sheet chamfering apparatus
JP2514490B2 (ja) * 1991-07-05 1996-07-10 株式会社ダイヘン 産業用ロボットの連動手動操作による教示制御方法
US5427363A (en) * 1993-06-14 1995-06-27 Cna Manufacturing Systems, Inc. End effector

Also Published As

Publication number Publication date
EP0640024B1 (de) 1998-12-23
CN1086163A (zh) 1994-05-04
AU4268193A (en) 1993-11-29
MY109505A (en) 1997-02-28
JPH08500296A (ja) 1996-01-16
DE69322778D1 (de) 1999-02-04
WO1993022104A1 (en) 1993-11-11
DE69322778T2 (de) 1999-12-02
US5671910A (en) 1997-09-30
EP0640024A1 (de) 1995-03-01

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