ATE207043T1 - Verfahren zur behandlung von dünnen schichten aus metalloxide oder nitride - Google Patents

Verfahren zur behandlung von dünnen schichten aus metalloxide oder nitride

Info

Publication number
ATE207043T1
ATE207043T1 AT93402959T AT93402959T ATE207043T1 AT E207043 T1 ATE207043 T1 AT E207043T1 AT 93402959 T AT93402959 T AT 93402959T AT 93402959 T AT93402959 T AT 93402959T AT E207043 T1 ATE207043 T1 AT E207043T1
Authority
AT
Austria
Prior art keywords
nitrides
metal oxides
thin layers
treating thin
layer
Prior art date
Application number
AT93402959T
Other languages
English (en)
Inventor
Francois Lerbet
Daniele Pillias
Original Assignee
Saint Gobain
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain filed Critical Saint Gobain
Application granted granted Critical
Publication of ATE207043T1 publication Critical patent/ATE207043T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/281—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/282—Carbides, silicides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
AT93402959T 1992-12-11 1993-12-07 Verfahren zur behandlung von dünnen schichten aus metalloxide oder nitride ATE207043T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9214911A FR2699164B1 (fr) 1992-12-11 1992-12-11 Procédé de traitement de couches minces à base d'oxyde ou de nitrure métallique.

Publications (1)

Publication Number Publication Date
ATE207043T1 true ATE207043T1 (de) 2001-11-15

Family

ID=9436451

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93402959T ATE207043T1 (de) 1992-12-11 1993-12-07 Verfahren zur behandlung von dünnen schichten aus metalloxide oder nitride

Country Status (7)

Country Link
US (1) US5569362A (de)
EP (1) EP0601928B1 (de)
JP (1) JP3708564B2 (de)
AT (1) ATE207043T1 (de)
DE (1) DE69330936T2 (de)
ES (1) ES2165364T3 (de)
FR (1) FR2699164B1 (de)

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CN1049017C (zh) * 1995-05-31 2000-02-02 西南交通大学 一种在人工器官表面沉积氧化钛和氮化钛复合膜的方法
US6190511B1 (en) * 1997-03-13 2001-02-20 David T. Wei Method and apparatus for ion beam sputter deposition of thin films
US6012830A (en) * 1998-06-23 2000-01-11 Valeo Sylvania L.L.C. Light shield for a vehicle headlamp
TWI314099B (en) * 2001-02-28 2009-09-01 Ppg Ind Ohio Inc Photo-induced hydrophilic article and method of making same
WO2003095695A2 (en) * 2002-05-06 2003-11-20 Guardian Industries Corp. Sputter coating apparatus including ion beam source(s), and corresponding method
FR2856677B1 (fr) * 2003-06-27 2006-12-01 Saint Gobain Substrat revetu d'une couche dielectrique et procede pour sa fabrication
FR2857467B1 (fr) 2003-07-09 2005-08-19 Saint Gobain Dispositif electrocommandable a proprietes optiques et/ou energetiques variables
WO2005063646A1 (en) 2003-12-22 2005-07-14 Cardinal Cg Company Graded photocatalytic coatings
US20050150758A1 (en) * 2004-01-09 2005-07-14 Yakshin Andrey E. Processes and device for the deposition of films on substrates
JP4922756B2 (ja) * 2004-04-09 2012-04-25 株式会社アルバック 成膜装置および成膜方法
US8524051B2 (en) * 2004-05-18 2013-09-03 Centre Luxembourg de Recherches pour le Verre et al Ceramique S. A. (C.R.V.C.) Coated article with oxidation graded layer proximate IR reflecting layer(s) and corresponding method
US7311975B2 (en) * 2004-06-25 2007-12-25 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method
US7585396B2 (en) * 2004-06-25 2009-09-08 Guardian Industries Corp. Coated article with ion treated overcoat layer and corresponding method
US7563347B2 (en) * 2004-06-25 2009-07-21 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus
US7550067B2 (en) * 2004-06-25 2009-06-23 Guardian Industries Corp. Coated article with ion treated underlayer and corresponding method
US7229533B2 (en) * 2004-06-25 2007-06-12 Guardian Industries Corp. Method of making coated article having low-E coating with ion beam treated and/or formed IR reflecting layer
WO2006017311A1 (en) 2004-07-12 2006-02-16 Cardinal Cg Company Low-maintenance coatings
EP1650173A1 (de) 2004-10-19 2006-04-26 Applied Films GmbH & Co. KG Glasbeschichtung
US8092660B2 (en) 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US7923114B2 (en) 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
DE102005007825B4 (de) * 2005-01-10 2015-09-17 Interpane Entwicklungs-Und Beratungsgesellschaft Mbh Verfahren zur Herstellung einer reflexionsmindernden Beschichtung, reflexionsmindernde Schicht auf einem transparenten Substrat sowie Verwendung einer derartigen Schicht
JP4882262B2 (ja) * 2005-03-31 2012-02-22 凸版印刷株式会社 透明導電膜積層体の製造方法
EP2013150B1 (de) 2006-04-11 2018-02-28 Cardinal CG Company Fotokatalytische beschichtungen mit verbesserten wartungsarmen eigenschaften
WO2007124291A2 (en) 2006-04-19 2007-11-01 Cardinal Cg Company Opposed functional coatings having comparable single surface reflectances
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
DE202006015876U1 (de) * 2006-10-17 2008-02-21 Mekra Lang Gmbh & Co. Kg Blendarme Spiegelscheibe sowie Rückspiegel mit einer solchen Spiegelscheibe
US7820309B2 (en) 2007-09-14 2010-10-26 Cardinal Cg Company Low-maintenance coatings, and methods for producing low-maintenance coatings
CN101935824B (zh) * 2009-07-03 2013-03-06 中芯国际集成电路制造(上海)有限公司 离子注入方法、设备及形成轻掺杂结构的方法
FR2976577B1 (fr) * 2011-06-17 2014-03-28 Saint Gobain Procede de fabrication d'un vitrage comprenant une couche poreuse
JP4919367B1 (ja) * 2011-08-02 2012-04-18 株式会社シンクロン 炭化珪素薄膜の成膜方法
EP3541762B1 (de) 2016-11-17 2022-03-02 Cardinal CG Company Statisch-dissipative beschichtungstechnologie
US10472274B2 (en) 2017-07-17 2019-11-12 Guardian Europe S.A.R.L. Coated article having ceramic paint modified surface(s), and/or associated methods

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US4395467A (en) * 1981-12-30 1983-07-26 Rca Corporation Transparent conductive film having areas of high and low resistivity
WO1987002713A1 (en) * 1985-10-31 1987-05-07 Ncr Corporation A method for forming an abrasion resistant coating on a transparent substrate
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US4793908A (en) * 1986-12-29 1988-12-27 Rockwell International Corporation Multiple ion source method and apparatus for fabricating multilayer optical films
JPS63241823A (ja) * 1987-03-27 1988-10-07 Nissin Electric Co Ltd 超電導薄膜の製造方法
JP2561303B2 (ja) * 1988-01-14 1996-12-04 日本電気株式会社 単結晶酸化物超伝導薄膜の製造方法
US4851095A (en) * 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
DE3920835C2 (de) * 1989-06-24 1997-12-18 Leybold Ag Einrichtung zum Beschichten von Substraten
CA2081912A1 (en) * 1990-05-01 1991-11-02 Chong T. Wan Vacuum deposited dark coating on a substrate
US5346600A (en) * 1992-08-14 1994-09-13 Hughes Aircraft Company Plasma-enhanced magnetron-sputtered deposition of materials

Also Published As

Publication number Publication date
EP0601928A1 (de) 1994-06-15
JPH06298546A (ja) 1994-10-25
FR2699164A1 (fr) 1994-06-17
DE69330936T2 (de) 2002-06-20
JP3708564B2 (ja) 2005-10-19
ES2165364T3 (es) 2002-03-16
DE69330936D1 (de) 2001-11-22
US5569362A (en) 1996-10-29
FR2699164B1 (fr) 1995-02-24
EP0601928B1 (de) 2001-10-17

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee