ATE226647T1 - Werkzeug mit einem schützenden schichten system - Google Patents

Werkzeug mit einem schützenden schichten system

Info

Publication number
ATE226647T1
ATE226647T1 AT97937765T AT97937765T ATE226647T1 AT E226647 T1 ATE226647 T1 AT E226647T1 AT 97937765 T AT97937765 T AT 97937765T AT 97937765 T AT97937765 T AT 97937765T AT E226647 T1 ATE226647 T1 AT E226647T1
Authority
AT
Austria
Prior art keywords
tool
layer system
layer
theta
mex
Prior art date
Application number
AT97937765T
Other languages
German (de)
English (en)
Inventor
Hans Braendle
Nobuhiko Shima
Original Assignee
Unaxis Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers Ag filed Critical Unaxis Balzers Ag
Priority claimed from PCT/IB1997/001090 external-priority patent/WO1999014392A1/en
Application granted granted Critical
Publication of ATE226647T1 publication Critical patent/ATE226647T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Materials For Medical Uses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Drilling Tools (AREA)
  • Chemical Vapour Deposition (AREA)
AT97937765T 1997-09-12 1997-09-12 Werkzeug mit einem schützenden schichten system ATE226647T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1997/001090 WO1999014392A1 (en) 1997-09-12 1997-09-12 Tool having a protective layer system

Publications (1)

Publication Number Publication Date
ATE226647T1 true ATE226647T1 (de) 2002-11-15

Family

ID=11004604

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97937765T ATE226647T1 (de) 1997-09-12 1997-09-12 Werkzeug mit einem schützenden schichten system

Country Status (8)

Country Link
JP (1) JP2001516655A (cs)
KR (1) KR100470826B1 (cs)
AT (1) ATE226647T1 (cs)
CA (1) CA2303124C (cs)
CZ (1) CZ301431B6 (cs)
DE (1) DE69716651T2 (cs)
SK (1) SK287369B6 (cs)
TR (1) TR200000710T2 (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4711107B2 (ja) * 2004-04-08 2011-06-29 三菱マテリアル株式会社 高硬度鋼の高速断続切削加工で硬質被覆層がすぐれた耐チッピング性および耐熱塑性変形性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
JP4711106B2 (ja) * 2004-04-09 2011-06-29 三菱マテリアル株式会社 難削材の高速断続切削加工ですぐれた耐チッピング性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
CN100577874C (zh) * 2004-04-19 2010-01-06 皮沃特公司 硬质耐磨的氮化铝基涂层
CN109128391A (zh) * 2018-11-22 2019-01-04 上海电气集团股份有限公司 一种齿轮加工方法

Also Published As

Publication number Publication date
CZ2000904A3 (cs) 2001-01-17
CA2303124C (en) 2007-09-25
TR200000710T2 (tr) 2000-09-21
KR20010030596A (ko) 2001-04-16
CA2303124A1 (en) 1999-03-25
DE69716651T2 (de) 2003-06-18
SK3472000A3 (en) 2001-07-10
DE69716651D1 (de) 2002-11-28
JP2001516655A (ja) 2001-10-02
KR100470826B1 (ko) 2005-03-07
SK287369B6 (sk) 2010-08-09
CZ301431B6 (cs) 2010-03-03

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties